WO2006019743A1 - Method and system for detecting liquid leakage - Google Patents

Method and system for detecting liquid leakage Download PDF

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Publication number
WO2006019743A1
WO2006019743A1 PCT/US2005/024709 US2005024709W WO2006019743A1 WO 2006019743 A1 WO2006019743 A1 WO 2006019743A1 US 2005024709 W US2005024709 W US 2005024709W WO 2006019743 A1 WO2006019743 A1 WO 2006019743A1
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WO
WIPO (PCT)
Prior art keywords
signal
detecting
sensor
controller
conductive line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2005/024709
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English (en)
French (fr)
Inventor
Ching-Chung Liang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
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3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Priority to JP2007525622A priority Critical patent/JP2008510139A/ja
Priority to BRPI0514177-0A priority patent/BRPI0514177A/pt
Priority to KR1020077003147A priority patent/KR20070033023A/ko
Publication of WO2006019743A1 publication Critical patent/WO2006019743A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
    • G01M3/165—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means by means of cables or similar elongated devices, e.g. tapes

Definitions

  • the present invention relates to a method and system for detecting liquid leakage which is capable of detecting leaked liquid having an impedance less than 100 mega ohm, in which a detected analog signal is converted into a digital signal so as to increase the sensibility and accuracy of detecting liquid leakage, thereby enhancing the precision of liquid leakage detection and preventing operational errors caused by outside environmental interference.
  • the leakage detector In manufacturing equipment, water and chemical liquid are commonly used for the purpose of cleaning or cooling. If water leakage or liquid leakage occurs, it would cause abnormal operation of the equipment and could possibly be harmful to the working staff. Prior attempts to solve this problem, include the leakage detector, for example, that was filed by the same applicant with the R.O.C. Patent Application No. 092116399. The structure thereof is shown in Fig. 1. The leakage detector shown therein is used to detect whether the equipment has the problem of water leakage. As shown in Fig. 1, the water leakage detector includes a sensor 10, a controller 14 and an alarm 18. The controller 14 consists of a transistor 15, a resistor 16 and a power source 17.
  • the sensor 10 includes two conductive lines 11 and an integument 12, wherein the two separate conductive lines 11 have two open terminals and two connection terminals.
  • the base and emitter of the transistor 15, the two connection terminals, the resistor 16 and the power source 17 are electrically connected in series.
  • the collector and emitter of the transistor 15, the power source 17 and the alarm 18 are electrically connected in series.
  • the integument 12 is used to cover the two separate conductive lines 11, wherein several parts of the two separate conductive lines 11 are exposed to form a plurality of electrodes 9.
  • the conventional water leakage detector can detect water leakage may not be optimized to detect chemical liquid leakage with high impedance. However, certain industrial chemicals may be harmful and therefore it is important to accurately detect liquid leakage.
  • the present invention provides a method and system for detecting liquid leakage, where the leaked liquid has an impedance less than 100 mega ohm can be detected.
  • a detected analog signal is converted into a digital signal so as to increase the accuracy of detecting water leakage and the short circuit and the open circuit of a sensor, thereby enhancing the precision of liquid leakage detection and preventing operational errors caused by outside environmental interference. It may be desirable to be able to reliably detect such liquids, including the chemical liquids used in the manufacture process of the TFT-LCD, semiconductor and PDP, i.e.
  • LC-841 Cleaner for liquid crystal (Semi-aqueous type), stereolithography (SLA), oxalic, ultra pure water (UPW) or water, can be dangerous or hazardous.
  • a method for detecting a liquid leak of the present invention comprises the steps of: using a sensor to detect the leak, the sensor comprises a first conductive line separate from a second conductive line, each conductive line having an open terminal and a connection terminal; generating a detecting signal from a signal generator, the detecting signal for detecting liquid with impedance less than 100 mega ohm, the detecting signal supplied to the sensor via the connection terminals of the first and second conductive lines by a controller; generating an analog signal at one of the two connection terminals when a leak is detected between the two conductive lines; converting the analog signal to a digital signal using the controller; and activating an alarm with the digital signal.
  • the invention comprises a computer readable recording medium for embodying a program, which program is executed for performing the steps as mentioned above.
  • the system comprises: a sensor comprising a first conductive line separate from a second conductive line, the first conductive line having a first open terminal and a first connection terminal, the second conductive line having a second open terminal and a second connection terminal, wherein an analog signal is generated at the first connection terminal of the first conductive line when the leak is detected between the two conductive lines; a signal generator providing a detecting signal for detecting liquid having an impedance less than or equal to 100 mega ohm, the signal generator connected to the first and second connection terminals of the first and second conductive lines; an alarm; and a controller controlling the signal generator and converting the analog signal to a digital signal that is used to activate the alarm, the controller connected to the first connection terminal of the first conductive line.
  • Another exemplary embodiment of the present invention is a method for detecting a liquid leak comprising the steps of: using a sensor to detect the leak, the sensor comprises a first conductive line separate from a second conductive line, each conductive line having a terminal connected to a terminal resistor and a connection terminal; generating a detecting signal from a signal generator, the detecting signal for detecting liquid with impedance less than 100 mega ohm, the detecting signal supplied to the sensor via the connection terminals of the first and second conductive lines by a controller; generating an first analog signal at one of the two connection terminals when a leak is detected between the two conductive lines; converting the first analog signal to a first digital signal using the controller; and activating an first alarm with the first digital signal.
  • the method further comprises: generating a second analog signal at one of the two connection terminals by the sensor, if the sensor is open circuited; converting the second analog signal into a second digital signal by the controller; and activating a second alarm with the second digital signal.
  • Another exemplary embodiment of the invention further comprises a computer readable recording medium for embodying a program, which program is executed to perform the above steps.
  • a system for detecting a liquid leak comprising: a sensor comprising a first conductive line separate from a second conductive line, the first conductive line having a first terminal connected to a terminal resistor and a first connection terminal, the second conductive line having a second terminal connected to the terminal resistor and a second connection terminal, wherein a first analog signal is generated at the first connection terminal of the first conductive line when the leak is detected between the two conductive lines; a signal generator providing a detecting signal for detecting liquid having an impedance less than or equal to 100 mega ohm, the signal generator connected to the first and second connection terminals of the first and second conductive lines; a first alarm; and a controller controlling the signal generator and converting the first analog signal to a first digital signal that is used to activate the first alarm, the controller connected to the first connection terminal of the first conductive line.
  • the system further comprises: a second alarm, wherein a second analog signal is generated at one of the first and second connection terminals if the sensor is open circuited, and the second analog signal is converted into a second digital signal by the controller, and the second alarm is activated by the second digital signal.
  • the impedance of the leaked liquid which can be detected by the present invention is less than 100 mega ohm, and a detected analog signal is converted into a digital signal so as to increase the accuracy of detecting liquid leakage, thereby enhancing the precision of liquid leakage detection and preventing operational errors caused by outside environmental interference.
  • Fig. 1 is a circuit block diagram showing a known water leakage detector
  • Fig. 2 is a schematic diagram showing a possible non-symmetry pulse signal that can be used in the present invention
  • Fig. 3 is a circuit block diagram showing an exemplary system for detecting liquid leakage according to the present invention
  • Fig. 4 is a circuit block diagram showing another exemplary system for detecting liquid leakage according to the present invention.
  • Fig. 5 is a flow chart showing an exemplary method for detecting liquid leakage according to the present invention.
  • Fig. 6 is a flow chart showing another exemplary method for detecting liquid leakage according to the present invention.
  • Fig. 3 shows a system for detecting liquid leakage according to an exemplary embodiment of the present invention.
  • the system comprises a sensor 30, a signal generator 35, a controller 34, and an alarm 38.
  • the length of sensor 30 can be up to 450 meters, including the length of the sensor body (up to 100 meters) and the wires connected to the sensor 30.
  • S ensor 30 has two separate conductive lines 31 and an integument or cover 32.
  • the two separate conductive lines 31 have two open terminals (shown schematically as 31a and 31b) and two connection terminals (shown schematically as 31c and 3 Id).
  • the integument 32 is used to cover the two separate conductive lines 31, wherein several parts of the two separate conductive lines 31 are exposed to form a plurality of electrodes 29.
  • the signal generator 35 is electrically connected to the two connection terminals of the two separate conductive lines 31.
  • the signal generator provides a detecting signal for detecting liquid with impedance less than 100 mega ohm (such as a non-symmetrical pulse signal with a voltage/period of +5V/1.7sec and -9V/0.8sec shown in Fig. 2) to the sensor 30.
  • the controller 34 comprises an analog/digital converter 36 and a logic circuit 37.
  • the input terminal of the analog/digital converter 36 is electrically connected to the negative terminal (or positive terminal) of the two connection terminals by using cables for shielding the signals from noise.
  • the output terminal of the analog/digital converter 36 is electrically connected to the input terminal of the logic circuit 37.
  • the analog/digital converter 36 outputs an 8-bit digital signal 8 to the logic circuit 37.
  • the output terminal of the logic circuit 37 is electrically connected to the alarm 38.
  • an analog signal is generated at the negative terminal (or positive terminal) of the two separate conductive lines 31.
  • the voltage of the analog signal is in the range of +5V to -9V.
  • the voltage of the analog signal depends on the impedance of the leaked liquid.
  • the analog/digital converter 36 converts the analog signal (+5V to -9V) into a digital signal (with the value ranging from 0 to 255).
  • the logic circuit 37 processes the digital signal. Then, the alarm 38 is activated by the digital signal, thereby warning operators of the occurrence of the liquid leakage.
  • Fig. 4 shows a system for detecting liquid leakage according to another exemplary embodiment of the present invention.
  • the embodiment shown in Fig. 4 is similar to the embodiment of Fig. 3 and further includes a terminal resistor 53.
  • the terminal resistor has two terminals (not shown) and are connected to the open terminal of each conductive line.
  • the system in Fig. 4 comprises a sensor 50, a signal generator 55, a controller 54, a first alarm 58, a second alarm 60 and an integument 52.
  • the integument is used to cover the conductive lines. Where the conductive lines are exposed a plurality of electrodes 49 are formed.
  • the signal generator 55 is electrically connected to two connection terminals, schematically shown as 51c and 5 Id, of the conductive lines.
  • the signal generator provides a detecting signal for detecting liquid with impedance less than 100 mega ohm (such as a non-symmetrical pulse signal with a voltage/period of +5V/1.7sec and -9V/0.8sec shown in Fig. 2) to the sensor 50.
  • the controller 54 comprises an analog/digital converter 56 and a logic circuit 57.
  • the input terminal of the analog/digital converter 56 is electrically connected to the negative terminal (or positive terminal) of the connection terminals by using cables for shielding the signals from noise.
  • the output terminal of the analog/digital converter 56 is electrically connected to the input terminal of the logic circuit 57.
  • the analog/digital converter 56 outputs an 8-bit digital signal 8 to the logic circuit 57.
  • the output terminal of the logic circuit 57 is electrically connected to the first alarm 58 and the second alarm 60.
  • a first analog signal is generated at the negative terminal (or positive terminal) of the two separate conductive lines 51.
  • the voltage of the first analog signal is in the range of +5 V to -9V.
  • the voltage of the first analog signal depends on the impedance of the leaked liquid.
  • the analog/digital converter 56 converts the first analog signal (+5V to -9V) into a first digital signal (with the value ranging from 0 to 255).
  • the logic circuit 57 processes the first digital signal, and then the first alarm 58 is activated by the first digital signal, thereby warning operators of the occurrence of the liquid leakage.
  • a second analog signal is generated at the negative terminal (or positive terminal) of the two separate conductive lines 51.
  • the analog/digital converter 56 converts the second analog signal (+5V to -9V) into a second digital signal (with the value ranging from 0 to 255).
  • the logic circuit 57 processes the second digital signal, and then the second alarm 60 is activated by the second digital signal, thereby warning operators that the sensor 50 is open circuited.
  • Fig. 5 shows an exemplary method for detecting liquid leakage according to the present invention.
  • a sensor is prepared, wherein the sensor is in a length up to 450 meters, and has two separate conductive lines having two open terminals and two connection terminals, and a detecting signal for detecting liquid with impedance less than 100 mega ohm (such as a non-symmetry pulse signal with a voltage/period of +5V/1.7sec and -9V/0.8sec shown in Fig. 2) is provided to the sensor through the two connection terminals by a signal generator.
  • a signal generator such as a non-symmetry pulse signal with a voltage/period of +5V/1.7sec and -9V/0.8sec shown in Fig. 2
  • step S61 When performing step S61, if liquid leakage is detected between the two separate conductive lines, an analog signal is generated at the negative terminal (or positive terminal) of the two connection terminals, wherein the voltage of the analog signal is in the range of +5 V to -9V.
  • step S62 the analog signal is converted into a digital signal by a controller.
  • step S63 the alarm is activated by the digital signal, thereby warning operators of the occurrence of the liquid leakage.
  • Fig. 6 shows an exemplary method for detecting liquid leakage according to the present invention.
  • a sensor and a signal generator are prepared, wherein the sensor has two separate conductive lines and a terminal resistor, two terminals of the two separate conductive lines being electrically connected to the two terminals of the terminal resistor, respectively, and the signal generator provides a detecting signal for detecting liquid with impedance less than 100 mega ohm (such as a non-symmetry pulse signal with a voltage/period of +5V/1.7sec and -9V/0.8sec shown in Fig. 2) to the sensor through the connection terminals of the two separate conductive lines.
  • 100 mega ohm such as a non-symmetry pulse signal with a voltage/period of +5V/1.7sec and -9V/0.8sec shown in Fig. 2
  • step S71 When performing step S71, if liquid leakage is detected between the two separate conductive lines, a first analog signal is generated at the negative terminal (or positive terminal) of the connection terminals of the two separate conductive lines, wherein the voltage of the first analog signal is in the range of +5 V to -9 V.
  • step S72 the first analog signal is converted into a first digital signal by a controller.
  • step S73 a first alarm is activated by the first digital signal, thereby warning operators of the occurrence of the liquid leakage.
  • step S74 if the sensor is open circuited, a second analog signal is generated at the negative terminal (or positive terminal) of the sensor, wherein the voltage of the second analog signal is in the range of +5V to -9V.
  • step 75 the second analog signal is converted into a second digital signal by the controller.
  • step S76 a second alarm is activated by the second digital signal, thereby warning operators that the sensor is open circuited.
  • the advantages of the method and system for detecting liquid leakage reside in that a detecting signal for detecting liquid with impedance less than 100 mega ohm is used to detect liquid leakage; when liquid leakage is detected, an analog signal is generated and converted into a digital signal (for example, +5V to -9V is divided into 256 intervals) so as to increase the sensibility and accuracy of detecting liquid leakage, thereby enhancing the precision of liquid leakage detection.
  • the present invention also prevents operational errors caused by outside environmental interference.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
PCT/US2005/024709 2004-08-10 2005-07-08 Method and system for detecting liquid leakage Ceased WO2006019743A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007525622A JP2008510139A (ja) 2004-08-10 2005-07-08 漏液検出方法およびシステム
BRPI0514177-0A BRPI0514177A (pt) 2004-08-10 2005-07-08 método para detectar um vazamento de lìquido, meio de gravação legìvel por computador, e, sistema para detectar um vazamento de lìquido
KR1020077003147A KR20070033023A (ko) 2004-08-10 2005-07-08 액체 누수 검출 방법 및 시스템

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW093123920A TW200606410A (en) 2004-08-10 2004-08-10 Method and system for detecting liquid leakage
TW093123920 2004-08-10

Publications (1)

Publication Number Publication Date
WO2006019743A1 true WO2006019743A1 (en) 2006-02-23

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PCT/US2005/024709 Ceased WO2006019743A1 (en) 2004-08-10 2005-07-08 Method and system for detecting liquid leakage

Country Status (8)

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JP (1) JP2008510139A (enExample)
KR (1) KR20070033023A (enExample)
BR (1) BRPI0514177A (enExample)
FR (1) FR2874260A1 (enExample)
IT (1) ITMI20051546A1 (enExample)
NL (1) NL1029695C2 (enExample)
TW (1) TW200606410A (enExample)
WO (1) WO2006019743A1 (enExample)

Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
KR100852907B1 (ko) * 2007-04-03 2008-08-19 이수건설 주식회사 누수 감지 기능을 갖춘 온수 분배기
KR200446008Y1 (ko) * 2009-06-12 2009-09-17 김호성 누수감지기의 결합구조
CN103295938B (zh) * 2013-05-29 2017-10-10 上海华虹宏力半导体制造有限公司 半导体处理设备
KR102187189B1 (ko) * 2019-03-05 2020-12-04 오토센서코리아(주) 단선 및 리크 검출 장치 및 검출 방법

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US3909712A (en) * 1973-04-06 1975-09-30 Howaldtswerke Deutsche Werft Circuit arrangement for measuring high ohmic cable faults in telecommunication and similar networks
US3981181A (en) * 1974-07-13 1976-09-21 Sadamasa Ochiai Method for detecting liquid leak and a cable therefor
JPS60196639A (ja) * 1984-03-19 1985-10-05 Tatsuta Electric Wire & Cable Co Ltd 電解質溶液検知器
US4677371A (en) * 1984-10-09 1987-06-30 Junkosha Co., Ltd. Sensor for detecting the presence and location of a water leak
JPH03267732A (ja) * 1990-03-16 1991-11-28 Sumitomo 3M Ltd 電食防止回路を有する漏水検知器
EP0298479B1 (en) * 1987-07-08 1992-05-20 Perma-Pipe, Inc. Leak detector and locator utilizing time domain reflectometry and sampling techniques
FR2709347A1 (fr) * 1993-08-27 1995-03-03 Ttk Installation de détection et de localisation de fuites de liquide.
DE4425551A1 (de) * 1994-07-19 1996-02-01 Gore W L & Ass Gmbh Meßgerät zum Messen des Verlaufs der charakteristischen Impedanz entlang einem Kabel

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JPS58167436A (ja) * 1982-03-26 1983-10-03 Hitachi Ltd 光学ガラスの製造方法
JPH09243497A (ja) * 1996-03-05 1997-09-19 Tsuruga Syst Kk 漏水個所検知装置
JPH11173939A (ja) * 1997-11-26 1999-07-02 Samsung Electron Co Ltd 半導体装置製造設備の漏水感知装置及び漏水感知センサー

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Publication number Priority date Publication date Assignee Title
US3909712A (en) * 1973-04-06 1975-09-30 Howaldtswerke Deutsche Werft Circuit arrangement for measuring high ohmic cable faults in telecommunication and similar networks
US3981181A (en) * 1974-07-13 1976-09-21 Sadamasa Ochiai Method for detecting liquid leak and a cable therefor
JPS60196639A (ja) * 1984-03-19 1985-10-05 Tatsuta Electric Wire & Cable Co Ltd 電解質溶液検知器
US4677371A (en) * 1984-10-09 1987-06-30 Junkosha Co., Ltd. Sensor for detecting the presence and location of a water leak
EP0298479B1 (en) * 1987-07-08 1992-05-20 Perma-Pipe, Inc. Leak detector and locator utilizing time domain reflectometry and sampling techniques
JPH03267732A (ja) * 1990-03-16 1991-11-28 Sumitomo 3M Ltd 電食防止回路を有する漏水検知器
FR2709347A1 (fr) * 1993-08-27 1995-03-03 Ttk Installation de détection et de localisation de fuites de liquide.
DE4425551A1 (de) * 1994-07-19 1996-02-01 Gore W L & Ass Gmbh Meßgerät zum Messen des Verlaufs der charakteristischen Impedanz entlang einem Kabel

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Also Published As

Publication number Publication date
ITMI20051546A1 (it) 2006-02-11
FR2874260A1 (fr) 2006-02-17
NL1029695C2 (nl) 2011-03-08
JP2008510139A (ja) 2008-04-03
NL1029695A1 (nl) 2006-02-13
KR20070033023A (ko) 2007-03-23
TW200606410A (en) 2006-02-16
BRPI0514177A (pt) 2008-06-03

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