JP2009065125A - 反応チャンバの光子誘起洗浄 - Google Patents
反応チャンバの光子誘起洗浄 Download PDFInfo
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- JP2009065125A JP2009065125A JP2008175758A JP2008175758A JP2009065125A JP 2009065125 A JP2009065125 A JP 2009065125A JP 2008175758 A JP2008175758 A JP 2008175758A JP 2008175758 A JP2008175758 A JP 2008175758A JP 2009065125 A JP2009065125 A JP 2009065125A
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- copper
- halide compound
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 82
- 238000004140 cleaning Methods 0.000 title claims abstract description 43
- 239000010949 copper Substances 0.000 claims abstract description 197
- 229910052802 copper Inorganic materials 0.000 claims abstract description 179
- -1 halide compound Chemical class 0.000 claims abstract description 146
- 238000000034 method Methods 0.000 claims abstract description 93
- 150000004820 halides Chemical class 0.000 claims abstract description 31
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 8
- 238000011065 in-situ storage Methods 0.000 claims abstract description 8
- 239000000356 contaminant Substances 0.000 claims description 117
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 90
- 229910052736 halogen Inorganic materials 0.000 claims description 25
- 150000002367 halogens Chemical class 0.000 claims description 25
- 229910021589 Copper(I) bromide Inorganic materials 0.000 claims 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 claims 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 claims 1
- 238000001020 plasma etching Methods 0.000 abstract description 17
- 238000011109 contamination Methods 0.000 abstract description 12
- LNUFLCYMSVYYNW-ZPJMAFJPSA-N [(2r,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6r)-6-[(2r,3r,4s,5r,6r)-6-[(2r,3r,4s,5r,6r)-6-[[(3s,5s,8r,9s,10s,13r,14s,17r)-10,13-dimethyl-17-[(2r)-6-methylheptan-2-yl]-2,3,4,5,6,7,8,9,11,12,14,15,16,17-tetradecahydro-1h-cyclopenta[a]phenanthren-3-yl]oxy]-4,5-disulfo Chemical compound O([C@@H]1[C@@H](COS(O)(=O)=O)O[C@@H]([C@@H]([C@H]1OS(O)(=O)=O)OS(O)(=O)=O)O[C@@H]1[C@@H](COS(O)(=O)=O)O[C@@H]([C@@H]([C@H]1OS(O)(=O)=O)OS(O)(=O)=O)O[C@@H]1[C@@H](COS(O)(=O)=O)O[C@H]([C@@H]([C@H]1OS(O)(=O)=O)OS(O)(=O)=O)O[C@@H]1C[C@@H]2CC[C@H]3[C@@H]4CC[C@@H]([C@]4(CC[C@@H]3[C@@]2(C)CC1)C)[C@H](C)CCCC(C)C)[C@H]1O[C@H](COS(O)(=O)=O)[C@@H](OS(O)(=O)=O)[C@H](OS(O)(=O)=O)[C@H]1OS(O)(=O)=O LNUFLCYMSVYYNW-ZPJMAFJPSA-N 0.000 abstract description 8
- 230000000977 initiatory effect Effects 0.000 abstract description 4
- 210000002381 plasma Anatomy 0.000 description 73
- 230000008569 process Effects 0.000 description 35
- 235000012431 wafers Nutrition 0.000 description 20
- 230000008901 benefit Effects 0.000 description 10
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 9
- 238000005530 etching Methods 0.000 description 9
- 229920000620 organic polymer Polymers 0.000 description 5
- 229910021594 Copper(II) fluoride Inorganic materials 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000006641 stabilisation Effects 0.000 description 3
- 238000011105 stabilization Methods 0.000 description 3
- 239000005751 Copper oxide Substances 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000004876 x-ray fluorescence Methods 0.000 description 2
- 239000005749 Copper compound Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000001880 copper compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32853—Hygiene
- H01J37/32862—In situ cleaning of vessels and/or internal parts
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/905—Cleaning of reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
【解決手段】銅含有汚染物などの汚染物13を、ハロゲン化銅化合物などのハロゲン化物化合物18に変える工程と、ハロゲン化銅化合物などのハロゲン化物化合物18を光子含有雰囲気に晒して、揮発性のハロゲン化銅生成物などの揮発性のハロゲン化物生成物17の形成を始める工程とを含む。更に、反応チャンバ12から、例えば揮発性のハロゲン化銅生成物などの揮発性のハロゲン化物生成物17を除去し、反応チャンバ12中で、揮発性のハロゲン化銅生成物などの揮発性のハロゲン化物生成物17の飽和を防止し、これにより、反応チャンバ12の壁に、揮発性のハロゲン化銅生成物などの揮発性のハロゲン化物生成物17が再付着するのを防止する。
【選択図】図3
Description
汚染物を、弗化物化合物とは異なるハロゲン化物化合物(halide compound)に変える工程と、
例えば弗化物化合物とは異なるハロゲン化物化合物のようなハロゲン化物化合物を光子含有雰囲気に晒して、揮発性のハロゲン化物生成物(halide product)の形成を始める工程と、
反応チャンバから揮発性のハロゲン化物生成物を除去し、反応チャンバ中で揮発性のハロゲン化物生成物の飽和を防止し、これにより揮発性のハロゲン化物生成物が反応チャンバの壁の上に再付着するのを防止する方法を提供する。
銅含有汚染物を、例えば弗化銅化合物とは異なるハロゲン化銅化合物のような、ハロゲン化銅化合物に変える工程と、
例えば弗化銅化合物とは異なるハロゲン化銅化合物のような、ハロゲン化銅化合物を、光子含有雰囲気に晒して、揮発性のハロゲン化銅生成物の形成を始める工程と、
反応チャンバから揮発したハロゲン化物生成物を除去し、反応チャンバ中で揮発したハロゲン化物生成物の飽和を防止し、これにより揮発性のハロゲン化物生成物が反応チャンバの壁の上に再付着するのを防止する工程を含む。
汚染物を、例えば弗化物化合物とは異なるハロゲン化物化合物のような、ハロゲン化物化合物に変える工程と、
例えば弗化物化合物とは異なるハロゲン化物化合物のような、ハロゲン化物化合物を、光子含有雰囲気に晒し、これにより揮発性のハロゲン化物生成物の形成を始める工程と、
反応チャンバから揮発性のハロゲン化物生成物を除去し、反応チャンバ中で揮発性のハロゲン化物生成物が飽和するのを防止し、反応チャンバの側壁に揮発性のハロゲン化物生成物が再付着するのを防止する工程とを含む。
銅含有汚染物を、例えば弗化銅化合物とは異なるハロゲン化銅化合物のような、ハロゲン化銅化合物に変える工程と、
例えば弗化銅化合物とは異なるハロゲン化銅化合物のような、ハロゲン化銅化合物を、光子含有雰囲気に晒し、揮発性のハロゲン化銅生成物の形成を始める工程と、
反応チャンバから揮発性のハロゲン化銅生成物を除去し、反応チャンバ中で揮発性のハロゲン化銅生成物が飽和するのを防止し、反応チャンバの側壁に揮発性のハロゲン化銅生成物が再付着するのを防止する工程とを含む。
Claims (11)
- 反応チャンバ(12)の壁(14)をその場洗浄して、壁(14)から汚染物(13)を除去する方法であって、
汚染物(13)をハロゲン化物化合物(18)に変える工程と、
ハロゲン化物化合物(18)を光子含有雰囲気に晒して、揮発性のハロゲン化物生成物(17)の形成を始める工程と、
反応チャンバ(12)から揮発性のハロゲン化物生成物(17)を除去し、反応チャンバ(12)中で揮発性のハロゲン化物生成物(17)の飽和を防止する工程とを含む方法。 - 汚染物(13)をハロゲン化物化合物(18)に変える工程は、汚染物(13)をハロゲン含有ガスに晒して行われる請求項1に記載の方法。
- 汚染物(13)をハロゲン化物化合物(18)に変える工程は、汚染物(13)をハロゲン含有プラズマに晒して行われる請求項1に記載の方法。
- 汚染物(13)をハロゲン含有プラズマに晒す工程は、汚染物(13)を、200ワットと1000ワットの間の電力、0.53Paと10.67Paの間の圧力、および50sccmと500sccmの間の流量のプラズマに晒して行われる請求項3に記載の方法。
- ハロゲン含有ガスまたはハロゲン含有プラズマは、BCl3/Cl2、HBr、I2、HCl、HI、Br2、またはCl2含有ガスまたは含有プラズマを含む請求項2〜4のいずれか1項に記載の方法。
- ハロゲン化物化合物(18)を光子含有雰囲気に晒す工程は、ハロゲン化物化合物(18)をHe、Ar、またはH含有プラズマに晒して行われる請求項1〜5のいずれか1項に記載の方法。
- 汚染物(13)をハロゲン化物化合物(18)に変える工程と、ハロゲン化物化合物(18)を光子含有雰囲気に晒す工程が、同時に行われる請求項1〜6のいずれか1項に記載の方法。
- 汚染物(13)をハロゲン化物化合物(18)に変える工程と、ハロゲン化物化合物(18)を光子含有雰囲気に晒す工程が、続いて行われる請求項1〜6のいずれか1項に記載の方法。
- 汚染物(13)は銅含有汚染物であり、ハロゲン化物化合物(18)はハロゲン化銅化合物である請求項1〜8のいずれか1項に記載の方法。
- ハロゲン化銅化合物(18)はCuClxを含み、光子含有雰囲気はHeプラズマであり、ハロゲン化銅化合物(18)を光子含有雰囲気に晒す工程が、1000ワットの電力、4Paの圧力で行われる請求項9に記載の方法。
- ハロゲン化銅化合物(18)はCuBrxを含み、光子含有雰囲気はHeプラズマであり、ハロゲン化銅化合物(18)を光子含有雰囲気に晒す工程が、1000ワットの電力、10.67Paの圧力で行われる請求項9に記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US94812907P | 2007-07-05 | 2007-07-05 | |
US97084407P | 2007-09-07 | 2007-09-07 | |
US5088208P | 2008-05-06 | 2008-05-06 | |
EP08159125A EP2025775A1 (en) | 2007-07-05 | 2008-06-26 | Photon induced cleaning of a reaction chamber |
Publications (1)
Publication Number | Publication Date |
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JP2009065125A true JP2009065125A (ja) | 2009-03-26 |
Family
ID=40834298
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008175758A Pending JP2009065125A (ja) | 2007-07-05 | 2008-07-04 | 反応チャンバの光子誘起洗浄 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7824499B2 (ja) |
EP (1) | EP2025775A1 (ja) |
JP (1) | JP2009065125A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009065170A (ja) * | 2007-09-07 | 2009-03-26 | Interuniv Micro Electronica Centrum Vzw | 希ガスクリーニングステップの追加によって改善したプラズマチャンバ壁のクリーニング |
JP2011077085A (ja) * | 2009-09-29 | 2011-04-14 | Fujitsu Semiconductor Ltd | 半導体装置の製造方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8114483B2 (en) * | 2007-07-05 | 2012-02-14 | Imec | Photon induced formation of metal comprising elongated nanostructures |
JP5448619B2 (ja) * | 2009-07-21 | 2014-03-19 | 東京応化工業株式会社 | サポートプレートの洗浄方法 |
US9397011B1 (en) * | 2015-04-13 | 2016-07-19 | Lam Research Corporation | Systems and methods for reducing copper contamination due to substrate processing chambers with components made of alloys including copper |
KR102623838B1 (ko) | 2018-08-20 | 2024-01-11 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1074732A (ja) * | 1996-09-02 | 1998-03-17 | Hitachi Ltd | プラズマクリーニング方法 |
JPH10233388A (ja) * | 1997-02-20 | 1998-09-02 | Hitachi Ltd | プラズマクリーニング方法 |
WO2005094244A2 (en) * | 2004-03-16 | 2005-10-13 | Lam Research Corporation | System, method and apparatus for self-cleaning dry etch |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69320963T2 (de) * | 1992-06-22 | 1999-05-12 | Lam Res Corp | Plasmareinigungsverfahren zum entfernen von rückständen in einer plasmabehandlungskammer |
US6569775B1 (en) * | 1999-03-30 | 2003-05-27 | Applied Materials, Inc. | Method for enhancing plasma processing performance |
US20030145790A1 (en) * | 2002-02-05 | 2003-08-07 | Hitoshi Sakamoto | Metal film production apparatus and metal film production method |
-
2008
- 2008-06-26 EP EP08159125A patent/EP2025775A1/en not_active Withdrawn
- 2008-06-27 US US12/147,900 patent/US7824499B2/en active Active
- 2008-07-04 JP JP2008175758A patent/JP2009065125A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1074732A (ja) * | 1996-09-02 | 1998-03-17 | Hitachi Ltd | プラズマクリーニング方法 |
JPH10233388A (ja) * | 1997-02-20 | 1998-09-02 | Hitachi Ltd | プラズマクリーニング方法 |
WO2005094244A2 (en) * | 2004-03-16 | 2005-10-13 | Lam Research Corporation | System, method and apparatus for self-cleaning dry etch |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009065170A (ja) * | 2007-09-07 | 2009-03-26 | Interuniv Micro Electronica Centrum Vzw | 希ガスクリーニングステップの追加によって改善したプラズマチャンバ壁のクリーニング |
JP2011077085A (ja) * | 2009-09-29 | 2011-04-14 | Fujitsu Semiconductor Ltd | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP2025775A1 (en) | 2009-02-18 |
US20090173359A1 (en) | 2009-07-09 |
US7824499B2 (en) | 2010-11-02 |
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