JP2009050146A5 - - Google Patents

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Publication number
JP2009050146A5
JP2009050146A5 JP2008155357A JP2008155357A JP2009050146A5 JP 2009050146 A5 JP2009050146 A5 JP 2009050146A5 JP 2008155357 A JP2008155357 A JP 2008155357A JP 2008155357 A JP2008155357 A JP 2008155357A JP 2009050146 A5 JP2009050146 A5 JP 2009050146A5
Authority
JP
Japan
Prior art keywords
piezoelectric element
electrode
vibrating body
support member
peripheral surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008155357A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009050146A (ja
JP5159452B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008155357A priority Critical patent/JP5159452B2/ja
Priority claimed from JP2008155357A external-priority patent/JP5159452B2/ja
Priority to US12/169,575 priority patent/US7915787B2/en
Priority to EP08160022.3A priority patent/EP2017905B1/en
Priority to CN2008101336635A priority patent/CN101350575B/zh
Publication of JP2009050146A publication Critical patent/JP2009050146A/ja
Publication of JP2009050146A5 publication Critical patent/JP2009050146A5/ja
Application granted granted Critical
Publication of JP5159452B2 publication Critical patent/JP5159452B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008155357A 2007-07-20 2008-06-13 アクチュエータ Expired - Fee Related JP5159452B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008155357A JP5159452B2 (ja) 2007-07-20 2008-06-13 アクチュエータ
US12/169,575 US7915787B2 (en) 2007-07-20 2008-07-08 Actuator
EP08160022.3A EP2017905B1 (en) 2007-07-20 2008-07-09 Actuator
CN2008101336635A CN101350575B (zh) 2007-07-20 2008-07-18 致动器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007189001 2007-07-20
JP2007189001 2007-07-20
JP2008155357A JP5159452B2 (ja) 2007-07-20 2008-06-13 アクチュエータ

Publications (3)

Publication Number Publication Date
JP2009050146A JP2009050146A (ja) 2009-03-05
JP2009050146A5 true JP2009050146A5 (enrdf_load_stackoverflow) 2011-07-28
JP5159452B2 JP5159452B2 (ja) 2013-03-06

Family

ID=40269208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008155357A Expired - Fee Related JP5159452B2 (ja) 2007-07-20 2008-06-13 アクチュエータ

Country Status (2)

Country Link
JP (1) JP5159452B2 (enrdf_load_stackoverflow)
CN (1) CN101350575B (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9164584B2 (en) * 2009-04-21 2015-10-20 Google Technology Holdings LLC Methods and devices for consistency of the haptic response across a touch sensitive device
CN102525378B (zh) * 2012-02-02 2014-01-01 重庆理工大学 一种纤毛振动驱动的微型机器人
KR101452055B1 (ko) * 2012-12-03 2014-10-21 삼성전기주식회사 진동발생장치
US11139426B2 (en) 2015-12-21 2021-10-05 Koninklijke Philips N.V. Actuator device based on an electroactive polymer
JP2017118040A (ja) * 2015-12-25 2017-06-29 日本特殊陶業株式会社 圧電アクチュエータ
CH713460A2 (de) * 2017-02-15 2018-08-15 Digi Sens Ag Schwingsaitensensor und Schwingsaite für einen Schwingsaitensensor.
CN107547005A (zh) * 2017-09-14 2018-01-05 苏州迈客荣自动化技术有限公司 一种新型压电陶瓷致动器
CN110690832B (zh) * 2018-07-06 2021-06-01 成都理想境界科技有限公司 一种压电驱动器、光纤扫描模组和投影设备
US10816016B2 (en) * 2018-10-31 2020-10-27 Seiko Instruments Inc. Thrust expansion device
CN111306400B (zh) * 2019-12-28 2022-02-11 邦瓷电子科技(盐城)有限责任公司 一种压电式管道爬行机器人

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07274559A (ja) * 1994-03-30 1995-10-20 Fanuc Ltd 圧電式リニアアクチュエータ
JPH0880068A (ja) * 1994-09-02 1996-03-22 Nikon Corp 超音波アクチュエータ
JPH10210776A (ja) * 1997-01-27 1998-08-07 Toshiba Corp 回転直動一体型超音波モータ及びそれを内蔵した電子機器
JP2005153110A (ja) * 2003-11-27 2005-06-16 Olympus Corp 静電アクチュエータ
JP4072518B2 (ja) * 2004-06-09 2008-04-09 キヤノン株式会社 振動波駆動装置
JP2007116889A (ja) * 2005-09-22 2007-05-10 Canon Inc インチワーム駆動によるアクチュエータ

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