JP2009061568A - Tray for processing tabular article and processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To effectively use a processing device for a semiconductor wafer for grinding a tabular article different in shape from the semiconductor wafer. <P>SOLUTION: The tray 1 on which a plurality of rectangular works W are set is sucked to and held on the chuck table 20 of a grinding device 10, and the work W is ground by grinding units 30A, 30B. The tray 1 has a frame 2 with a same outline as the outline of the semiconductor wafer which is formed around a suction base part 3 of a porous material so formed as to match the work W. The chuck table 20 has a first suction area 21 corresponding to the suction base part 3 and a second suction area 22 corresponding to the frame 2. The work W is held on the chuck table 20 through the tray 1 with the suction base part 3 corresponding to the suction area 21 and the frame corresponding to the second suction area 22. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a tray for holding a plate-like object such as a glass plate by adsorbing it to a vacuum suction-type holding means and holding the plate-like object in a processing apparatus when performing processing such as grinding on one exposed surface. And a processing apparatus having a holding means for holding such a tray.

  In the manufacturing process of a semiconductor wafer, the front surface side of the wafer is vacuum-sucked, and the exposed back surface is ground or polished to reduce the thickness to a desired thickness. In recent years, a wafer tends to be processed very thinly in order to make a semiconductor device lighter, thinner, and smaller, and accordingly, there is a problem that it becomes difficult to safely transport the wafer after being thinned. Therefore, the adhesive tape attached to the annular frame is attached to the wafer, the wafer held via the frame is held by the processing (polishing) device and processed, and after processing, the wafer is transferred directly through the frame. The technique of doing is known (patent document 1). In addition, a transfer tray in which a circular recess for storing a wafer is formed on the upper surface has been proposed (Patent Document 2).

Japanese Patent Laid-Open No. 6-302569 JP 2007-88416 A

  By the way, in some electronic parts, there is a case where a thin plate-like material cut out from a thin plate-like material made of ceramics, glass or the like into a rectangular shape of an appropriate size is used after being thinned. Such a thin plate-like material is thinned. In some cases, a grinding apparatus for thinning the semiconductor wafer can be used. However, since semiconductor wafers are gathered in a circular shape and not so large in size (outer diameter), a cassette that accommodates multiple wafers, an automatic transfer system from the cassette, or a vacuum that holds the wafers Adsorption-type chuck tables and the like have specifications corresponding to wafers.

  Therefore, for example, when a rectangular plate-shaped object is supplied to a wafer grinding apparatus, the standard specification of the apparatus is inevitably changed such that the chuck table or the like is replaced with one adapted to the plate-shaped object. Although the plate-like object can be held by the adhesive tape and the frame as in Patent Document 1 above, since the frame is larger than the outer diameter of the wafer, the cassette and the automatic transfer system are eventually replaced with ones suitable for the frame. Need to be done.

  Therefore, the present invention provides a plate that can be used without changing the standard specification of the processing apparatus as much as possible when processing a plate-like object having a shape different from the shape of the semiconductor wafer by using the processing apparatus of the semiconductor wafer. An object of the present invention is to provide a tray for processing objects and a processing apparatus.

  The tray for processing a plate-like object according to the present invention is a tray on which a plate-like workpiece is placed and holds the workpiece on a vacuum suction type holding means, and corresponds to the shape of the workpiece. The vacuum suction hole is formed over the entire area, and the suction base portion on which the workpiece is placed with one surface exposed is surrounded by the suction base portion, and corresponds to the shape of the holding means. A frame having a shape to be attached, and detachably attached to a boundary portion between the suction base and the frame, and having a height that does not exceed the height of the exposed one side of the workpiece in the attached state And a restricting means for preventing displacement of the work piece placed on the suction base.

  According to the tray of the present invention, the workpiece is placed on the suction base, and in that state, placed on a vacuum suction type holding means such as a processing apparatus. The workpiece is prevented from being displaced in the surface direction by the regulating means, and is positioned on the suction base. When both the first and second suction areas of the holding means are operated in vacuum, the tray frame is sucked and held in the second suction area, and the vacuum between the first suction area and the suction base of the tray is vacuumed. By sucking air through the suction holes, the workpiece is sucked and held in the first suction area together with the suction base. When the workpiece and the tray are thus held by the holding means, the exposed surface of the workpiece is processed by the processing device. Since the exposed surface of the workpiece exceeds the regulating means, the machining means does not contact the regulating means, and the workpiece is processed. If the processing waste (for example, grinding waste) generated by the processing is cleaned and removed with the detachable regulating means removed, the cleaning effect can be enhanced.

  Next, the processing apparatus of the present invention is suitable for effectively using the tray of the present invention, and is opposed to the holding surface of the vacuum suction type holding means having a flat holding surface for holding the tray. The tray is the tray according to claim 1, wherein the tray is provided with processing means that can be attached to and detached from the holding surface and whose rotation axis is substantially orthogonal. The holding surface of the holding means is formed such that the first suction area corresponding to the suction base and the second suction area corresponding to the frame are formed on the same plane. In addition, a vacuum line for sucking air above the holding surface is individually provided.

  In the processing apparatus of the present invention, the tray of the present invention is placed and placed such that the suction base corresponds to the first suction area and the frame corresponds to the second suction area. By vacuum suction from each area, the tray is sucked and held on the holding surface, and the workpiece is sucked and held on the first area. In this state, the workpiece is processed by the processing means. After processing, the vacuum suction is released and the workpiece is picked up along with the tray. When releasing the vacuum suction, water or air is blown from the second suction area side toward the workpiece, and the tray is pulled by negative pressure. The state of being attracted by the holding means is released. If this release operation is performed even in the first suction area, the workpiece may be lifted or jumped up, possibly damaging or hindering suction in the next process. Do.

  According to the present invention, when processing a plate-like object having a shape different from a circular semiconductor wafer by using a semiconductor wafer processing apparatus, the standard specification of the processing apparatus is changed as much as possible. This makes it possible to use the apparatus effectively, and the cost can be reduced.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. One embodiment relates to a technique for grinding and thinning one surface of a rectangular workpiece W shown in FIG. The workpiece W is a thin plate-like electronic component cut out from a thin plate material made of, for example, ceramics or glass into a rectangular shape having an appropriate size. The thickness of the workpiece W before grinding is, for example, about 1 mm or more, and is reduced to less than 1 mm by grinding.

  FIG. 1 shows a grinding apparatus (processing apparatus) according to an embodiment. The grinding apparatus 10 is originally an apparatus used when, for example, the back surface of a semiconductor wafer having a thickness of about 700 μm is ground and thinned to a desired thickness (for example, about 50 to 100 μm). The workpiece W is supplied to the grinding device 10 and ground. For this reason, the grinding device 10 is slightly changed in specification. In supplying the workpiece W to the grinding apparatus 10, the tray 1 shown in FIGS. 2 and 3A is used. First, the tray 1 will be described.

  The tray 1 has a circular shape similar to the outer shape of a semiconductor wafer having a size to be ground by the grinding apparatus 10, and the outer shape is formed by the circular frame 2. The frame body 2 is made of alumina ceramic or the like, and has a thickness of about 1 to 5 mm. The outer diameter is slightly smaller than the outer diameter of the chuck table (holding means) 20 provided in the grinding apparatus 10. In the center of the frame 2, a suction base 3 is disposed.

  The suction base 3 is made of a porous material such as porous ceramics in which a large number of vacuum suction pores (vacuum suction holes) communicating over the front and back surfaces are formed over the entire area. The suction base 3 is fixed to the frame 2 in a state of being fitted into a rectangular hole 2 a formed in the center of the frame 2. The thickness of the suction base 3 is the same as that of the frame 2, and the front and back surfaces of both are substantially the same surface, that is, the same surface. The suction base 3 may be made of a material other than a porous material as long as vacuum suction holes are formed over the front and back surfaces.

  Further, one V-shaped notch (hereinafter referred to as a notch) 2 b is formed on the peripheral surface of the frame body 2. The notch 2b is located at a position corresponding to one side of the suction base 3, that is, a position where the line L passing through the intermediate position of the one side and the center of the tray 1 and the outer peripheral edge of the frame 2 intersect. Is formed. This notch 2b is the same as that formed on the semiconductor wafer as a mark indicating the crystal orientation, and is used for recognizing the rotational angle position of the tray 1.

  The peripheral edge on the surface side of the suction base 3 is thin to form a step 3a having a uniform width, and the step 3a forms a rectangular groove 4 between the frame 2 and the suction base 3. Has been. A pair of L-shaped guides (regulating means) 5 is detachably fitted in the groove 4. One guide 5 is fitted in the groove 4 on two continuous sides, and the other guide 5 is fitted in the groove 4 on the other two continuous sides. When the pair of guides 5 are fitted in the grooves 4, the guides 5 higher than the surface of the suction base 3 are arranged around the surface of the suction base 3.

  As shown in FIG. 2, a plurality (four in this case) of workpieces W are placed on the suction base portion 3 in contact with each other and in contact with the guide 5. These workpieces W are prevented from being displaced in the horizontal direction by the guide 5. The height of the guide 5 does not exceed the height position of the exposed surface (upper surface) of the workpiece W placed on the suction base 3, and the desired grinding amount of the workpiece W is determined from the height position. A thing lower than the reduced height is used.

  The above is the tray 1 which concerns on one Embodiment, Next, the grinding apparatus 10 with which the workpiece W is supplied with this tray 1 is demonstrated. According to this grinding apparatus 10, the tray 1 on which the workpiece W is placed on the suction base 3 (hereinafter referred to as the workpiece mounting tray 1 </ b> A) is used as the horizontal upper surface of the vacuum suction chuck table 20 ( Holding surface 20a is attracted and held, and rough grinding and finish grinding are sequentially performed on the exposed surface of work piece W by two grinding units (for rough grinding and finish grinding) 30A and 30B.

  As shown in FIG. 1, the grinding apparatus 10 has a rectangular parallelepiped base 11, and a supply cassette 12 </ b> A and a recovery cassette 12 </ b> B are detachable on both sides of the base 11 on the front side in the Y direction in the figure. Set to A plurality of workpiece mounting trays 1 </ b> A are stacked and stored in the supply cassette 12 </ b> A with the workpiece W facing up. One workpiece mounting tray 1A is pulled out of the supply cassette 12A by the transfer robot 13 and placed on the positioning table 14, where it is determined at a fixed position.

  The positioning table 14 includes a central vacuum suction-type rotary table 14a and a plurality of pins 14b that are arranged radially around the rotary table 14a and advance and retreat with respect to the center of the rotary table 14a. The workpiece mounting tray 1A is placed on the rotary table 14a by the transport robot 13 with the workpiece W facing upward, and when a plurality of pins 14b that have been evacuated to the periphery move to the rotary table 14a side, It is pushed by the pin 14b, is centered on the rotary table 14a, and is positioned at a predetermined position.

  A notch sensor 14 c for detecting a notch 2 b formed in the frame body 2 of the tray 1 is disposed on a predetermined position around the positioning table 14 on the base 11. As the notch sensor 14c, a transmissive or reflective optical sensor composed of a combination of a light emitting unit and a light receiving unit is preferably used. The notch 2b of the tray 1 is detected by the notch sensor 14c by rotating the rotary table 14a that has attracted and fixed the tray 1 after positioning, and the rotary table at the detection position or a position further rotated by a predetermined angle from the detection position. The rotation of 14a stops. The stop position is a pick-up position of the workpiece mounting tray 1A by the supply arm 15A.

  The supply arm 15A holds and transports the workpiece mounting tray 1A by vacuum suction. As shown in FIG. 4, a disk 16c is fixed to the tip of a horizontal swivel arm 16a via a holder 16b. A plurality of (in this case, four) suction cup-like suction pads 16d are provided on the lower surface of the disk 16c. The disk 16c has an outer diameter slightly smaller than the outer diameter of the frame 2, and a plurality of suction pads 16d are arranged at equal intervals in the circumferential direction at locations on the outer periphery of the lower surface of the disk 16c that can correspond to the surface of the frame 2. Arranged. Inside the arm 16a, the holder 16b, and the disk 16c, an air suction path 16e is formed, which communicates with each suction pad 16d and sucks air from the suction pad 16d.

  As shown in FIG. 1, the arm 16a is provided on the base 11 so as to rotate horizontally and to be lifted and lowered via a rotating shaft 16f. The supply arm 15A sucks the workpiece mounting tray 1A by pressing the suction pad 16d against the suction position on the surface of the frame body 2 (position indicated by a circular broken line in FIG. 2A) in a vacuum operation state. ,Hold. At the same time, the attracting action of the positioning table 14 is released, and the workpiece mounting tray 1A is transferred from the picking position to the supply arm 15A. Thereafter, the arm 16a turns and the workpiece mounting tray 1A is transferred to the disc-shaped chuck table 20. At this time, since the workpiece W is simply placed on the tray 1, the workpiece W receives a stress in the horizontal direction, but the guide 5 prevents the horizontal displacement.

  As shown in FIG. 1, a turntable 25 that is rotationally driven in the R direction is provided on the base 11, and a plurality of (in this case, three) chuck tables 20 are provided on the outer periphery of the turntable 25. Are arranged at equal intervals in the circumferential direction. These chuck tables 20 are rotatably supported, and are rotated in one direction or both directions by a rotation driving mechanism (not shown).

  The chuck table 20 is a vacuum suction type. As shown in FIGS. 5 and 6, a rectangular first suction area 21 is formed at the center of the upper surface 23 a of the disk-shaped base 23, and the first suction area 21 is further formed. A second suction area 22 having a circular outer shape is formed around the suction area 21. These suction areas 21 and 22 are both formed of a porous member similar to the suction base 3 of the tray 1. The first suction area 21 is formed in a shape and size substantially corresponding to the suction base portion 3 of the tray 1, and the second suction area 22 is formed in a shape and size substantially corresponding to the frame 2 of the tray 1. Is formed. Each suction area 21, 22 is isolated by a rectangular partition 23 b (which is a part of the base 23) along the outer shape of the first suction area 21. The entire upper surface 20a of the chuck table 20 is flat. That is, the upper surfaces of the first suction area 21, the second suction area 22, and the partition part 23b are flush with each other.

  As shown in FIG. 6, a first vacuum line 21 </ b> L that leads to the first suction area 21 and sucks air above the first suction area 21 is formed inside the base 23. Similarly, in the base 23, a second vacuum line 22 </ b> L that leads to the second suction area 22 and sucks air above the second suction area 22 is formed. The vacuum suction operation of the first suction area 21 and the second suction area 22 by the vacuum lines 21L and 22L can be individually controlled. In the illustrated example, one first vacuum line 21L and two second vacuum lines 22L are shown, but the number and arrangement of these vacuum lines 21L and 22L are arbitrary.

  Now, the workpiece mounting tray 1A held on the positioning table 14 is chucked by the supply arm 15A so that the turntable 25 rotates from the picking position to the attachment / detachment position which is the frontmost side in the Y direction. It is placed concentrically on the table 20. At this time, both the first and second suction areas 21 and 22 of the chuck table 20 are operated in vacuum, and the workpiece mounting tray 1A is sucked and held on the chuck table 20 at the same time as being placed.

  The rotational angle position of the chuck table 20 when receiving the workpiece mounting tray 1A from the supply arm 15A is always such that the first suction area 21 corresponds to the suction base 3 of the tray 1 and the second suction area. 22 is determined as a fixed point position corresponding to the frame 2 of the tray 1. As a result, the workpiece mounting tray 1A placed on the chuck table 20 from the supply arm 15A has the suction base portion 3 overlapped with the first suction area 21 and the frame body 2 overlapped with the second suction area 22. In this state, the chuck table 20 is vacuum-sucked. The fixed point position of the chuck table 20 is adjusted according to the pick-up position defined by the notch sensor 14 c of the positioning table 14.

  In the workpiece mounting tray 1A placed on the chuck table 20 in this way, both the suction areas 21 and 22 are operated in vacuum, so that the frame body 2 of the tray 1 becomes the second suction area 22. Adsorbed. Further, the air is sucked from the suction base portion 3 of the tray 1, whereby the workpiece W is sucked together with the suction base portion 3 to the first suction area 21. Therefore, the entire tray 1 is attracted and held on the upper surface of the chuck table 20.

  The workpiece mounting tray 1A held on the chuck table 20 as described above is sent to the primary processing position below the rough grinding unit 30A when the turntable 25 rotates a predetermined angle in the R direction. At this position, the exposed surface of the workpiece W is roughly ground by the grinding unit 30A. Next, the work mounting tray 1A is fed again to the secondary machining position below the finish grinding grinding unit 30B by rotating the turntable 25 again in the R direction by a predetermined angle. At this position, the exposed surface is exposed by the grinding unit 30B. Is finish ground.

  Two columns 17A and 17B arranged in the X direction are erected at the end on the back side of the base 11, and the grinding units 30A and 30B are respectively provided in the Z direction (on the front surface of the columns 17A and 17B). It is installed so that it can be raised and lowered in the vertical direction. That is, a guide 41 extending in the Z direction is provided on the front surface of each column 17A, 17B, and each grinding unit 30A, 30B is slidably mounted on the guide 41 via a slider 42. The grinding units 30 </ b> A and 30 </ b> B are moved up and down in the Z direction via a slider 42 by a ball screw type feed mechanism 44 driven by a servo motor 43.

  Each of the grinding units 30A and 30B has the same configuration, and is distinguished by the fact that the grindstone to be mounted is different for rough grinding and finish grinding. As shown in FIGS. 5 and 6, the grinding units 30 </ b> A and 30 </ b> B have a cylindrical spindle housing 31 whose axial direction extends in the Z direction, and is driven to rotate by a spindle motor 33 in the spindle housing 31. A spindle shaft (rotating shaft) 32 is supported. A grindstone wheel (processing tool) 35 is attached to the lower end of the spindle shaft 32 via a flange 34.

  The grindstone wheel 35 has a plurality of grindstones 37 arranged and fixed to the lower surface of an annular frame 36. The grinding surface formed by the lower surface of the rotating grindstone 37 is set to a plane orthogonal to the axial direction of the spindle shaft 32. Therefore, the ground surface is parallel to the holding surface 20 a of the chuck table 20. As the grindstone 37, for example, a diamond-bonded material mixed with a glassy bond material, molded, and sintered is used.

  As the grindstone 37 attached to the grinding unit 30A for rough grinding, for example, one containing relatively coarse abrasive grains of about # 320 to # 400 is used. Further, as the grindstone 37 attached to the grinding unit 30B for finish grinding, for example, a grindstone containing relatively fine abrasive grains of about # 2000 to # 8000 is used. Each of the grinding units 30A and 30B is provided with a grinding water supply mechanism (not shown) for supplying grinding water for cooling and lubrication of the grinding surface or discharging grinding scraps.

  The grindstone wheel 35 rotates together with the spindle shaft 32, and the grinding outer diameter of the rotating grindstone 37 is equal to or longer than the length of the diagonal lines of the plurality of workpieces W arranged on the tray 1. Is used. Further, the primary machining position and the secondary machining position determined by rotating the turntable 25 by a predetermined angle are all passed through the rotation center of the tray 1 where the cutting edge which is the lower surface of the grindstone 37 rotates by the rotation of the chuck table 20. The workpiece W is set at a position where it can be ground.

  The exposed surface of the workpiece W is ground by each of the grinding units 30A and 30B at each processing position of rough grinding and finish grinding. Grinding of the workpiece W is performed while the chuck table 20 rotates to rotate the workpiece W together with the tray 1 and the grinding mechanism 30A (30B) is lowered by the feed mechanism 44 while rotating the grinding wheel. This is done by pressing the grindstone 37 of the wheel 35 against the exposed surface of the workpiece W.

  The workpiece W is firmly held on the chuck table 20 by the vacuum suction action via the tray 1, so that the grinding is performed accurately without causing a positional shift. Further, since the upper surface of the guide 5 is lower than the height position of the exposed surface of the workpiece W and lower than the height obtained by subtracting the grinding amount of the workpiece W from the height position, the grindstone 37 is guided. It does not happen that it contacts 5 and is ground.

  The workpiece W is ground while the thickness is measured by a thickness measuring gauge 50 provided in the vicinity of each processing position. As shown in FIG. 5, the thickness measurement gauge 50 includes a reference height gauge 51 in which the probe 51a contacts the upper surface 23a of the base 23 of the chuck table 20, and a probe 52a in the surface of the workpiece (in this case, the workpiece). The thickness of the workpiece W during grinding is measured by comparing the height measurement values of both the height gauges 51 and 52. The In this case, since the workpiece W is placed on the chuck table 20 via the suction base 3 of the tray 1, the thickness measurement value is taken into account the thickness of the suction base 3. .

  In this way, the workpiece W is ground while the thickness is measured by the thickness measurement gauge 50, and the feed amount of the grinding wheel 35 by the feed mechanism 44 is controlled based on the measured thickness value. The amount of grinding for each of rough grinding and finish grinding is set appropriately. For example, in rough grinding, the grinding is performed to 20 to 40 μm before the target thickness after finish grinding, and the rest is ground by finish grinding. Is taken.

  When the workpiece W is thinned to the target thickness through rough grinding and finish grinding, the process proceeds to collection of the workpiece mounting tray 1A as follows. First, the turntable 25 is rotated by a predetermined angle in the R direction, and the workpiece mounting tray 1A is moved from the secondary processing position to the attachment / detachment position (the workpiece mounting tray 1A is placed on the chuck table 20 by the supply arm 15A. (Returned position). The vacuum operation of the chuck table 20 is stopped at this attachment / detachment position, and then the workpiece mounting tray 1A is taken up by the recovery arm 15B and conveyed to the spinner type cleaning device 18. The recovery arm 15B is a vacuum suction type having the same configuration as the supply arm 15A shown in FIG. 4, sucks the tray 1 by the same operation as the supply arm 15A, and conveys the workpiece mounting tray 1A by a turning operation. At this time, since the workpiece W is simply placed on the tray 1, the workpiece W receives a stress in the horizontal direction, but the guide 5 prevents the horizontal displacement.

  When the recovery arm 15B picks up the workpiece mounting tray 1A from the chuck table 20, the suction pad 16d is pressed against the suction position of the frame 2, and the vacuum operation of the first and second suction areas 21 and 22 is stopped. Next, air is pumped from the second vacuum line 22 </ b> L in the direction of the workpiece W, and the air is blown upward from the second suction area 22. As a result, the state in which the tray 1 is attracted to the chuck table 20 by the negative pressure is released, and thereafter, the collection arm 15B picks up the tray 1. The reason why the vacuum suction release operation is performed only on the second suction area 22 side is that if the work is also performed in the first suction area 21, the workpiece W will be lifted or jumped up, damaged, or hindered in the next process. This is because there is a risk of becoming. In order to release the vacuum suction, a liquid such as water may be used in addition to air.

  The workpiece mounting tray 1 </ b> A is held by a holding table (not shown) in the cleaning device 18, and cleaning water is supplied to the ground exposed surface for cleaning, and then nitrogen gas or air is blown to dry the processing. Is done. As the holding table provided in the cleaning device 18, a vacuum adsorption type similar to the chuck table 20 is preferably used. Next, the workpiece mounting tray 1 </ b> A is transferred and stored from the cleaning device 18 into the collection cassette 12 </ b> B by the transfer robot 13. The chuck table 20 in the attachment / detachment position from which the workpiece mounting tray 1A has been removed is cleaned with cleaning water discharged from the nozzle 26, and grinding debris and the like are removed.

  Thus, the exposed surface of the workpiece W is ground and thinned to the target thickness. Then, the workpiece W is taken out from the tray 1 collected from the collection cassette 12B and transferred to the next processing step. In one embodiment, only one surface of the workpiece W is ground. However, there are cases where both surfaces of the workpiece W are ground to a target thickness. After grinding, the other unground surface is exposed and set on the tray 1, and the grinding step is performed again.

  According to the above embodiment, the workpiece W having a rectangular shape is set on the tray 1, and the tray 1 (workpiece mounting tray 1 </ b> A) is adsorbed and held on the chuck table 20, thereby grinding the semiconductor wafer. The apparatus 10 can be used to grind a plurality of rectangular workpieces W in the same manner as when grinding a semiconductor wafer. In the grinding apparatus 10, the chuck table 20 is exchanged for one having the first and second suction areas 21 and 22 corresponding to the tray 1, and the cassettes 12A and 12B are placed in the tray as necessary. By changing to one that can accommodate 1, the workpiece W can be automatically ground. That is, the specification change of the grinding apparatus 10 is slight, and therefore the grinding apparatus 10 can be used without changing the standard specification as much as possible. As a result, effective use of the grinding apparatus 10 and cost reduction are achieved.

  Further, the first and second vacuum lines 21L and 22L are separately provided for the first and second suction areas 21 and 22 of the chuck table 20, respectively, so that the vacuum is provided for each suction area 21 and 22 respectively. Operation can be controlled. For this reason, when the tray 1 is picked up by the recovery arm 15B after the completion of grinding, it is possible to perform a vacuum suction releasing operation in which air is blown out only on the second suction area 22 side. Thereby, the lifting and jumping of the workpiece W placed on the suction base 3 can be suppressed, and damage to the workpiece W can be prevented.

  Further, the guide 5 that regulates the displacement of the workpiece W placed on the tray 1 is detachably fitted to the groove 4 of the tray 1. Therefore, when the tray 1 from which the workpiece W has been taken out is washed after the grinding is finished, the guide 5 is removed from the tray 1 and washed, so that the grinding clogged in the groove 4 in which the guide 5 was fitted. The cleaning effect can be enhanced such that the debris can be completely removed and the pores of the suction base 3 can be further cleaned.

  In addition, in the said embodiment, although the guide 5 is a form with which the whole is fitted with respect to the groove | channel 4, the structure which can be attached or detached is arbitrary. For example, as shown in FIG. 7, a plurality of fitting holes 4a are formed in the groove 4 of the tray 1, while pins 5a corresponding to these fitting holes 4a are formed on the lower surface of the guide 5 and the pins 5a are fitted. A form in which the hole 4a is detachably fitted can be employed.

  Further, in the above embodiment, the workpieces W are rectangular, and a plurality (four pieces) of the workpieces W are placed side by side on the tray 1, and the rectangular suction base 3 corresponding to the workpieces W is formed on the tray 1. However, the shape and number of the workpiece W are arbitrary, and the shape of the suction base 3 is formed in a shape corresponding to the number and shape of the workpiece W.

  Moreover, although the said embodiment applies this invention to the grinding apparatus 10 which grinds the workpiece W, this invention is not limited to a grinding apparatus, Other processes, such as a polisher which grind | polishes a workpiece It can also be applied to devices.

1 is an overall perspective view of a grinding apparatus according to an embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS (a): Top view of the tray which concerns on one Embodiment of this invention, (b): It is BB sectional drawing of (a). (A): It is a perspective view of the tray which concerns on one Embodiment of this invention, (b): It is a perspective view of the chuck table which concerns on one Embodiment. It is sectional drawing of the supply arm with which the grinding apparatus shown in FIG. 2 is provided. It is a perspective view which shows the grinding unit and chuck table with which the grinding apparatus shown in FIG. 2 is provided. It is the same side view. It is a perspective view which shows the other form of the attachment or detachment structure of the guide with respect to a tray.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Tray, 2 ... Frame, 3 ... Suction base part, 5 ... Guide (regulation means),
10 ... grinding device (processing device), 20 ... chuck table (holding means),
20a ... holding surface, 21 ... first suction area, 21L ... first vacuum line 22 ... second suction area, 22L ... second vacuum line,
30A, 30B ... Grinding unit (processing means), 32 ... Spindle shaft (rotating shaft),
35 ... Wheel wheel (processing tool), W ... Workpiece

Claims (2)

A tray on which a plate-like workpiece is placed, and the workpiece is held in a vacuum suction type holding means,
It has a shape corresponding to the shape of the workpiece, and a vacuum suction hole is formed over the entire area, and surrounds the suction base portion on which the workpiece is placed with one side exposed. A frame having a shape corresponding to the shape of the holding means;
It is detachably attached to the boundary portion between the suction base and the frame, and has a height that does not exceed the height of one side where the workpiece is exposed in the attached state, and is mounted on the suction base. A plate-like object processing tray, comprising: a restricting means for preventing displacement of a placed work piece. A vacuum suction type holding means having a flat holding surface for holding the tray;
A processing means that is disposed opposite to the holding surface, a rotary machining tool is detachable from the holding surface, and the rotation axis thereof is provided substantially orthogonally;
The tray is a tray according to claim 1,
The holding surface of the holding means is formed such that a first suction area corresponding to the suction base and a second suction area corresponding to the frame form the same plane,
A processing apparatus, wherein a vacuum line for sucking air above the holding surface is individually provided for each of these adsorption areas.

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