JP2009064758A5 - - Google Patents
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- Publication number
- JP2009064758A5 JP2009064758A5 JP2007233995A JP2007233995A JP2009064758A5 JP 2009064758 A5 JP2009064758 A5 JP 2009064758A5 JP 2007233995 A JP2007233995 A JP 2007233995A JP 2007233995 A JP2007233995 A JP 2007233995A JP 2009064758 A5 JP2009064758 A5 JP 2009064758A5
- Authority
- JP
- Japan
- Prior art keywords
- organic
- display panel
- substrate
- manufacturing apparatus
- panel manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000001771 vacuum deposition Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009500 colour coating Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007233995A JP5252864B2 (ja) | 2007-09-10 | 2007-09-10 | 有機ｅｌディスプレイパネル製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007233995A JP5252864B2 (ja) | 2007-09-10 | 2007-09-10 | 有機ｅｌディスプレイパネル製造装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009064758A JP2009064758A (ja) | 2009-03-26 |
| JP2009064758A5 true JP2009064758A5 (enrdf_load_html_response) | 2010-10-28 |
| JP5252864B2 JP5252864B2 (ja) | 2013-07-31 |
Family
ID=40559148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007233995A Expired - Fee Related JP5252864B2 (ja) | 2007-09-10 | 2007-09-10 | 有機ｅｌディスプレイパネル製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5252864B2 (enrdf_load_html_response) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5567905B2 (ja) * | 2009-07-24 | 2014-08-06 | 株式会社日立ハイテクノロジーズ | 真空蒸着方法及びその装置 |
| EP2921571B1 (en) * | 2012-11-13 | 2017-02-01 | Mitsubishi Heavy Industries, Ltd. | Vacuum vapor deposition apparatus |
| KR102699846B1 (ko) * | 2020-11-30 | 2024-08-27 | 캐논 톡키 가부시키가이샤 | 성막 장치 |
| JP7242626B2 (ja) * | 2020-12-10 | 2023-03-20 | キヤノントッキ株式会社 | 成膜装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07145480A (ja) * | 1993-11-22 | 1995-06-06 | Hitachi Ltd | スパッタリング装置およびそれを用いた成膜方法 |
| JPH0913173A (ja) * | 1995-06-28 | 1997-01-14 | Hitachi Ltd | スパッタリング装置、及びその防着板交換方法 |
| JP2005056673A (ja) * | 2003-08-04 | 2005-03-03 | Nec Plasma Display Corp | プラズマディスプレイパネルの成膜装置、該パネルの製造方法及びプラズマ表示装置の製造方法 |
| JP4549697B2 (ja) * | 2004-03-04 | 2010-09-22 | 株式会社アルバック | 成膜装置及び成膜方法 |
-
2007
- 2007-09-10 JP JP2007233995A patent/JP5252864B2/ja not_active Expired - Fee Related
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