JP2008502153A5 - - Google Patents
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- Publication number
- JP2008502153A5 JP2008502153A5 JP2007515564A JP2007515564A JP2008502153A5 JP 2008502153 A5 JP2008502153 A5 JP 2008502153A5 JP 2007515564 A JP2007515564 A JP 2007515564A JP 2007515564 A JP2007515564 A JP 2007515564A JP 2008502153 A5 JP2008502153 A5 JP 2008502153A5
- Authority
- JP
- Japan
- Prior art keywords
- blade
- rod
- brittle material
- groove
- cleaved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 22
- 239000000463 material Substances 0.000 claims 13
- 230000015572 biosynthetic process Effects 0.000 claims 6
- 230000000977 initiatory effect Effects 0.000 claims 4
- 230000000149 penetrating effect Effects 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims 1
- 238000003776 cleavage reaction Methods 0.000 claims 1
- 230000002596 correlated effect Effects 0.000 claims 1
- 230000000875 corresponding effect Effects 0.000 claims 1
- 239000002178 crystalline material Substances 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 230000007017 scission Effects 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US57688804P | 2004-06-03 | 2004-06-03 | |
| US60/576,888 | 2004-06-03 | ||
| US11/144,465 | 2005-06-02 | ||
| US11/144,465 US7422963B2 (en) | 2004-06-03 | 2005-06-02 | Method for cleaving brittle materials |
| PCT/US2005/019370 WO2005122243A2 (en) | 2004-06-03 | 2005-06-03 | Method and apparatus for cleaving brittle materials |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008502153A JP2008502153A (ja) | 2008-01-24 |
| JP2008502153A5 true JP2008502153A5 (enExample) | 2008-07-24 |
| JP5097543B2 JP5097543B2 (ja) | 2012-12-12 |
Family
ID=35503819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007515564A Expired - Fee Related JP5097543B2 (ja) | 2004-06-03 | 2005-06-03 | 脆性材料を劈開するための方法 |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US7422963B2 (enExample) |
| EP (1) | EP1782465B1 (enExample) |
| JP (1) | JP5097543B2 (enExample) |
| KR (1) | KR101166595B1 (enExample) |
| AT (1) | ATE461021T1 (enExample) |
| AU (1) | AU2005253577B2 (enExample) |
| BR (1) | BRPI0511794B1 (enExample) |
| CA (1) | CA2569376C (enExample) |
| DE (1) | DE602005020023D1 (enExample) |
| ES (1) | ES2340402T3 (enExample) |
| MY (1) | MY142564A (enExample) |
| TW (1) | TWI402150B (enExample) |
| WO (1) | WO2005122243A2 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4346598B2 (ja) * | 2005-10-06 | 2009-10-21 | 株式会社東芝 | 化合物半導体素子及びその製造方法 |
| JP2007160537A (ja) * | 2005-12-09 | 2007-06-28 | Japan Science & Technology Agency | 劈開方法および劈開装置 |
| US8835802B2 (en) | 2006-01-24 | 2014-09-16 | Stephen C. Baer | Cleaving wafers from silicon crystals |
| DE102007018080B3 (de) * | 2007-04-17 | 2008-06-19 | Eisele, Christopher, Dr. | Verfahren und Vorrichtung zur Herstellung von dünnen Scheiben oder Folien aus Halbleiterkörpern |
| US8057376B2 (en) * | 2007-12-18 | 2011-11-15 | Caridianbct, Inc. | Blood processing apparatus with sealed diffuser in optical control apparatus |
| TWI498990B (zh) * | 2012-12-19 | 2015-09-01 | Genesis Photonics Inc | 劈裂裝置 |
| CN104210039B (zh) * | 2013-05-30 | 2016-04-06 | 正达国际光电股份有限公司 | 钻石线切割机及该钻石线切割机的切割方法 |
| JP6661204B1 (ja) * | 2019-04-19 | 2020-03-11 | ハイソル株式会社 | 層状物質劈開方法 |
| CN111730771B (zh) * | 2020-06-09 | 2021-10-29 | 安徽利锋机械科技有限公司 | 一种晶圆切割机 |
| US11377758B2 (en) | 2020-11-23 | 2022-07-05 | Stephen C. Baer | Cleaving thin wafers from crystals |
| CN114999958B (zh) * | 2022-05-27 | 2024-05-03 | 颀中科技（苏州）有限公司 | 用于去除卷带芯片的芯片剔除装置 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3901423A (en) | 1973-11-26 | 1975-08-26 | Purdue Research Foundation | Method for fracturing crystalline materials |
| US4184472A (en) * | 1978-05-15 | 1980-01-22 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method and apparatus for slicing crystals |
| US4244348A (en) | 1979-09-10 | 1981-01-13 | Atlantic Richfield Company | Process for cleaving crystalline materials |
| US4343287A (en) | 1980-08-29 | 1982-08-10 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Crystal cleaving machine |
| US4628151A (en) | 1985-12-30 | 1986-12-09 | Cardas George F | Multi-strand conductor cable having its strands sized according to the golden section |
| JPS62188325A (ja) * | 1986-02-14 | 1987-08-17 | Sumitomo Electric Ind Ltd | 化合物半導体のｏｆ面出し方法及び装置 |
| US4955357A (en) | 1988-01-22 | 1990-09-11 | Hi-Silicon Co., Ltd. | Method and apparatus for cutting polycrystalline silicon rods |
| US6007916A (en) * | 1989-04-06 | 1999-12-28 | Sumitomo Electric Industries, Ltd. | Synthetic single crystal diamond for wiring drawing dies and process for producing the same |
| US5593815A (en) * | 1989-07-31 | 1997-01-14 | Goldstar Co., Ltd. | Cleaving process in manufacturing a semiconductor laser |
| US4980517A (en) | 1989-09-25 | 1990-12-25 | Tp Orthodontics, Inc. | Multi-strand electrical cable |
| JPH03142928A (ja) * | 1989-10-30 | 1991-06-18 | Disco Abrasive Syst Ltd | ウエーハの切り出し方法 |
| JPH0695504B2 (ja) * | 1989-10-31 | 1994-11-24 | 直江津電子工業株式会社 | ウエハ枚葉式内周刃２分割切断装置におけるウエハ供給回収装置 |
| US5335282A (en) | 1992-07-22 | 1994-08-02 | Cardas George F | Signal summing non-microphonic differential microphone |
| JP2564084B2 (ja) * | 1993-03-04 | 1996-12-18 | 直江津電子工業株式会社 | 半導体ウエハの回収方法 |
| JPH08298251A (ja) | 1995-02-28 | 1996-11-12 | Shin Etsu Handotai Co Ltd | 薄板の製造方法 |
| JPH1179770A (ja) * | 1997-07-10 | 1999-03-23 | Yamaha Corp | スクライブ装置及び劈開方法 |
| JPH11284278A (ja) * | 1998-03-27 | 1999-10-15 | Toshiba Corp | レーザダイオードの製造装置および製造方法 |
| JP3733091B2 (ja) * | 2002-08-02 | 2006-01-11 | 直江津電子工業株式会社 | 半導体ウエハ分離装置 |
-
2005
- 2005-06-02 US US11/144,465 patent/US7422963B2/en not_active Expired - Lifetime
- 2005-06-02 TW TW94118177A patent/TWI402150B/zh not_active IP Right Cessation
- 2005-06-03 MY MYPI20052549A patent/MY142564A/en unknown
- 2005-06-03 WO PCT/US2005/019370 patent/WO2005122243A2/en not_active Ceased
- 2005-06-03 ES ES05769112T patent/ES2340402T3/es not_active Expired - Lifetime
- 2005-06-03 AU AU2005253577A patent/AU2005253577B2/en not_active Ceased
- 2005-06-03 DE DE200560020023 patent/DE602005020023D1/de not_active Expired - Lifetime
- 2005-06-03 BR BRPI0511794-1A patent/BRPI0511794B1/pt not_active IP Right Cessation
- 2005-06-03 EP EP20050769112 patent/EP1782465B1/en not_active Expired - Lifetime
- 2005-06-03 CA CA2569376A patent/CA2569376C/en not_active Expired - Fee Related
- 2005-06-03 KR KR1020077000136A patent/KR101166595B1/ko not_active Expired - Fee Related
- 2005-06-03 JP JP2007515564A patent/JP5097543B2/ja not_active Expired - Fee Related
- 2005-06-03 AT AT05769112T patent/ATE461021T1/de not_active IP Right Cessation
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