JP2008546965A5 - - Google Patents

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Publication number
JP2008546965A5
JP2008546965A5 JP2008518008A JP2008518008A JP2008546965A5 JP 2008546965 A5 JP2008546965 A5 JP 2008546965A5 JP 2008518008 A JP2008518008 A JP 2008518008A JP 2008518008 A JP2008518008 A JP 2008518008A JP 2008546965 A5 JP2008546965 A5 JP 2008546965A5
Authority
JP
Japan
Prior art keywords
constant pressure
guide
pressure bearing
magnetic preload
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008518008A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008546965A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/KR2005/002775 external-priority patent/WO2007024031A1/en
Publication of JP2008546965A publication Critical patent/JP2008546965A/ja
Publication of JP2008546965A5 publication Critical patent/JP2008546965A5/ja
Pending legal-status Critical Current

Links

JP2008518008A 2005-08-23 2005-08-23 磁気予圧及び運動誤差補正機能を有する定圧ベアリング移送装置 Pending JP2008546965A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2005/002775 WO2007024031A1 (en) 2005-08-23 2005-08-23 Static bearing conveying apparatus having magnetically preloading and motional error correcting functions

Publications (2)

Publication Number Publication Date
JP2008546965A JP2008546965A (ja) 2008-12-25
JP2008546965A5 true JP2008546965A5 (enExample) 2011-02-24

Family

ID=37771755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008518008A Pending JP2008546965A (ja) 2005-08-23 2005-08-23 磁気予圧及び運動誤差補正機能を有する定圧ベアリング移送装置

Country Status (4)

Country Link
US (1) US7942099B2 (enExample)
EP (1) EP1917447B1 (enExample)
JP (1) JP2008546965A (enExample)
WO (1) WO2007024031A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007024031A1 (en) * 2005-08-23 2007-03-01 Korea Institute Of Machinery & Materials Static bearing conveying apparatus having magnetically preloading and motional error correcting functions
DE102007057833A1 (de) 2007-11-30 2009-06-04 Etel S.A. Linearführung mit integriertem Linearmotor
KR101318211B1 (ko) * 2011-05-31 2013-10-15 한국기계연구원 5 자유도 운동 오차 보정 기능을 갖는 능동 보정형 스테이지 및 그 운동 오차 보정 방법
DE102012200220A1 (de) * 2011-06-20 2012-12-20 Semilev Gmbh Verfahren zum Kalibrieren eines aktiv magnetgelagerten Roboters
DE102012014812A1 (de) * 2012-07-26 2014-01-30 Etel S.A. Vorrichtung zum Testen von Wafern
GB201701952D0 (en) * 2017-02-06 2017-03-22 Libertine Fpe Ltd Actuator
US10393707B2 (en) * 2017-05-03 2019-08-27 Hiwin Technologies Corp. Method for estimating a variation in preload applied to linear guideway
DE102023127135B3 (de) 2023-10-05 2024-10-10 Jenaer Antriebstechnik Gmbh Lageranordnung, Linearachssystem mit dieser Lageranordnung sowie Anlage mit diesem Linearachssystem
WO2026162253A1 (en) * 2025-01-30 2026-08-06 Asml Netherlands B.V. Actuators with integrated air bearings in a semiconductor manufacturing apparatus

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE630212A (enExample) * 1962-03-28
DE2134425B2 (de) * 1971-07-09 1973-09-27 Krauss-Maffei Ag, 8000 Muenchen Elektromagnetisches Trag und Fuhrungssystem
GB1371143A (en) * 1972-01-24 1974-10-23 Tracked Hovercraft Ltd Ground transportation systems and tracks and vehicles therefor
US3937148A (en) * 1973-01-02 1976-02-10 Cambridge Thermionic Corporation Virtually zero power linear magnetic bearing
DE2446851A1 (de) 1974-10-01 1976-04-08 Messerschmitt Boelkow Blohm Regelanordnung zur dynamischen entkopplung eines schienengebundenen fahrzeuges von seinen schienen, das gegenueber seinen schienen mit hilfe von magnetenin einem abstand gefuehrt ist
FR2488353A1 (fr) * 1980-08-07 1982-02-12 Cermo Dispositif hydrostatique de support
JPS6018918A (ja) * 1983-07-13 1985-01-31 Canon Inc ステージ装置
DE3578860D1 (de) * 1984-10-23 1990-08-30 Toshiba Kawasaki Kk Transportsystem vom typ mit schwebendem traeger.
JPH0571536A (ja) * 1991-09-11 1993-03-23 Canon Inc 静圧軸受装置
US5360470A (en) * 1992-07-06 1994-11-01 Fujitsu Limited Magnetic levitating transporting apparatus with a movable magnetic unit
JPH0678413A (ja) * 1992-07-06 1994-03-18 Fujitsu Ltd 磁気浮上搬送装置
JP3209844B2 (ja) * 1993-11-22 2001-09-17 富士通株式会社 磁気浮上搬送装置
EP0648698B1 (en) * 1992-07-07 1998-01-07 Ebara Corporation Magnetically levitated carrying apparatus
US5732636A (en) * 1996-06-05 1998-03-31 National Science Council Magnetic levitation system
US6267876B1 (en) * 1998-07-31 2001-07-31 Trinity Flywheel Power Control of magnetic bearing-supported rotors
DE102004004020A1 (de) * 2004-01-20 2005-08-11 Index-Werke Gmbh & Co. Kg Hahn & Tessky Werkzeugmaschine
KR100827738B1 (ko) * 2004-12-20 2008-05-07 고쿠리츠 다이가쿠 호진 큐슈 코교 다이가쿠 초전도 자기 부상에 의한 비접촉 반송 장치
WO2007024031A1 (en) * 2005-08-23 2007-03-01 Korea Institute Of Machinery & Materials Static bearing conveying apparatus having magnetically preloading and motional error correcting functions

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