JP2008280195A - Cnt成長方法 - Google Patents
Cnt成長方法 Download PDFInfo
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- JP2008280195A JP2008280195A JP2007124119A JP2007124119A JP2008280195A JP 2008280195 A JP2008280195 A JP 2008280195A JP 2007124119 A JP2007124119 A JP 2007124119A JP 2007124119 A JP2007124119 A JP 2007124119A JP 2008280195 A JP2008280195 A JP 2008280195A
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Abstract
【解決手段】CNT成長用触媒層として触媒金属の酸化物層を有してなる基板を用い、この基板に対してCNT成長用プロセスガスを供給し、この基板上にCNTを成長させるCNT成長方法において、CNT成長プロセス中に、プロセスガスより触媒金属の酸化物を還元させ、この触媒金属上にCNTを成長させる。
【選択図】なし
Description
13 回転駆動手段 14 加熱手段
15 同軸型真空アーク蒸着源 15a カソード電極
15b アノード電極 15c トリガ電極
15d 絶縁碍子 15e トリガ電源
15f アーク電源 15g 直流電圧源
15h コンデンサユニット 16 酸化性ガス導入系
16a、16c バルブ 16b マスフローコントローラ
16d ガスボンベ 17 真空排気系
17a コンダクタンスバルブ 17b ターボ分子ポンプ
17c バルブ 17d ロータリーポンプ
18 コントローラ S 基板
Claims (6)
- CNT成長用触媒層として触媒金属の酸化物層を有してなる基板を用い、この基板に対してCNT成長用プロセスガスを供給し、この基板上にCNTを成長させるCNT成長方法において、CNT成長プロセス中に、該プロセスガスより触媒金属の酸化物を還元させ、この触媒金属上にCNTを成長させることを特徴とするCNT成長方法。
- 前記CNT成長用触媒層としての触媒金属の酸化物層を、酸化性雰囲気中での触媒金属の酸化物層の形成工程により形成することを特徴とする請求項1記載のCNT成長方法。
- 前記CNT成長用触媒層としての触媒金属の酸化物層を、非酸化性雰囲気中での触媒金属層の形成工程及びその後の酸化性雰囲気中での触媒金属の酸化物層の形成工程により形成することを特徴とする請求項1又は2記載のCNT成長方法。
- 前記CNT成長用触媒層としての触媒金属の酸化物層を、スパッタリング法、EB蒸着法、レーザーアブレーション法、又は同軸型真空アーク蒸着源法で形成することを特徴とする請求項1〜3のいずれか1項に記載のCNT成長方法。
- 前記CNT成長用触媒層としての触媒金属の酸化物層の形成時に、基板を加熱しながら成膜することを特徴とする請求項1〜4のいずれか1項に記載のCNT成長方法。
- 前記酸化性雰囲気が、酸素ガス、水蒸気、一酸化炭素ガス及び二酸化炭素ガスから選ばれたガス雰囲気であることを特徴とする請求項1〜5のいずれか1項に記載のCNT成長方法。
Priority Applications (1)
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JP2007124119A JP5052954B2 (ja) | 2007-05-09 | 2007-05-09 | Cnt成長方法 |
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JP2007124119A JP5052954B2 (ja) | 2007-05-09 | 2007-05-09 | Cnt成長方法 |
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JP2008280195A true JP2008280195A (ja) | 2008-11-20 |
JP5052954B2 JP5052954B2 (ja) | 2012-10-17 |
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JP2007124119A Active JP5052954B2 (ja) | 2007-05-09 | 2007-05-09 | Cnt成長方法 |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010163331A (ja) * | 2009-01-19 | 2010-07-29 | Toshiba Corp | カーボンナノチューブ成長方法とカーボンナノチューブ束形成基板 |
WO2010089860A1 (ja) * | 2009-02-04 | 2010-08-12 | 国立大学法人信州大学 | カーボンナノチューブの製造方法 |
US7800010B2 (en) | 2007-03-08 | 2010-09-21 | Fanuc Ltd | Wire-cut electric discharge machine having wire tension control function |
US7888617B2 (en) | 2007-04-10 | 2011-02-15 | Fanuc Ltd | Controller for wire-cut electrical discharge machine |
JP2011207733A (ja) * | 2010-03-30 | 2011-10-20 | Toshiba Corp | カーボンナノチューブ集合体、太陽電池、及び導波路及びカーボンナノチューブ集合体付き基板 |
US8202504B2 (en) | 2009-02-04 | 2012-06-19 | Shinshu University | Method for manufacturing carbon nanotubes |
JP2012176856A (ja) * | 2011-02-25 | 2012-09-13 | Tokyo Electron Ltd | カーボンナノチューブの形成方法、その前処理方法、電子放出素子及び照明装置 |
JP2012176855A (ja) * | 2011-02-25 | 2012-09-13 | Tokyo Electron Ltd | カーボンナノチューブの形成方法及び前処理方法 |
US8333947B2 (en) | 2009-05-21 | 2012-12-18 | Shinshu University | Method of manufacturing carbon nanotubes |
CN105923621A (zh) * | 2016-05-06 | 2016-09-07 | 东南大学 | 一种利用电子束诱导淀积制备纳米管道的方法 |
JP2018043238A (ja) * | 2017-11-15 | 2018-03-22 | 日立化成株式会社 | カーボンナノチューブ合成用触媒の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007031271A (ja) * | 2005-07-22 | 2007-02-08 | Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi | カーボンナノチューブのマトリックスの製造方法 |
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2007
- 2007-05-09 JP JP2007124119A patent/JP5052954B2/ja active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007031271A (ja) * | 2005-07-22 | 2007-02-08 | Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi | カーボンナノチューブのマトリックスの製造方法 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7800010B2 (en) | 2007-03-08 | 2010-09-21 | Fanuc Ltd | Wire-cut electric discharge machine having wire tension control function |
US7888617B2 (en) | 2007-04-10 | 2011-02-15 | Fanuc Ltd | Controller for wire-cut electrical discharge machine |
JP2010163331A (ja) * | 2009-01-19 | 2010-07-29 | Toshiba Corp | カーボンナノチューブ成長方法とカーボンナノチューブ束形成基板 |
US8609199B2 (en) | 2009-01-19 | 2013-12-17 | Kabushiki Kaisha Toshiba | Carbon nanotube growing process, and carbon nanotube bundle formed substrate |
US8202504B2 (en) | 2009-02-04 | 2012-06-19 | Shinshu University | Method for manufacturing carbon nanotubes |
US8192714B2 (en) | 2009-02-04 | 2012-06-05 | Shinshu University | Method for manufacturing carbon nanotubes |
WO2010089860A1 (ja) * | 2009-02-04 | 2010-08-12 | 国立大学法人信州大学 | カーボンナノチューブの製造方法 |
US8333947B2 (en) | 2009-05-21 | 2012-12-18 | Shinshu University | Method of manufacturing carbon nanotubes |
JP2011207733A (ja) * | 2010-03-30 | 2011-10-20 | Toshiba Corp | カーボンナノチューブ集合体、太陽電池、及び導波路及びカーボンナノチューブ集合体付き基板 |
JP2012176856A (ja) * | 2011-02-25 | 2012-09-13 | Tokyo Electron Ltd | カーボンナノチューブの形成方法、その前処理方法、電子放出素子及び照明装置 |
JP2012176855A (ja) * | 2011-02-25 | 2012-09-13 | Tokyo Electron Ltd | カーボンナノチューブの形成方法及び前処理方法 |
CN105923621A (zh) * | 2016-05-06 | 2016-09-07 | 东南大学 | 一种利用电子束诱导淀积制备纳米管道的方法 |
JP2018043238A (ja) * | 2017-11-15 | 2018-03-22 | 日立化成株式会社 | カーボンナノチューブ合成用触媒の製造方法 |
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JP5052954B2 (ja) | 2012-10-17 |
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