JP2009017005A - 圧電振動子及びその製造方法 - Google Patents
圧電振動子及びその製造方法 Download PDFInfo
- Publication number
- JP2009017005A JP2009017005A JP2007174051A JP2007174051A JP2009017005A JP 2009017005 A JP2009017005 A JP 2009017005A JP 2007174051 A JP2007174051 A JP 2007174051A JP 2007174051 A JP2007174051 A JP 2007174051A JP 2009017005 A JP2009017005 A JP 2009017005A
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- lid
- piezoelectric vibrator
- film formation
- formation region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 229910052751 metal Inorganic materials 0.000 claims abstract description 136
- 239000002184 metal Substances 0.000 claims abstract description 136
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 70
- 238000005304 joining Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 18
- 238000007789 sealing Methods 0.000 abstract description 5
- 235000014676 Phragmites communis Nutrition 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 description 27
- 239000000463 material Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000005219 brazing Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007174051A JP2009017005A (ja) | 2007-07-02 | 2007-07-02 | 圧電振動子及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007174051A JP2009017005A (ja) | 2007-07-02 | 2007-07-02 | 圧電振動子及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009017005A true JP2009017005A (ja) | 2009-01-22 |
| JP2009017005A5 JP2009017005A5 (cg-RX-API-DMAC10.html) | 2010-08-12 |
Family
ID=40357400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007174051A Withdrawn JP2009017005A (ja) | 2007-07-02 | 2007-07-02 | 圧電振動子及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009017005A (cg-RX-API-DMAC10.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102163962A (zh) * | 2010-02-18 | 2011-08-24 | 精工电子有限公司 | 封装件、封装件的制造方法、压电振动器、振荡器、电子设备及电波钟 |
| JP2013030850A (ja) * | 2011-07-26 | 2013-02-07 | Seiko Epson Corp | 振動デバイスおよび電子機器 |
-
2007
- 2007-07-02 JP JP2007174051A patent/JP2009017005A/ja not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102163962A (zh) * | 2010-02-18 | 2011-08-24 | 精工电子有限公司 | 封装件、封装件的制造方法、压电振动器、振荡器、电子设备及电波钟 |
| JP2013030850A (ja) * | 2011-07-26 | 2013-02-07 | Seiko Epson Corp | 振動デバイスおよび電子機器 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Effective date: 20100630 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100630 |
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| A711 | Notification of change in applicant |
Effective date: 20110729 Free format text: JAPANESE INTERMEDIATE CODE: A712 |
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| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20110729 |
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| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110819 |
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| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20111220 |