JP2008311338A5 - - Google Patents

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Publication number
JP2008311338A5
JP2008311338A5 JP2007156135A JP2007156135A JP2008311338A5 JP 2008311338 A5 JP2008311338 A5 JP 2008311338A5 JP 2007156135 A JP2007156135 A JP 2007156135A JP 2007156135 A JP2007156135 A JP 2007156135A JP 2008311338 A5 JP2008311338 A5 JP 2008311338A5
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JP
Japan
Prior art keywords
detection means
intermittently
low energy
continuously
discharge generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007156135A
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English (en)
Japanese (ja)
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JP2008311338A (ja
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Priority to JP2007156135A priority Critical patent/JP2008311338A/ja
Priority claimed from JP2007156135A external-priority patent/JP2008311338A/ja
Publication of JP2008311338A publication Critical patent/JP2008311338A/ja
Publication of JP2008311338A5 publication Critical patent/JP2008311338A5/ja
Pending legal-status Critical Current

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JP2007156135A 2007-06-13 2007-06-13 真空処理装置及びこれに用いる異常放電予知装置、並びに、真空処理装置の制御方法 Pending JP2008311338A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007156135A JP2008311338A (ja) 2007-06-13 2007-06-13 真空処理装置及びこれに用いる異常放電予知装置、並びに、真空処理装置の制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007156135A JP2008311338A (ja) 2007-06-13 2007-06-13 真空処理装置及びこれに用いる異常放電予知装置、並びに、真空処理装置の制御方法

Publications (2)

Publication Number Publication Date
JP2008311338A JP2008311338A (ja) 2008-12-25
JP2008311338A5 true JP2008311338A5 (enExample) 2010-07-22

Family

ID=40238710

Family Applications (1)

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JP2007156135A Pending JP2008311338A (ja) 2007-06-13 2007-06-13 真空処理装置及びこれに用いる異常放電予知装置、並びに、真空処理装置の制御方法

Country Status (1)

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JP (1) JP2008311338A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102473631B (zh) * 2009-06-30 2014-11-26 朗姆研究公司 用于等离子体处理工具原位工艺监控和控制的方法和装置
JP6226777B2 (ja) * 2014-03-06 2017-11-08 Ｓｐｐテクノロジーズ株式会社 プラズマ処理装置の異常放電予知方法及び装置、並びに異常放電予知機能付きプラズマ処理装置
JP6582292B2 (ja) * 2015-07-28 2019-10-02 東京電子交易株式会社 放電分析方法及び放電分析装置
JP6807558B2 (ja) * 2016-11-08 2021-01-06 パナソニックＩｐマネジメント株式会社 プラズマ処理方法およびプラズマ処理装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09266098A (ja) * 1996-03-29 1997-10-07 Seiko Epson Corp プラズマ状態検出装置及びその方法並びにエッチング終点検出装置及びその方法
JPH09266097A (ja) * 1996-03-29 1997-10-07 Seiko Epson Corp プラズマ処理方法及びプラズマ処理装置
JP2002176034A (ja) * 2000-12-08 2002-06-21 Yoshio Fujino プラズマエッチングにおける異常放電自動防止装置
JP2004220923A (ja) * 2003-01-15 2004-08-05 Ulvac Japan Ltd 異常放電検出装置と検出方法、及び該異常放電検出装置を備えたプラズマ処理装置
KR100807724B1 (ko) * 2003-08-07 2008-02-28 가부시키가이샤 히다치 고쿠사이 덴키 기판처리장치 및 기판처리방법
JP2005259941A (ja) * 2004-03-11 2005-09-22 Renesas Technology Corp スパッタエッチング装置、スパッタエッチングシステム及びスパッタエッチング方法
JP4673653B2 (ja) * 2005-03-30 2011-04-20 オリジン電気株式会社 真空装置における異常放電発生予防方法及び真空装置
JP2006328510A (ja) * 2005-05-30 2006-12-07 Ulvac Japan Ltd プラズマ処理方法及び装置
JP5094002B2 (ja) * 2005-09-06 2012-12-12 ルネサスエレクトロニクス株式会社 プラズマ処理装置およびその異常放電抑止方法
JP5159055B2 (ja) * 2006-03-08 2013-03-06 株式会社ＥＭ・Ｐｒｅｄｉｘ 交流電源装置

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