JP2009063005A - 磁気軸受装置 - Google Patents
磁気軸受装置 Download PDFInfo
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- JP2009063005A JP2009063005A JP2007228601A JP2007228601A JP2009063005A JP 2009063005 A JP2009063005 A JP 2009063005A JP 2007228601 A JP2007228601 A JP 2007228601A JP 2007228601 A JP2007228601 A JP 2007228601A JP 2009063005 A JP2009063005 A JP 2009063005A
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- magnetic bearing
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- 230000005484 gravity Effects 0.000 claims description 3
- 230000008030 elimination Effects 0.000 claims description 2
- 238000003379 elimination reaction Methods 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000001687 destabilization Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0444—Details of devices to control the actuation of the electromagnets
- F16C32/0451—Details of controllers, i.e. the units determining the power to be supplied, e.g. comparing elements, feedback arrangements with P.I.D. control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
【解決手段】回転体の磁気軸受において、回転体の並進運動を制御する並進運動制御回路23と、該回転体の傾斜運動を制御する傾斜運動制御回路24を具備する磁気軸受制御装置において、ラジアル電位センサ部の信号を入力として、ラジアル電磁石のx、y方向の力に作用する不平衡消去回路36を並列接続した。
【選択図】図2
Description
x1 :上側ラジアル変位センサ部のx方向変位
y1 :上側ラジアル変位センサ部のy方向変位
x2 :下側ラジアル変位センサ部のx方向変位
y2 :下側ラジアル変位センサ部のy方向変位
x:回転体重心のx方向変位
y:回転体重心のy方向変位
θy :y軸まわりの回転体の傾斜角
θx :x軸まわりの回転体の傾斜角
fx :回転体に作用するx方向の力
fy :回転体に作用するy方向の力
τy :回転体に作用するy軸まわりのトルク
τx :回転体に作用するx軸まわりのトルク
fx1:上側ラジアル電磁石のx方向の力
fy1:上側ラジアル電磁石のy方向の力
fx2:下側ラジアル電磁石のx方向の力
fy2:下側ラジアル電磁石のy方向の力
を表わす。
尚、x方向、y方向及びz方向は図5に示す方向である。
KMLB ΤΤSである。
ここで
であり、 8極ヘテロポーラ型の場合、
であり、
μ0:真空の透磁率
Si:磁極の断面積
Ni:コイルの巻き数
Ii:バイアス電流
δi:空隙長
を表わす。
ここで
PIDA´とKC´は(3)式のPIDAや(4)式のKCと異なり、p12のリカッチ微分方程式の解を含んでいない。
8 第2交差信号変換器
21 第1信号分岐線
22 第2信号分岐線
23 並進運動制御回路
24 傾斜運動制御回路
36 不平衡消去回路
Claims (3)
- 回転体の磁気軸受において、回転体の並進運動を制御する並進運動制御回路と、該回転体の傾斜運動を制御する傾斜運動制御回路を具備し、不平衡消去回路を並列接続したことを特徴とする回転体の磁気軸受装置。
- 前記傾斜運動制御回路は交差信号変換器を介在した1対の信号分岐線が互に交差する交差フィードバック信号系を具備し、前記交差信号変換器の伝達関数Kc´がIpΩKd/2Idであることを特徴とする請求項1に記載の回転体の磁気軸受装置。
但し、Id:重心を通る直径まわりの慣性モーメント
Ip:回転軸まわりの慣性モーメント
Ω :回転軸の回転角速度
Kd:微分制御係数 - 前記交差フィードバック信号系に所定のカットオフ角速度の低域通過フィルターを直列に付加したことを特徴とする回転体の磁気軸受装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007228601A JP5201713B2 (ja) | 2007-09-04 | 2007-09-04 | 磁気軸受装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007228601A JP5201713B2 (ja) | 2007-09-04 | 2007-09-04 | 磁気軸受装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012259465A Division JP2013068327A (ja) | 2012-11-28 | 2012-11-28 | 磁気軸受装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009063005A true JP2009063005A (ja) | 2009-03-26 |
JP5201713B2 JP5201713B2 (ja) | 2013-06-05 |
Family
ID=40557767
Family Applications (1)
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JP2007228601A Active JP5201713B2 (ja) | 2007-09-04 | 2007-09-04 | 磁気軸受装置 |
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JP (1) | JP5201713B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013100104A1 (ja) | 2011-12-29 | 2013-07-04 | 株式会社大阪真空機器製作所 | ラジアル方向制御器及び、それが適用された磁気軸受装置 |
CN107304786A (zh) * | 2016-04-22 | 2017-10-31 | 英格索尔-兰德公司 | 主动磁轴承控制器 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6235114A (ja) * | 1985-08-08 | 1987-02-16 | Koyo Seiko Co Ltd | 5自由度型磁気軸受の制御方法 |
JPS63303217A (ja) * | 1987-06-01 | 1988-12-09 | Shinko Electric Co Ltd | 磁気軸受の制御装置 |
JPH0510326A (ja) * | 1991-06-27 | 1993-01-19 | Matsushita Electric Ind Co Ltd | 磁気軸受の制御装置 |
JPH06213233A (ja) * | 1993-01-21 | 1994-08-02 | Koyo Seiko Co Ltd | 磁気軸受装置 |
JPH06213244A (ja) * | 1992-10-14 | 1994-08-02 | Gkn Automot Ag | 非対称ケージを有する等速ボール回転式継手 |
-
2007
- 2007-09-04 JP JP2007228601A patent/JP5201713B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6235114A (ja) * | 1985-08-08 | 1987-02-16 | Koyo Seiko Co Ltd | 5自由度型磁気軸受の制御方法 |
JPS63303217A (ja) * | 1987-06-01 | 1988-12-09 | Shinko Electric Co Ltd | 磁気軸受の制御装置 |
JPH0510326A (ja) * | 1991-06-27 | 1993-01-19 | Matsushita Electric Ind Co Ltd | 磁気軸受の制御装置 |
JPH06213244A (ja) * | 1992-10-14 | 1994-08-02 | Gkn Automot Ag | 非対称ケージを有する等速ボール回転式継手 |
JPH06213233A (ja) * | 1993-01-21 | 1994-08-02 | Koyo Seiko Co Ltd | 磁気軸受装置 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013100104A1 (ja) | 2011-12-29 | 2013-07-04 | 株式会社大阪真空機器製作所 | ラジアル方向制御器及び、それが適用された磁気軸受装置 |
JP2013139844A (ja) * | 2011-12-29 | 2013-07-18 | Osaka Vacuum Ltd | ラジアル方向制御器及び、それが適用された磁気軸受装置 |
CN103732931A (zh) * | 2011-12-29 | 2014-04-16 | 株式会社大阪真空机器制作所 | 径向控制器以及应用了该径向控制器的磁轴承装置 |
KR101413790B1 (ko) | 2011-12-29 | 2014-06-30 | 가부시끼가이샤 오오사까 신꾸우기끼 세이사꾸쇼 | 래디얼 방향 제어기 및 그것이 적용된 자기 베어링 장치 |
US8853905B2 (en) | 2011-12-29 | 2014-10-07 | Osaka Vacuum, Ltd. | Radial direction controller and magnetic bearing apparatus utilizing same |
CN103732931B (zh) * | 2011-12-29 | 2015-03-11 | 株式会社大阪真空机器制作所 | 径向控制器以及应用了该径向控制器的磁轴承装置 |
CN107304786A (zh) * | 2016-04-22 | 2017-10-31 | 英格索尔-兰德公司 | 主动磁轴承控制器 |
Also Published As
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JP5201713B2 (ja) | 2013-06-05 |
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