JP5499414B2 - Method for increasing shape restoring force of particle-dispersed mixed functional fluid using fluctuating magnetic field, polishing apparatus and polishing method using the same - Google Patents
Method for increasing shape restoring force of particle-dispersed mixed functional fluid using fluctuating magnetic field, polishing apparatus and polishing method using the same Download PDFInfo
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Description
本発明は、各種微細・複雑構造を有する精密加工部品の仕上げ研磨や金型の仕上げ研磨などに利用できる加工法と、これに用いる粒子分散型混合機能性流体の復元力増大方法に関する。 The present invention relates to a processing method that can be used for finish polishing of precision processed parts having various fine and complex structures, finish polishing of a mold, and the like, and a method for increasing the restoring force of a particle-dispersed mixed functional fluid used therefor.
各種微細・複雑構造を有する精密加工部品の仕上げ研磨や金型の仕上げ研磨工程は、複雑な自由曲面が多く存在する形状であり、従来技術では機械化・自動化が困難である。このため、製造現場ではこの工程は多くの場合に熟練工による手作業に頼らざるを得ず、多大なコストと時間が費やされている。仕上げ研磨工程の機械化・自動化を可能にする手段として、多種多様な部品形状に倣って変形ができ、かつ一定の圧力を発生することのできる柔軟な研磨工具と、これを利用した研磨法の考案が有効であると考えられる。柔軟な研磨工具として利用できるものとして、磁気的・物理的特性を調整することのできる粒子分散型混合機能性流体が考えられる（特許文献１）。すなわち、この流体を工作物形状に沿って変形する研磨パッドとスラリー（研磨剤）とみなし、研磨に利用するのである。粒子分散型混合機能性流体と同様に磁気に感応する機能性流体である磁性流体（水やオイル中に平均粒径数ｎｍのマグネタイト微粒子が高濃度で分散された流体）は流動性の高さから工作物形状に沿って変形と復元をするが、研磨抵抗が低いため高い研磨能率が期待できず、同様の機能性流体である磁気粘性流体（水やオイル中に平均粒径数μｍのマグネタイト鉄粒子が高濃度で分散した流体）は流動性の低さから高い研磨抵抗が発生し、高い研磨能率が期待できるが一度変形すると復元し難い。一方、粒子分散型混合機能性流体は磁性流体と磁気粘性流体の特長を併せ持つため、高い形状復元力を示しながらも高能率研磨が期待できる。しかしながら、特許文献１に挙げた粒子分散型混合機能性流体と磁場の印加、無印加といったことを繰り返す変動磁場（交流磁界）を利用した研磨法では、大きな被加工面の凹凸に倣って粒子分散型混合機能性流体が変形して一定の圧力を発生しながら高精度・高能率研磨を実現するには、形状復元力が不十分である。 The finish polishing of precision processed parts having various fine and complex structures and the finish polishing process of molds have many complicated free-form surfaces, and it is difficult to mechanize and automate them with the conventional technology. For this reason, at the manufacturing site, this process often has to rely on manual work by skilled workers, and a great deal of cost and time are spent. As a means to enable mechanization and automation of the final polishing process, a flexible polishing tool that can be deformed following a wide variety of component shapes and can generate a certain pressure, and a polishing method using the same Is considered effective. As a material that can be used as a flexible polishing tool, a particle-dispersed mixed functional fluid capable of adjusting magnetic and physical properties is conceivable (Patent Document 1). That is, this fluid is regarded as a polishing pad and a slurry (abrasive) that are deformed along the shape of the workpiece, and is used for polishing. Magnetic fluid (fluid in which magnetite fine particles with an average particle size of several nanometers are dispersed at a high concentration in water or oil), which is a functional fluid that is sensitive to magnetism like a particle-dispersed mixed functional fluid, has high fluidity It is deformed and restored along the shape of the workpiece, but high polishing efficiency cannot be expected due to low polishing resistance. Magnetorheological fluid (magnetite with an average particle size of several μm in water or oil) is a similar functional fluid. (A fluid in which iron particles are dispersed at a high concentration) generates a high polishing resistance due to its low fluidity, and a high polishing efficiency can be expected, but it is difficult to restore once deformed. On the other hand, since the particle-dispersed mixed functional fluid has both the characteristics of a magnetic fluid and a magnetorheological fluid, high-efficiency polishing can be expected while exhibiting a high shape restoring force. However, in the polishing method using the particle-dispersed mixed functional fluid listed in Patent Document 1 and a variable magnetic field (alternating magnetic field) that repeats application and non-application of a magnetic field, particle dispersion follows the unevenness of a large work surface. The shape restoring force is insufficient to realize high-precision and high-efficiency polishing while the mold mixed functional fluid is deformed to generate a constant pressure.
粒子分散型混合機能性流体は、凹凸の大きな微細、複雑形状の被加工物に対する研磨工具としては形状復元力が十分ではなく、研磨能率も低い。 The particle-dispersed mixed functional fluid does not have a sufficient shape restoring force and has a low polishing efficiency as a polishing tool for a fine and complex workpiece having large irregularities.
本発明は前記に鑑み提案されたものであって、粒子分散型混合機能性流体にネオジ磁石（Ｎｄ-Ｆｅ-Ｂ）を公転させることで発生する回転変動磁場を印加し、粒子分散型混合機能性流体中の磁性粒子の磁力線方向への配列作用を促進することによる形状復元力の増大方法と、これを利用した研磨技術に関するものである。 The present invention has been proposed in view of the above, and applies a rotationally varying magnetic field generated by revolving a neodymium magnet (Nd-Fe-B) to a particle-dispersed mixed functional fluid, thereby providing a particle-dispersed mixed function The present invention relates to a method for increasing the shape restoring force by accelerating the alignment action of magnetic particles in a magnetic fluid in the direction of the lines of magnetic force, and a polishing technique using the method.
微細・複雑形状の部品や金型の全面を自動的に高精度に研磨できる技術は、未だ確立されていない。例えば、熟練工の手作業による金型仕上げ工程を本研磨法で実現できれば、大幅なコスト削減、迅速化が期待できる。本発明は、安価で高機能・高性能な機器の製造を助け、大きな経済効果を生み出すことができるものと考えられる。 No technology has yet been established that can automatically and precisely polish the entire surface of fine and complex shaped parts and molds. For example, if a mold finishing process by a skilled worker can be realized by this polishing method, significant cost reduction and speedup can be expected. The present invention is considered to be able to help manufacture inexpensive, high-functionality, high-performance equipment and produce a great economic effect.
まず、本発明の変動磁場を援用した粒子分散型混合機能性流体における形状復元力の増大手法について説明する。磁場発生源としては、ネオジ（Ｎｄ-Ｆｅ-Ｂ）磁石もしくは電磁石が用いられる。 First, a method for increasing the shape restoring force in the particle-dispersed mixed functional fluid using the variable magnetic field of the present invention will be described. A neodymium (Nd—Fe—B) magnet or an electromagnet is used as the magnetic field generation source.
本発明で利用する変動磁場は、静磁場（直流磁界）発生源を回転させることによって発生する回転変動磁場であり、特許文献１における磁場の印加、無印加といったことを繰り返す変動磁場（交流磁界）とは異なり、磁力線の方向を変動させる変動磁場である。また、特許文献１においてのような変動磁場は砥粒に運動を与えるのではなく、粒子分散型混合機能性流体の形状復元力を増大することが主目的である。 The fluctuating magnetic field used in the present invention is a rotating fluctuating magnetic field generated by rotating a static magnetic field (DC magnetic field) generation source, and fluctuating magnetic field (AC magnetic field) that repeats application and non-application of the magnetic field in Patent Document 1. Unlike, it is a fluctuating magnetic field that fluctuates the direction of the magnetic field lines. The main purpose of the variable magnetic field as in Patent Document 1 is not to give movement to the abrasive grains but to increase the shape restoring force of the particle-dispersed mixed functional fluid.
粒子分散型混合機能性流体は、(a)強磁性粒子（材質：カルボニル鉄粉、平均粒径１〜１０μｍ）、(b)磁性微粒子（材質：マグネタイト、平均粒径１〜１０ｎｍ）、(b)砥粒微粒子（材質：アルミナ砥粒やダイヤモンド砥粒、セリウム砥粒等の研磨材、平均粒径０．０１μｍ〜１０μｍ）、 (d)分散媒（水、油等）が用いられた流体である。 The particle-dispersed mixed functional fluid includes (a) ferromagnetic particles (material: carbonyl iron powder, average particle size 1 to 10 μm), (b) magnetic fine particles (material: magnetite, average particle size 1 to 10 nm), (b ) Abrasive fine particles (Material: Abrasives such as alumina abrasive grains, diamond abrasive grains, cerium abrasive grains, average particle diameter 0.01 μm to 10 μm), (d) fluid using dispersion medium (water, oil, etc.) is there.
偏心距離１４でスピンドル１下端面に固定されたディスク状かブロック状永久磁石３をモーター２により公転８させる。磁石の下には、非磁性板４が一定の間隙δ１０で設置されており、非磁性板４下に供給された粒子分散型混合機能性流体５は、永久磁石３によって磁力保持される。永久磁石３の公転８によって粒子分散型混合機能性流体５には回転変動磁場が印加され、磁力線６の作用位置と方向の変動により、粒子分散型混合機能性流体５の磁性粒子ブラシが動的挙動を示す。この動的挙動が粒子分散型混合機能性流体５の粒子配列作用を促進し、高い形状復元力を示す。粒子分散型混合機能性流体５中では、特長である(a)強磁性粒子、(b)磁性微粒子によって、長く柔らかい磁性粒子ブラシ(磁性針状体)が形成される。 (c)砥粒微粒子は非磁性であることから、磁気浮揚現象や重力により粒子分散型混合機能性流体５表面に押し出されて砥粒層ができ、この砥粒層中の砥粒が磁性粒子ブラシにより保持される。このとき、被加工物７を回転９、揺動１６させながら非磁性板４との間隙Δ１１である状態で粒子分散型混合機能性流体５に押し付けると砥粒が被加工物表面を擦過して表面が研磨される。 A disk-like or block-like permanent magnet 3 fixed to the lower end surface of the spindle 1 at an eccentric distance 14 is revolved 8 by a motor 2. A non-magnetic plate 4 is installed below the magnet with a constant gap δ 10, and the particle-dispersed mixed functional fluid 5 supplied below the non-magnetic plate 4 is magnetically held by the permanent magnet 3. A rotationally varying magnetic field is applied to the particle-dispersed mixed functional fluid 5 by the revolution 8 of the permanent magnet 3, and the magnetic particle brush of the particle-dispersed mixed functional fluid 5 is dynamically moved by fluctuations in the action position and direction of the magnetic force lines 6. Shows behavior. This dynamic behavior promotes the particle arrangement action of the particle-dispersed mixed functional fluid 5 and exhibits a high shape restoring force. In the particle dispersion type mixed functional fluid 5, a long and soft magnetic particle brush (magnetic needle) is formed by the features (a) ferromagnetic particles and (b) magnetic fine particles. (c) Since the abrasive fine particles are non-magnetic, they are pushed out to the surface of the particle-dispersed mixed functional fluid 5 by a magnetic levitation phenomenon or gravity to form an abrasive layer, and the abrasive grains in the abrasive layer are magnetic particles. It is held by a brush. At this time, when the workpiece 7 is rotated 9 and oscillated 16 and pressed against the particle-dispersed mixed functional fluid 5 in the state of the gap Δ11 with the non-magnetic plate 4, the abrasive grains rub against the workpiece surface. The surface is polished.
このように本発明の加工法は、前記構成の粒子分散型混合機能性流体に先述のような回転変動磁場を与えながら加工を行うものであって、その際の流体としては、前記分散媒に(a)強磁性粒子と(ｃ)砥粒微粒子とを分散させた二成分系の流体よりも、(a)強磁性粒子と(ｂ)磁性微粒子と（ｃ）砥粒微粒子とを分散させた三成分系の流体の方がより大きな形状復元力を示し、精微な加工を実施できる。即ち前記(a)強磁性粒子の周囲を覆って距離を広げて吸引力を低下して平均化する作用は(b)磁性微粒子と(d)分散媒の混合液（磁性流体）により得られるからである。 As described above, the processing method of the present invention performs processing while applying the rotationally varying magnetic field as described above to the particle-dispersed mixed functional fluid having the above-described configuration. (a) Ferromagnetic particles, (b) magnetic fine particles, and (c) abrasive fine particles were dispersed rather than a binary fluid in which ferromagnetic particles and (c) fine abrasive particles were dispersed. A three-component fluid exhibits a greater shape restoring force and can perform fine processing. That is, (a) the action of covering the periphery of the ferromagnetic particles, extending the distance and reducing the attractive force, and averaging is obtained by (b) a mixture of magnetic fine particles and (d) a dispersion medium (magnetic fluid). It is.
実施例１ 粒子分散型混合機能性流体における形状復元力の比較
図１の加工原理を具現化して自製した加工装置を用いて、粒子分散型混合機能性流体における形状復元力の比較を行った。偏心距離５ｍｍでディスク状ネオジ磁石（Ｎｄ−Ｆｅ−Ｂ、寸法：φ１８×１０ｍｍ、残留磁束密度：１．２４Ｔ、保磁力:９２３ｋＡ/ｍ、表面磁束密度（ホールプローブによる実測値）：０．４１Ｔ）を、モーターにより回転数１０００ｒｐｍで公転運動させた。非磁性板にはアルミ板を用い、間隙δは０．５ｍｍとした。なお、アルミ板に生じる渦電流の影響は大きくないことが確認済みである。粒子分散型混合機能性流体の構成比を表１に示す。また、その供給量は１ｍＬとした。工作物には挙動の観察を容易にするためにアクリル板を用い、静磁場、変動磁場下それぞれにおいて、押し付け前後における粒子分散型混合機能性流体の形状の相違を観察した。
Example 1 Comparison of Shape Restoring Force in Particle-Dispersed Mixed Functional Fluid Using a processing apparatus that self-manufactured the processing principle of FIG. 1, the shape restoring force in a particle-dispersed mixed functional fluid was compared. Disk-shaped neodymium magnet with an eccentric distance of 5 mm (Nd-Fe-B, dimensions: φ18 × 10 mm, residual magnetic flux density: 1.24 T, coercive force: 923 kA / m, surface magnetic flux density (actually measured with a Hall probe): 0.41 T ) Was revolved at a rotational speed of 1000 rpm by a motor. An aluminum plate was used as the nonmagnetic plate, and the gap δ was set to 0.5 mm. It has been confirmed that the influence of eddy current generated in the aluminum plate is not large. Table 1 shows the composition ratio of the particle-dispersed mixed functional fluid. The supply amount was 1 mL. In order to facilitate the observation of the behavior of the workpiece, an acrylic plate was used, and the difference in the shape of the particle-dispersed mixed functional fluid before and after pressing was observed under static and variable magnetic fields.
実施例２ 微細溝形状被加工物の研磨加工
図１の加工原理を具現化して自製した加工装置を用いて、変動磁場を印加しながら微細溝形状被加工物の研磨加工を行った。被加工物には高硬度非磁性快削鋼ＨＰＭ７５、溝幅４５０μｍ、溝深さ２００μｍとした。溝はエンドミルで作製し、溝上部は研削仕上げした。工作物回転数ｎｗは１５０ｒｐｍとし、送り速度５ｍｍ/ｓ、送り振幅１５ｍｍとした。加工条件は実施例１と同様である。なお、２０分毎に粒子分散型混合機能性流体を新しいものと交換し、１８０分間研磨を行った。
Example 2 Polishing of Fine Groove Shaped Workpiece Using a processing apparatus made by embodying the processing principle of FIG. 1, the fine groove shaped work piece was polished while applying a variable magnetic field. The workpiece had a high hardness nonmagnetic free-cutting steel HPM75, a groove width of 450 μm, and a groove depth of 200 μm. The groove was produced by an end mill, and the upper part of the groove was ground. Workpiece rotational speed n w is a 150 rpm, and feed rate 5 mm / s, a feed amplitude 15 mm. The processing conditions are the same as in Example 1. Every 20 minutes, the particle-dispersed mixed functional fluid was replaced with a new one, and polishing was performed for 180 minutes.
〔評価〕
（粒子分散型混合機能性流体の形状の観察）
ビデオカメラを用いて観察した。結果を図２に示した。
（被加工面の表面粗さ）
研磨加工前後の表面粗さ（Ｒａ）をキーエンス社製三次元レーザー顕微鏡「ＶＫ-８７１０」を用いて測定した。結果を表２、図３に示した。
[Evaluation]
(Observation of shape of particle-dispersed mixed functional fluid)
Observation was performed using a video camera. The results are shown in FIG.
(Surface roughness of work surface)
The surface roughness (Ra) before and after polishing was measured using a 3D laser microscope “VK-8710” manufactured by Keyence Corporation. The results are shown in Table 2 and FIG.
粒子分散型混合機能性流体における形状復元力の比較を行った実施例１において、図２より、静磁場下では押し付けられた部分の粒子分散型混合機能性流体の形状が復元されていないのに対し、変動磁場下では形状が元の形状に復元していることが確認できる。よって、変動磁場による形状復元力を確認することができる。 In Example 1 where the shape restoring force in the particle dispersion type mixed functional fluid was compared, from FIG. 2, the shape of the pressed particle dispersion type mixed functional fluid was not restored under the static magnetic field. On the other hand, it can be confirmed that the shape is restored to the original shape under the varying magnetic field. Therefore, the shape restoring force due to the varying magnetic field can be confirmed.
一方、研磨加工を行った実施例２においては、大きな形状の崩れもなく研磨前後の表面粗さの平滑化やエッジ部のバリが低減しており（図３）、表面粗さは研磨後により小さな値となることが確認された（表２）。このことから、研磨前の表面形状を維持したままで表面粗さのみを平滑化する（面精度を高める）倣い研磨が行われたものと推察される。 On the other hand, in Example 2 in which the polishing process was performed, the surface roughness before and after the polishing was smoothed and the burrs at the edges were reduced without any significant deformation of the shape (FIG. 3). A small value was confirmed (Table 2). From this, it is surmised that copying polishing was performed in which only the surface roughness was smoothed (the surface accuracy was increased) while maintaining the surface shape before polishing.
以上説明したように、本発明の粒子分散型混合機能性流体の形状復元力増大方法及びそれを利用した加工法は、従来多くの場合に人による手加工に頼らざるを得なかった三次元形状に対する仕上げ研磨を、機械化・自動化を実施できるものである。これは、熟練工の手作業によるコスト高の問題や多大な加工時間の問題を解決する手段として利用できる。 As described above, the method for increasing the shape restoring force of the particle-dispersed mixed functional fluid of the present invention and the processing method using the same are three-dimensional shapes that had to be relied on manually by humans in many cases. Can be mechanized and automated. This can be used as a means for solving the problem of high cost due to manual work of a skilled worker and the problem of great processing time.
１ スピンドル
２ モーター（回転動力源）
３ ２１ 磁石
４ ２２ 非磁性板
５ ２３ 粒子分散型混合機能性流体
６ 磁力線
７ ２４ 被工作物（被磁性材料）
８ ２５ モーターの回転（回転速度ｎｓ）
９ 被加工物テーブルの回転（回転速度ｎｗ）
１０ 間隙δ（磁石と被磁性板）
１１ 間隙Δ（非磁性板と被加工物）
１２ ２６ 中心軸（モーターの回転、被加工物テーブル）
１３ ２７ 中心軸（磁石）
１４ 偏心距離
１５ ２８ 磁化の方向
１６ 被加工物テーブルの送り
３１ 未加工面（微細溝曲部）
３２ 未加工面（微細溝）
３３ 研磨後加工面（微細溝曲部）
３４ 研磨後加工面（微細溝）
1 Spindle 2 Motor (Rotary power source)
3 21 Magnet 4 22 Non-magnetic plate 5 23 Particle dispersion type mixed functional fluid 6 Magnetic field line 7 24 Workpiece (magnetic material)
8 25 Motor rotation (rotation speed n s )
9 Workpiece table rotation (rotation speed nw )
10 Gap δ (Magnet and magnetized plate)
11 Gap Δ (Non-magnetic plate and workpiece)
12 26 center axis (motor rotation, workpiece table)
13 27 Central axis (magnet)
14 Eccentric distance 15 28 Magnetization direction 16 Workpiece table feed 31 Unprocessed surface (fine groove curve)
32 Unprocessed surface (fine groove)
33 Surface after grinding (curved groove)
34 Surface after polishing (fine grooves)
Claims (5)
強磁性粒子（材質：カルボニル鉄粉、平均粒径１〜１０μｍ）、
磁性微粒子（材質：マグネタイト、平均粒径１〜１０ｎｍ）、
砥粒微粒子（材質：アルミナ砥粒やダイヤモンド砥粒、セリウム砥粒等の研磨材、平均粒径０．０１μｍ〜１０μｍ）、
分散媒（水、油等）のすべてが混合された流体である請求項１又は２又は３に記載の方法。 The particle-dispersed mixed functional fluid is
Ferromagnetic particles (material: carbonyl iron powder, average particle size 1-10 μm),
Magnetic fine particles (material: magnetite, average particle size 1 to 10 nm),
Abrasive fine particles (Material: Alumina abrasive, diamond abrasive, cerium abrasive, etc., average particle size 0.01 μm to 10 μm),
The method according to claim 1, 2 or 3, wherein all of the dispersion medium (water, oil, etc.) is a mixed fluid .
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| JP2009063034A JP5499414B2 (en) | 2009-03-16 | 2009-03-16 | Method for increasing shape restoring force of particle-dispersed mixed functional fluid using fluctuating magnetic field, polishing apparatus and polishing method using the same |
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