JP2009056563A - Surface-coated cutting tool - Google Patents

Surface-coated cutting tool Download PDF

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JP2009056563A
JP2009056563A JP2007227131A JP2007227131A JP2009056563A JP 2009056563 A JP2009056563 A JP 2009056563A JP 2007227131 A JP2007227131 A JP 2007227131A JP 2007227131 A JP2007227131 A JP 2007227131A JP 2009056563 A JP2009056563 A JP 2009056563A
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inclination angle
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JP5023898B2 (en
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Keiji Nakamura
惠滋 中村
Akira Osada
晃 長田
Hisashi Honma
尚志 本間
Manyasu Nishiyama
満康 西山
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Mitsubishi Materials Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface-coated cutting tool with a hard coating layer achieving excellent wear resistance in high-speed intermittent cutting work. <P>SOLUTION: An upper layer of the hard coating layer in the surface-coated cutting tool comprises an aluminum oxide layer, and a lower layer is composed of a tight adhesion Ti compound layer, a modified (Ti<SB>1</SB>-<SB>X</SB>Zr<SB>X</SB>)CN layer (X=0.02-0.25 by atomic ratio), and a modified (Ti<SB>1</SB>-<SB>Y</SB>Cr<SB>Y</SB>)CN layer (Y=0.12-0.20 by atomic ratio). In each of the modified (Ti, Zr)CN layer and the modified (Ti, Cr)CN layer, on an inclination angle frequency distribution graph for ä111} faces, the highest peak exists in an inclination angle section within a range of 0-10 deg., and the total of frequencies existing in the inclination angle section occupies a ratio of 45% or more of all the frequencies. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

この発明は、大きな発熱を伴うとともに、切刃部に大きな衝撃的・機械的負荷がかかる鋼や鋳鉄などの高速断続切削加工で、硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆切削工具(以下、被覆工具という)に関するものである。   This invention is a surface-coated cutting tool that exhibits high wear resistance with a hard coating layer in high-speed intermittent cutting of steel, cast iron, and the like that involves a large amount of heat and a large impact and mechanical load on the cutting edge. (Hereinafter referred to as a coated tool).

従来、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層が、いずれも化学蒸着形成された、Tiの炭化物(以下、TiCで示す)層、窒化物(以下、同じくTiNで示す)層、炭窒化物(以下、TiCNで示す)層、炭酸化物(以下、TiCOで示す)層、および炭窒酸化物(以下、TiCNOで示す)層のうちの2層以上からなり、かつ3〜20μmの合計平均層厚を有するTi化合物層、
(b)上部層が、化学蒸着形成された1〜15μmの平均層厚を有する酸化アルミニウム(以下、Al23で示す)層、
からなる硬質被覆層を形成してなる被覆工具において、上記Ti化合物層におけるTiの一部を10原子%以下のCrで置換した硬質被覆層(以下、従来(Ti,Cr)CN層という)を設けることによって、耐摩耗性をさらに向上させるようにした被覆工具が知られている。
Conventionally, on the surface of a base composed of tungsten carbide (hereinafter referred to as WC) base cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) base cermet (hereinafter collectively referred to as a tool base),
(A) Ti carbide (hereinafter referred to as TiC) layer, nitride (hereinafter also referred to as TiN) layer, carbonitride (hereinafter referred to as TiCN) layer formed by chemical vapor deposition of the lower layers. A Ti compound layer consisting of two or more of a carbon oxide (hereinafter referred to as TiCO) layer and a carbonitride oxide (hereinafter referred to as TiCNO) layer and having a total average layer thickness of 3 to 20 μm,
(B) an aluminum oxide (hereinafter referred to as Al 2 O 3 ) layer having an average layer thickness of 1 to 15 μm, wherein the upper layer is formed by chemical vapor deposition;
A hard coating layer (hereinafter referred to as a conventional (Ti, Cr) CN layer) in which a part of Ti in the Ti compound layer is replaced with 10 atomic% or less of Cr There is known a coated tool which is provided to further improve the wear resistance.

また、WC基超硬合金またはTiCN基サーメットで構成された工具基体の表面に、
(a)第1層として、化学蒸着形成されたTiN層、TiCN層からなり、0.1〜1μmの平均層厚を有する第1密着接合層、
(b)第2層として、化学蒸着形成され、
組成式:(Ti1−βZrβ)CNで表した場合、原子比で、β:0.02〜0.25を満足し、かつ2.5〜15μmの平均層厚を有するTiとZrの複合炭窒化物(以下、従来(Ti,Zr)CNで示す)層、
(c)第3層として、TiCO層、TiCNO層からなり、0.1〜1μmの平均層厚を有する第2密着接合層、
(d)第4層として、化学蒸着形成されたAl23層からなり、かつ1〜15μmの平均層厚を有する高温硬質層、
以上(a)〜(d)で構成された硬質被覆層を形成してなる被覆工具が知られており、この被覆工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられていることも知られている。
特開平 6− 31503号公報 特開平10−244405号公報 特開2006−334710号公報 特開2001−11632号公報
In addition, on the surface of the tool base made of WC-based cemented carbide or TiCN-based cermet,
(A) As the first layer, a first adhesion bonding layer composed of a TiN layer formed by chemical vapor deposition and a TiCN layer, and having an average layer thickness of 0.1 to 1 μm,
(B) The second layer is formed by chemical vapor deposition,
When represented by the composition formula: (Ti 1-β Zr β ) CN, the atomic ratio of Ti and Zr satisfying β: 0.02 to 0.25 and an average layer thickness of 2.5 to 15 μm. A composite carbonitride (hereinafter referred to as conventional (Ti, Zr) CN) layer,
(C) As the third layer, a second adhesive bonding layer comprising an TiCO layer and a TiCNO layer and having an average layer thickness of 0.1 to 1 μm,
(D) As the fourth layer, a high-temperature hard layer comprising an Al 2 O 3 layer formed by chemical vapor deposition and having an average layer thickness of 1 to 15 μm,
A coated tool formed by forming a hard coating layer composed of the above (a) to (d) is known, and this coated tool is used for continuous cutting and intermittent cutting of various steels and cast irons, for example. It is also known that
JP-A-6-31503 JP-A-10-244405 JP 2006-334710 A JP 2001-11632 A

近年の切削装置の高性能化はめざましく、一方で切削加工における省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削効率の向上を目的として、切削速度を高速化する傾向にあるが、上記の従来被覆工具においては、これを鋼や鋳鉄などの通常の条件での切削加工に用いた場合には問題はないが、特にこれを、高熱発生を伴い、かつ、切刃部に大きな衝撃的・機械的負荷がかかる高速断続切削加工に用いた場合には、下部層として前記従来(Ti,Cr)CN層を設けた被覆工具においては、硬質被覆層の高温強度が十分であるとはいえないため、機械的衝撃に対して満足に対応することができず、切削加工時の機械的な衝撃力によってチッピングを発生しやすく、また、下部層として従来(Ti,Zr)CN層を設けた被覆工具においては、耐熱性が不十分であるために切削加工時に発生する高熱によって熱塑性変形、偏摩耗を生じ耐摩耗性が低下し、いずれにしても比較的短時間で使用寿命に至るのが現状である。   In recent years, the performance of cutting machines has been remarkable, while there has been a strong demand for labor saving and energy saving in cutting, as well as cost reduction, and along with this, the tendency to increase cutting speed for the purpose of improving cutting efficiency However, in the above-mentioned conventional coated tool, there is no problem when this is used for cutting under normal conditions such as steel and cast iron, but this is particularly accompanied by high heat generation and the cutting edge. When used in high-speed interrupted cutting where a large impact or mechanical load is applied to the part, the high-temperature strength of the hard coating layer is sufficient in the coated tool provided with the conventional (Ti, Cr) CN layer as the lower layer. Therefore, it cannot respond satisfactorily to mechanical impact, and is likely to generate chipping due to mechanical impact force at the time of cutting, and as a lower layer (Ti, Zr) CN layer established Since the coated tool has insufficient heat resistance, the high heat generated during cutting causes thermoplastic deformation and uneven wear, resulting in a decrease in wear resistance. Is the current situation.

そこで、本発明者等は、上述のような観点から、被覆工具の耐チッピング性、耐摩耗性の向上をはかるべく、硬質被覆層の下部層を構成する従来(Ti,Zr)CN層および従来(Ti,Cr)CN層に着目し、研究を行った結果、
(a)従来被覆工具の硬質被覆層において、例えば、通常の化学蒸着装置にて、
反応ガス組成:容量%で、TiCl:1〜5%、ZrCl:0.1〜1%、CHCN:0.6〜5%、N2:25〜45%、H2:残り、
反応雰囲気温度:750〜980℃、
反応雰囲気圧力:2.7〜13.5kPa、
の条件(通常条件という)で蒸着を行うと、下部層を構成する一つの層である(Ti,Zr)CN(以下、従来(Ti,Zr)CNで示す)層が蒸着形成されるが、これを、
反応ガス組成:容量%で、TiCl:10〜15%、ZrCl:0.5〜3.5%、CHCN:3〜8%、N2:20〜40%、HCl:0.5〜2%、H2:残り、
反応雰囲気温度:800〜900℃、
反応雰囲気圧力:5〜20kPa、
の条件、すなわち上記の通常条件に比して、反応ガス成分のTiClおよびCHCNの含有割合を多くし、さらに、HClを加えた条件で蒸着形成して、
組成式:(Ti1−XZr)CN(ただし、原子比で、X:0.02〜0.25)を満足する(Ti,Zr)CN層を形成すると、この結果の(Ti,Zr)CN層(以下、改質(Ti,Zr)CN層という)は、上記の従来(Ti,Zr)CN層に比して一段とすぐれた耐熱性を有すること。
In view of the above, the present inventors have proposed a conventional (Ti, Zr) CN layer and a conventional layer constituting the lower layer of the hard coating layer in order to improve the chipping resistance and wear resistance of the coated tool. As a result of conducting research by focusing on the (Ti, Cr) CN layer,
(A) In a hard coating layer of a conventional coated tool, for example, in a normal chemical vapor deposition apparatus,
Reaction gas composition: by volume%, TiCl 4: 1~5%, ZrCl 4: 0.1~1%, CH 3 CN: 0.6~5%, N 2: 25~45%, H 2: remainder,
Reaction atmosphere temperature: 750-980 ° C.
Reaction atmosphere pressure: 2.7 to 13.5 kPa,
When vapor deposition is performed under the conditions (referred to as normal conditions), a (Ti, Zr) CN (hereinafter referred to as conventional (Ti, Zr) CN) layer, which is one layer constituting the lower layer, is formed by vapor deposition. this,
Reaction gas composition: by volume%, TiCl 4: 10~15%, ZrCl 4: 0.5~3.5%, CH 3 CN: 3~8%, N 2: 20~40%, HCl: 0.5 ~2%, H 2: remainder,
Reaction atmosphere temperature: 800 to 900 ° C.
Reaction atmosphere pressure: 5 to 20 kPa,
In comparison with the above-mentioned conditions, that is, the above-mentioned normal conditions, the content ratio of the reaction gas components TiCl 4 and CH 3 CN is increased, and further, vapor deposition is performed under the condition of adding HCl,
When a (Ti, Zr) CN layer satisfying the composition formula: (Ti 1-X Zr X ) CN (wherein the atomic ratio is X: 0.02 to 0.25) is formed, the resulting (Ti, Zr ) The CN layer (hereinafter referred to as a modified (Ti, Zr) CN layer) has heat resistance that is much higher than that of the conventional (Ti, Zr) CN layer.

(b)上記の従来(Ti,Zr)CN層と上記(a)の改質(Ti,Zr)CN層は、いずれも同様の結晶構造、すなわち格子点にTi、Zr、炭素(C)、および窒素(N)からなる構成原子がそれぞれ存在するNaCl型面心立方晶の結晶構造を有するが、それぞれの層について、
電界放出型走査電子顕微鏡を用い、図1(a),(b)に概略説明図で例示される通り、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記従来(Ti,Zr)CN層は、図3に例示される通り、{111}面の測定傾斜角の分布が0〜45度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記改質(Ti,Zr)CN層は、図2に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、そしてこのような場合に、改質(Ti,Zr)CN層にはクーリングクラックが均一に分散し、これによって、Zr含有量を増加したことによる改質(Ti,Zr)CN層の高温強度の低下を抑制することができ、しかも、このシャープな最高ピークは、グラフ横軸の傾斜角区分に現れる高さおよび傾斜角区分位置が前記改質(Ti,Zr)CN層におけるZrの含有割合を調整することにより変化すること。
(B) The conventional (Ti, Zr) CN layer and the modified (Ti, Zr) CN layer of (a) have the same crystal structure, that is, Ti, Zr, carbon (C) at the lattice points, And a crystal structure of a NaCl type face centered cubic crystal in which constituent atoms composed of nitrogen (N) are present,
Using a field emission scanning electron microscope, as illustrated in the schematic explanatory diagrams of FIGS. 1A and 1B, the electron beam is individually applied to each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface. Is measured with respect to the normal of the surface polished surface, and the tilt angle formed by the normal of the {111} plane that is the crystal plane of the crystal grain is measured. When the measured inclination angle in the range of 0.25 degrees is divided for each pitch of 0.25 degrees and the inclination angle number distribution graph is formed by counting the frequencies existing in each division, the conventional (Ti, Zr) As illustrated in FIG. 3, the CN layer exhibits an unbiased inclination angle number distribution graph in the range of the measured inclination angle of the {111} plane within the range of 0 to 45 degrees, whereas the modification ( As illustrated in FIG. 2, the Ti, Zr) CN layer has a sharp peak at a specific position in the tilt angle section. A peak appears, and in such a case, cooling cracks are uniformly dispersed in the modified (Ti, Zr) CN layer, and thereby the modified (Ti, Zr) CN layer due to an increase in the Zr content. In addition, the sharp maximum peak has a height that appears in the tilt angle section of the horizontal axis of the graph and the position of the tilt angle section in the Zr in the modified (Ti, Zr) CN layer. It changes by adjusting the content ratio.

(c)上記の通り、上記改質(Ti,Zr)CN層の形成に際して、層中のZr含有割合を、Tiとの合量に占める割合(原子比)で0.02〜0.25とすることによって、前記改質(Ti,Zr)CN層の傾斜角度数分布グラフで、シャープな最高ピークが傾斜角区分の0〜10度の範囲内に現れ、かつ、前記0〜10度の範囲内に存在する度数割合が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示すようになるのであり、したがって、前記改質(Ti,Zr)CN層中のZr含有割合が前記の範囲から低い方に外れても、あるいは高い方に外れても、傾斜角度数分布グラフにおけるシャープな最高ピークが傾斜角区分の0〜10度の範囲から外れ、かつ、前記0〜10度の範囲内に存在する度数数割合も45%未満になってしまい、この場合は一段の耐熱性向上効果を期待できないばかりか、Zr含有割合を増加したことによる高温強度の低下をクーリングクラックの均一分散によって抑制することはできないこと。
つまり、上記改質(Ti,Zr)CN層のZr成分は、Tiとの合量に占める割合(原子比)で0.02(2原子%)以上で所望の耐熱性向上効果が現れるが、その含有割合が0.25(25原子%)を越えると、高熱発生を伴う高速切削加工では、改質(Ti,Zr)CN層は急激に軟化し、熱塑性変形、偏摩耗を生じやすくなることから、その含有割合は、Tiとの合量に占める割合(原子比)で0.02〜0.25とする必要がある。
(C) As described above, when forming the modified (Ti, Zr) CN layer, the Zr content ratio in the layer is 0.02 to 0.25 as a ratio (atomic ratio) to the total amount with Ti. By doing this, in the gradient angle distribution graph of the modified (Ti, Zr) CN layer, a sharp maximum peak appears in the range of 0 to 10 degrees of the tilt angle section, and the range of 0 to 10 degrees In the modified (Ti, Zr) CN layer, the frequency ratio existing in the tilt angle frequency distribution graph occupies a ratio of 45% or more of the entire frequency in the tilt angle frequency distribution graph. Even if the Zr content ratio is out of the above range, the sharp maximum peak in the tilt angle distribution graph is out of the range of 0 to 10 degrees of the tilt angle section, and Within the range of 0 to 10 degrees The frequency ratio is also less than 45%. In this case, not only can the heat resistance improvement effect be further improved, but also the decrease in high-temperature strength due to the increase in the Zr content ratio should be suppressed by uniform distribution of cooling cracks. What you can't do.
That is, the Zr component of the modified (Ti, Zr) CN layer has a desired heat resistance improvement effect when the ratio (atomic ratio) to the total amount with Ti is 0.02 (2 atomic%) or more. When the content ratio exceeds 0.25 (25 atomic%), the modified (Ti, Zr) CN layer softens rapidly during high-speed cutting with high heat generation, and it is likely to cause thermoplastic deformation and uneven wear. Therefore, the content ratio needs to be 0.02 to 0.25 in the ratio (atomic ratio) to the total amount with Ti.

(d)また、従来被覆工具の硬質被覆層において、下部層を構成する(Ti,Cr)CN層(従来(Ti,Cr)CN層)は、例えば、通常の化学蒸着装置にて、
反応ガス組成:容量%で、TiCl:3〜10%、CrF:0.1〜0.4%、CHCN:0.5〜3%、N2:20〜40%、H2:残り、
反応雰囲気温度:800〜900℃、
反応雰囲気圧力:6〜20kPa、
の条件(通常条件という)で蒸着形成されるが、
これを、
反応ガス組成:容量%で、TiCl:1〜5%、CrCl:0.7〜2.5%、CHCN:3〜6%、N2:20〜40%、HCl:0.5〜2%、H2:残り、
反応雰囲気温度:800〜900℃、
反応雰囲気圧力:5〜20kPa、
の条件、すなわち上記の通常条件に比して、反応ガス成分の一つであるCrFにかえて少量のCrClおよびHClを加え、さらに、TiClの含有割合を少なく、CHCNの含有割合を多くした条件で蒸着形成すると、
組成式:(Ti1−YCr)CN(ただし、原子比で、Y:0.12〜0.20)を満足する(Ti,Cr)CN層(以下、改質(Ti,Cr)CN層という)が形成され、この改質(Ti,Cr)CN層は、前記従来(Ti,Cr)CN層に比して一段とすぐれた耐熱性および高温強度を有すること。
(D) Moreover, in the hard coating layer of the conventional coated tool, the (Ti, Cr) CN layer (conventional (Ti, Cr) CN layer) constituting the lower layer is, for example, in a normal chemical vapor deposition apparatus.
Reaction gas composition: by volume%, TiCl 4: 3~10%, CrF 5: 0.1~0.4%, CH 3 CN: 0.5~3%, N 2: 20~40%, H 2: remaining,
Reaction atmosphere temperature: 800 to 900 ° C.
Reaction atmosphere pressure: 6-20 kPa,
It is formed by vapor deposition under the conditions (called normal conditions)
this,
Reaction gas composition: by volume%, TiCl 4: 1~5%, CrCl 3: 0.7~2.5%, CH 3 CN: 3~6%, N 2: 20~40%, HCl: 0.5 ~2%, H 2: remainder,
Reaction atmosphere temperature: 800 to 900 ° C.
Reaction atmosphere pressure: 5 to 20 kPa,
In other words, compared with the above normal conditions, a small amount of CrCl 3 and HCl are added instead of CrF 5 which is one of the reaction gas components, and the content ratio of TiCl 4 is reduced, and the content of CH 3 CN is reduced. When vapor deposition is performed under the condition where the ratio is increased,
(Ti, Cr) CN layer (hereinafter, modified (Ti, Cr) CN satisfying the composition formula: (Ti 1-Y Cr Y ) CN (wherein Y: 0.12 to 0.20 in atomic ratio)) This modified (Ti, Cr) CN layer has better heat resistance and high temperature strength than the conventional (Ti, Cr) CN layer.

(e)上記の従来(Ti,Cr)CN層と改質(Ti,Cr)CN層は、同様の結晶構造、すなわち格子点にTi、Cr、炭素(C)、および窒素(N)からなる構成原子がそれぞれ存在するNaCl型面心立方晶の結晶構造を有するが、それぞれの層について、(Ti,Zr)CN層の場合と同様、図1(a),(b)に概略説明図で例示される通り、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、前記従来(Ti,Cr)CN層は、図5に例示される通り、{111}面の測定傾斜角の分布が0〜45度の範囲内で不偏的な傾斜角度数分布グラフを示すのに対して、前記改質(Ti,Cr)CN層は、図4に例示される通り、傾斜角区分の特定位置にシャープな最高ピークが現れ、そしてこのような場合に、改質(Ti,Cr)CN層にはクーリングクラックが均一に分散し、これによって、Cr含有量を増加したことによる改質(Ti,Cr)CN層の高温強度の低下を抑制することができ、しかも、このシャープな最高ピークは、グラフ横軸の傾斜角区分に現れる高さおよび傾斜角区分位置が前記改質(Ti,Cr)CN層におけるCrの含有割合を調整することにより変化すること。
(E) The conventional (Ti, Cr) CN layer and the modified (Ti, Cr) CN layer described above have the same crystal structure, that is, lattice points consisting of Ti, Cr, carbon (C), and nitrogen (N). Although it has a NaCl type face centered cubic crystal structure in which each constituent atom exists, each layer is schematically illustrated in FIGS. 1A and 1B as in the case of the (Ti, Zr) CN layer. As illustrated,
Using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal grain is normal to the surface polished surface. The tilt angle formed by the normal line of the {111} plane, which is the crystal plane, is measured, and, among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are classified for each pitch of 0.25 degrees. In addition, when an inclination angle number distribution graph is created by counting the frequencies existing in each section, the conventional (Ti, Cr) CN layer has a measured inclination of the {111} plane as illustrated in FIG. Whereas the angle distribution shows an unbiased inclination angle number distribution graph in the range of 0 to 45 degrees, the modified (Ti, Cr) CN layer has an inclination angle section as illustrated in FIG. A sharp peak appears at a specific position in the region, and in such a case, modification (T , Cr) CN layer uniformly disperses cooling cracks, which can suppress a decrease in high-temperature strength of the modified (Ti, Cr) CN layer due to an increase in the Cr content. The sharpest peak is that the height appearing in the tilt angle section on the horizontal axis of the graph and the tilt angle section position change by adjusting the Cr content ratio in the modified (Ti, Cr) CN layer.

(f)上記の通り、上記改質(Ti,Cr)CN層の形成に際して、層中のCr含有割合を、Tiとの合量に占める割合(原子比)で0.12〜0.20とすることによって、前記改質(Ti,Cr)CN層の傾斜角度数分布グラフで、シャープな最高ピークが傾斜角区分の0〜10度の範囲内に現れ、かつ、前記0〜10度の範囲内に存在する度数割合が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示すようになるのであり、したがって、前記改質(Ti,Cr)CN層中のCr含有割合が前記の範囲から低い方に外れても、あるいは高い方に外れても、傾斜角度数分布グラフにおけるシャープな最高ピークが傾斜角区分の0〜10度の範囲から外れ、かつ、前記0〜10度の範囲内に存在する度数数割合も45%未満になってしまい、この場合は耐熱性向上効果を期待できないばかりか、Cr含有割合を増加したことによる高温強度の低下をクーリングクラックの均一分散によって抑制することはできないこと。
つまり、上記改質(Ti,Cr)CN層のCr成分は、Tiとの合量に占める割合(原子比)で0.12(12原子%)以上で所望の耐熱性向上効果が現れるが、その含有割合が0.20(20原子%)を越えると、高熱発生を伴う高速断続切削加工では、改質(Ti,Cr)CN層は急激に軟化し、チッピングを発生しやすくなることから、その含有割合は、Tiとの合量に占める割合(原子比)で0.12〜0.20とする必要がある。
(F) As described above, when the modified (Ti, Cr) CN layer is formed, the Cr content in the layer is 0.12 to 0.20 in terms of the ratio (atomic ratio) to the total amount with Ti. In the gradient angle distribution graph of the modified (Ti, Cr) CN layer, a sharp maximum peak appears in the range of 0 to 10 degrees of the tilt angle section, and the range of 0 to 10 degrees In the modified (Ti, Cr) CN layer, the frequency ratio existing in the tilt angle frequency distribution graph occupies a ratio of 45% or more of the entire frequency in the tilt angle frequency distribution graph. Even if the Cr content ratio is out of the lower range or higher range, the sharp peak in the tilt angle number distribution graph is out of the range of 0 to 10 degrees of the tilt angle section, and Within the range of 0 to 10 degrees The frequency ratio is also less than 45%. In this case, not only the heat resistance improvement effect cannot be expected, but also the decrease in high-temperature strength due to the increase in the Cr content ratio cannot be suppressed by uniform dispersion of cooling cracks. thing.
That is, the Cr component of the modified (Ti, Cr) CN layer has a desired heat resistance improvement effect at a ratio (atomic ratio) of 0.12 (12 atomic%) or more in the total amount with Ti, When the content ratio exceeds 0.20 (20 atomic%), the modified (Ti, Cr) CN layer is softened rapidly in high-speed intermittent cutting with high heat generation, and chipping is likely to occur. The content ratio needs to be 0.12 to 0.20 as a ratio (atomic ratio) to the total amount with Ti.

(g)硬質被覆層の上部層がAl23層、下部層が密着性Ti化合物層と改質(Ti,Zr)CN層と改質(Ti,Cr)CN層からなり、かつ、該改質(Ti,Zr)CN層が、2.5〜15μmの平均層厚を有し、{111}面の測定傾斜角の分布が0〜10度の範囲内に傾斜角区分の最高ピークが現れ、かつ前記0〜10度の範囲内に存在する度数割合が45%以上を占め、さらに、該改質(Ti,Cr)CN層が、2.5〜15μmの平均層厚を有し、{111}面の測定傾斜角の分布が0〜10度の範囲内に傾斜角区分の最高ピークが現れ、かつ前記0〜10度の範囲内に存在する度数割合が45%以上を占める被覆工具は、特に、改質(Ti,Zr)CN層が従来(Ti,Zr)CN層に比して一段と高い耐熱性を有し、また、改質(Ti,Cr)CN層が従来(Ti,Cr)CNに比してすぐれた高温強度と耐熱性を有し、さらに、同上部層であるAl23層がすぐれた高温硬さを具備することと相俟って、特に高熱発生を伴い、かつ、切刃部に大きな衝撃的・機械的負荷がかかる鋼や鋳鉄などの高速断続切削加工でも、前記硬質被覆層はチッピングの発生を抑制しつつすぐれた耐熱性を発揮し、熱塑性変形、偏摩耗を生じることがないため、長期に亘ってすぐれた耐摩耗性を示すようになること。
以上(a)〜(g)に示される研究結果を得たのである。
(G) The upper layer of the hard coating layer is an Al 2 O 3 layer, the lower layer is an adhesive Ti compound layer, a modified (Ti, Zr) CN layer, and a modified (Ti, Cr) CN layer, The modified (Ti, Zr) CN layer has an average layer thickness of 2.5 to 15 μm, and the distribution of the measured inclination angle of the {111} plane is within the range of 0 to 10 degrees, and the highest peak of the inclination angle section is Appearing and the frequency ratio existing in the range of 0 to 10 degrees occupies 45% or more, and the modified (Ti, Cr) CN layer has an average layer thickness of 2.5 to 15 μm, The coated tool in which the distribution of the measured inclination angle of the {111} plane has the highest peak of the inclination angle section in the range of 0 to 10 degrees, and the frequency ratio existing in the range of 0 to 10 degrees occupies 45% or more. In particular, the modified (Ti, Zr) CN layer has a much higher heat resistance than the conventional (Ti, Zr) CN layer, Quality (Ti, Cr) CN layer is conventional (Ti, Cr) in comparison with the CN has excellent high-temperature strength and heat resistance, further, the high-temperature hardness of the Al 2 O 3 layer is the top layer is excellent Combined with this, the hard coating layer generates chipping even in high-speed intermittent cutting such as steel and cast iron, which is accompanied by particularly high heat generation and a large impact and mechanical load on the cutting edge. It exhibits excellent heat resistance while suppressing, and does not cause thermoplastic deformation or uneven wear, and therefore exhibits excellent wear resistance over a long period of time.
The research results shown in (a) to (g) above were obtained.

この発明は、上記の研究結果に基づいてなされたものであって、
「 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に上部層と下部層とからなる硬質被覆層を蒸着形成した表面被覆切削工具において、
(a)上記上部層は、化学蒸着で形成された1〜15μmの平均層厚を有する酸化アルミニウム層からなり、
(b)上記下部層は、3〜20μmの合計平均層厚を有し、いずれも化学蒸着で形成された密着性Ti化合物層と、TiとZrの複合炭窒化物層と、TiとCrの複合炭窒化物層とからなり、
(c)上記密着性Ti化合物層は、0.1〜5μmの合計平均層厚を有するTiの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの1層または2層以上からなり、
(d)上記TiとZrの複合炭窒化物層は、2.5〜15μmの平均層厚を有し、かつ、
組成式:(Ti1−XZr)CN
で表した場合、0.02≦X≦0.25(但し、原子比)を満足するTiとZrの複合炭窒化物層であり、
さらに、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜10度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示すTiとZrの複合炭窒化物層で形成され、
(e)上記TiとCrの複合炭窒化物層は、2.5〜15μmの平均層厚を有し、かつ、
組成式:(Ti1−YCr)CN
で表した場合、原子比で、Y:0.12〜0.20を満足するTiとCrの複合炭窒化物層であり、
さらに、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜10度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示すTiとCrの複合炭窒化物層で形成されている、
ことを特徴とする表面被覆切削工具(被覆工具)。」
に特徴を有するものである。
This invention was made based on the above research results,
In a surface-coated cutting tool in which a hard coating layer composed of an upper layer and a lower layer is vapor-deposited on the surface of a tool base composed of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
(A) The upper layer is made of an aluminum oxide layer having an average layer thickness of 1 to 15 μm formed by chemical vapor deposition,
(B) The lower layer has a total average layer thickness of 3 to 20 μm, all of which are an adhesive Ti compound layer formed by chemical vapor deposition, a composite carbonitride layer of Ti and Zr, and Ti and Cr. A composite carbonitride layer,
(C) The adhesive Ti compound layer is composed of a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride oxide layer having a total average layer thickness of 0.1 to 5 μm. It consists of one or more layers,
(D) The Ti and Zr composite carbonitride layer has an average layer thickness of 2.5 to 15 μm, and
Composition formula: (Ti 1-X Zr X ) CN
Is a composite carbonitride layer of Ti and Zr that satisfies 0.02 ≦ X ≦ 0.25 (however, atomic ratio),
Further, by using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the normal line of the surface polishing surface is The inclination angle formed by the normal line of the {111} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set every pitch of 0.25 degrees. In the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak is present in the inclination angle section in the range of 0 to 10 degrees, and within the range of 0 to 10 degrees. Is formed of a composite carbonitride layer of Ti and Zr showing a tilt angle number distribution graph that occupies a ratio of 45% or more of the entire frequency in the tilt angle frequency distribution graph,
(E) The Ti and Cr composite carbonitride layer has an average layer thickness of 2.5 to 15 μm, and
Composition formula: (Ti 1-Y Cr Y ) CN
Is a composite carbonitride layer of Ti and Cr satisfying Y: 0.12 to 0.20 in atomic ratio,
Further, by using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the normal line of the surface polishing surface is The inclination angle formed by the normal line of the {111} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set every pitch of 0.25 degrees. In the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak is present in the inclination angle section in the range of 0 to 10 degrees, and within the range of 0 to 10 degrees. Is formed of a composite carbonitride layer of Ti and Cr showing an inclination angle distribution graph that occupies a ratio of 45% or more of the entire frequency in the inclination angle distribution graph.
A surface-coated cutting tool (coated tool). "
It has the characteristics.

つぎに、この発明の被覆工具の硬質被覆層の構成層について、上記の通りに数値限定した理由を以下に説明する。   Next, the reason why the constituent layers of the hard coating layer of the coated tool of the present invention are numerically limited as described above will be described below.

(a)下部層の密着性Ti化合物層
密着性Ti化合物層は、工具基体と上部層であるAl23層および改質(Ti、Zr)CN層および改質(Ti,Cr)CN層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性向上に寄与する作用をもつが、その合計平均層厚が0.1μm未満では、所望のすぐれた密着性を確保することができず、一方前記密着性は5μmまでの合計平均層厚で充分であることから、その合計平均層厚を0.1〜5μmと定めた。
(A) Adhesive Ti compound layer of lower layer Adhesive Ti compound layer consists of an Al 2 O 3 layer, a modified (Ti, Zr) CN layer, and a modified (Ti, Cr) CN layer that are the tool base and the upper layer. It adheres firmly to any of the above, and thus has the effect of contributing to improved adhesion of the hard coating layer to the tool substrate, but if the total average layer thickness is less than 0.1 μm, the desired excellent adhesion should be ensured. On the other hand, since the total average layer thickness up to 5 μm is sufficient for the adhesion, the total average layer thickness was determined to be 0.1 to 5 μm.

(b)下部層の改質(Ti,Zr)CN層
上記の改質(Ti,Zr)CN層の傾斜角度数分布グラフの傾斜角区分における最高ピーク位置および前記最高ピークが存在する所定の傾斜角区分内に存在する度数割合は、上記の通り層中のZr含有割合(X値)をTiとの合量に占める原子比で、0.02〜0.25とすることによって、0〜10度の範囲内の傾斜角区分に最高ピークを存在させ、かつ前記0〜10度の範囲内に存在する度数割合を、傾斜角度数分布グラフにおける度数全体の45%以上とすることができるものであり、したがって、その含有割合が0.02未満でも、0.25を越えても、前記最高ピーク位置の現れる傾斜角区分が0〜10度の範囲内から外れ、さらに前記0〜10度の範囲内に存在する度数割合は45%未満となってしまい、そのため、高温強度の低下をクーリングクラックの均一分散により抑制することができなくなるばかりか、高速断続切削加工におけるすぐれた耐熱性向上効果を確保することができなくなり、熱塑性変形の発生あるいは偏摩耗の発生によって耐摩耗性の劣ったものとなる。
また、改質(Ti,Zr)CN層におけるC成分には層の硬さを向上させ、一方N成分には高温強度を向上させる作用があり、これら両成分を共存含有することにより高い硬さとすぐれた強度を具備するようになるものであり、したがって、層中のN成分の含有割合が、C成分との合量に占める原子比で0.35未満では所望の強度を確保することができず、一方その含有割合が同じく0.55を越えると、相対的にC成分の含有割合が少なくなり過ぎて、所望の高硬度が得られなくなることから、C成分との合量に占めるN成分の含有割合は、原子比で0.35〜0.55とすることが望ましい。
このように前記改質(Ti,Zr)CN層は、従来の(Ti,Zr)CN層に比して、一段とすぐれた耐熱性を有するようになるが、その平均層厚が2.5μm未満では所望のすぐれた耐熱性向上効果を硬質被覆層に十分に具備せしめることができず、一方その平均層厚が15μmを越えると、チッピングが発生し易くなることから、その平均層厚を2.5〜15μmと定めた。
(B) Modified (Ti, Zr) CN layer of lower layer The highest peak position in the inclination angle section of the inclination angle number distribution graph of the modified (Ti, Zr) CN layer and a predetermined inclination where the highest peak exists The frequency ratio existing in the corner section is 0 to 10 by adjusting the Zr content ratio (X value) in the layer to the total amount with Ti as 0.02 to 0.25 as described above. The highest peak exists in the inclination angle section within the range of degrees, and the frequency ratio existing in the range of 0 to 10 degrees can be 45% or more of the entire degrees in the inclination angle distribution graph. Therefore, even if the content ratio is less than 0.02 or exceeds 0.25, the inclination angle section at which the highest peak position appears is out of the range of 0 to 10 degrees, and further the range of 0 to 10 degrees. The frequency ratio that exists in is not 45% As a result, not only can the decrease in high-temperature strength be suppressed by the uniform distribution of cooling cracks, but it will also be impossible to ensure an excellent heat resistance improvement effect in high-speed interrupted cutting. Due to the occurrence of uneven wear or uneven wear, the wear resistance is inferior.
In addition, the C component in the modified (Ti, Zr) CN layer improves the hardness of the layer, while the N component has the effect of improving the high-temperature strength. Therefore, if the content ratio of the N component in the layer is less than 0.35 in terms of the atomic ratio to the total amount with the C component, the desired strength can be secured. On the other hand, if the content ratio similarly exceeds 0.55, the content ratio of the C component is relatively decreased, and the desired high hardness cannot be obtained. Therefore, the N component occupies the total amount with the C component. The content ratio of is desirably 0.35 to 0.55 in atomic ratio.
As described above, the modified (Ti, Zr) CN layer has higher heat resistance than the conventional (Ti, Zr) CN layer, but the average layer thickness is less than 2.5 μm. However, the desired excellent heat resistance improvement effect cannot be sufficiently provided to the hard coating layer. On the other hand, if the average layer thickness exceeds 15 μm, chipping tends to occur. It was determined to be 5 to 15 μm.

(c)下部層の改質(Ti,Cr)CN層
改質(Ti,Cr)CN層については、上記の通り、層中のCr含有割合(Y値)をTiとの合量に占める原子比で、0.12〜0.20とすることによって、{111}面の法線がなす傾斜角を集計してなる傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜10度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占め、かつ、すぐれた耐熱性、高温強度を具備する改質(Ti,Cr)CN層を蒸着形成することができるが、その平均層厚が2.5μm未満では所望のすぐれた耐熱性、高温強度向上効果を発揮することができず、一方その平均層厚が15μmを越えると、偏摩耗の原因となる熱塑性変形が発生し易くなり、摩耗が加速するようになることから、その平均層厚を2.5〜15μmと定めた。
(C) Lower layer modified (Ti, Cr) CN layer As for the modified (Ti, Cr) CN layer, as described above, the Cr content ratio (Y value) in the layer accounts for the total amount of Ti By setting the ratio to 0.12 to 0.20, in the inclination angle number distribution graph in which the inclination angles formed by the normal lines of the {111} plane are tabulated, the inclination angle sections within the range of 0 to 10 degrees are included. While the highest peak is present, the total of the frequencies within the range of 0 to 10 degrees occupies a ratio of 45% or more of the entire frequencies in the inclination angle frequency distribution graph, and has excellent heat resistance and high temperature strength. The modified (Ti, Cr) CN layer can be formed by vapor deposition. However, if the average layer thickness is less than 2.5 μm, the desired excellent heat resistance and high temperature strength cannot be improved. If the average layer thickness exceeds 15 μm, it will cause uneven wear. Easily thermal plastic deformation is generated, since it becomes worn accelerates, determined the average layer thickness and 2.5~15Myuemu.

(d)上部層のAl23
Al23層は、すぐれた高温硬さを有し、硬質被覆層の耐摩耗性向上に寄与するが、その平均層厚が1μm未満では、硬質被覆層に十分な耐摩耗性を発揮せしめることができず、一方その平均層厚が15μmを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を1〜15μmと定めた。
(D) the Al 2 O 3 layer the Al 2 O 3 layer of the upper layer has excellent high-temperature hardness, contributes to improvement in wear resistance of the hard coating layer, the average layer thickness is less than 1 [mu] m, hard Since the coating layer cannot exhibit sufficient wear resistance, on the other hand, if the average layer thickness exceeds 15 μm, chipping tends to occur. Therefore, the average layer thickness is set to 1 to 15 μm. It was.

なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するTiN層を最表面層として、必要に応じて蒸着形成してもよいが、この場合の平均層厚は0.1〜1μmでよく、これは0.1μm未満では、十分な識別効果が得られず、一方前記TiN層による前記識別効果は1μmまでの平均層厚で十分であるという理由からである。   In addition, for the purpose of identification before and after the use of the cutting tool, the TiN layer having a golden color tone may be vapor-deposited as necessary, but the average layer thickness in this case is 0.1 to 1 μm may be sufficient, and if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.

この発明の被覆工具は、高熱発生を伴い、かつ、切刃部に大きな衝撃的・機械的負荷がかかる鋼や鋳鉄などの高速断続切削加工でも、硬質被覆層の下部層のうちの改質(Ti,Cr)CN層および改質(Ti,Zr)CN層が一段とすぐれた耐熱性と高温強度を有し、熱塑性変形、偏摩耗の発生を抑制することによって、硬質被覆層はチッピングの発生もなくより一段とすぐれた耐摩耗性を示すものとなる。   The coated tool of the present invention is a modification of the lower layer of the hard coating layer even in high-speed intermittent cutting such as steel or cast iron that involves high heat generation and a large impact / mechanical load on the cutting edge ( The Ti, Cr) CN layer and the modified (Ti, Zr) CN layer have excellent heat resistance and high-temperature strength, and the hard coating layer can also generate chipping by suppressing the occurrence of thermoplastic deformation and uneven wear. The wear resistance is further improved.

つぎに、この発明の被覆工具を実施例により具体的に説明する。   Next, the coated tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも0.5〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、VC粉末、TaC粉末、NbC粉末、Cr32粉末、TiN粉末、TaN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.05mmのホーニング加工を施すことによりISO・CNMG120412に規定するスローアウエイチップ形状をもったWC基超硬合金製の工具基体A〜Fをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 0.5 to 3 μm as raw material powder These raw material powders are blended into the blending composition shown in Table 1, further added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and then formed into a compact with a predetermined shape at a pressure of 98 MPa. The green compact was press-molded and vacuum-sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour. After sintering, the cutting edge portion had R: 0.05 mm. The tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape specified in ISO · CNMG12041 were manufactured by performing the honing process.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比で、TiC/TiN=50/50)粉末、Mo2C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分にR:0.09mmのホーニング加工を施すことによりISO規格・CNMG120412のチップ形状をもったTiCN基サーメット製の工具基体a〜fを形成した。 Further, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, blend these raw material powders into the composition shown in Table 2, wet mix with a ball mill for 24 hours, dry, and press-mold into a green compact at 98 MPa pressure Then, this green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, the cutting edge portion is subjected to a honing process of R: 0.09 mm. Tool bases a to f made of TiCN-based cermet having a chip shape conforming to ISO standards / CNMG 120212 were formed.

つぎに、これらの工具基体A〜Fおよび工具基体a〜fの表面に、通常の化学蒸着装置を用い、硬質被覆層の下部層として、密着性Ti化合物層、改質(Ti,Cr)CN層および改質(Ti,Zr)CN層からなる下部層を表3、4に示される条件で、表5に示される組み合わせおよび目標層厚で蒸着形成し、ついで同じく表3に示される条件にて、上部層としてのAl23層を同じく表5に示される組み合わせで、かつ目標層厚で蒸着形成することにより本発明被覆工具1〜13をそれぞれ製造した。 Next, on the surfaces of the tool bases A to F and the tool bases a to f, an ordinary chemical vapor deposition apparatus is used, and as a lower layer of the hard coating layer, an adhesive Ti compound layer, modified (Ti, Cr) CN. A lower layer composed of a layer and a modified (Ti, Zr) CN layer is formed by vapor deposition under the conditions shown in Tables 3 and 4 with the combinations and target layer thicknesses shown in Table 5, and then in the same conditions as shown in Table 3. Then, the inventive coated tools 1 to 13 were manufactured by vapor-depositing Al 2 O 3 layers as upper layers in the same combinations as shown in Table 5 and with a target layer thickness.

また、比較の目的で、硬質被覆層の下部層として、密着性Ti化合物層および従来(Ti,Cr)CN層、従来(Ti,Zr)CN層を表3、4に示される条件で、表6に示される組み合わせおよび目標層厚で蒸着形成し、さらに上部層としてのAl23層を、表3に示される条件で、かつ同じく表6に示される目標層厚で蒸着形成することにより比較被覆工具1〜13をそれぞれ製造した。 For comparison purposes, as the lower layer of the hard coating layer, an adhesive Ti compound layer, a conventional (Ti, Cr) CN layer, and a conventional (Ti, Zr) CN layer are displayed under the conditions shown in Tables 3 and 4. 6 by vapor deposition with the combination and target layer thickness shown in FIG. 6, and further by depositing the Al 2 O 3 layer as the upper layer under the conditions shown in Table 3 and with the target layer thickness also shown in Table 6. Comparative coated tools 1 to 13 were produced, respectively.

ついで、上記の本発明被覆工具と比較被覆工具の硬質被覆層を構成する改質(Ti,Zr)CN層および従来(Ti,Zr)CN層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフをそれぞれ作成した。
すなわち、上記傾斜角度数分布グラフは、上記の改質(Ti,Zr)CN層および従来(Ti,Zr)CN層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、前記表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、30×50μmの領域を0.1μm/stepの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
Next, with respect to the modified (Ti, Zr) CN layer and the conventional (Ti, Zr) CN layer constituting the hard coating layer of the above-described coated tool of the present invention and the comparative coated tool, a gradient is obtained using a field emission scanning electron microscope. Each angle distribution graph was created.
That is, the inclination angle number distribution graph shows the inside of the column of the field emission scanning electron microscope in a state where the surfaces of the modified (Ti, Zr) CN layer and the conventional (Ti, Zr) CN layer are polished surfaces. Irradiating the polished surface with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees with an irradiation current of 1 nA on each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface Then, using an electron backscatter diffraction image apparatus, a {111} plane which is a crystal plane of the crystal grain with respect to a normal line of the surface-polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step The inclination angle formed by the normal line is measured, and based on the measurement result, among the measurement inclination angles, the measurement inclination angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, Created by counting the frequencies existing in each category It was.

この結果得られた各種の改質(Ti,Zr)CN層および従来(Ti,Zr)CN層の傾斜角度数分布グラフにおいて、{111}面が最高ピークを示す傾斜角区分、並びに0〜10度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合を表5,6にそれぞれ示した。     In the inclination angle number distribution graphs of the various modified (Ti, Zr) CN layers and conventional (Ti, Zr) CN layers obtained as a result, the inclination angle division in which the {111} plane shows the highest peak, and 0-10 Tables 5 and 6 show the ratio of the number of tilt angles existing in the tilt angle section within the degree range to the number of tilt angles in the entire tilt angle distribution graph.

また、本発明被覆工具と比較被覆工具の硬質被覆層を構成する改質(Ti,Cr)CN層および従来(Ti,Cr)CN層についても、前記(Ti,Zr)CN層の場合と同様に、電界放出型走査電子顕微鏡を用いて、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより傾斜角度数分布グラフ作成した。   The modified (Ti, Cr) CN layer and the conventional (Ti, Cr) CN layer constituting the hard coating layer of the coated tool of the present invention and the comparative coated tool are also the same as in the case of the (Ti, Zr) CN layer. In addition, using a field emission scanning electron microscope, the measurement inclination angle within the range of 0 to 45 degrees is divided into pitches of 0.25 degrees, and the inclinations are counted by counting the frequencies existing in each division. An angle number distribution graph was created.

この結果得られた各種の改質(Ti,Cr)CN層および従来(Ti,Cr)CN層の傾斜角度数分布グラフにおいて、{111}面が最高ピークを示す傾斜角区分、並びに0〜10度の範囲内の傾斜角区分内に存在する傾斜角度数の傾斜角度数分布グラフ全体の傾斜角度数に占める割合を表5,6にそれぞれ示した。   In the inclination angle number distribution graphs of the various modified (Ti, Cr) CN layers and conventional (Ti, Cr) CN layers obtained as a result, the inclination angle division in which the {111} plane shows the highest peak, and 0 to 10 Tables 5 and 6 show the ratio of the number of tilt angles existing in the tilt angle section within the degree range to the number of tilt angles in the entire tilt angle distribution graph.

上記の各種の傾斜角度数分布グラフにおいて、表5に示される通り、本発明被覆工具1〜13の改質(Ti,Zr)CN層、改質(Ti,Cr)CN層は、いずれも{111}面の測定傾斜角の分布が0〜10度の範囲内の傾斜角区分に最高ピークが現れ、かつ0〜10度の範囲内の傾斜角区分内に存在する傾斜角度数の割合が45%以上である傾斜角度数分布グラフを示すのに対して、表6に示される通り、比較被覆工具1〜13の従来(Ti,Zr)CN層、従来(Ti,Cr)CN層は、いずれも{111}面の測定傾斜角の分布が0〜45度の範囲内で不偏的で、最高ピークが存在せず、0〜10度の範囲内の傾斜角区分内に存在する傾斜角度数の割合も30%以下である傾斜角度数分布グラフを示すものであった。
また、図2は、本発明被覆工具3の改質(Ti,Zr)CN層の傾斜角度数分布グラフ、図3は、比較被覆工具3の従来(Ti,Zr)CN層の傾斜角度数分布グラフ、図4は、本発明被覆工具3の改質(Ti,Cr)CN層の傾斜角度数分布グラフ、図5は、比較被覆工具3の従来(Ti,Cr)CN層の傾斜角度数分布グラフをそれぞれ示すものである。
In the above-described various inclination angle number distribution graphs, as shown in Table 5, the modified (Ti, Zr) CN layer and the modified (Ti, Cr) CN layer of the present coated tools 1 to 13 are all { 111}, the highest peak appears in the tilt angle section in the range of 0 to 10 degrees of the measured tilt angle distribution, and the ratio of the tilt angle number existing in the tilt angle section in the range of 0 to 10 degrees is 45. %, The conventional (Ti, Zr) CN layer and the conventional (Ti, Cr) CN layer of the comparative coating tools 1 to 13 are as shown in Table 6. The distribution of the measured inclination angle of the {111} plane is unbiased within the range of 0 to 45 degrees, the highest peak does not exist, and the number of inclination angles existing in the inclination angle section within the range of 0 to 10 degrees. An inclination angle number distribution graph having a ratio of 30% or less was shown.
FIG. 2 is a graph showing the distribution of the tilt angle number of the modified (Ti, Zr) CN layer of the coated tool 3 of the present invention, and FIG. 3 is the distribution of the tilt angle number of the conventional (Ti, Zr) CN layer of the comparative coated tool 3. 4 is a graph showing the distribution of the tilt angle number of the modified (Ti, Cr) CN layer of the coated tool 3 of the present invention, and FIG. 5 is the graph showing the distribution of the tilt angle number of the conventional (Ti, Cr) CN layer of the comparative coated tool 3. Each graph is shown.

さらに、上記の本発明被覆工具1〜13および比較被覆工具1〜13について、これの硬質被覆層の構成層を電子線マイクロアナライザー(EPMA)およびオージェ分光分析装置を用いて観察(層の縦断面を観察)したところ、前者および後者とも目標組成と実質的に同じ組成を有する密着性Ti化合物層、改質(Ti,Zr)CN層、改質(Ti,Cr)CN層、従来(Ti,Zr)CN層、従来(Ti,Cr)CN層、Al23層からなることが確認された。また、これらの被覆工具の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定(同じく縦断面測定)したところ、いずれも目標層厚と実質的に同じ平均層厚(5点測定の平均値)を示した。 Further, for the above-described coated tools 1 to 13 and comparative coated tools 1 to 13 described above, the constituent layers of the hard coating layer were observed using an electron beam microanalyzer (EPMA) and an Auger spectroscopic analyzer (longitudinal section of the layer). Observed), an adhesive Ti compound layer, a modified (Ti, Zr) CN layer, a modified (Ti, Cr) CN layer, a conventional (Ti, It was confirmed to be composed of a Zr) CN layer, a conventional (Ti, Cr) CN layer, and an Al 2 O 3 layer. Moreover, when the thickness of the constituent layer of the hard coating layer of these coated tools was measured using a scanning electron microscope (similarly longitudinal section measurement), the average layer thickness (5 The average value of point measurement) was shown.

つぎに、上記の各種の被覆工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆工具1〜13および比較被覆工具1〜13について、
被削材:JIS・SCr420Hの長さ方向等間隔4本縦溝入り丸棒、
切削速度: 440 m/min、
切り込み: 1.3 mm、
送り: 0.28 mm/rev、
切削時間: 10 分、
の条件(切削条件Aという)での合金鋼の湿式断続高速切削試験(通常の切削速度は、250m/min)、
被削材:JIS・SUM11の長さ方向等間隔4本縦溝入り丸棒、
切削速度: 435 m/min、
切り込み: 1.5 mm、
送り: 0.29 mm/rev、
切削時間: 12 分、
の条件(切削条件Bという)での快削鋼の湿式断続高速切削試験(通常の切削速度は、200m/min)、
被削材:JIS・FC150の長さ方向等間隔4本縦溝入り丸棒、
切削速度: 470 m/min、
切り込み: 2.0 mm、
送り: 0.30 mm/rev、
切削時間: 10 分、
の条件(切削条件Cという)でのねずみ鋳鉄の湿式断続高速切削試験(通常の切削速度は、300m/min)、
を行い、いずれの切削試験(水溶性切削油使用)でも切刃の逃げ面摩耗幅を測定した。この測定結果を表7に示した。
Next, in the state where each of the above various coated tools is screwed to the tip of the tool steel tool with a fixing jig, the present coated tools 1 to 13 and the comparative coated tools 1 to 13 are as follows:
Work material: JIS · SCr420H lengthwise equidistant 4 round bars with vertical grooves,
Cutting speed: 440 m / min,
Cutting depth: 1.3 mm,
Feed: 0.28 mm / rev,
Cutting time: 10 minutes,
Wet intermittent high-speed cutting test (normal cutting speed is 250 m / min) of alloy steel under the above conditions (referred to as cutting condition A),
Work material: JIS · SUM11 lengthwise equidistant 4 round grooved round bars,
Cutting speed: 435 m / min,
Cutting depth: 1.5 mm,
Feed: 0.29 mm / rev,
Cutting time: 12 minutes,
Wet intermittent high-speed cutting test of free-cutting steel under the conditions (cutting condition B) (normal cutting speed is 200 m / min),
Work material: JIS / FC150 lengthwise equidistantly 4 round bars with flutes,
Cutting speed: 470 m / min,
Cutting depth: 2.0 mm,
Feed: 0.30 mm / rev,
Cutting time: 10 minutes,
Wet intermittent high-speed cutting test (normal cutting speed is 300 m / min) of gray cast iron under the conditions (cutting condition C)
The flank wear width of the cutting edge was measured in any cutting test (using water-soluble cutting oil). The measurement results are shown in Table 7.

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Figure 2009056563

表5〜7に示される結果から、本発明被覆工具1〜13は、いずれも硬質被覆層の下部層のうちの改質(Ti,Zr)CN層および改質(Ti,Cr)CN層が、{111}面の傾斜角が0〜10度の範囲内の傾斜角区分で最高ピークを示すと共に、前記0〜10度の傾斜角区分範囲内に存在する度数の合計割合が45%以上を占める傾斜角度数分布グラフを示し、高熱発生を伴い、かつ、切刃部に大きな衝撃的・機械的負荷がかかる各種の鋼や鋳鉄などの高速断続切削加工でも、前記改質(Ti,Zr)CN層、改質(Ti,Cr)CN層が一段とすぐれた耐熱性と高温強度を有し、熱塑性変形、偏摩耗、チッピングの発生が防止されることから、硬質被覆層がチッピングを発生することなくすぐれた耐摩耗性を示すのに対して、硬質被覆層の下部層のうちの(Ti,Zr)CN層、(Ti,Cr)CN層が、{111}面の測定傾斜角の分布が0〜45度の範囲内で不偏的で、最高ピークが存在しない傾斜角度数分布グラフを示す従来(Ti,Zr)CN層、従来(Ti,Cr)CN層で構成された比較被覆工具1〜13では、硬質被覆層にチッピングが発生したり、あるいは、硬質被覆層の耐摩耗性が劣るものであり、その結果として、比較的短時間で使用寿命に至ることが明らかである。   From the results shown in Tables 5 to 7, all of the coated tools 1 to 13 of the present invention have the modified (Ti, Zr) CN layer and the modified (Ti, Cr) CN layer in the lower layer of the hard coating layer. , The inclination angle of the {111} plane has the highest peak in the inclination angle section within the range of 0 to 10 degrees, and the total ratio of the frequencies existing in the inclination angle section range of 0 to 10 degrees is 45% or more. This graph shows the distribution of the number of inclined angles, and the modification (Ti, Zr) even in high-speed intermittent cutting of various steels and cast irons that generate high heat and have a large impact / mechanical load on the cutting edge. CN layer and modified (Ti, Cr) CN layer has excellent heat resistance and high temperature strength, and prevents the occurrence of thermoplastic deformation, partial wear, and chipping, so that the hard coating layer generates chipping. Hard coating while showing excellent wear resistance The (Ti, Zr) CN layer and (Ti, Cr) CN layer in the lower layer of the above are non-biased within the range of the measured inclination angle of the {111} plane within the range of 0 to 45 degrees, and the highest peak exists. In the comparative coating tools 1 to 13 composed of the conventional (Ti, Zr) CN layer and the conventional (Ti, Cr) CN layer showing the inclination angle number distribution graph that does not occur, chipping occurs in the hard coating layer, or the hard It is apparent that the wear resistance of the coating layer is inferior and, as a result, the service life is reached in a relatively short time.

上述のように、この発明の被覆工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、大きな発熱を伴うとともに、切刃部に大きな衝撃的・機械的負荷がかかる高速断続切削加工で、硬質被覆層がすぐれた耐摩耗性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。   As described above, the coated tool of the present invention is not only continuous and intermittent cutting under normal conditions such as various steels and cast irons, but also generates a large amount of heat and has a large impact and mechanical load on the cutting edge. In high-speed interrupted machining, the hard coating layer exhibits excellent wear resistance and exhibits excellent cutting performance over a long period of time. It is possible to cope with the reduction of cost and cost.

硬質被覆層の下部層を構成する改質(Ti,Zr)CN層、改質(Ti,Cr)CN層、従来(Ti,Zr)CN層、従来(Ti,Cr)CN層における結晶粒の{111}面の傾斜角の測定範囲を示す概略説明図である。The modified (Ti, Zr) CN layer, the modified (Ti, Cr) CN layer, the conventional (Ti, Zr) CN layer, and the conventional (Ti, Cr) CN layer constituting the lower layer of the hard coating layer It is a schematic explanatory drawing which shows the measurement range of the inclination angle of a {111} surface. 本発明被覆工具3の硬質被覆層の下部層を構成する改質(Ti,Zr)CN層の{111}面の傾斜角度数分布グラフである。It is an inclination angle number distribution graph of the {111} plane of the modified (Ti, Zr) CN layer constituting the lower layer of the hard coating layer of the present coated tool 3. 比較被覆工具3の硬質被覆層の下部層を構成する従来(Ti,Zr)CN層の{111}面の傾斜角度数分布グラフである。4 is a graph showing the distribution of inclination angle numbers of {111} planes of a conventional (Ti, Zr) CN layer constituting the lower layer of the hard coating layer of the comparative coating tool 3. 本発明被覆工具3の硬質被覆層の下部層を構成する改質(Ti,Cr)CN層の{111}面の傾斜角度数分布グラフである。It is an inclination angle number distribution graph of the {111} plane of the modified (Ti, Cr) CN layer constituting the lower layer of the hard coating layer of the present coated tool 3. 比較被覆工具3の硬質被覆層の下部層を構成する従来(Ti,Cr)CN層の{111}面の傾斜角度数分布グラフである。4 is a graph showing the distribution of the number of inclination angles of the {111} plane of a conventional (Ti, Cr) CN layer constituting the lower layer of the hard coating layer of the comparative coating tool 3.

Claims (1)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に上部層と下部層とからなる硬質被覆層を蒸着形成した表面被覆切削工具において、
(a)上記上部層は、化学蒸着で形成された1〜15μmの平均層厚を有する酸化アルミニウム層からなり、
(b)上記下部層は、3〜20μmの合計平均層厚を有し、いずれも化学蒸着で形成された密着性Ti化合物層と、TiとZrの複合炭窒化物層と、TiとCrの複合炭窒化物層とからなり、
(c)上記密着性Ti化合物層は、0.1〜5μmの合計平均層厚を有するTiの炭化物層、窒化物層、炭窒化物層、炭酸化物層、および炭窒酸化物層のうちの1層または2層以上からなり、
(d)上記TiとZrの複合炭窒化物層は、2.5〜15μmの平均層厚を有し、かつ、
組成式:(Ti1−XZr)CN
で表した場合、0.02≦X≦0.25(但し、原子比)を満足するTiとZrの複合炭窒化物層であり、
さらに、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜10度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示すTiとZrの複合炭窒化物層で形成され、
(e)上記TiとCrの複合炭窒化物層は、2.5〜15μmの平均層厚を有し、かつ、
組成式:(Ti1−YCr)CN
で表した場合、原子比で、Y:0.12〜0.20を満足するTiとCrの複合炭窒化物層であり、
さらに、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{111}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記0〜10度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の45%以上の割合を占める傾斜角度数分布グラフを示すTiとCrの複合炭窒化物層で形成されている、
ことを特徴とする表面被覆切削工具。
In a surface-coated cutting tool in which a hard coating layer composed of an upper layer and a lower layer is vapor-deposited on the surface of a tool base composed of a tungsten carbide-based cemented carbide or a titanium carbonitride-based cermet,
(A) The upper layer is made of an aluminum oxide layer having an average layer thickness of 1 to 15 μm formed by chemical vapor deposition,
(B) The lower layer has a total average layer thickness of 3 to 20 μm, all of which are an adhesive Ti compound layer formed by chemical vapor deposition, a composite carbonitride layer of Ti and Zr, and Ti and Cr. A composite carbonitride layer,
(C) The adhesive Ti compound layer is composed of a Ti carbide layer, a nitride layer, a carbonitride layer, a carbonate layer, and a carbonitride oxide layer having a total average layer thickness of 0.1 to 5 μm. It consists of one or more layers,
(D) The Ti and Zr composite carbonitride layer has an average layer thickness of 2.5 to 15 μm, and
Composition formula: (Ti 1-X Zr X ) CN
Is a composite carbonitride layer of Ti and Zr that satisfies 0.02 ≦ X ≦ 0.25 (however, atomic ratio),
Further, by using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the normal line of the surface polishing surface is The inclination angle formed by the normal line of the {111} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set every pitch of 0.25 degrees. In the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak is present in the inclination angle section in the range of 0 to 10 degrees, and within the range of 0 to 10 degrees. Is formed of a composite carbonitride layer of Ti and Zr showing a tilt angle number distribution graph that occupies a ratio of 45% or more of the entire frequency in the tilt angle frequency distribution graph,
(E) The Ti and Cr composite carbonitride layer has an average layer thickness of 2.5 to 15 μm, and
Composition formula: (Ti 1-Y Cr Y ) CN
Is a composite carbonitride layer of Ti and Cr satisfying Y: 0.12 to 0.20 in atomic ratio,
Further, by using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the normal line of the surface polishing surface is The inclination angle formed by the normal line of the {111} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set every pitch of 0.25 degrees. In the inclination angle number distribution graph obtained by summing up the frequencies existing in each section, the highest peak is present in the inclination angle section in the range of 0 to 10 degrees, and within the range of 0 to 10 degrees. Is formed of a composite carbonitride layer of Ti and Cr showing an inclination angle distribution graph that occupies a ratio of 45% or more of the entire frequency in the inclination angle distribution graph.
A surface-coated cutting tool characterized by that.
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