JP2008519982A - 質量流量センサ用レイノルズ数補正関数 - Google Patents
質量流量センサ用レイノルズ数補正関数 Download PDFInfo
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- 239000007789 gas Substances 0.000 claims abstract description 155
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 14
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- 238000010438 heat treatment Methods 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000004088 simulation Methods 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 230000008859 change Effects 0.000 description 7
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- 238000005259 measurement Methods 0.000 description 3
- 238000012512 characterization method Methods 0.000 description 2
- 238000004134 energy conservation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
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- 238000013461 design Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
- G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
- G01F15/046—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means involving digital counting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
- G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
- G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Details Of Flowmeters (AREA)
- Flow Control (AREA)
Abstract
Description
2 出口
10 質量流量センサ
18 主導管
18a 上流部分
18b 下流部分
24 プロセッサ
100 制御アルゴリズム
MFC 質量流量制御装置
Claims (15)
- 流量センサにおいて、
前記センサを通る流れを分割するセンサチューブ及びバイパスチューブであって、前記センサのバイパス比は、前記センサを通る総流量を前記センサチューブのみを通る流量で除した値に等しい、センサチューブ及びバイパスチューブと、
前記センサチューブの上流部分及び下流部分を加熱するためのヒーター要素と、
前記ヒーター要素間の抵抗の差に基づいて電圧を発生するため、前記ヒーターに接続されており、前記センサを通る基準ガスの既知の流量に基づいて前記電圧を較正する、回路と、
前記回路に接続されたプロセッサであって、
前記センサを通る流量を、前記回路からの較正済みの電圧に基づいて計測し、
前記計測済みの流量に多ガス補正関数及びレイノルズ数補正関数を乗じ、基準ガス及び被計測ガスのバイパス比の差を補償するようにプログラムされた、プロセッサとを含む、センサ。 - 請求項1に記載のセンサにおいて、
前記回路は、ホイートストンブリッジを含む要素に接続されている、センサ。 - 請求項1に記載の流量センサを含む質量流量制御装置において、更に、
前記バイパスチューブ及び前記センサチューブに連結された主導管と、該主導管を通る質量流量を制御するためのバルブとを含む、質量流量制御装置。 - 請求項4に記載のセンサにおいて、
前記レイノルズ数に対するバイパス比誤差曲線の前記多項係数は、実験的に得られる、センサ。 - 請求項1に記載のセンサにおいて、
前記バイパスチューブは、1000sccm又はそれ以上の流量を可能にする大きさを備えている、センサ。 - ガスの流量を計測する方法において、
流れをバイパスチューブとセンサチューブとの間で分割する工程であって、バイパス比は、センサを通る総流量を前記センサチューブのみを通る流量で除した値に等しい、工程と、
ヒーター要素を使用して前記センサチューブの上流部分及び下流部分を加熱する工程と、
前記ヒーター要素間の抵抗の差を計測する工程であって、基準ガスの既知の流量に基づいて前記抵抗を較正する工程と、
前記センサチューブ及び前記バイパスチューブを通る流量を、前記ヒーター要素からの較正済みの抵抗に基づいて計測する工程と、
計測した流量に多ガス補正関数及びレイノルズ数補正関数を乗じ、前記基準ガス及び被計測ガスのバイパス比の差を補償する工程とを含む、方法。 - 請求項8に記載の方法において、
前記レイノルズ数に対するバイパス比誤差曲線の前記多項係数は、実験的に得られる、方法。 - 請求項7に記載の方法において、
前記抵抗は、前記センサチューブを通る流れを示す電圧を提供するため、ホイートストンブリッジを使用して計測される、方法。 - 請求項7に記載の方法において、
前記主導管は、1000sccm又はそれ以上の流量を可能にする大きさを備えている、方法。 - 質量流量を制御するための方法において、
上流部分及び下流部分を持つ主導管を提供する工程と、
前記主導管の前記上流部分を、前記主導管の前記下流部分に、センサチューブ及びバイパスチューブを通して連結する工程であって、前記主導管を通る流れは、前記センサチューブ及び前記バイパスチューブに分割され、バイパス比は、前記センサを通る総流量を前記センサチューブのみを通る流量で除した値に等しい、工程と、
前記センサチューブの前記上流部分及び前記下流部分を、ヒーター要素を使用して加熱する工程と、
前記ヒーター要素間の抵抗の差を計測する工程であって、前記抵抗は、基準ガスの既知の流量に基づいて較正される、工程と、
前記主導管を通る流量を、前記ヒーター要素からの較正済みの抵抗に基づいて計測する工程と、
計測した流量に多ガス補正関数及びレイノルズ数補正関数を乗じ、前記基準ガス及び被計測ガスのバイパス比の差を補償する工程と、
前記主導管を通る質量流量を制御する工程と、
所望の流量を受け取る工程と、
前記所望の流量を、前記主導管を通る、前記レイノルズ数で補正した流量と比較する工程と、
前記レイノルズ数で補正した流量が、前記主導管を通る前記所望の流量と等しくなるまで、前記主導管を通る質量流量を変化する工程とを含む、方法。 - 請求項13に記載の方法において、
レイノルズ数に対するバイパス比誤差曲線の多項係数は、実験的に得られる、方法。 - 請求項12に記載の方法において、
前記主導管は、1000sccm又はそれ以上の流量を可能にする大きさを備えている、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/987,719 US7000463B1 (en) | 2004-11-12 | 2004-11-12 | Reynolds number correction function for mass flow rate sensor |
US10/987,719 | 2004-11-12 | ||
PCT/US2005/040280 WO2006055314A2 (en) | 2004-11-12 | 2005-11-07 | Reynolds number correction function for mass flow rate sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008519982A true JP2008519982A (ja) | 2008-06-12 |
JP4944037B2 JP4944037B2 (ja) | 2012-05-30 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007541266A Active JP4944037B2 (ja) | 2004-11-12 | 2005-11-07 | 質量流量センサ用レイノルズ数補正関数 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7000463B1 (ja) |
JP (1) | JP4944037B2 (ja) |
KR (1) | KR101318670B1 (ja) |
DE (1) | DE112005002773B4 (ja) |
GB (1) | GB2434208B (ja) |
TW (1) | TWI404920B (ja) |
WO (1) | WO2006055314A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010091320A (ja) * | 2008-10-06 | 2010-04-22 | Horiba Stec Co Ltd | 質量流量計及びマスフローコントローラ |
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US7302843B2 (en) * | 2005-07-19 | 2007-12-04 | C & L Performance, Inc. | Mass air flow housing for mass air flow sensor |
WO2008030454A2 (en) * | 2006-09-05 | 2008-03-13 | Celerity, Inc. | Multi-gas flow device |
EP1959242A3 (en) * | 2007-02-19 | 2009-01-07 | Yamatake Corporation | Flowmeter and flow control device |
US7651263B2 (en) * | 2007-03-01 | 2010-01-26 | Advanced Energy Industries, Inc. | Method and apparatus for measuring the temperature of a gas in a mass flow controller |
US7826986B2 (en) * | 2008-09-26 | 2010-11-02 | Advanced Energy Industries, Inc. | Method and system for operating a mass flow controller |
CA2739100C (en) * | 2008-10-08 | 2018-05-22 | Expro Meters, Inc. | Viscous fluid flow measurement using a differential pressure measurement and a sonar measured velocity |
JP5808537B2 (ja) * | 2009-10-01 | 2015-11-10 | 株式会社堀場エステック | 流量測定機構及びマスフローコントローラ |
DE102011051931A1 (de) | 2011-07-19 | 2013-01-24 | Aixtron Se | Vorrichtung und Verfahren zum Bestimmen des Dampfdrucks eines in einem Trägergasstrom verdampften Ausgangsstoffes |
KR101199105B1 (ko) * | 2012-05-30 | 2012-11-08 | 윤정중 | 기체유량측정 프로그램 및 기체유량측정방법 |
KR101404385B1 (ko) * | 2012-09-03 | 2014-06-09 | 윤정중 | 조임기구 기체유량계 프로그램 및 유량측정방법 및 이를 이용한 유량측정장치 |
CN104713606B (zh) * | 2015-03-12 | 2018-11-30 | 新奥科技发展有限公司 | 多组分气体的流量测量方法及装置 |
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USD866375S1 (en) | 2017-08-02 | 2019-11-12 | Buoy Labs, Inc. | Water flow monitoring device |
US11781895B2 (en) | 2018-02-23 | 2023-10-10 | Buoy Labs, Inc. | Fluid flow analysis and management |
US10982985B2 (en) * | 2019-03-04 | 2021-04-20 | Hitachi Metals, Ltd. | High flow tubular bypass |
DE102019113539B9 (de) | 2019-05-21 | 2021-12-02 | Tdk Corporation | Verfahren und Vorrichtung zum Betreiben eines Multigassensors |
DE102021202464B3 (de) * | 2021-03-15 | 2022-09-08 | Rota Yokogawa Gmbh & Co Kg | Verfahren zur kompensation des einflusses der reynolds-zahl auf die messung eines coriolis-massendurchflussmessgeräts und derartiges gerät |
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-
2004
- 2004-11-12 US US10/987,719 patent/US7000463B1/en active Active
-
2005
- 2005-11-07 WO PCT/US2005/040280 patent/WO2006055314A2/en active Application Filing
- 2005-11-07 KR KR1020077013080A patent/KR101318670B1/ko active IP Right Grant
- 2005-11-07 GB GB0708927A patent/GB2434208B/en active Active
- 2005-11-07 DE DE112005002773.2T patent/DE112005002773B4/de active Active
- 2005-11-07 JP JP2007541266A patent/JP4944037B2/ja active Active
- 2005-11-11 TW TW094139573A patent/TWI404920B/zh active
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2010091320A (ja) * | 2008-10-06 | 2010-04-22 | Horiba Stec Co Ltd | 質量流量計及びマスフローコントローラ |
JP4705140B2 (ja) * | 2008-10-06 | 2011-06-22 | 株式会社堀場エステック | 質量流量計及びマスフローコントローラ |
Also Published As
Publication number | Publication date |
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GB2434208B (en) | 2009-05-06 |
KR101318670B1 (ko) | 2013-10-16 |
WO2006055314A2 (en) | 2006-05-26 |
GB0708927D0 (en) | 2007-06-20 |
US7000463B1 (en) | 2006-02-21 |
WO2006055314A3 (en) | 2006-08-10 |
DE112005002773T5 (de) | 2007-10-31 |
KR20070067739A (ko) | 2007-06-28 |
DE112005002773B4 (de) | 2021-07-22 |
JP4944037B2 (ja) | 2012-05-30 |
GB2434208A (en) | 2007-07-18 |
TW200632289A (en) | 2006-09-16 |
TWI404920B (zh) | 2013-08-11 |
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