JP2008540831A5 - - Google Patents

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Publication number
JP2008540831A5
JP2008540831A5 JP2008510191A JP2008510191A JP2008540831A5 JP 2008540831 A5 JP2008540831 A5 JP 2008540831A5 JP 2008510191 A JP2008510191 A JP 2008510191A JP 2008510191 A JP2008510191 A JP 2008510191A JP 2008540831 A5 JP2008540831 A5 JP 2008540831A5
Authority
JP
Japan
Prior art keywords
orifice
powdered
chamber
granular material
piston
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008510191A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008540831A (ja
JP5032466B2 (ja
Filing date
Publication date
Priority claimed from US11/120,330 external-priority patent/US7213347B2/en
Application filed filed Critical
Publication of JP2008540831A publication Critical patent/JP2008540831A/ja
Publication of JP2008540831A5 publication Critical patent/JP2008540831A5/ja
Application granted granted Critical
Publication of JP5032466B2 publication Critical patent/JP5032466B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2008510191A 2005-05-03 2006-05-03 素早い気化を促進するための材料の計量供給 Expired - Lifetime JP5032466B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/120,330 2005-05-03
US11/120,330 US7213347B2 (en) 2005-05-03 2005-05-03 Metering material to promote rapid vaporization
PCT/US2006/017095 WO2006119403A2 (en) 2005-05-03 2006-05-03 Metering material to promote rapid vaporization

Publications (3)

Publication Number Publication Date
JP2008540831A JP2008540831A (ja) 2008-11-20
JP2008540831A5 true JP2008540831A5 (https=) 2009-04-30
JP5032466B2 JP5032466B2 (ja) 2012-09-26

Family

ID=37075866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008510191A Expired - Lifetime JP5032466B2 (ja) 2005-05-03 2006-05-03 素早い気化を促進するための材料の計量供給

Country Status (4)

Country Link
US (1) US7213347B2 (https=)
EP (1) EP1877596B1 (https=)
JP (1) JP5032466B2 (https=)
WO (1) WO2006119403A2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7625602B2 (en) 2005-05-03 2009-12-01 Eastman Kodak Company Controllably feeding powdered or granular material
US7877895B2 (en) 2006-06-26 2011-02-01 Tokyo Electron Limited Substrate processing apparatus
JP4974832B2 (ja) * 2007-09-10 2012-07-11 株式会社アルバック 蒸着源、蒸着装置
JP4996452B2 (ja) * 2007-12-28 2012-08-08 株式会社アルバック 成膜源、成膜装置
JP4974877B2 (ja) * 2007-12-28 2012-07-11 株式会社アルバック 成膜源、成膜装置
WO2010098308A1 (ja) * 2009-02-24 2010-09-02 株式会社アルバック 有機化合物蒸気発生装置及び有機薄膜製造装置
CN106967951B (zh) * 2017-03-28 2019-06-04 信利半导体有限公司 一种成膜装置、成膜方法及成膜源

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2447789A (en) * 1945-03-23 1948-08-24 Polaroid Corp Evaporating crucible for coating apparatus
GB1122577A (en) 1965-11-16 1968-08-07 Hermsdorf Keramik Veb Method of and devices for the vaporisation of materials
US4249674A (en) * 1979-08-10 1981-02-10 Antenore Ronald L Dry product dispenser
US4885211A (en) * 1987-02-11 1989-12-05 Eastman Kodak Company Electroluminescent device with improved cathode
US4769292A (en) * 1987-03-02 1988-09-06 Eastman Kodak Company Electroluminescent device with modified thin film luminescent zone
FR2660670B1 (fr) * 1990-04-06 1992-10-30 Clausse Georges Dispositif pour effectuer en continu l'evaporation sous vide d'un melange de metaux pulverulents.
JPH07258828A (ja) * 1994-03-24 1995-10-09 Matsushita Electric Works Ltd 膜形成方法
JPH08212547A (ja) * 1995-02-02 1996-08-20 Kao Corp 磁気記録媒体の製造装置
JP3586551B2 (ja) * 1998-01-27 2004-11-10 松下電器産業株式会社 光記録媒体の製造方法及び製造装置
US5945163A (en) 1998-02-19 1999-08-31 First Solar, Llc Apparatus and method for depositing a material on a substrate
US6037241A (en) * 1998-02-19 2000-03-14 First Solar, Llc Apparatus and method for depositing a semiconductor material
DE19852326A1 (de) * 1998-11-12 1999-11-18 Siemens Ag Verfahren zum Herstellen eines mit einem dotierten Leuchtstoff beschichteten Substrats sowie Vorrichtung zum Bedampfen eines Substrats mit einem Beschichtungsstoff
US20030051728A1 (en) * 2001-06-05 2003-03-20 Lloyd Peter M. Method and device for delivering a physiologically active compound
US7090830B2 (en) * 2001-05-24 2006-08-15 Alexza Pharmaceuticals, Inc. Drug condensation aerosols and kits
GB0229003D0 (en) * 2002-12-12 2003-01-15 Int Coatings Ltd Powder coating process
US7501152B2 (en) * 2004-09-21 2009-03-10 Eastman Kodak Company Delivering particulate material to a vaporization zone
US7398605B2 (en) 2005-02-04 2008-07-15 Eastman Kodak Company Method of feeding particulate material to a heated vaporization surface
US7165340B2 (en) * 2005-02-04 2007-01-23 Eastman Kodak Company Feeding organic material to a heated surface
US7625601B2 (en) * 2005-02-04 2009-12-01 Eastman Kodak Company Controllably feeding organic material in making OLEDs

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