JP2008290179A - Columnar cutting tool for surface treatment of film-like object and surface treatment apparatus therewith - Google Patents

Columnar cutting tool for surface treatment of film-like object and surface treatment apparatus therewith Download PDF

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JP2008290179A
JP2008290179A JP2007137513A JP2007137513A JP2008290179A JP 2008290179 A JP2008290179 A JP 2008290179A JP 2007137513 A JP2007137513 A JP 2007137513A JP 2007137513 A JP2007137513 A JP 2007137513A JP 2008290179 A JP2008290179 A JP 2008290179A
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columnar
magnetic
surface treatment
bite
magnetic field
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Teruhisa Nakamura
輝久 中村
Rei Hanamura
玲 花村
Keita Yamamoto
慶太 山本
Yoshio Matsuo
良夫 松尾
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FDK Corp
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FDK Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a columnar cutting tool for a surface treatment of a film-like object and a surface treatment apparatus therewith, capable of performing an efficient surface treatment by a fine cutting operation, while maintaining a non-contact state with no external force applied to the film-like object. <P>SOLUTION: A permanent magnet 20 is provided at an outer circumference of a columnar cutting tool 2 as a magnetic field generation source and is linked to drive means. A plurality of the permanent magnets 20 are arranged at the outer-circumference of a bar-like body while extending in the longitudinal direction thereof in a belt-like shape. The permanent magnetic 20 is brought to face a polishing object 1 in a non-contact manner and a magnetic polishing liquid 4 is allowed to be present in the vicinity thereof. The columnar cutting tool 2 is made to perform a specified motion by activating the drive means, and fluid polishing is performed by a magnetic cluster (a magnetic brush) generated in the magnetic polishing liquid 4 which is present in the vicinity thereof. A magnetic field generating source (20) is a belt-like shape, extending in the longitudinal direction of the bar-like body and by which an action range of the magnetic field is widened. Therefore, an action of the magnetic field is enhanced for a wider area and preferably applicable to film-like polishing objects. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、金属リボンや樹脂フィルムなどのフィルム形状体の表面処理のための柱状バイトおよびそれを用いた表面処理装置に関するもので、より具体的には、薄膜で比較的に幅が大きいフィルム形状体などの対象物に対して、微細な削り作用のためのバイトの改良に関する。   The present invention relates to a columnar tool for surface treatment of a film-shaped body such as a metal ribbon or a resin film, and a surface treatment apparatus using the same, and more specifically, a film shape having a relatively large width as a thin film The present invention relates to improvement of a bite for fine cutting action on an object such as a body.

金属リボンや樹脂フィルムなど、薄膜で比較的に幅が大きいフィルム形状体にあっては、製造の際には表面性状の改質を行う表面処理が必要であり、その表面について研磨や洗浄および清浄等の表面処理が行われている。   In the case of a thin film film with a relatively wide width, such as a metal ribbon or a resin film, surface treatment is required to modify the surface properties during production, and the surface is polished, washed and cleaned. Surface treatment such as is performed.

表面処理の一つには鏡面仕上げがあり、上述したフィルム形状体でも重要な表面処理となる。つまり、部材表面の鏡面仕上げは外観の美しさを得ることはもちろん、コーティング等の仕上げ工程前の下地作りといった目的から重要となっている。   One of the surface treatments is a mirror finish, which is an important surface treatment even for the above-described film shape. In other words, the mirror finish on the surface of the member is important for the purpose of obtaining the beauty of the appearance and of making the base before the finishing process such as coating.

しかし、フィルム形状体は薄膜であるため、わずかな力ですぐにシワができ、扱いが難しいという問題がある。例えばポリッシングパッドなどの工具を研磨対象面に接触させる加工方法は、抑え力を加えることから対象物に大きな応力が生じ、鏡面仕上げの加工が適正には行えない。   However, since the film-shaped body is a thin film, there is a problem that it can be quickly wrinkled with a slight force and is difficult to handle. For example, in the processing method in which a tool such as a polishing pad is brought into contact with the surface to be polished, a large force is generated on the target because a restraining force is applied, so that the mirror finishing cannot be properly performed.

鏡面仕上げを行い得る精密研磨の技術として、いわゆる磁気研磨法と呼ばれる技術が知られている。これは、磁性流体(MF:Magnetic Fluid)や磁気粘性流体(MRF:Magneto Rheological Fluid)を研磨粒子と混合させ、磁界により混合液を運動させることで研磨を行っている。   A so-called magnetic polishing technique is known as a precision polishing technique capable of performing mirror finish. This is performed by mixing a magnetic fluid (MF) or a magnetorheological fluid (MRF) with abrasive particles and moving the mixed liquid by a magnetic field.

研磨バイトには永久磁石を備え磁界発生源とし、その研磨バイトの周りに磁気研磨液(ペースト材料)を付着させると、磁気吸引力によりMFやMRF中の強磁性粒子(例えば、鉄粒子),マグネタイト粒子が、多数凝集して磁気クラスタを形成する。この磁気クラスタは、磁束に沿うので研磨対象に対立して針状に多数が立ち並ぶ態様を採る。よって、磁気研磨液が研磨バイトに付着して磁気ブラシとなる。   The polishing tool has a permanent magnet as a magnetic field generation source. When a magnetic polishing liquid (paste material) is attached around the polishing tool, ferromagnetic particles (for example, iron particles) in MF and MRF by magnetic attraction force, A large number of magnetite particles aggregate to form a magnetic cluster. Since this magnetic cluster follows the magnetic flux, it takes a form in which a large number of needles are arranged in opposition to the object to be polished. Therefore, the magnetic polishing liquid adheres to the polishing bite to form a magnetic brush.

磁気ブラシあるいは研磨対象が回転動作することにより、両者間の相対運動により磁気ブラシが研磨対象の表面を接触した状態で移動する。その結果、研磨対象の表面の凹凸は研磨粒子を伴う磁気ブラシが研磨し、より平滑な表面を得ることができ、非接触の流体研磨が行える。   When the magnetic brush or the object to be polished rotates, the magnetic brush moves in contact with the surface of the object to be polished by relative movement between the two. As a result, the unevenness of the surface to be polished is polished by the magnetic brush with the abrasive particles, a smoother surface can be obtained, and non-contact fluid polishing can be performed.

ところが、磁気研磨法による場合、フィルム形状体は薄膜である上に比較的に幅が大きいことから、単純に適用したのでは効率が上がらない問題があり、研磨に時間がかかり改善の要求がある。   However, in the case of the magnetic polishing method, since the film-shaped body is a thin film and has a relatively large width, there is a problem that the efficiency is not improved if it is simply applied. .

この発明は上述した課題を解決するもので、その目的は、薄膜で比較的に幅が大きいフィルム形状体などの対象物に対して、外力が加わらない非接触の状態を保持し、微細な削り作用による表面処理を効率よく行うことができるフィルム状の対象物の表面処理のための柱状バイトおよびそれを用いた表面処理装置を提供することにある。   The object of the present invention is to solve the above-mentioned problems. The object of the present invention is to maintain a non-contact state in which an external force is not applied to an object such as a film-shaped body having a relatively thin width and a fine shaving. An object of the present invention is to provide a columnar bite for surface treatment of a film-like object capable of efficiently performing surface treatment by action and a surface treatment apparatus using the same.

上述した目的を達成するために、本発明に係るフィルム状の対象物の表面処理のための柱状バイトは、フィルム状の対象物に対して非接触の状態を保ち、周辺に存在させた磁気ペーストを連動することにより微細な削り作用による表面処理を行うものであって、柱状バイトは棒状本体の外周に永久磁石等の磁界発生源を複数設け、当該磁界発生源は棒状本体の長手に延びる帯形状とし、棒状本体の少なくとも一方端と連結した駆動手段の駆動により当該棒状本体が長手に沿う軸について所定の運動動作を行う構成にする(請求項1)。   In order to achieve the above-described object, the columnar bite for surface treatment of a film-like object according to the present invention maintains a non-contact state with respect to the film-like object and is a magnetic paste that is present in the periphery. The columnar bite is provided with a plurality of magnetic field generating sources such as permanent magnets on the outer periphery of the rod-shaped body, and the magnetic field source is a band extending in the longitudinal direction of the rod-shaped body. The rod-shaped main body is configured to perform a predetermined motion operation on an axis along the longitudinal direction by driving of a driving means connected to at least one end of the rod-shaped main body.

また、上記柱状バイトを用いた表面処理装置は、その柱状バイトと、当該柱状バイトへ連係して所定の運動動作を行わせる駆動手段とを備え、柱状バイトは対象物に対して磁界発生源が非接触に対面する配置とし、磁気ペーストには微細な削り作用を発揮する砥粒を混合しておき、当該磁気ペーストは対象物と柱状バイトとの間に存在させ、駆動手段を起動することにより柱状バイトには所定の運動動作を行わせ、磁界発生源の磁界により磁気ペーストに時間的に定常的あるいは変動的な磁界を加えて非接触の微細な削り作用による表面処理を行う構成にする(請求項2)。   The surface treatment apparatus using the columnar bite includes the columnar bite and driving means for performing a predetermined motion operation in conjunction with the columnar bite. The columnar bite has a magnetic field generation source with respect to the object. It is arranged to face non-contact, the magnetic paste is mixed with abrasive grains that exhibit a fine shaving action, the magnetic paste is present between the object and the columnar bite, and the driving means is activated The columnar tool is configured to perform a predetermined motion and apply a surface treatment by a non-contact fine cutting action by applying a temporally steady or fluctuating magnetic field to the magnetic paste by the magnetic field of the magnetic field generation source ( Claim 2).

また、柱状バイトが対象物に対して上方に位置する配置において、当該柱状バイトを上から覆う上部カバーを設けて、動作時に飛び散る磁気ペーストを留めて下方へ滴下させる構成にすることができる(請求項3)。   Further, in an arrangement in which the columnar bite is located above the object, an upper cover that covers the columnar bite from above can be provided, and the magnetic paste that scatters during operation can be retained and dropped downward (claim) Item 3).

また、柱状バイトが対象物に対して下方に位置する配置において、当該柱状バイトを下から覆う下部カバーを設けて、動作時に飛び散る磁気ペーストを留めて下方へ流下させる構成にすることができる(請求項4)。   Further, in the arrangement in which the columnar bite is positioned below the object, a lower cover that covers the columnar bite from below can be provided so that the magnetic paste that scatters during operation can be retained and flowed downward (claims). Item 4).

また、磁気ペーストの組成において、砥粒はフェライト粒子や金属粒子などの磁性を有する磁性粒子とすることもよい(請求項5)。   In the composition of the magnetic paste, the abrasive grains may be magnetic particles having magnetism such as ferrite particles and metal particles.

したがって本発明では、磁気研磨のための柱状バイトはその外周に永久磁石等の磁界発生源を複数設け、当該磁界発生源は棒状本体の長手に延びる帯形状とすることから、対象物と非接触に対面する磁界の作用領域が広くなる。このため、広い面積に対して磁界の作用が行え、フィルム状の対象物に好適に対応できる。   Therefore, in the present invention, the columnar tool for magnetic polishing is provided with a plurality of magnetic field generating sources such as permanent magnets on the outer periphery thereof, and the magnetic field generating source has a strip shape extending in the longitudinal direction of the rod-shaped main body. The field of action of the magnetic field that faces is widened. For this reason, the effect | action of a magnetic field can be performed with respect to a wide area, and it can respond suitably to a film-like target object.

本発明に係る柱状バイトでは、その外周に永久磁石等の磁界発生源を複数設け、当該磁界発生源は棒状本体の長手に延びる帯形状とすることから、対象物と非接触に対面する磁界の作用領域が広くなる。このため、広い面積に対して磁界の作用が発揮し、フィルム状の対象物に好適に対応できる。したがって、本発明に係る柱状バイトおよびそれを用いた表面処理装置によれば、薄膜で比較的に幅が大きいフィルム形状体などの対象物に対して、外力が加わらない非接触の状態を保持し、微細な削り作用による表面処理を効率よく行うことができる。   In the columnar bite according to the present invention, a plurality of magnetic field generation sources such as permanent magnets are provided on the outer periphery, and the magnetic field generation source has a strip shape extending in the longitudinal direction of the rod-shaped main body. The area of action becomes wider. For this reason, the effect | action of a magnetic field is exhibited with respect to a wide area, and it can respond suitably to a film-like target object. Therefore, according to the columnar bite and the surface treatment apparatus using the same according to the present invention, a non-contact state in which an external force is not applied to an object such as a thin film-shaped object having a relatively large width is maintained. Therefore, surface treatment by a fine shaving action can be performed efficiently.

(第1の実施の形態)
図1,図2は、本発明の第1の実施の形態を示している。本形態において、表面処理装置は、磁界発生源(永久磁石20)を有する柱状バイト2を備える。研磨対象1は支持台3に固定し、その研磨対象1に対して柱状バイト2が非接触に対面する配置とし、研磨対象1との間に磁気ペースト(磁気研磨液4)を存在させ、柱状バイト2にはこれと連係させた駆動手段5を起動することにより所定の運動動作を行わせ、磁気研磨液4に生成した磁気クラスタにより流体研磨を行うようになっている。
(First embodiment)
1 and 2 show a first embodiment of the present invention. In this embodiment, the surface treatment apparatus includes a columnar tool 2 having a magnetic field generation source (permanent magnet 20). The polishing object 1 is fixed to the support base 3, and the columnar cutting tool 2 is disposed so as to face the polishing object 1 in a non-contact manner, and a magnetic paste (magnetic polishing liquid 4) is present between the polishing object 1 and the columnar tool. The cutting tool 2 is activated by a driving means 5 linked thereto to perform a predetermined motion, and fluid polishing is performed by a magnetic cluster generated in the magnetic polishing liquid 4.

研磨対象1としては、金属リボンや樹脂フィルムなど、厚さ数十μmから数百μm程度の薄膜で比較的に幅が大きいフィルム形状体を想定している。柱状バイト2は、棒状本体の外周に永久磁石20を設けて磁界の発生源としている。この磁界発生源とする永久磁石20は、棒状本体の長手に延びる帯形状とし、外周に複数個配列させている。磁界発生源としては永久磁石20に限らず、例えば電磁石などでも適用でき、磁気研磨液4に対して磁界を作用し得るものであればよい。発生する磁界は、時間的に定常的である必要はなく、時間的に変動的な磁界を発生させてもよい。また、柱状バイト2は、本形態では断面形状を円形状とするが、これに限らず、例えば4角形状や多角形状としてもよい。   As the polishing object 1, a thin film having a thickness of several tens to several hundreds of μm, such as a metal ribbon or a resin film, is assumed to have a relatively large width. The columnar bite 2 is provided with a permanent magnet 20 on the outer periphery of the rod-shaped main body to serve as a magnetic field generation source. The permanent magnets 20 serving as the magnetic field generation source have a strip shape extending in the longitudinal direction of the rod-shaped main body, and a plurality of permanent magnets 20 are arranged on the outer periphery. The magnetic field generation source is not limited to the permanent magnet 20 but may be an electromagnet, for example, as long as it can act on the magnetic polishing liquid 4. The generated magnetic field does not have to be stationary in time, and a temporally varying magnetic field may be generated. Further, the columnar bite 2 has a circular cross-sectional shape in the present embodiment, but is not limited thereto, and may be, for example, a quadrangular shape or a polygonal shape.

駆動手段5は、柱状バイト2の少なくとも一方端と連結し、当該駆動手段5を起動することにより柱状バイト2には長手に沿う軸について所定の回転動作を行わせる。あるいは回転動作ではなく、例えば正転,逆転の動作を交互に繰り返す往復動作を行わせるなど、適宜な運動動作を行うようにしてもよい。駆動手段5としては例えばNC工作機を用いればよく、ボール盤,旋盤,NC旋盤,フライス盤などの回転軸(チャック部)に柱状バイト2の軸部を取り付けして着脱を行うようにする。また、支持台3に対して振動駆動のための駆動手段を連結し、その駆動手段の駆動により支持台3を振動動作させるようにすることもできる。   The driving means 5 is connected to at least one end of the columnar cutting tool 2 and starts up the driving means 5 to cause the columnar cutting tool 2 to perform a predetermined rotating operation on the axis along the longitudinal direction. Alternatively, instead of the rotation operation, for example, an appropriate motion operation such as a reciprocation operation in which a forward rotation and a reverse operation are alternately repeated may be performed. As the driving means 5, for example, an NC machine tool may be used, and the shaft portion of the columnar tool 2 is attached to and detached from a rotating shaft (chuck portion) such as a drilling machine, a lathe, an NC lathe, or a milling machine. Further, driving means for vibration driving can be connected to the support base 3, and the support base 3 can be vibrated by driving the driving means.

磁気研磨液4は、磁性粒子および溶媒との2成分を含む。溶媒には植物油脂などを用いている。この磁気研磨液4は研磨対象1と柱状バイト2との狭間へ供給手段により供給するようになっている。   The magnetic polishing liquid 4 contains two components of magnetic particles and a solvent. Vegetable oil or the like is used as the solvent. This magnetic polishing liquid 4 is supplied by a supply means between the object 1 and the columnar tool 2.

磁性粒子としては、フェライト粒子や鉄粉等の金属粒子などを用いることができる。フェライト粒子は、酸化鉄を主成分とするセラミックスであり大半が強磁性を示し、磁化を持つため、磁界をかけることで当該粒子は磁気クラスタを形成する。鉄粉等の磁化し得る金属粒子でも同様であり、磁界をかけることで当該粒子は磁気クラスタを形成する。そして、セラミックスであるフェライト粒子や鉄粉等の金属粒子は、研磨対象1のフィルム形状体等に対しては十分に硬く、よって研磨のための砥粒として機能させることができ、磁気クラスタそのものが、緻密な削り作用による表面処理を行うための磁気ブラシとなる。また、研磨粒子自体が磁性をもつことにより、吸着効果が高くなり、飛散を防止することができる。   As magnetic particles, metal particles such as ferrite particles and iron powder can be used. Ferrite particles are ceramics mainly composed of iron oxide, and most of them show ferromagnetism and have magnetization. Therefore, when a magnetic field is applied, the particles form magnetic clusters. The same applies to magnetizable metal particles such as iron powder. When a magnetic field is applied, the particles form magnetic clusters. The metal particles such as ferrite particles and iron powder, which are ceramics, are sufficiently hard for the film-shaped body of the object 1 to be polished, and thus can function as abrasive grains for polishing. Thus, a magnetic brush for performing a surface treatment by a precise cutting action is obtained. Further, since the abrasive particles themselves have magnetism, the adsorption effect is enhanced and scattering can be prevented.

柱状バイト2の運動動作は、上述したように単なる回転動作や正転,逆転を繰り返す往復動作など、所定の運動動作を行わせる。このとき、柱状バイト2の周辺には磁気研磨液4を供給しておき、そして研磨対象1には、支持台3を振動動作させることにより所定の振動動作を行わせることもよい。   As described above, the motion of the columnar tool 2 is performed by a predetermined motion such as a simple rotational motion or a reciprocating motion that repeats normal rotation and reverse rotation. At this time, the magnetic polishing liquid 4 may be supplied to the periphery of the columnar bite 2 and the polishing target 1 may be caused to perform a predetermined vibration operation by vibrating the support base 3.

柱状バイト2と研磨対象1との間には磁気研磨液4が存在し、当該磁気研磨液4はフェライト粒子や鉄粉など磁性粒子を含み、永久磁石20により磁気研磨液4に時間的に定常的あるいは変動的な磁界が加わると磁気クラスタが生成する。つまり、磁気研磨液中のフェライト粒子や鉄粉など磁性粒子が、磁気吸引力により多数凝集して磁気クラス夕となる。そして前述したように、フェライト粒子や鉄粉など磁性粒子は研磨のための砥粒として機能し、磁気クラスタそのものが、緻密な削りを行う磁気ブラシとなる。磁気ブラシは、磁束に沿って研磨対象1に対立して針状に多数が立ち並び、砥粒作用を行うフェライト粒子が研磨対象1の表面に抑えつけられる。このとき、柱状バイト2と研磨対象1とは相対運動することから、フェライト粒子は研磨対象1の表面上を接触しつつ運動して緻密な削りを行う。よって、緻密な削り作用による表面処理を行うことができる。   There is a magnetic polishing liquid 4 between the columnar tool 2 and the object 1 to be polished, and the magnetic polishing liquid 4 contains magnetic particles such as ferrite particles and iron powder, and the permanent magnet 20 keeps the magnetic polishing liquid 4 in time. When a magnetic field or a variable magnetic field is applied, a magnetic cluster is generated. That is, a large number of magnetic particles such as ferrite particles and iron powder in the magnetic polishing liquid are aggregated by the magnetic attractive force to form a magnetic class. As described above, magnetic particles such as ferrite particles and iron powder function as abrasive grains for polishing, and the magnetic clusters themselves become magnetic brushes that perform precise shaving. A large number of magnetic brushes are arranged in a needle shape in opposition to the polishing object 1 along the magnetic flux, and ferrite particles that perform an abrasive action are held down on the surface of the polishing object 1. At this time, since the columnar tool 2 and the object 1 to be polished move relative to each other, the ferrite particles move while being in contact with the surface of the object 1 to be polished precisely. Therefore, it is possible to perform a surface treatment by a precise cutting action.

このように、磁気研磨のための柱状バイト2はその外周に永久磁石20による磁界発生源を複数設け、当該磁界発生源(20)は棒状本体の長手に延びる帯形状とすることから、研磨対象1と非接触に対面する磁界の作用領域が広くなる。このため、広い面積に対して磁界の作用が発揮し、幅が大きいフィルム形状体などの研磨対象1に対して好適に対応できる。   As described above, the columnar bite 2 for magnetic polishing is provided with a plurality of magnetic field generation sources by the permanent magnets 20 on the outer periphery, and the magnetic field generation source (20) has a strip shape extending in the longitudinal direction of the rod-shaped main body. The field of action of the magnetic field facing non-contact with 1 is widened. For this reason, the effect | action of a magnetic field is exhibited with respect to a wide area, and it can respond | correspond suitably with respect to grinding | polishing objects 1 such as a film-shaped body with a large width.

したがって、薄膜で比較的に幅が大きいフィルム形状体などの対象物に対して、外力が加わらない非接触の状態を保持し、微細な削り作用による表面処理を効率よく行うことができる。   Therefore, a non-contact state in which an external force is not applied to an object such as a film-shaped body that is a thin film and has a relatively large width can be maintained, and surface treatment by a fine shaving action can be efficiently performed.

上述したように、磁気研磨液4は組成をフェライト粒子や鉄粉など磁性粒子および溶媒を含むものとするので、フェライト粒子や鉄粉など磁性粒子は、いわゆる磁気研磨において磁気クラスタを形成する機能と、研磨のための研磨材(砥粒)の機能を発揮することになる。すなわち、磁気クラスタそのものが、緻密な削りを行う磁気ブラシとなり、砥粒であるフェライト粒子や鉄粉など磁性粒子は永久磁石20の磁界により磁気ブラシ内に留まり染み出すことがない。したがって、加工面の汚染がなく、砥粒の減少がないため、緻密な削り作用による表面処理を高効率に行うことができる。   As described above, since the magnetic polishing liquid 4 contains magnetic particles such as ferrite particles and iron powder and a solvent, the magnetic particles such as ferrite particles and iron powder have a function of forming a magnetic cluster in so-called magnetic polishing, and polishing. The function of the abrasive material (abrasive grain) will be exhibited. That is, the magnetic cluster itself becomes a magnetic brush that performs fine cutting, and magnetic particles such as ferrite particles and iron powder, which are abrasive grains, remain in the magnetic brush due to the magnetic field of the permanent magnet 20 and do not ooze out. Therefore, there is no contamination of the processed surface and there is no decrease in abrasive grains, so that surface treatment by a precise cutting action can be performed with high efficiency.

そして、フェライト粒子や鉄粉など磁性粒子が磁化を持ち、これによる磁気クラスタそのものが研磨のための磁気ブラシとなるので、磁気バイトにつく磁気ブラシの付着度が高くなり、柱状バイト2に連動する磁気ブラシのレスポンスが向上し、これによっても研磨効率が高くなる。   Since magnetic particles such as ferrite particles and iron powder are magnetized, and the magnetic cluster itself becomes a magnetic brush for polishing, the degree of adhesion of the magnetic brush attached to the magnetic bite is increased and interlocked with the columnar bite 2. The response of the magnetic brush is improved, and this also increases the polishing efficiency.

また、研磨対象1の表面に有機物などの汚れが付着している場合、有機物は当該研磨対象1と硬度が同程度であるため削り取ることが容易であり、フェライト粒子や鉄粉など磁性粒子による磁気ブラシの緻密な削り作用によって簡単に除去することができ、研磨対象1の表面を傷つけることなく表面処理としていわゆる洗浄が行える。   Further, when dirt such as organic matter adheres to the surface of the object 1 to be polished, the organic substance has the same hardness as that of the object 1 to be polished and can be easily scraped off. It can be easily removed by the fine shaving action of the brush, and so-called cleaning can be performed as a surface treatment without damaging the surface of the polishing object 1.

(実験による検証)
図1,図と2に示す表面処理装置により試料の研磨を行った。つまり、表面処理に関する本発明の効果を実証するため、所定の研磨条件において研磨対象の研磨を行い、研磨後の表面粗さRa(算術平均粗さ)を評価した。
(Verification by experiment)
The sample was polished by the surface treatment apparatus shown in FIGS. That is, in order to demonstrate the effect of the present invention relating to the surface treatment, the polishing target was polished under predetermined polishing conditions, and the surface roughness Ra (arithmetic average roughness) after polishing was evaluated.

磁気研磨液4は組成として、鉄粉,植物油脂あるいは水,樹脂剤とを用い、これらを均一に混合することにより2種類を調製した。つまり、磁気研磨液Sは溶媒を植物油脂としたもの、磁気研磨液Lは溶媒を水としたものである。   Two types of magnetic polishing liquid 4 were prepared by using iron powder, vegetable oil or fat or water, and a resin agent, and mixing them uniformly. That is, the magnetic polishing liquid S is obtained by using vegetable oil as a solvent, and the magnetic polishing liquid L is obtained by using water as a solvent.

研磨対象1は、Agを圧延して形成した厚さ50μmのフィルム形状体とし、その表面の研磨を行った。この研磨対象1に対して、柱状バイト2の位置を間隔1.0mmで対面する状態に調整し、研磨対象1には支持台3上で速度20mm/secの往復運動を行わせ、柱状バイト2には回転数500rpmの回転動作を行わせた。   The object 1 to be polished was a film-shaped body having a thickness of 50 μm formed by rolling Ag, and the surface was polished. The position of the columnar cutting tool 2 is adjusted to face the polishing object 1 with an interval of 1.0 mm, and the polishing object 1 is caused to reciprocate on the support 3 at a speed of 20 mm / sec. Was rotated at 500 rpm.

研磨時間を変えて測定を行ったところ、表面粗さRaについて、表1および図3に示す結果を得た。

Figure 2008290179
When the measurement was performed while changing the polishing time, the results shown in Table 1 and FIG. 3 were obtained for the surface roughness Ra.

Figure 2008290179

表1および図3から明らかなように、研磨時間が10分程度で表面粗さRaは25nmから29nm程度を得ており、表面の研磨を良好に行うことができる。その結果、鏡面仕上げ等の表面処理を効率よく良好に行えることを確認した。   As apparent from Table 1 and FIG. 3, the polishing time is about 10 minutes and the surface roughness Ra is about 25 nm to 29 nm, and the surface can be polished well. As a result, it was confirmed that surface treatment such as mirror finishing can be performed efficiently and satisfactorily.

(第2の実施の形態)
図4は本発明の第2の実施の形態を示している。本形態において、表面処理装置は、柱状バイト2が研磨対象1に対して上方に位置する配置を採り、柱状バイト2を上から覆う上部カバー6を設け、動作時に飛び散る磁気研磨液4を留めて下方へ滴下させる構成になっている。第1実施形態と同様な構成には同一符号を付してあり、その説明を省略する。
(Second Embodiment)
FIG. 4 shows a second embodiment of the present invention. In this embodiment, the surface treatment apparatus has an arrangement in which the columnar cutting tool 2 is positioned above the object 1 to be polished, is provided with an upper cover 6 that covers the columnar cutting tool 2 from above, and holds the magnetic polishing liquid 4 scattered during operation. It is configured to drop downward. The same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

研磨対象1はフィルム形状体であり、これは上流側の供給ロール7から繰り出して下流側の巻き取りロール8に巻き取るようになっている。これには複数のガイドローラ9を、支持台3を中央にして上流側,下流側に適宜に配置してあり、搬送路には上流側に磁気研磨液4を吐出させる供給ノズル10を配置し、下流側には洗浄液を吐出させる洗浄ノズル11を配置している。   The object 1 to be polished is a film-shaped body, which is fed from the upstream supply roll 7 and wound around the downstream winding roll 8. For this purpose, a plurality of guide rollers 9 are appropriately arranged on the upstream side and the downstream side with the support base 3 in the center, and a supply nozzle 10 for discharging the magnetic polishing liquid 4 is arranged on the upstream side in the transport path. A cleaning nozzle 11 for discharging the cleaning liquid is disposed on the downstream side.

磁気研磨の際には、磁気研磨液4は磁界発生源20の磁界により柱状バイト2の当該部位に多くが留まるが、柱状バイト2の運動動作に伴って飛び散りが生じる。この場合、飛び散った磁気研磨液4は上部カバー6に当たり留められて下方へ滴下し、研磨対象1上に付着するので再度の供給が始まる。したがって、飛び散った磁気研磨液4を循環的に再利用することができ、磁気研磨を効率よく行える。その結果、薄膜で比較的に幅が大きいフィルム形状体などの対象物に対して、微細な削り作用による表面処理の作業をより高効率に行うことができる。   At the time of magnetic polishing, a large amount of the magnetic polishing liquid 4 stays at the portion of the columnar bit 2 due to the magnetic field of the magnetic field generation source 20, but scattering occurs as the columnar bit 2 moves. In this case, the scattered magnetic polishing liquid 4 is caught by the upper cover 6 and dropped downward, and adheres onto the polishing target 1, so that the supply again starts. Therefore, the scattered magnetic polishing liquid 4 can be reused cyclically, and magnetic polishing can be performed efficiently. As a result, it is possible to more efficiently perform surface treatment work by a fine shaving action on an object such as a film-shaped body that is a thin film and has a relatively large width.

(第3の実施の形態)
図5は本発明の第3の実施の形態を示している。本形態において、表面処理装置は、柱状バイト2が研磨対象1に対して下方に位置する配置を採り、柱状バイト2を下から覆う下部カバー12を設けて、動作時に飛び散る磁気ペーストを留めて下方へ流下させる構成になっている。上述した他の実施形態と同様な構成には同一符号を付してあり、その説明を省略する。
(Third embodiment)
FIG. 5 shows a third embodiment of the present invention. In this embodiment, the surface treatment apparatus has an arrangement in which the columnar cutting tool 2 is positioned below the object 1 to be polished, and is provided with a lower cover 12 that covers the columnar cutting tool 2 from below, and holds down the magnetic paste scattered during operation. It is configured to flow down. The same components as those in the other embodiments described above are denoted by the same reference numerals, and the description thereof is omitted.

この場合、柱状バイト2を研磨対象1の下方(裏側)へ配置しているので、飛び散った磁気研磨液4は下部カバー12に当たり留められて滴下し、下部カバー12の底部分に溜まり、磁気研磨液4の溜まりレベルが所定以上になると、当該溜まり部位へ柱状バイト2が接触するので運動動作中の柱状バイト2表面へ付着して再度の供給が始まる。したがって、飛び散った磁気研磨液4を循環的に再利用することができ、磁気研磨を効率よく行える。その結果、薄膜で比較的に幅が大きいフィルム形状体などの対象物に対して、微細な削り作用による表面処理の作業をより高効率に行うことができる。   In this case, since the columnar tool 2 is arranged below (behind) the object 1 to be polished, the scattered magnetic polishing liquid 4 is held by the lower cover 12 and dropped, and collected at the bottom of the lower cover 12 to be magnetically polished. When the accumulation level of the liquid 4 exceeds a predetermined level, the columnar bite 2 comes into contact with the pooled part, so that it adheres to the surface of the columnar bite 2 in motion and starts to be supplied again. Therefore, the scattered magnetic polishing liquid 4 can be reused cyclically, and magnetic polishing can be performed efficiently. As a result, it is possible to more efficiently perform surface treatment work by a fine shaving action on an object such as a film-shaped body that is a thin film and has a relatively large width.

(第4の実施の形態)
図6は本発明の第4の実施の形態を示している。本形態において、表面処理装置は、柱状バイト2を2つ備え、研磨対象1に対して上方および下方とにそれぞれ配置し、研磨対象1の表裏を同時に流体研磨する構成になっている。そして、上方に位置する柱状バイト2は上部カバー6を設けて上から覆い、動作時に飛び散る磁気研磨液4を留めて下方へ滴下させ、下方に位置する柱状バイト2は下部カバー12を設けて下から覆い、動作時に飛び散る磁気ペーストを留めて下方へ流下させるようになっている。上述した他の実施形態と同様な構成には同一符号を付してあり、その説明を省略する。
(Fourth embodiment)
FIG. 6 shows a fourth embodiment of the present invention. In this embodiment, the surface treatment apparatus includes two columnar tools 2 and is arranged above and below the object 1 to be polished and fluidly polishes the front and back of the object 1 at the same time. The upper columnar bite 2 is provided with an upper cover 6 and covered from above, and the magnetic polishing liquid 4 scattered during operation is retained and dropped downward, while the lower columnar bite 2 is provided with a lower cover 12 The magnetic paste that scatters during operation is retained and allowed to flow downward. The same components as those in the other embodiments described above are denoted by the same reference numerals, and the description thereof is omitted.

この場合、柱状バイト2を研磨対象1の裏表に配置するので、表裏両面を同時に研磨することができる。そして、研磨対象1の表面側では、飛び散った磁気研磨液4は上部カバー6に当たり留められて下方へ滴下し、研磨対象1上に付着するので再度の供給が始まる。また、研磨対象1の側方から下方へ滴下する分は、下部カバー12へ向かう。研磨対象1の裏面側では、飛び散った磁気研磨液4は下部カバー12に当たり留められて滴下し、下部カバー12の底部分に溜まり、溜まりレベルが所定以上になると、運動動作中の柱状バイト2表面へ付着して再度の供給が始まる。   In this case, since the columnar tool 2 is arranged on the front and back of the object 1 to be polished, both the front and back surfaces can be polished simultaneously. Then, on the surface side of the polishing object 1, the scattered magnetic polishing liquid 4 hits the upper cover 6 and drops downward, and adheres onto the polishing object 1, so that the supply starts again. Further, the portion that drops downward from the side of the polishing object 1 is directed to the lower cover 12. On the back surface side of the object 1 to be polished, the scattered magnetic polishing liquid 4 hits the lower cover 12 and drops and accumulates on the bottom of the lower cover 12, and when the accumulation level exceeds a predetermined level, the surface of the columnar bite 2 during the movement operation Then, the supply starts again.

したがって、飛び散った磁気研磨液4は、研磨対象1の表面側,裏面側の両面において循環的に再利用することができ、磁気研磨を効率よく行える。その結果、薄膜で比較的に幅が大きいフィルム形状体などの対象物に対して、微細な削り作用による表面処理の作業をより高効率に行うことができる。   Therefore, the scattered magnetic polishing liquid 4 can be reused cyclically on both the front side and the back side of the polishing object 1, and the magnetic polishing can be performed efficiently. As a result, it is possible to more efficiently perform surface treatment work by a fine shaving action on an object such as a film-shaped body that is a thin film and has a relatively large width.

本発明に係る表面処理装置の第1の実施の形態を示す斜視図である。1 is a perspective view showing a first embodiment of a surface treatment apparatus according to the present invention. 図1に示す表面処理装置の側面図である。It is a side view of the surface treatment apparatus shown in FIG. 研磨時間と表面粗さとの関係を示すグラフである。It is a graph which shows the relationship between polishing time and surface roughness. 本発明に係る表面処理装置の第2の実施の形態を示す斜視図である。It is a perspective view which shows 2nd Embodiment of the surface treatment apparatus which concerns on this invention. 本発明に係る表面処理装置の第3の実施の形態を示す斜視図である。It is a perspective view which shows 3rd Embodiment of the surface treatment apparatus which concerns on this invention. 本発明に係る表面処理装置の第4の実施の形態を示す斜視図である。It is a perspective view which shows 4th Embodiment of the surface treatment apparatus which concerns on this invention.

符号の説明Explanation of symbols

1 研磨対象(対象物)
2 柱状バイト
20 永久磁石(磁界発生源)
3 支持台
4 磁気研磨液(磁気ペースト)
5 駆動手段
6 上部カバー
7 供給ロール
8 巻き取りロール
9 ガイドローラ
10 供給ノズル
11 洗浄ノズル
12 下部カバー
1 Polishing object (object)
2 Columnar tool 20 Permanent magnet (Magnetic field source)
3 Support base 4 Magnetic polishing liquid (magnetic paste)
5 Driving means 6 Upper cover 7 Supply roll 8 Take-up roll 9 Guide roller 10 Supply nozzle 11 Cleaning nozzle 12 Lower cover

Claims (5)

フィルム状の対象物に対して非接触の状態を保ち、周辺に存在させた磁気ペーストを連動することにより微細な削り作用による表面処理を行う柱状バイトであって、
前記柱状バイトは、棒状本体の外周に永久磁石等の磁界発生源を複数設け、
当該磁界発生源は、前記棒状本体の長手に延びる帯形状とし、前記棒状本体の少なくとも一方端と連結した駆動手段の駆動により当該棒状本体が長手に沿う軸について所定の運動動作を行うことを特徴とするフィルム状の対象物の表面処理のための柱状バイト。
A columnar bite that performs a surface treatment by a fine shaving action by keeping a non-contact state with respect to a film-like object and interlocking with a magnetic paste present in the periphery,
The columnar tool is provided with a plurality of magnetic field generating sources such as permanent magnets on the outer periphery of the rod-shaped main body,
The magnetic field generating source has a strip shape extending in the longitudinal direction of the rod-shaped main body, and the rod-shaped main body performs a predetermined motion operation on an axis along the longitudinal length by driving of a driving means connected to at least one end of the rod-shaped main body. A columnar tool for surface treatment of film-like objects.
請求項1に記載の柱状バイトと、当該柱状バイトへ連係して所定の運動動作を行わせる駆動手段とを備え、
前記柱状バイトは、前記対象物に対して前記磁界発生源が非接触に対面する配置とし、前記磁気ペーストには微細な削り作用を発揮する砥粒を混合しておき、当該磁気ペーストは前記対象物と前記柱状バイトとの間に存在させ、前記駆動手段を起動することにより前記柱状バイトには所定の運動動作を行わせ、前記磁界発生源の磁界により前記磁気ペーストに時間的に定常的あるいは変動的な磁界を加えて非接触の微細な削り作用による表面処理を行うことを特徴とする表面処理装置。
The columnar bite according to claim 1, and driving means for performing a predetermined motion operation in association with the columnar bite,
The columnar bite is disposed so that the magnetic field generation source faces the object in a non-contact manner, and the magnetic paste is mixed with abrasive grains that exhibit a fine shaving action, and the magnetic paste is the object The columnar bite is caused to move between the object and the columnar bite, and the driving means is activated to cause the columnar bite to perform a predetermined motion. A surface treatment apparatus characterized by applying a fluctuating magnetic field and performing surface treatment by a non-contact fine cutting action.
前記柱状バイトが前記対象物に対して上方に位置する配置において、当該柱状バイトを上から覆う上部カバーを設け、その上部カバーにて動作時に飛び散る前記磁気ペーストを留めて下方へ滴下させるように構成したことを特徴とする請求項2に記載の表面処理装置。   In the arrangement in which the columnar bite is positioned above the object, an upper cover is provided to cover the columnar bite from above, and the magnetic paste that scatters during operation is held by the upper cover and dropped downward. The surface treatment apparatus according to claim 2. 前記柱状バイトが前記対象物に対して下方に位置する配置において、当該柱状バイトを下から覆う下部カバーを設け、その下部カバーにて動作時に飛び散る前記磁気ペーストを留めて下方へ流下させることを特徴とする請求項2に記載の表面処理装置。   In the arrangement in which the columnar bite is positioned below the object, a lower cover is provided to cover the columnar bite from below, and the magnetic paste that scatters during operation is held by the lower cover to flow downward. The surface treatment apparatus according to claim 2. 前記磁気ペーストの組成は、前記砥粒はフェライト粒子や金属粒子などの磁性を有する磁性粒子とすることを特徴とする請求項2から4の何れか1項に記載の表面処理装置。   5. The surface treatment apparatus according to claim 2, wherein the composition of the magnetic paste is such that the abrasive grains are magnetic particles having magnetism such as ferrite particles and metal particles.
JP2007137513A 2007-05-24 2007-05-24 Columnar cutting tool for surface treatment of film-like object and surface treatment apparatus therewith Withdrawn JP2008290179A (en)

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