JP2008510139A - 漏液検出方法およびシステム - Google Patents
漏液検出方法およびシステム Download PDFInfo
- Publication number
- JP2008510139A JP2008510139A JP2007525622A JP2007525622A JP2008510139A JP 2008510139 A JP2008510139 A JP 2008510139A JP 2007525622 A JP2007525622 A JP 2007525622A JP 2007525622 A JP2007525622 A JP 2007525622A JP 2008510139 A JP2008510139 A JP 2008510139A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- controller
- conductor
- sensor
- analog
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 53
- 239000004020 conductor Substances 0.000 claims abstract description 80
- 239000007788 liquid Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims description 9
- 230000003213 activating effect Effects 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000003317 industrial substance Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
- G01M3/165—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means by means of cables or similar elongated devices, e.g. tapes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW093123920A TW200606410A (en) | 2004-08-10 | 2004-08-10 | Method and system for detecting liquid leakage |
| PCT/US2005/024709 WO2006019743A1 (en) | 2004-08-10 | 2005-07-08 | Method and system for detecting liquid leakage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008510139A true JP2008510139A (ja) | 2008-04-03 |
| JP2008510139A5 JP2008510139A5 (enExample) | 2008-07-10 |
Family
ID=35159969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007525622A Pending JP2008510139A (ja) | 2004-08-10 | 2005-07-08 | 漏液検出方法およびシステム |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JP2008510139A (enExample) |
| KR (1) | KR20070033023A (enExample) |
| BR (1) | BRPI0514177A (enExample) |
| FR (1) | FR2874260A1 (enExample) |
| IT (1) | ITMI20051546A1 (enExample) |
| NL (1) | NL1029695C2 (enExample) |
| TW (1) | TW200606410A (enExample) |
| WO (1) | WO2006019743A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100852907B1 (ko) * | 2007-04-03 | 2008-08-19 | 이수건설 주식회사 | 누수 감지 기능을 갖춘 온수 분배기 |
| KR200446008Y1 (ko) * | 2009-06-12 | 2009-09-17 | 김호성 | 누수감지기의 결합구조 |
| CN103295938B (zh) * | 2013-05-29 | 2017-10-10 | 上海华虹宏力半导体制造有限公司 | 半导体处理设备 |
| KR102187189B1 (ko) * | 2019-03-05 | 2020-12-04 | 오토센서코리아(주) | 단선 및 리크 검출 장치 및 검출 방법 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58167436A (ja) * | 1982-03-26 | 1983-10-03 | Hitachi Ltd | 光学ガラスの製造方法 |
| JPH0197830A (ja) * | 1987-07-08 | 1989-04-17 | Midwesco Inc | 時間ドメインの反射測定及びサンプリング技術を用いた漏れ検出・位置決め装置 |
| JPH09243497A (ja) * | 1996-03-05 | 1997-09-19 | Tsuruga Syst Kk | 漏水個所検知装置 |
| JPH11173939A (ja) * | 1997-11-26 | 1999-07-02 | Samsung Electron Co Ltd | 半導体装置製造設備の漏水感知装置及び漏水感知センサー |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2317304C3 (de) * | 1973-04-06 | 1979-03-29 | Howaldtswerke-Deutsche Werft Ag Hamburg Und Kiel, 2300 Kiel | Schaltungsanordnung zum Messen hxxochohmiger Kabelfehler in Fernmeldenetzen und ähnlichen Netzen |
| JPS5415435B2 (enExample) * | 1974-07-13 | 1979-06-14 | ||
| JPS60196639A (ja) * | 1984-03-19 | 1985-10-05 | Tatsuta Electric Wire & Cable Co Ltd | 電解質溶液検知器 |
| JPS6190048A (ja) * | 1984-10-09 | 1986-05-08 | Junkosha Co Ltd | 漏液検知センサ |
| JP3001222B2 (ja) * | 1990-03-16 | 2000-01-24 | 住友スリーエム株式会社 | 電食防止回路を有する漏水検知器 |
| FR2709347B1 (fr) * | 1993-08-27 | 1995-10-13 | Ttk | Installation de détection et de localisation de fuites de liquide. |
| DE4425551A1 (de) * | 1994-07-19 | 1996-02-01 | Gore W L & Ass Gmbh | Meßgerät zum Messen des Verlaufs der charakteristischen Impedanz entlang einem Kabel |
-
2004
- 2004-08-10 TW TW093123920A patent/TW200606410A/zh unknown
-
2005
- 2005-07-08 WO PCT/US2005/024709 patent/WO2006019743A1/en not_active Ceased
- 2005-07-08 KR KR1020077003147A patent/KR20070033023A/ko not_active Ceased
- 2005-07-08 BR BRPI0514177-0A patent/BRPI0514177A/pt not_active Application Discontinuation
- 2005-07-08 JP JP2007525622A patent/JP2008510139A/ja active Pending
- 2005-08-05 IT IT001546A patent/ITMI20051546A1/it unknown
- 2005-08-09 NL NL1029695A patent/NL1029695C2/nl not_active IP Right Cessation
- 2005-08-10 FR FR0508484A patent/FR2874260A1/fr not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58167436A (ja) * | 1982-03-26 | 1983-10-03 | Hitachi Ltd | 光学ガラスの製造方法 |
| JPH0197830A (ja) * | 1987-07-08 | 1989-04-17 | Midwesco Inc | 時間ドメインの反射測定及びサンプリング技術を用いた漏れ検出・位置決め装置 |
| JPH09243497A (ja) * | 1996-03-05 | 1997-09-19 | Tsuruga Syst Kk | 漏水個所検知装置 |
| JPH11173939A (ja) * | 1997-11-26 | 1999-07-02 | Samsung Electron Co Ltd | 半導体装置製造設備の漏水感知装置及び漏水感知センサー |
Also Published As
| Publication number | Publication date |
|---|---|
| ITMI20051546A1 (it) | 2006-02-11 |
| FR2874260A1 (fr) | 2006-02-17 |
| NL1029695C2 (nl) | 2011-03-08 |
| WO2006019743A1 (en) | 2006-02-23 |
| NL1029695A1 (nl) | 2006-02-13 |
| KR20070033023A (ko) | 2007-03-23 |
| TW200606410A (en) | 2006-02-16 |
| BRPI0514177A (pt) | 2008-06-03 |
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