JP2009078348A5 - - Google Patents
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- Publication number
- JP2009078348A5 JP2009078348A5 JP2008209140A JP2008209140A JP2009078348A5 JP 2009078348 A5 JP2009078348 A5 JP 2009078348A5 JP 2008209140 A JP2008209140 A JP 2008209140A JP 2008209140 A JP2008209140 A JP 2008209140A JP 2009078348 A5 JP2009078348 A5 JP 2009078348A5
- Authority
- JP
- Japan
- Prior art keywords
- shape memory
- matrix material
- memory matrix
- shape
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 40
- 239000011159 matrix material Substances 0.000 claims 25
- 239000000758 substrate Substances 0.000 claims 16
- 239000000126 substance Substances 0.000 claims 9
- 238000000034 method Methods 0.000 claims 5
- 230000009477 glass transition Effects 0.000 claims 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 230000004913 activation Effects 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 2
- 230000001747 exhibiting effect Effects 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- IBOFVQJTBBUKMU-UHFFFAOYSA-N 4,4'-methylene-bis-(2-chloroaniline) Chemical compound C1=C(Cl)C(N)=CC=C1CC1=CC=C(N)C(Cl)=C1 IBOFVQJTBBUKMU-UHFFFAOYSA-N 0.000 claims 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims 1
- 239000004721 Polyphenylene oxide Substances 0.000 claims 1
- HIFVAOIJYDXIJG-UHFFFAOYSA-N benzylbenzene;isocyanic acid Chemical class N=C=O.N=C=O.C=1C=CC=CC=1CC1=CC=CC=C1 HIFVAOIJYDXIJG-UHFFFAOYSA-N 0.000 claims 1
- 230000003750 conditioning effect Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229920001610 polycaprolactone Polymers 0.000 claims 1
- 239000004632 polycaprolactone Substances 0.000 claims 1
- 229920000570 polyether Polymers 0.000 claims 1
- 229920000909 polytetrahydrofuran Polymers 0.000 claims 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 claims 1
- 230000007704 transition Effects 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/838,954 | 2007-08-15 | ||
| US11/838,954 US7458885B1 (en) | 2007-08-15 | 2007-08-15 | Chemical mechanical polishing pad and methods of making and using same |
| US12/103,292 | 2008-04-15 | ||
| US12/103,292 US8221196B2 (en) | 2007-08-15 | 2008-04-15 | Chemical mechanical polishing pad and methods of making and using same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009078348A JP2009078348A (ja) | 2009-04-16 |
| JP2009078348A5 true JP2009078348A5 (enExample) | 2011-07-28 |
| JP5340669B2 JP5340669B2 (ja) | 2013-11-13 |
Family
ID=40032802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008209140A Expired - Fee Related JP5340669B2 (ja) | 2007-08-15 | 2008-08-15 | 改良されたケミカルメカニカル研磨パッドならびに同研磨パッドの製造法および使用法 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US8221196B2 (enExample) |
| EP (1) | EP2025454B1 (enExample) |
| JP (1) | JP5340669B2 (enExample) |
| KR (1) | KR101507612B1 (enExample) |
| TW (1) | TWI444247B (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5248152B2 (ja) * | 2008-03-12 | 2013-07-31 | 東洋ゴム工業株式会社 | 研磨パッド |
| JP5544124B2 (ja) * | 2009-08-18 | 2014-07-09 | 富士紡ホールディングス株式会社 | 研磨パッド |
| US10041745B2 (en) | 2010-05-04 | 2018-08-07 | Fractal Heatsink Technologies LLC | Fractal heat transfer device |
| US20110287698A1 (en) * | 2010-05-18 | 2011-11-24 | Hitachi Global Storage Technologies Netherlands B.V. | System, method and apparatus for elastomer pad for fabricating magnetic recording disks |
| WO2012036444A2 (ko) * | 2010-09-15 | 2012-03-22 | 주식회사 엘지화학 | Cmp용 연마 패드 |
| US20120306120A1 (en) * | 2011-05-06 | 2012-12-06 | Guoqiang Li | Compression Programming of Shape Memory Polymers Below the Glass Transition Temperature |
| US9406971B2 (en) | 2011-07-01 | 2016-08-02 | GM Global Technology Operations LLC | Shape memory polymer containing composite materials |
| US20130017762A1 (en) * | 2011-07-15 | 2013-01-17 | Infineon Technologies Ag | Method and Apparatus for Determining a Measure of a Thickness of a Polishing Pad of a Polishing Machine |
| US9421669B2 (en) * | 2012-07-30 | 2016-08-23 | Globalfoundries Singapore Pte. Ltd. | Single grooved polishing pad |
| US9522454B2 (en) * | 2012-12-17 | 2016-12-20 | Seagate Technology Llc | Method of patterning a lapping plate, and patterned lapping plates |
| DE102013203116A1 (de) * | 2013-02-26 | 2014-08-28 | Robert Bosch Gmbh | Schleifmittelvorrichtung |
| WO2015050642A1 (en) * | 2013-10-03 | 2015-04-09 | Applied Materials, Inc. | Cmp equipment using magnet responsive composites |
| US9421666B2 (en) * | 2013-11-04 | 2016-08-23 | Applied Materials, Inc. | Printed chemical mechanical polishing pad having abrasives therein |
| JP6838811B2 (ja) | 2014-05-02 | 2021-03-03 | スリーエム イノベイティブ プロパティズ カンパニー | 断続的構造化研磨物品並びに被加工物の研磨方法 |
| KR102640690B1 (ko) * | 2015-09-25 | 2024-02-23 | 씨엠씨 머티리얼즈 엘엘씨 | 높은 탄성률 비를 갖는 폴리우레탄 화학 기계적 연마 패드 |
| US20170232573A1 (en) * | 2016-02-12 | 2017-08-17 | Kabushiki Kaisha Toshiba | Polishing member and semiconductor manufacturing method |
| US11866594B2 (en) | 2017-06-27 | 2024-01-09 | Lawrence Livermore National Security, Llc | Elastomeric shape memory polymer composites |
| WO2019139586A1 (en) * | 2018-01-11 | 2019-07-18 | Intel Corporation | Magnetic polishing pad and platen structures for chemical mechanical polishing |
| US10654146B2 (en) | 2018-01-23 | 2020-05-19 | Seagate Technology Llc | One or more charging members used in the manufacture of a lapping plate, and related apparatuses and methods of making |
| US11697183B2 (en) | 2018-07-26 | 2023-07-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fabrication of a polishing pad for chemical mechanical polishing |
| KR102174958B1 (ko) * | 2019-03-27 | 2020-11-05 | 에스케이씨 주식회사 | 결함 발생을 최소화시키는 연마패드 및 이의 제조방법 |
| JP2024509814A (ja) | 2021-03-05 | 2024-03-05 | サンーゴバン アブレイシブズ，インコーポレイティド | 研磨物品及びそれを形成するための方法 |
| EP4457057A1 (en) | 2021-12-30 | 2024-11-06 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for forming same |
| US12296434B2 (en) | 2021-12-30 | 2025-05-13 | Saint-Gobain Abrasives, Inc. | Abrasive articles and methods for forming same |
| KR102769305B1 (ko) * | 2023-12-12 | 2025-02-14 | 케이피엑스케미칼 주식회사 | 폐연마패드 재생방법 및 이 방법으로 재생된 재생 연마패드 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0739506B2 (ja) | 1988-09-30 | 1995-05-01 | 三菱重工業株式会社 | 形状記憶ポリマー発泡体 |
| JP2668273B2 (ja) * | 1989-12-08 | 1997-10-27 | 株式会社エース電研 | 研磨装置および研磨方法 |
| US5032622A (en) | 1990-07-02 | 1991-07-16 | The Dow Chemical Company | Densifiable and re-expandable polyurethane foam |
| US5759090A (en) * | 1994-06-01 | 1998-06-02 | Minnesota Mining And Manufacturing Company | Sanding pad containing a heat distortable polymer and sanding process using same |
| JPH08323614A (ja) * | 1995-05-30 | 1996-12-10 | Sony Corp | 化学的機械研磨方法および装置 |
| US6090479A (en) | 1995-06-26 | 2000-07-18 | Sekisui Kagaku Kogyo Kabushiki Kaisha | Shape-recoverable resin foamed product |
| AU758800B2 (en) | 1998-02-23 | 2003-03-27 | Gkss-Forschungszentrum Geesthacht Gmbh | Shape memory polymers |
| AU751861B2 (en) | 1998-02-23 | 2002-08-29 | Massachusetts Institute Of Technology | Biodegradable shape memory polymers |
| JP2000344902A (ja) * | 1999-06-04 | 2000-12-12 | Fuji Spinning Co Ltd | 研磨パッド用ウレタン成形物の製造法及び研磨パッド用ウレタン成形物 |
| DE60104576T2 (de) | 2000-02-14 | 2004-12-16 | Nichias Corp. | Schaumkörper mit Formgedächtnis und Verfahren zu dessen Herstellung |
| JP4078411B2 (ja) | 2000-08-29 | 2008-04-23 | ニチアス株式会社 | 自動車エンジン用防音カバー及び前記防音カバー用フォーム材の製造方法 |
| US6583194B2 (en) | 2000-11-20 | 2003-06-24 | Vahid Sendijarevic | Foams having shape memory |
| US6532720B2 (en) | 2000-12-15 | 2003-03-18 | International Paper Company | Packaging method using elastic memory foam as safety indicator for heat damage |
| JP4131632B2 (ja) | 2001-06-15 | 2008-08-13 | 株式会社荏原製作所 | ポリッシング装置及び研磨パッド |
| US6592995B2 (en) | 2001-07-24 | 2003-07-15 | Kimberly-Clark Worldwide, Inc. | Humidity activated materials having shape-memory |
| US6783436B1 (en) | 2003-04-29 | 2004-08-31 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Polishing pad with optimized grooves and method of forming same |
| US20060286906A1 (en) * | 2005-06-21 | 2006-12-21 | Cabot Microelectronics Corporation | Polishing pad comprising magnetically sensitive particles and method for the use thereof |
| KR100935479B1 (ko) * | 2005-08-05 | 2010-01-06 | 배성훈 | 화학적 기계적 연마장치 |
| US7300340B1 (en) | 2006-08-30 | 2007-11-27 | Rohm and Haas Electronics Materials CMP Holdings, Inc. | CMP pad having overlaid constant area spiral grooves |
| US7371160B1 (en) * | 2006-12-21 | 2008-05-13 | Rohm And Haas Electronic Materials Cmp Holdings Inc. | Elastomer-modified chemical mechanical polishing pad |
| US7458885B1 (en) * | 2007-08-15 | 2008-12-02 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing pad and methods of making and using same |
| US7635290B2 (en) * | 2007-08-15 | 2009-12-22 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Interpenetrating network for chemical mechanical polishing |
| US8257142B2 (en) | 2008-04-15 | 2012-09-04 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing method |
-
2008
- 2008-04-15 US US12/103,292 patent/US8221196B2/en not_active Expired - Fee Related
- 2008-08-13 TW TW097130773A patent/TWI444247B/zh not_active IP Right Cessation
- 2008-08-14 EP EP08162346.4A patent/EP2025454B1/en not_active Ceased
- 2008-08-14 KR KR1020080080160A patent/KR101507612B1/ko not_active Expired - Fee Related
- 2008-08-15 JP JP2008209140A patent/JP5340669B2/ja not_active Expired - Fee Related
-
2012
- 2012-06-12 US US13/494,575 patent/US8535119B2/en not_active Expired - Fee Related
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