KR20070061868A - 이용가능한 계측 용량에 기반하여 계측 샘플링을 동적으로조정하는 방법 및 시스템 - Google Patents

이용가능한 계측 용량에 기반하여 계측 샘플링을 동적으로조정하는 방법 및 시스템 Download PDF

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Publication number
KR20070061868A
KR20070061868A KR1020077008344A KR20077008344A KR20070061868A KR 20070061868 A KR20070061868 A KR 20070061868A KR 1020077008344 A KR1020077008344 A KR 1020077008344A KR 20077008344 A KR20077008344 A KR 20077008344A KR 20070061868 A KR20070061868 A KR 20070061868A
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South Korea
Prior art keywords
metrology
available
tools
sampling rate
new
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Ceased
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KR1020077008344A
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English (en)
Korean (ko)
Inventor
매튜 에이. 퍼디
Original Assignee
어드밴스드 마이크로 디바이시즈, 인코포레이티드
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Application filed by 어드밴스드 마이크로 디바이시즈, 인코포레이티드 filed Critical 어드밴스드 마이크로 디바이시즈, 인코포레이티드
Publication of KR20070061868A publication Critical patent/KR20070061868A/ko
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • General Factory Administration (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
KR1020077008344A 2004-10-05 2005-06-23 이용가능한 계측 용량에 기반하여 계측 샘플링을 동적으로조정하는 방법 및 시스템 Ceased KR20070061868A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/958,891 2004-10-05
US10/958,891 US7076321B2 (en) 2004-10-05 2004-10-05 Method and system for dynamically adjusting metrology sampling based upon available metrology capacity

Publications (1)

Publication Number Publication Date
KR20070061868A true KR20070061868A (ko) 2007-06-14

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KR1020077008344A Ceased KR20070061868A (ko) 2004-10-05 2005-06-23 이용가능한 계측 용량에 기반하여 계측 샘플링을 동적으로조정하는 방법 및 시스템

Country Status (8)

Country Link
US (1) US7076321B2 (enExample)
JP (1) JP2008516447A (enExample)
KR (1) KR20070061868A (enExample)
CN (1) CN101032013B (enExample)
DE (1) DE112005002474B4 (enExample)
GB (1) GB2434882B (enExample)
TW (1) TWI369749B (enExample)
WO (1) WO2006041543A1 (enExample)

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KR20160140474A (ko) * 2015-05-27 2016-12-07 내셔날 쳉쿵 유니버시티 샘플링 비율 결정 기법에 의한 계측 샘플링 방법 및 그 컴퓨터 프로그램 제품

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DE102012200066B4 (de) * 2012-01-03 2020-09-03 Endress + Hauser Process Solutions Ag Verfahren und Einrichtung zur Visualisierung von Informationen in einer Prozessanlage
US9816370B2 (en) * 2012-09-19 2017-11-14 Honeywell International Inc. System and method for optimizing an operation of a sensor used with wellbore equipment
CN102945030B (zh) * 2012-11-02 2015-04-01 上海华力微电子有限公司 一种有效控制晶圆生产过程中生产周期失控的方法
US9760020B2 (en) 2012-11-21 2017-09-12 Kla-Tencor Corporation In-situ metrology
US10133263B1 (en) 2014-08-18 2018-11-20 Kla-Tencor Corporation Process condition based dynamic defect inspection
US10754260B2 (en) 2015-06-18 2020-08-25 Kla-Tencor Corporation Method and system for process control with flexible sampling
KR102351636B1 (ko) * 2015-09-21 2022-01-13 케이엘에이 코포레이션 유연적 샘플링을 이용한 공정 제어 방법 및 시스템
US10884342B2 (en) 2015-11-11 2021-01-05 Asml Netherlands B.V. Method and apparatus for predicting performance of a metrology system
CN108931336A (zh) * 2017-05-23 2018-12-04 北京航天计量测试技术研究所 一种高稳定性压力控制算法
KR101995112B1 (ko) * 2017-06-14 2019-09-30 에스케이 주식회사 장비신뢰지수에 기초한 Lot 리스크 스코어 기반의 동적 Lot 계측 제어방법 및 시스템
CN115083936B (zh) * 2021-03-10 2025-01-10 长鑫存储技术有限公司 采样量测方法、系统、计算机设备及存储介质
US12000882B2 (en) 2021-03-10 2024-06-04 Changxin Memory Technologies, Inc. Sampling measurement method, system, computer device and storage medium

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160140474A (ko) * 2015-05-27 2016-12-07 내셔날 쳉쿵 유니버시티 샘플링 비율 결정 기법에 의한 계측 샘플링 방법 및 그 컴퓨터 프로그램 제품

Also Published As

Publication number Publication date
DE112005002474T5 (de) 2007-09-06
DE112005002474B4 (de) 2017-02-09
GB2434882A (en) 2007-08-08
CN101032013B (zh) 2011-07-06
TW200623300A (en) 2006-07-01
GB2434882B (en) 2009-01-21
JP2008516447A (ja) 2008-05-15
US20060074503A1 (en) 2006-04-06
GB0705693D0 (en) 2007-05-02
TWI369749B (en) 2012-08-01
US7076321B2 (en) 2006-07-11
WO2006041543A1 (en) 2006-04-20
CN101032013A (zh) 2007-09-05

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