JP2008520933A5 - - Google Patents
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- Publication number
- JP2008520933A5 JP2008520933A5 JP2007543283A JP2007543283A JP2008520933A5 JP 2008520933 A5 JP2008520933 A5 JP 2008520933A5 JP 2007543283 A JP2007543283 A JP 2007543283A JP 2007543283 A JP2007543283 A JP 2007543283A JP 2008520933 A5 JP2008520933 A5 JP 2008520933A5
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- fluid outlet
- deformation element
- fixed
- central portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 25
- 238000005452 bending Methods 0.000 claims 5
- 239000000463 material Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 238000007789 sealing Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 2
Claims (3)
- 加圧流体を制御するノーマリークローズ型流体マイクロバルブであって：
（ａ）基板に形成され且つ流体流出口を有するチャンバ；
（ｂ）前記基板によって支持された対向する固定端；
（ｃ）前記対向する固定端に取り付けられた変形要素であり、前記流体流出口を封止可能な中心部分を有し、低い熱膨張係数を有する第１の材料から成る第１の層と高い熱膨張係数を有する第２の材料から成る第２の層とを含む平面状の積層体として構築され、前記固定端に隣接する固定部分と該固定部分間の中心部分とを有し、前記固定部分の曲げ剛性が前記中心部分の曲げ剛性より実質的に低い、変形要素；及び
（ｄ）前記変形要素に急激な温度上昇を生じさせ、前記変形要素を前記流体流出口から離れる方向に屈曲させ、前記加圧流体が前記流体流出口を通って流れることができるように前記流体流出口を開かせ、その後、前記変形要素の温度が低下したときに前記流体流出口が封止されるように、前記変形要素に加熱パルスを印加するように適応された部材、
を有するノーマリークローズ型流体マイクロバルブ。 - 加圧流体を制御するノーマリーオープン型流体マイクロバルブであって：
（ａ）基板に形成され且つ流体流出口を有するチャンバ；
（ｂ）前記基板によって支持され、中心面を定める対向する固定端；
（ｃ）前記対向する固定端に取り付けられた変形要素であり、流体流出口に近接する中心部分を有することで前記加圧流体の前記流体流出口を通じての流れを可能にし、低い熱膨張係数を有する第１の材料から成る第１の層と高い熱膨張係数を有する第２の材料から成る第２の層とを含む平面状の積層体として構築され、前記固定端に隣接する固定部分と該固定部分間の中心部分とを有し、前記固定部分の曲げ剛性が前記中心部分の曲げ剛性より実質的に低い、変形要素；及び
（ｄ）前記変形要素に急激な温度上昇を生じさせ、前記変形要素を前記流体流出口の方に屈曲させて、前記流体流出口に接触させ且つそれを封止させることにより前記流体流出口を通じての流れを停止させ、その後、前記変形要素の温度が低下したときに前記流体流出口が緩められて開かれるように、前記変形要素に加熱パルスを印加するように適応された部材、
を有するノーマリーオープン型流体マイクロバルブ。 - 前記変形要素の前記中心部分に前記流体流出口に向かい合わせで接合されたバルブ封止材を更に有し、前記バルブ封止材は前記加熱パルスの印加後に前記流体流出口に押し当てられて前記加圧流体に対する封止を形成する、請求項１７に記載のノーマリーオープン型流体マイクロバルブ。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/994,686 US7188931B2 (en) | 2004-11-22 | 2004-11-22 | Doubly-anchored thermal actuator having varying flexural rigidity |
| PCT/US2005/041866 WO2006057909A1 (en) | 2004-11-22 | 2005-11-18 | Doubly-anchored thermal actuator having varying flexural rigidity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008520933A JP2008520933A (ja) | 2008-06-19 |
| JP2008520933A5 true JP2008520933A5 (ja) | 2008-12-18 |
Family
ID=36090766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007543283A Pending JP2008520933A (ja) | 2004-11-22 | 2005-11-18 | 変化する曲げ剛性を有する二点固定型熱アクチュエータ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7188931B2 (ja) |
| EP (1) | EP1814741B1 (ja) |
| JP (1) | JP2008520933A (ja) |
| WO (1) | WO2006057909A1 (ja) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7913928B2 (en) * | 2005-11-04 | 2011-03-29 | Alliant Techsystems Inc. | Adaptive structures, systems incorporating same and related methods |
| KR20080040240A (ko) * | 2006-11-02 | 2008-05-08 | 삼성전자주식회사 | 열구동 방식의 잉크젯 프린트헤드 |
| DE102009049445A1 (de) * | 2009-10-14 | 2011-05-26 | Michael Borchardt | Kontaktfreies emissionsinduziertes Mikroventil |
| US8322825B2 (en) | 2010-10-26 | 2012-12-04 | Eastman Kodak Company | Dispenser including overlapping outlet and return port |
| WO2012058019A1 (en) | 2010-10-26 | 2012-05-03 | Eastman Kodak Company | Liquid dispenser including filter in return port |
| EP2632727B1 (en) | 2010-10-26 | 2015-08-05 | Eastman Kodak Company | Dispenser including array of liquid dispensing elements |
| WO2012058035A1 (en) | 2010-10-26 | 2012-05-03 | Eastman Kodak Company | Liquid dispenser including secondary liquid manifold |
| EP2632726B1 (en) | 2010-10-26 | 2015-07-01 | Eastman Kodak Company | Liquid dispenser including sloped outlet opening wall |
| US20120098888A1 (en) | 2010-10-26 | 2012-04-26 | Yonglin Xie | Liquid dispenser including curved outlet opening wall |
| US8573743B2 (en) | 2010-10-26 | 2013-11-05 | Eastman Kodak Company | Liquid dispenser including curved vent |
| WO2012058020A1 (en) | 2010-10-26 | 2012-05-03 | Eastman Kodak Company | Liquid dispenser including multiple liquid return passages |
| WO2012145166A1 (en) * | 2011-04-19 | 2012-10-26 | Eastman Kodak Company | Flow-through ejection system including compliant membrane transducer |
| US8864287B2 (en) * | 2011-04-19 | 2014-10-21 | Eastman Kodak Company | Fluid ejection using MEMS composite transducer |
| US8602531B2 (en) * | 2011-04-19 | 2013-12-10 | Eastman Kodak Company | Flow-through ejection system including compliant membrane transducer |
| US11001494B2 (en) | 2011-06-23 | 2021-05-11 | Duality Reality Energy, LLC | Multi-zone microstructure spring |
| US9085454B2 (en) | 2011-07-05 | 2015-07-21 | Duality Reality Energy, LLC | Reduced stiffness micro-mechanical structure |
| US9076961B2 (en) | 2012-01-31 | 2015-07-07 | Duality Reality Energy, LLC | Energy harvesting with a micro-electro-machanical system (MEMS) |
| US8783804B2 (en) | 2012-03-28 | 2014-07-22 | Eastman Kodak Company | Functional liquid deposition using continuous liquid dispenser |
| US8770722B2 (en) | 2012-03-28 | 2014-07-08 | Eastman Kodak Company | Functional liquid deposition using continuous liquid |
| US8684500B2 (en) * | 2012-08-06 | 2014-04-01 | Xerox Corporation | Diaphragm for an electrostatic actuator in an ink jet printer |
| GB2534239B (en) * | 2015-03-26 | 2017-04-19 | Solar Fluidics Pte Ltd | Solar energy system |
| US20170261734A1 (en) * | 2016-03-10 | 2017-09-14 | Tokitae Llc | Thermal expansion actuators, microscopes including the same, and related methods |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3946398A (en) * | 1970-06-29 | 1976-03-23 | Silonics, Inc. | Method and apparatus for recording with writing fluids and drop projection means therefor |
| SE349676B (ja) * | 1971-01-11 | 1972-10-02 | N Stemme | |
| US4296421A (en) * | 1978-10-26 | 1981-10-20 | Canon Kabushiki Kaisha | Ink jet recording device using thermal propulsion and mechanical pressure changes |
| WO1993022140A1 (en) * | 1992-04-23 | 1993-11-11 | Seiko Epson Corporation | Liquid jet head and production thereof |
| JPH07285221A (ja) * | 1994-04-19 | 1995-10-31 | Sharp Corp | インクジェットヘッド |
| US5599695A (en) * | 1995-02-27 | 1997-02-04 | Affymetrix, Inc. | Printing molecular library arrays using deprotection agents solely in the vapor phase |
| DE69624282T2 (de) * | 1995-04-19 | 2003-07-03 | Seiko Epson Corp | Tintenstrahlaufzeichnungskopf und Verfahren zu dessen Herstellung |
| JP3257340B2 (ja) * | 1995-05-24 | 2002-02-18 | 松下電器産業株式会社 | 液体塗布方法、液体塗布装置およびスリットノズル |
| SE9503141D0 (sv) * | 1995-09-12 | 1995-09-12 | Siemens Elema Ab | Narkosapparat |
| DE69733125T2 (de) * | 1996-02-10 | 2006-03-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bistabiler microantrieb mit gekoppelten membranen |
| US5785295A (en) * | 1996-08-27 | 1998-07-28 | Industrial Technology Research Institute | Thermally buckling control microvalve |
| JPH10318385A (ja) * | 1997-05-21 | 1998-12-04 | Hitachi Metals Ltd | 金属ダイアフラム式流量調節弁 |
| US6180427B1 (en) * | 1997-07-15 | 2001-01-30 | Silverbrook Research Pty. Ltd. | Method of manufacture of a thermally actuated ink jet including a tapered heater element |
| US6254793B1 (en) * | 1997-07-15 | 2001-07-03 | Silverbrook Research Pty Ltd | Method of manufacture of high Young's modulus thermoelastic inkjet printer |
| US6087638A (en) * | 1997-07-15 | 2000-07-11 | Silverbrook Research Pty Ltd | Corrugated MEMS heater structure |
| AUPO794797A0 (en) * | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | A device (MEMS07) |
| AUPO807497A0 (en) * | 1997-07-15 | 1997-08-07 | Silverbrook Research Pty Ltd | A method of manufacture of an image creation apparatus (IJM23) |
| JP2000266223A (ja) * | 1999-03-15 | 2000-09-26 | Matsushita Electric Works Ltd | 半導体マイクロバルブ |
| US6481821B1 (en) * | 1999-07-13 | 2002-11-19 | Samsung Electronics Co., Ltd. | Actuator for ink jet printer head using shape memory alloy |
| US6561627B2 (en) * | 2000-11-30 | 2003-05-13 | Eastman Kodak Company | Thermal actuator |
| US6631979B2 (en) * | 2002-01-17 | 2003-10-14 | Eastman Kodak Company | Thermal actuator with optimized heater length |
| US6869169B2 (en) | 2002-05-15 | 2005-03-22 | Eastman Kodak Company | Snap-through thermal actuator |
| US6598960B1 (en) * | 2002-05-23 | 2003-07-29 | Eastman Kodak Company | Multi-layer thermal actuator with optimized heater length and method of operating same |
-
2004
- 2004-11-22 US US10/994,686 patent/US7188931B2/en not_active Expired - Fee Related
-
2005
- 2005-11-18 WO PCT/US2005/041866 patent/WO2006057909A1/en active Application Filing
- 2005-11-18 EP EP05851818A patent/EP1814741B1/en not_active Expired - Fee Related
- 2005-11-18 JP JP2007543283A patent/JP2008520933A/ja active Pending
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