JP2008516447A5 - - Google Patents

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Publication number
JP2008516447A5
JP2008516447A5 JP2007535669A JP2007535669A JP2008516447A5 JP 2008516447 A5 JP2008516447 A5 JP 2008516447A5 JP 2007535669 A JP2007535669 A JP 2007535669A JP 2007535669 A JP2007535669 A JP 2007535669A JP 2008516447 A5 JP2008516447 A5 JP 2008516447A5
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JP
Japan
Prior art keywords
metrology
available
sampling rate
capacity
tools
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007535669A
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English (en)
Japanese (ja)
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JP2008516447A (ja
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Publication date
Priority claimed from US10/958,891 external-priority patent/US7076321B2/en
Application filed filed Critical
Publication of JP2008516447A publication Critical patent/JP2008516447A/ja
Publication of JP2008516447A5 publication Critical patent/JP2008516447A5/ja
Pending legal-status Critical Current

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JP2007535669A 2004-10-05 2005-06-23 利用可能なメトロロジーキャパシティに基づいてメトロロジーサンプリングを動的に調整する方法およびシステム Pending JP2008516447A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/958,891 US7076321B2 (en) 2004-10-05 2004-10-05 Method and system for dynamically adjusting metrology sampling based upon available metrology capacity
PCT/US2005/022424 WO2006041543A1 (en) 2004-10-05 2005-06-23 Method and system for dynamically adjusting metrology sampling based upon available metrology capacity

Publications (2)

Publication Number Publication Date
JP2008516447A JP2008516447A (ja) 2008-05-15
JP2008516447A5 true JP2008516447A5 (enExample) 2008-08-14

Family

ID=34979412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007535669A Pending JP2008516447A (ja) 2004-10-05 2005-06-23 利用可能なメトロロジーキャパシティに基づいてメトロロジーサンプリングを動的に調整する方法およびシステム

Country Status (8)

Country Link
US (1) US7076321B2 (enExample)
JP (1) JP2008516447A (enExample)
KR (1) KR20070061868A (enExample)
CN (1) CN101032013B (enExample)
DE (1) DE112005002474B4 (enExample)
GB (1) GB2434882B (enExample)
TW (1) TWI369749B (enExample)
WO (1) WO2006041543A1 (enExample)

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US9760020B2 (en) 2012-11-21 2017-09-12 Kla-Tencor Corporation In-situ metrology
US10133263B1 (en) 2014-08-18 2018-11-20 Kla-Tencor Corporation Process condition based dynamic defect inspection
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US10754260B2 (en) 2015-06-18 2020-08-25 Kla-Tencor Corporation Method and system for process control with flexible sampling
KR102351636B1 (ko) * 2015-09-21 2022-01-13 케이엘에이 코포레이션 유연적 샘플링을 이용한 공정 제어 방법 및 시스템
US10884342B2 (en) 2015-11-11 2021-01-05 Asml Netherlands B.V. Method and apparatus for predicting performance of a metrology system
CN108931336A (zh) * 2017-05-23 2018-12-04 北京航天计量测试技术研究所 一种高稳定性压力控制算法
KR101995112B1 (ko) * 2017-06-14 2019-09-30 에스케이 주식회사 장비신뢰지수에 기초한 Lot 리스크 스코어 기반의 동적 Lot 계측 제어방법 및 시스템
CN115083936B (zh) * 2021-03-10 2025-01-10 长鑫存储技术有限公司 采样量测方法、系统、计算机设备及存储介质
US12000882B2 (en) 2021-03-10 2024-06-04 Changxin Memory Technologies, Inc. Sampling measurement method, system, computer device and storage medium

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