JP2008277730A - Defect inspection apparatus, defect inspection program, figure drawing apparatus, and figure drawing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a technique which can detect a defect in run-length data to be used for drawing of a figure before the execution of drawing, with a simple structure. <P>SOLUTION: Input CAD data D1 and run-length data D2 obtained by performing a RIP process on the input CAD data D1 are acquired. Then a predetermined conversion process is performed on at least one of the input CAD data D1 and the run-length data D2 to make the data formats of both data comparable, and then both data are compared with each other to detect an area having a difference as a defect area in the run-length data D2. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a technique for inspecting defects in run-length data obtained by RIP processing input data describing a figure to be drawn and used for drawing the figure. For example, a circuit pattern of a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, a glass substrate for plasma display, a substrate for an optical disk (hereinafter simply referred to as “substrate”) is drawn directly on a resist from CAD data. The present invention relates to a technique for inspecting defects in run-length data provided at the time.

  With the recent increase in integration and complexity of semiconductor integrated circuits, it is essential to switch from the business model for small-lot mass production such as DRAM (Dynamic Random Access Memory) to the business model for high-mix low-volume production such as system LSI. It has become to. In addition, circuit patterns such as system LSIs are becoming finer year by year, and the development costs are enormous.

  Conventionally, pattern drawing on a substrate (more specifically, pattern drawing (exposure) by photolithography) creates a photomask by drawing a circuit pattern created and edited by a CAD system on a film with a laser, A method of transferring a circuit pattern onto a substrate using the photomask has been adopted. However, this photomask is very expensive because it is finely processed with high precision, and there is a problem that it is not suitable for high-mix low-volume production in terms of cost.

  Therefore, in order to reduce development costs for system LSIs and the like, a pattern drawing method that does not use a photomask (that is, a method of drawing a circuit pattern directly on a resist from CAD data without using a photomask. "Drawing method") has been introduced.

  In a device that draws a circuit pattern by the direct drawing method (hereinafter referred to as “direct drawing device”), run-length data (Raster Image Processor) obtained by processing CAD data describing a circuit pattern to be drawn (Raster Image Processor) Drawing is executed by interpreting a plurality of horizontal (or vertical) line segment start point positions and lengths).

  By the way, the run-length data acquired by the RIP process may have a defect (that is, a difference from the description contents of the CAD data) due to erroneous conversion in the RIP process. If the run-length data is defective, correct drawing is not performed. Therefore, when performing drawing, it is necessary to perform a step of verifying whether or not correct drawing can be executed based on run-length data having no defect.

  In the case of a pattern drawing method using a photomask, a photomask is always generated before the drawing is executed. Therefore, it is possible to verify whether correct drawing can be performed by inspecting this photomask.

  However, in the case of a direct drawing method that does not use a photomask, drawing is performed without generating a photomask, so that it is impossible to inspect run-length data for defects using the photomask. Conventionally, in the case of the direct drawing method, drawing on the substrate is once executed and the drawn circuit pattern is inspected. For example, the defect was inspected by visually confirming the circuit pattern of the substrate after development, or by inspecting an image (captured image) obtained by imaging the circuit pattern of the substrate after development. (See Patent Document 1).

  According to this configuration, a defect in run-length data can be detected only after drawing is executed once. That is, even if a defect has occurred in the run-length data acquired by the RIP process, the defect cannot be detected before the drawing is executed, so that the drawing process based on the defective run-length data is executed. The substrate obtained by this is wasted.

  In order to prevent the generation of such a useless sample, a technique has also been proposed that makes it possible to detect a run-length data defect before performing drawing. For example, run-length data (run-length data used for drawing) obtained from CAD data by RIP processing and run-length data (verification run data) obtained from the CAD data using an algorithm different from the RIP processing. A method for detecting defects occurring in run-length data used for drawing has been proposed (see Patent Document 2).

JP 2001-337041 A JP 2004-56068 A

  According to the above configuration, since the defect in the run length data can be detected before the drawing is performed, there is an advantage that the sample is not wasted. However, in this configuration, in addition to a functional unit that executes RIP processing for acquiring run-length data that is actually used for drawing, a functional unit that executes RIP processing defined by an algorithm different from the RIP processing. Will be necessary. That is, a plurality of RIP processing function units are required, and a plurality of RIP processes are required to detect a defect. This increases the processing load associated with defect detection and increases the processing time.

  Therefore, there has been a demand for a technique that can detect a defect in run-length data with a simpler configuration before executing drawing.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of detecting a defect in run-length data used for drawing a graphic before the drawing is performed with a simple configuration. Yes.

  The invention according to claim 1 is a defect inspection apparatus for inspecting defects in run-length data used for drawing graphics, wherein input data acquisition means for acquiring input data describing a graphic to be drawn, and the input data The run length data acquisition means for acquiring the run length data acquired by RIP processing is compared with the input data and the run length data. Defect detection means for detecting a defect area of length data.

  The invention according to claim 2 is the defect inspection apparatus according to claim 1, wherein when the defect area is detected in the run length data, the defect area is repaired to obtain repair run length data. Means.

  A third aspect of the present invention is the defect inspection apparatus according to the first or second aspect, wherein the defect detection means performs a predetermined conversion on at least one of the input data and the run-length data. Data format conversion means for executing processing and aligning both data in a data format that can be compared with each other.

  A fourth aspect of the present invention is the defect inspection apparatus according to the third aspect, wherein the data format conversion means executes a graphic process on the run-length data to form a graphic of the run-length data. Difference area data specifying the difference area by calculating an exclusive OR of the figured run length data and the input data. And a different area specifying means for acquiring.

  A fifth aspect of the present invention is the defect inspection apparatus according to the fourth aspect, wherein the defect detection means calculates a logical product of the difference area data and the graphic run length data to thereby calculate the run length. It further comprises an extra defect area specifying means for specifying an extra defect area which is an area where run data is generated even though the input data does not exist in the data.

  The invention according to claim 6 is the defect inspection apparatus according to claim 4 or 5, wherein the defect detection means calculates the logical product of the difference area data and the input data, thereby obtaining the run length data. And a missing defect area specifying means for specifying a missing defect area which is an area in which run data is not generated even though the input data exists.

  A seventh aspect of the present invention is the defect inspection apparatus according to the third aspect, wherein the data format conversion means executes a graphic process on the run-length data to form the run-length data into a graphic form. A first difference area obtained by subtracting the graphic area defined by the input data from the graphic area defined by the graphic run-length data. By extracting a first difference area acquisition means for acquiring data and a positive value area in the first difference area data, run data is generated even though the input data does not exist in the run length data. It further comprises an extra defect area specifying means for specifying an extra defect area, which is an existing area.

  The invention according to claim 8 is the defect inspection apparatus according to claim 3, wherein the data format conversion unit performs a graphing process on the run-length data, and the run-length data is converted into a graphic. A second difference area obtained by subtracting a graphic area defined by the graphic run-length data from a graphic area defined by the input data. Run data is generated even though the input data exists in the run-length data by extracting a positive difference area in the second difference area data and second difference area acquisition means for acquiring data. And a missing defect region specifying means for specifying a missing defect region that is not a region.

  A ninth aspect of the present invention is the defect inspection apparatus according to the fourth aspect, wherein the defect detecting means subtracts a graphic area defined by the input data from a graphic area defined by the difference area data. The input data does not exist in the run-length data by extracting a first difference area acquisition means for acquiring the first difference area data and a positive value area in the first difference area data. In addition, there is further provided an extra defect area specifying means for specifying an extra defect area which is an area in which run data is generated.

  A tenth aspect of the present invention is the defect inspection apparatus according to the fourth aspect, wherein the defect detection means is configured to display a graphic area defined by the graphic run-length data from a graphic area defined by the difference area data. And the second difference difference area acquisition means for acquiring the second difference difference area data by extracting the positive difference area in the second difference difference area data, thereby extracting the input data in the run length data. And a missing defect area specifying means for specifying a missing defect area, which is an area in which run data is not generated.

  The invention according to claim 11 is the defect inspection apparatus according to claim 3, wherein the data format conversion unit performs a first imaging process on the run-length data to image the run-length data. Run-length data imaging means for acquiring the imaged run-length data, and input data imaging for acquiring the imaged input data obtained by imaging the input data by executing a second imaging process on the input data And the defect detection means further comprises a difference area specifying means for specifying the difference area by comparing the imaging run-length data and the imaging input data in units of pixels.

  According to a twelfth aspect of the present invention, in the defect inspection apparatus according to the eleventh aspect, the difference area specifying unit compares the imaging run-length data and the imaging input data in units of pixels, and A region in which pixels exist only in the normalized run length data is specified as an extra defect region in which run data is generated even though the input data does not exist in the run length data.

  The invention according to claim 13 is the defect inspection apparatus according to claim 11 or 12, wherein the different area specifying unit compares the imaging run-length data and the imaging input data in units of pixels, An area where pixels exist only in the imaging input data is specified as a missing defect area in the run-length data where the input data exists but no run data is generated.

  The invention according to claim 14 is the defect inspection apparatus according to claim 3, wherein the data format conversion unit performs a coordinate value conversion process on the input data to include one or more graphics included in the input data. Input data coordinate value conversion means for acquiring coordinate value input data each of which is described by a set of coordinate values, wherein the defect detection means is a position of start points and end points of a plurality of runs included in the run length data A region where run data is generated even though the input data does not exist in the run-length data by comparing a predetermined coordinate value among a plurality of coordinate values included in the coordinate-valued input data And an extra defective area, which is an area where the input data exists but no run data is generated in the run length data. Further comprising a difference area specifying means for specifying.

  A fifteenth aspect of the invention is the defect inspection apparatus according to any one of the fifth, twelfth and fourteenth aspects, wherein the extra defect area is generated in the run length data when the extra defect area is specified. And extra defect repairing means for deleting the run data.

  The invention according to claim 16 is the defect inspection apparatus according to any one of claims 6, 13 and 14, wherein when the missing defect area is specified, the missing defect area in the run length data is newly added. A missing defect repairing means for generating run data;

  The invention of claim 17 is the defect inspection apparatus according to any one of claims 1 to 16, wherein the input data is CAD data of a pattern to be drawn on a substrate, and the run-length data is stored on the substrate. Served to draw a pattern.

  The invention of claim 18 is acquired by executing an RIP process on an input data acquisition function for acquiring input data describing a graphic to be drawn in the computer by being executed by the computer. A run-length data acquisition function for acquiring run-length data, and a defect detection function for comparing the input data and the run-length data and detecting the difference area as a defect area of the run-length data when there is a difference area And realize.

  According to a nineteenth aspect of the present invention, there is provided a graphic drawing apparatus for drawing a graphic on an output medium based on run-length data, the input data acquiring means for acquiring input data describing the graphic to be drawn, and the input data The run length data acquisition means for acquiring the run length data acquired by RIP processing is compared with the input data and the run length data, and when there is a difference area, the difference area is determined as the run length. A defect detection means for detecting data as a defect area; a repair means for repairing the defect area to obtain repair run-length data when the defect area is detected in the run-length data; and the run-length data. When the defective area is detected, the repair run-length data is referred to as drawing run-length data. And when the defective area is not detected in the run length data, the drawing run length data acquiring means for acquiring the run length data as it is as the drawing run length data, and the drawing run length data And a drawing means for drawing a graphic on the output medium.

  The invention according to claim 20 is the figure drawing apparatus according to claim 19, wherein the input data is CAD data of a pattern to be drawn on a substrate, and the drawing means performs RIP processing on the CAD data. The pattern is drawn on the substrate based on the run-length data acquired by the above step.

  The invention of claim 21 is a graphic drawing system for drawing a graphic on an output medium based on run length data, a defect inspection device for inspecting defects in the run length data, and a drawing run from the defect inspection device. A drawing device for obtaining length data and drawing a graphic on the output medium based on the drawing run-length data, wherein the defect inspection device acquires input data describing the graphic to be drawn When the acquisition means, the run-length data acquisition means for acquiring the run-length data acquired by performing RIP processing on the input data, and the input data and the run-length data are compared, there is a difference area A defect detecting means for detecting the difference area as a defect area of the run-length data; and the run-length When the defective area is detected in the data, the repair means for repairing the defective area and acquiring repair run-length data; and when the defective area is detected in the run-length data, the repair run Drawing run-length data acquisition means for acquiring length data as drawing run-length data and acquiring the run-length data as drawing run-length data as it is when the defect area is not detected in the run-length data And drawing run length data transmitting means for transmitting the drawing run length data to the drawing apparatus.

  The invention of claim 22 is the graphic drawing system according to claim 21, wherein the input data is CAD data of a pattern to be drawn on a substrate, and the drawing device performs RIP processing on the CAD data. The pattern is drawn on the substrate based on the run-length data acquired by the above step.

  According to the invention described in claims 1 to 22, since the defect of the run length data is detected by comparing the data before and after the RIP process, that is, the input data and the run length data, drawing based on the run length data is performed. Even if it is not executed, it is possible to detect defects occurring in the run-length data.

  In particular, according to the second aspect of the present invention, when a defect is detected in the run-length data, the defect is repaired, so that run-length data having no defect can be acquired.

  In particular, according to the seventeenth aspect of the present invention, it is possible to detect a defect occurring in the run-length data before performing pattern drawing on the substrate based on the run-length data. Therefore, it is possible to prevent a situation in which a drawing process is performed on the substrate based on defective run length data and a useless sample is generated.

  In particular, according to the invention described in claims 19 to 22, when a defect is detected in the run-length data, the graphic is drawn based on the repair run-length data. Therefore, it is possible to correctly draw a figure based on the run length data in which the defect is repaired.

[First Embodiment]
<1. Constitution>
<1a. Overall configuration of drawing system>
A graphic drawing system 100 according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a diagram showing the overall configuration of the graphic drawing system 100.

  The graphic drawing system 100 includes a CAD device 1, a RIP device 2, a defect inspection device 3, and a drawing device 4. These devices 1 to 4 are connected to each other via a network N such as a LAN.

  The CAD device 1 is a device that creates and edits data describing a figure to be drawn, and outputs the data as CAD data that is vector data. The CAD data is expressed in a data format having a cell hierarchy called a stream format (for example, GDSII). Each cell hierarchy holds information related to at least one graphic (for example, information related to the position and shape of the graphic, specifically the vertex position coordinates of the graphic) and cell reference information. Hereinafter, the CAD data output from the CAD device 1 is referred to as “input CAD data D1”.

  The RIP device 2 acquires the input CAD data D1 from the CAD device 1, performs RIP expansion on the acquired input CAD data D1, converts it into run-length data, and outputs it. More specifically, the input CAD data D1 which is vector data is converted into raster image data (that is, data (line data) in which binary image data forming a plurality of pixels in the first direction is arranged) in the first direction. Data that is arranged in a large number in a second direction orthogonal to the data. Further, the raster image data is subjected to run-length encoding processing and is output as compressed run-length data. More specifically, bitmap data is sequentially run-length encoded from the first line to the last line in the second direction in units of line data, and converted into compressed run-length data. As shown in FIG. 4, the obtained run-length data includes a graphic region in the input CAD data D1, where the start point position and length of a plurality of horizontal line segments (run Li (i = 1, 2,...)). This is the data described. Hereinafter, the run-length data output from the RIP device 2 is referred to as “run-length data D2”.

  The defect inspection apparatus 3 inspects defects in the run length data D2 used for drawing. That is, the input CAD data D1 is obtained from the CAD device 1, and the run-length data D2 is obtained from the RIP device 2, and the run-length data D2 is inspected for defects based on the obtained two data. In addition, the defect inspection apparatus 3 transmits run length data (“drawing run length data T”) to be used for drawing to the drawing apparatus 4. In other words, when a defect is detected in the run-length data D2, the repaired data (“repair run-length data D4” (see FIG. 6)) is transmitted to the drawing apparatus 4 as drawing run-length data T. To do. If no defect is detected in the run-length data D2, the run-length data D2 is transmitted as it is to the drawing device 4 as drawing run-length data T. A specific configuration of the defect inspection apparatus 3 will be described in detail later.

  The drawing device 4 is a device that draws a figure on an output medium. That is, drawing run-length data T is acquired from the defect inspection apparatus 3, and drawing of a figure is executed based on the acquired drawing run-length data T. More specifically, the drawing run-length data T is developed into bitmap data, and a two-dimensional image is recorded on the output medium based on the bitmap data.

  In this embodiment, it is assumed that the CAD device 1 creates drawing data of a circuit pattern such as an LSI to be exposed and recorded on the substrate and outputs it as input CAD data D1. The drawing device 4 is a device that directly draws (exposes) a circuit pattern created by the CAD device 1 on a substrate.

<1b. Configuration of defect inspection system>
<1b-1. Hardware configuration>
A hardware configuration of the defect inspection apparatus 3 will be described with reference to FIG. FIG. 2 is a schematic diagram illustrating a hardware configuration of the defect inspection apparatus 3.

  The defect inspection apparatus 3 has a configuration in which a control unit 11, a ROM 12, a RAM 13, a media drive 14, an operation unit 15, and a display unit 16 are electrically connected via a bus line 17.

  The control unit 11 is composed of a CPU. The control unit 11 controls each of the above hardware units based on a program (or a program read by the media drive 14) P stored in the ROM 12, and realizes the function of the defect inspection apparatus 3.

  The ROM 12 is a read-only storage device that stores a program P and data necessary for controlling the defect inspection apparatus 3 in advance.

  The RAM 13 is a storage device that can be read and written, and temporarily stores data generated during arithmetic processing by the control unit 11. The RAM 13 is configured by SRAM, flash memory, or the like.

  The media drive 14 is a functional unit that reads information stored in a recording medium (more specifically, a portable recording medium such as a CD-ROM, a DVD (Digital Versatile Disk), or a flexible disk) M. is there.

  The operation unit 15 is an input device composed of a keyboard and a mouse, and accepts user operations such as input of commands and various data. The user operation received by the operation unit 15 is input to the control unit 11 as a signal.

  The display unit 16 includes a monitor and the like, and displays various data and the operation state of the defect inspection apparatus 3.

<1b-2. Functional configuration>
A functional configuration of the defect inspection apparatus 3 will be described with reference to FIGS. 3 and 4. FIG. 3 is a schematic diagram showing a functional configuration of the defect inspection apparatus 3. FIG. 4 is a diagram schematically showing various data acquired in the defect detection process executed in the defect inspection apparatus 3 and its correlation.

  The defect inspection apparatus 3 includes a CAD data acquisition unit 31, a run length data acquisition unit 32, a defect detection unit 33, a defect repair unit 34, a drawing run length data acquisition unit 35, and a drawing run length data transmission unit. 36. The functions of these units are realized by reading the program P stored in advance in the ROM 12 or the like or the program P recorded in the recording medium M and executing it in the control unit 11.

  The CAD data acquisition unit 31 acquires input CAD data D1 describing a figure to be drawn from the CAD device 1 via the network N (that is, data before RIP expansion of run-length data D2 to be inspected). To do.

  The run-length data acquisition unit 32 is acquired from the RIP device 2 via the network N by RIP-expanding the run-length data D2 (that is, the input CAD data D1 describing the graphic to be drawn) used for drawing the graphic. Data).

  The defect detection unit 33 detects a defect in the run length data D2. More specifically, the input CAD data D1 and the run length data D2 are compared, and if there is a difference area, the difference area is detected as a defective area of the run length data D2. The defect detection unit 33 includes a conversion processing unit 331, a different area specifying unit 332, an extra defect area specifying unit 333, and a missing defect area specifying unit 334.

  The conversion processing unit 331 performs predetermined conversion processing on at least one of the input CAD data D1 and the run-length data D2 described in different formats, and the comparison CAD data arranged in a data format that can be compared with each other. F1 and comparison run length data F2 are acquired (see FIG. 4). The conversion processing unit 331 includes a comparison input CAD data acquisition unit 3311 and a comparison run length data acquisition unit 3312.

  The comparison input CAD data acquisition unit 3311 acquires the input CAD data D1 acquired by the CAD data acquisition unit 31 as it is as comparison CAD data F1 (see FIG. 4).

  The comparison run-length data acquisition unit 3312 executes “figure processing” on the run-length data D2 acquired by the run-length data acquisition unit 32, and uses the graphic run-length data D22 obtained by executing the processing. Obtained as comparison run-length data F2 (see FIG. 4).

  The “graphic processing” is processing for converting run-length data D2, which is data described by a plurality of runs Li (i = 1, 2,...) Into a data format described by graphics. The graphic processing will be described with reference to FIG. FIG. 5 is a schematic diagram for explaining the graphic processing.

  In the graphic processing, first, each of the plurality of runs Li constituting the run-length data D2 is graphicized into a rectangle. That is, each run Li has a rectangular figure Ri (i = 1) whose length in the X direction is equal to the length of the line segment of the run Li and whose length in the Y direction is equal to the distance in the Y direction between the runs Li. , 2,... As a result, the run-length data D2 is converted from data described by a plurality of runs Li to data D21 described by a plurality of rectangular figures Ri.

  Subsequently, the plurality of rectangular figures Ri are merged (or the logical sum (OR) of the plurality of rectangular figures Ri is calculated), and the merge area of each rectangular figure Ri is extracted. As a result, the area described by the run-length data D2 is made into a graphic, and the graphic run-length data D22 is acquired.

  Refer to FIG. 3 again. The difference area specifying unit 332 compares the comparison CAD data F1 and the comparison run length data F2, and detects a difference between the two data. More specifically, an exclusive OR (XOR) of the comparison CAD data F1 (that is, the input CAD data D1 here) and the comparison run-length data F2 (that is, the graphic run-length data D22 here) is calculated. Thus, the difference area data D3 specifying the difference area between the two data is acquired (see FIG. 4). If there is a difference area between the two data, the difference area is detected as a defect area of the run-length data D2.

  The excess defect area specifying unit 333 calculates a logical product (AND) of the difference area data D3 and the comparison run length data F2 (that is, the graphic run length data D22), and specifies the “excess defect area Ae”. The defect area data D3a is acquired (see FIG. 4). However, the “excess defect area Ae” means a data area that has been created in an area that should not be created in the RIP process (that is, run data even though the input CAD data D1 does not exist in the run-length data D2). Are generated). In other words, the extra defect area specifying unit 333 only includes an area that exists in the graphic run-length data D22 among areas defined by the different area data D3 (that is, a different area between the input CAD data D1 and the run-length data D2). Is extracted to identify the excess defect area Ae.

  The missing defect area specifying unit 334 calculates a logical product (AND) of the difference area data D3 and the comparison CAD data F1 (that is, the input CAD data D1) to identify the missing defect area data that specifies the “missing defect area Af”. D3b is acquired (see FIG. 4). However, the “missing defect area Af” is a data area that is not created in the area that should have been created in the RIP process (that is, run data is generated even though the input CAD data D1 exists in the run-length data D2). Area). That is, the missing defect area specifying unit 334 specifies the missing defect area Af by extracting only the area existing in the input CAD data D1 from the areas defined by the different area data D3.

  When the defect detection unit 33 detects a defect in the run-length data D2, the defect repair unit 34 performs a defect repair process on the run-length data D2, and acquires repair run-length data D4. The defect repair unit 34 includes an extra defect repair unit 341 and a missing defect repair unit 342.

  When the excess defect area Ae is detected, the excess defect repair unit 341 repairs the excess defect area Ae. More specifically, as shown in FIG. 6, the excess defect area Ae in the run-length data D2 is identified based on the excess defect area data D3a acquired by the excess defect area identification unit 333 (for example, the vertex coordinates of the defect area) The defect area is specified by the value), and the process of deleting the run data existing in the area is executed. Thereby, the excess defect of the run length data D2 is repaired.

  The missing defect repair unit 342 repairs the missing defect area Af when the missing defect area Af is detected. More specifically, as shown in FIG. 6, the missing defect area Af in the run-length data D2 is identified based on the missing defect area data D3b acquired by the missing defect area identifying unit 334, and the RIP process is performed again on the area. Execute to generate new run data. Furthermore, when run data exists in the vicinity of the newly generated run data, the newly generated run data is combined with the nearby run data. Thereby, the repair run length data D4 in which the missing defect of the run length data D2 is repaired is acquired.

  The drawing run-length data acquisition unit 35 acquires drawing run-length data T that is run-length data to be used for drawing. More specifically, when the defect detection unit 33 does not detect a defect in the run-length data D2 to be inspected, the run-length data D2 is acquired as it is as the drawing run-length data T, and the defect detection unit 33 inspects. When a defect is detected in the target run-length data D2, repair run-length data D4 acquired by the defect repair unit 34 is acquired as drawing run-length data T.

  The drawing run-length data transmission unit 36 transmits the drawing run-length data T acquired by the drawing run-length data acquisition unit 35 to the drawing device 4. The drawing device 4 performs drawing based on the drawing run-length data T received from the drawing run-length data transmission unit 36.

<2. Processing action>
<2a. Processing operation in figure drawing system>
Here, processing executed by the graphic drawing system 100 will be described with reference to FIG. FIG. 7 is a diagram showing the flow of processing from when the input CAD data D1 is acquired until the drawing of the graphic is executed.

  First, the CAD device 1 creates drawing data of a circuit pattern to be exposed and recorded on the substrate, and transmits it to the RIP device 2 as input CAD data D1 (step S1).

  Subsequently, the RIP device 2 that has acquired the input CAD data D1 from the RIP device 2 performs RIP expansion on the acquired input CAD data D1 and outputs run-length data D2 (step S2).

  Subsequently, the defect inspection apparatus 3 acquires the run-length data D2 output in step S2 from the RIP apparatus 2, inspects the acquired run-length data D2 for defects, and acquires the drawing run-length data T. Then, it is transmitted to the drawing device 4 (step S3). The specific processing flow of step S3 will be described in detail later.

  Subsequently, the drawing device 4 that has acquired the drawing run-length data T from the defect inspection device 3 executes drawing processing based on the acquired drawing run-length data T (step S4). That is, a circuit pattern that is a two-dimensional image is exposed on the substrate.

  The above is a series of drawing processes executed in the graphic drawing system 100. Next, the process (step S3) performed in the defect inspection apparatus 3 will be described.

<2b. Processing operation in defect inspection apparatus 3>
The process executed by the defect inspection apparatus 3 (that is, the defect inspection process and the defect repair process) will be described more specifically with reference to FIG. FIG. 8 is a diagram showing a flow of defect inspection processing and defect repair processing executed in the defect inspection apparatus 3.

  First, the CAD data acquisition unit 31 acquires input CAD data D1 from the CAD device 1 (step S11). Further, the run length data acquisition unit 32 acquires the run length data D2 from the RIP device 2 (step S12).

  Subsequently, the defect detection unit 33 detects a defect in the run-length data D2 acquired in step S12 (steps S13 to S16).

  That is, first, the conversion processing unit 331 acquires the comparison CAD data F1 and the comparison run-length data F2 that are arranged in a data format that can be compared with each other (step S13). More specifically, the comparison input CAD data acquisition unit 3311 acquires the input CAD data D1 (that is, the data acquired by the CAD data acquisition unit 31 in step S11) as the comparison CAD data F1 as it is. In addition, the comparison run length data acquisition unit 3312 executes the graphic processing on the run length data D2 (that is, the data acquired by the run length data acquisition unit 32 in step S12), and executes the processing. The figured run-length data D22 is acquired as comparison run-length data F2.

  Subsequently, the different area specifying unit 332 calculates the exclusive OR of the comparison CAD data F1 and the comparison run length data F2, and acquires the different area data D3 specifying the difference area between the two data (step S14). ).

  Subsequently, the excess defect area specifying unit 333 performs a logical product (AND) of the difference area data D3 acquired in step S14 and the comparison run length data F2 (that is, the graphic run length data D22) acquired in step S13. ) To obtain excess defect area data D3a specifying the excess defect area Ae (step S15).

  Subsequently, the missing defect area specifying unit 334 calculates a logical product (AND) of the difference area data D3 acquired in step S14 and the comparison CAD data F1 (ie, input CAD data D1) acquired in step S13. Then, the missing defect area data D3b specifying the missing defect area Af is acquired (step S16).

  Note that the processing order of step S15 and the processing of step S16 may be reversed. That is, either the process of acquiring the missing defect area data D3b or the process of acquiring the excess defect area data D3a may be performed first.

  Subsequently, the defect repair unit 34 determines whether or not the defect detection unit 33 has detected a defect in the run-length data D2 (that is, whether or not a difference region has been detected) in the difference area data D3 acquired in step S14. Based on the determination (step S17).

  If it is determined in step S17 that a defect has been detected, the defect repair unit 34 repairs the detected defect and obtains repair run-length data D4 (step S18). More specifically, first, the extra defect repair unit 341 repairs the extra defect. That is, the excess defect area Ae in the run-length data D2 is specified based on the excess defect area data D3a acquired in step S15, and the excess data is repaired by deleting the run data existing in the area. Further, the missing defect repair unit 342 repairs the missing defect. That is, the missing defect area Af in the run length data D2 is identified based on the missing defect area data D3b acquired in step S16, and the RIP process is performed again on the area to generate new run data. Repair the defect. By executing these processes, repair run-length data D4 is acquired.

  Subsequently, the drawing run-length data acquisition unit 35 acquires the repair run-length data D4 acquired in step S18 as the drawing run-length data T (step S19).

  On the other hand, if it is determined in step S17 that no defect has been detected, the process proceeds to step S20 without executing step S18. In step S20, the drawing run-length data acquisition unit 35 acquires the run-length data D2 acquired in step S12 as the drawing run-length data T (step S20).

  When the drawing run-length data T is acquired by executing the processing of either step S19 or step S20, the drawing run-length data transmitting unit 36 draws the acquired drawing run-length data T. It transmits to the apparatus 4 (step S21). The drawing device 4 executes drawing based on the drawing run-length data T (step S4 in FIG. 7). The above is a series of processes executed in the defect inspection apparatus 3.

<3. effect>
According to the above embodiment, the defect inspection apparatus 3 detects defects in the run-length data D2 by comparing the data before and after the RIP process, that is, the input CAD data D1 and the run-length data D2. Before the apparatus 4 performs drawing based on the run-length data D2 (that is, without performing drawing), it is possible to detect a defect occurring in the run-length data D2.

  Further, it is not necessary to provide a plurality of RIP processing function units for detecting a defect, and it is not necessary to execute RIP processing a plurality of times. Therefore, it is possible to detect a defect occurring in the run-length data D2 with a simple configuration.

  In addition, when a defect is detected in the run-length data D2, the defect is repaired and the repair run-length data D4 is generated, so that run-length data without a defect can be acquired.

  If a defect is detected in the run-length data D2, the repair run-length data D4 is sent as drawing run-length data T to the drawing device 4, and the drawing device 4 draws based on the drawing run-length data T. Execute. Therefore, the drawing apparatus 4 does not perform pattern drawing based on the defective run-length data D2, and a useless substrate is not generated.

  Further, according to the above embodiment, when correction processing is performed on CAD data, the correction content can be efficiently confirmed. That is, by executing the following processing, it is possible to confirm the correction contents applied to the CAD data.

  First, “CAD data before correction” is acquired from the CAD device 1 as input CAD data D1, and run-length data (that is, after correction) acquired from the RIP device 2 by RIP development of “CAD data after correction”. Run length data generated from CAD data) is acquired as run length data D2. Then, the acquired CAD data D1 and the run length data D2 are compared to detect a difference between the two data, and the difference area data D3 is acquired. In the difference area data D3, a portion in which the CAD data is corrected should be detected as the difference area. That is, by looking at the acquired difference area data D3, it is possible to efficiently confirm what correction has been performed on the CAD data. In addition, by confirming whether or not the portion corrected for CAD data is correctly detected as a difference area, whether or not the correction performed on CAD data is correctly reflected in the generated run-length data. It can be verified.

  As a matter of course, if the “corrected CAD data” is acquired as the input CAD data D1 from the CAD device 1 and compared with the run-length data generated from the corrected CAD data, the corrected CAD data It is possible to verify whether or not correct run-length data has been generated based on the above (that is, detect run-length data defects).

[Second Embodiment]
<1. Constitution>
<1a. Overall configuration of drawing system>
A graphic drawing system according to a second embodiment of the present invention will be described. In the following, a configuration different from the first embodiment will be described, and description of the same configuration will be omitted. For the same configuration, the reference numerals used in the first embodiment are appropriately used.

  Similar to the graphic drawing system 100 according to the first embodiment, the graphic drawing system according to the second embodiment includes a CAD device 1 and a RIP device 2 connected to each other via a network N such as a LAN. The defect inspection apparatus 5 and the drawing apparatus 4 are provided (see FIG. 1). The configurations of the CAD device 1, RIP device 2, and drawing device 4 are the same as those in the first embodiment. The defect inspection apparatus 5 inspects defects in the run-length data D2 used for drawing, similarly to the defect inspection apparatus 3 according to the first embodiment. Next, a specific configuration of the defect inspection apparatus 5 will be described.

<1b. Configuration of defect inspection system>
The defect inspection apparatus 5 is realized by the same hardware configuration as the defect inspection apparatus 3 according to the first embodiment (see FIG. 2).

  A functional configuration of the defect inspection apparatus 5 will be described with reference to FIGS. 9 and 10. FIG. 9 is a schematic diagram showing a functional configuration of the defect inspection apparatus 5. FIG. 10 is a diagram schematically showing various data acquired in the defect detection process executed in the defect inspection apparatus 5 and the correlation thereof.

  The defect inspection apparatus 5 includes a CAD data acquisition unit 51, a run length data acquisition unit 52, a defect detection unit 53, a defect repair unit 54, a drawing run length data acquisition unit 55, and a drawing run length data transmission unit. 56. The functions of these units are realized by reading a program P stored in advance in the ROM 12 or the like or a program recorded in the recording medium M and executing it in the control unit 11 (see FIG. 2). The functions of the CAD data acquisition unit 51, run length data acquisition unit 52, defect repair unit 54, drawing run length data acquisition unit 55, drawing run length data transmission unit 56 are the same as the CAD data acquisition unit 31 and the run length data acquisition. This is the same as each of the unit 32, the defect repair unit 34, the drawing run-length data acquisition unit 35, and the drawing run-length data transmission unit 36.

  The defect detection unit 53 detects a defect in the run length data D2. More specifically, the input CAD data D1 and the run length data D2 are compared, and if there is a difference area, the difference area is detected as a defective area of the run length data D2. The defect detection unit 53 includes a conversion processing unit 531 and a different area specifying unit 532.

  The conversion processing unit 531 performs predetermined conversion processing on both the input CAD data D1 and the run-length data D2 described in different formats, and the comparison CAD data G1 aligned in a mutually comparable data format. And comparative run length data G2 are acquired (see FIG. 10). The conversion processing unit 531 includes a comparison input CAD data acquisition unit 5311 and a comparison run length data acquisition unit 5312.

  The comparison input CAD data acquisition unit 5311 executes “CAD data imaging process” on the input CAD data D1 acquired by the CAD data acquisition unit 51, and sets the imaging CAD data D101 obtained by executing the process. Obtained as comparison CAD data G1 (see FIG. 10).

  The “CAD data imaging process” is a process of converting input CAD data D1, which is data described by a graphic, into a data format described by an image, as shown in FIG. In the CAD data imaging process, a process for filling the inside of the polygonal figure (polygon) is performed for each piece of polygonal figure data included in the input CAD data D1. As a result, an image is generated in which the outline becomes a polygonal figure defined by the figure data. That is, the graphic data is converted into image data. By executing this process on all the graphic data included in the input CAD data D1, the imaging CAD data D101 is obtained.

  The comparison run-length data acquisition unit 5312 performs “run-length imaging process” on the run-length data D2 acquired by the run-length data acquisition unit 52, and the imaging run-length data obtained by executing the process D202 is acquired as comparison run length data G2 (see FIG. 10).

  As shown in FIG. 11B, the “run-length imaging process” refers to run-length data D2, which is data described by a plurality of runs Li (i = 1, 2,...). It is a process of converting to the data format to be described. More specifically, it is a process of painting the corresponding pixel according to the coordinate value information of the run Li included in the run length data D2. In the run-length imaging process, first, a rectangular region Ri (i = 1, 2,...) Is based on each of a plurality of runs Li (i = 1, 2,...) Constituting the run-length data D2. ) Is defined (D201), and the pixels corresponding to each of the rectangular regions Ri (i = 1, 2,...) Are filled (D202). As a result, the run-length data D2 is converted from data described by a plurality of runs Li to data D202 described by a pixel set. That is, the imaging run length data D202 is acquired.

  Refer to FIG. 9 again. The difference area specifying unit 532 compares the comparison CAD data F1 and the comparison run length data F2, and detects a difference between the two data. More specifically, the comparison CAD data G1 (that is, the imaging CAD data D101 here) and the comparison run-length data G2 (that is, the imaging run-length data D202 here) are compared in pixel units (more specifically). Specifically, the difference area data D3 specifying the difference area between the two data (that is, the area where the pixel exists only in one of the data) To get.

  In particular, the different area specifying unit 532 extracts an area where pixels exist only in the imaging run-length data D202 as the extra defect area Ae, and acquires extra defect area data D3a specifying the extra defect area Ae. In addition, a region where pixels exist only in the imaging CAD data D101 is extracted as a missing defect region Af, and missing defect region data D3b specifying the missing defect region Af is acquired.

<2. Processing action>
<2a. Processing operation in figure drawing system>
The overall flow of processing executed by the graphic drawing system according to the second embodiment is the same as the flow of processing executed by the graphic drawing system 100 according to the first embodiment (see FIG. 7).

<2b. Processing operation in defect inspection apparatus 3>
Processing (that is, defect inspection processing and defect repair processing) executed by the defect inspection apparatus 5 will be described. Since the flow of processing executed by the defect inspection apparatus 5 is substantially the same as the flow of processing executed by the defect inspection apparatus 3 according to the first embodiment (see FIG. 8), in the following, refer to FIG. However, differences from this will be described.

  First, the CAD data acquisition unit 51 acquires the input CAD data D1 from the CAD device 1, and the run-length data acquisition unit 52 acquires the run-length data D2 from the RIP device 2 (see steps S11 to S12).

  Subsequently, the defect detection unit 53 detects a defect in the run-length data D2 acquired in the previous step (see step S12) (see step S13 to step S16).

  That is, first, the conversion processing unit 531 acquires the comparison CAD data G1 and the comparison run-length data G2 that are arranged in a data format that can be compared with each other (see step S13). More specifically, the comparison input CAD data acquisition unit 5311 performs a CAD data imaging process on the input CAD data D1 (that is, the data acquired by the CAD data acquisition unit 51 in the previous step (see step S11)). Then, the imaging CAD data D101 obtained by executing the processing is acquired as the comparison CAD data G1. The comparison run length data acquisition unit 5312 executes the run length imaging process on the run length data D2 (that is, the data acquired by the run length data acquisition unit 52 in the previous step (see step S12)), Imaging run-length data D202 obtained by executing this processing is acquired as comparison run-length data G2.

  Subsequently, the different area specifying unit 532 compares the pixels of the comparative CAD data G1 and the comparative run length data G2, and acquires the different area data D3 specifying the different area between the two data (see step S14).

  Furthermore, the different area specifying unit 532 acquires extra defect area data D3a obtained by extracting an area (extra defect area Ae) constituted by extra pixels from the different areas (see step S15).

  Furthermore, missing defect area data D3b obtained by extracting an area (missing defect area Af) constituted by missing pixels among the different areas is acquired (see step S16).

  Subsequently, the defect repair unit 54 obtains whether or not the defect detection unit 53 has detected a defect in the run-length data D2 (that is, whether or not a difference area has been detected) in the previous step (see step S14). The determination is made based on the different area data D3 (see step S17).

  If it is determined that a defect has been detected, the defect repair unit 34 repairs the detected defect and acquires repair run-length data D4 (see step S18), and a drawing run-length data acquisition unit. 55 acquires the acquired repair run-length data D4 as drawing run-length data T (see step S19). Then, the drawing run-length data transmission unit 56 transmits the acquired drawing run-length data T to the drawing device 4 (see step S21).

  On the other hand, when it is determined that no defect is detected, the drawing run-length data acquisition unit 55 acquires the run-length data D2 acquired in the previous step (see step S12) as the drawing run-length data T. (See step S20). Then, the drawing run-length data transmission unit 56 transmits the acquired drawing run-length data T to the drawing device 4 (see step S21).

[Third Embodiment]
<1. Constitution>
<1a. Overall configuration of drawing system>
A graphic drawing system according to a third embodiment of the present invention will be described. In the following, a configuration different from the first embodiment will be described, and description of the same configuration will be omitted. For the same configuration, the reference numerals used in the first embodiment are appropriately used.

  Similar to the graphic drawing system 100 according to the first embodiment, the graphic drawing system according to the third embodiment includes a CAD device 1 and a RIP device 2 connected to each other via a network N such as a LAN. The defect inspection apparatus 6 and the drawing apparatus 4 are provided (see FIG. 1). The configurations of the CAD device 1, RIP device 2, and drawing device 4 are the same as those in the first embodiment. The defect inspection apparatus 6 inspects defects in the run-length data D2 used for drawing, similarly to the defect inspection apparatus 3 according to the first embodiment. Next, a specific configuration of the defect inspection apparatus 6 will be described.

<1b. Configuration of defect inspection system>
The defect inspection apparatus 6 is realized by a hardware configuration similar to that of the defect inspection apparatus 3 according to the first embodiment (see FIG. 2).

  A functional configuration of the defect inspection apparatus 6 will be described with reference to FIGS. FIG. 12 is a schematic diagram showing a functional configuration of the defect inspection apparatus 6. FIG. 13 is a diagram schematically showing various data acquired in the defect detection process executed in the defect inspection apparatus 6 and its correlation.

  The defect inspection apparatus 6 includes a CAD data acquisition unit 61, a run length data acquisition unit 62, a defect detection unit 63, a defect repair unit 64, a drawing run length data acquisition unit 65, and a drawing run length data transmission unit. 66. The functions of these units are realized by reading a program P stored in advance in the ROM 12 or the like or a program recorded in the recording medium M and executing it in the control unit 11 (see FIG. 2). The CAD data acquisition unit 61, run length data acquisition unit 62, defect repair unit 64, drawing run length data acquisition unit 65, and drawing run length data transmission unit 66 function as a CAD data acquisition unit 31, run length data acquisition. This is the same as each of the unit 32, the defect repair unit 34, the drawing run-length data acquisition unit 35, and the drawing run-length data transmission unit 36.

  The defect detection unit 63 detects a defect in the run length data D2. More specifically, the input CAD data D1 and the run length data D2 are compared, and if there is a difference area, the difference area is detected as a defective area of the run length data D2. The defect detection unit 63 includes a conversion processing unit 631 and a different area specifying unit 632.

  The conversion processing unit 631 performs a predetermined conversion process on at least one of the input CAD data D1 and the run-length data D2 (in this case, the input CAD data D1) described in different formats and can compare them with each other. The comparison CAD data H1 and the comparison run length data H2 aligned in the data format are acquired (see FIG. 13). The conversion processing unit 631 includes a comparison input CAD data acquisition unit 6311 and a comparison run length data acquisition unit 6312.

  The comparison input CAD data acquisition unit 6311 executes “coordinate value conversion process” on the input CAD data D1 acquired by the CAD data acquisition unit 61, and uses the coordinate value conversion CAD data D11 obtained by executing the process. Obtained as comparison CAD data H1 (see FIG. 13).

  The “coordinate value conversion process” is a process of converting the input CAD data D1, which is data described by a graphic, into a data format described by a set of coordinate values, as shown in FIG. In the coordinate value conversion processing, first, a plurality of straight lines Ni (i = 1, 2,...) Parallel to the scanning direction (or sub-scanning direction) are defined in the input CAD data D1 (D10). . And the coordinate information of the intersection of each straight line Ni and the polygon figure (polygon) contained in the input CAD data D1 is acquired. However, the straight line Ni (i = 1, 2,...) Intersects each polygonal figure at two points. Here, each coordinate value of these two points is a pair of coordinate values (hereinafter referred to as “ Coordinate value set Mi (shown as i = 1, 2,...)). Further, in the coordinate value set Mi, the coordinate value with the smaller X coordinate value is set as the start point coordinate value Msi (i = 1, 2,...), And the other coordinate value is set as the end point coordinate value Mei (i = 1, 2). , ...). As a result, each of the polygonal figures included in the CAD data D1 is converted into a coordinate-valued CAD defined by a plurality of coordinate value sets Mi (start point coordinate value Msi and end point coordinate value Mei) (i = 1, 2,...). Data D11 is acquired.

  Refer to FIG. 12 again. The comparison run-length data acquisition unit 6312 acquires the run-length data D2 acquired by the run-length data acquisition unit 52 as it is as the comparison run-length data H2 (see FIG. 13).

  The difference area specifying unit 632 compares the comparison CAD data H1 and the comparison run length data H2, and detects a difference between the two data. More specifically, each of the plurality of runs Li (i = 1, 2,...) Included in the comparison run length data H2 (that is, the run length data D2 here) and the comparison CAD data H1 (that is, here) Then, by comparing each of a plurality of coordinate value groups Mi (i = 1, 2,...) Included in the coordinate-valued CAD data D11) (more specifically, the starting point position of each run Li, By comparing the start point coordinate value Msi of the coordinate value set Mi corresponding to the run Li, the end point position of each run Li is also compared to the end point coordinate value Mei of the coordinate value set Mi corresponding to the run Li. By doing so, a difference area (excess defect area Ae and missing defect area Af) between the two data is specified and acquired as difference area data D3. However, each coordinate value set Mi included in the coordinated CAD data D11 and the start and end positions of the run Li (i = 1, 2,...) Included in the run-length data D2 are in a common coordinate system. It is expressed using (for example, a common coordinate system using the origin coordinates of CAD data as a common reference).

  The process in which the different area specifying unit 632 specifies the different areas (excess defect area Ae and missing defect area Af) will be specifically described with reference to FIGS. 15 to 17. FIG. 15 and FIG. 16 are diagrams showing a flow of processing executed by the different area specifying unit 632. FIG. 17 is a diagram schematically illustrating a different area.

[Identification of the difference area occurring on the -X side]
The different area specifying unit 632 includes the position of the start point of the run Li (i = 1, 2,...) Included in the comparison run length data H2 and the coordinate value set Mi (i = 1, 2) included in the comparison CAD data H1. ,..) Are compared with the start point coordinate value Msi to identify the difference area generated on the -X side of the run-length data H2 (more specifically, on the -X side of the polygon figure to be drawn). To do.

  A process for identifying a difference area occurring on the −X side will be described with reference to FIGS. 15 and 17. First, the different area specifying unit 632 selects one run from the runs Li (i = 1, 2,...) Included in the comparison run length data H2, and the run (shown as “run Lt”). The coordinate value of the starting point is acquired (step S31).

  Subsequently, among the coordinate value sets Mi (i = 1, 2,...) Included in the comparison CAD data H1, the coordinate value set Mi (“coordinate value set Mt”) corresponding to the run Lt acquired in step S31. The starting point coordinate value Msi (shown as “starting point coordinate value Mst”) is acquired (step S32). The “corresponding coordinate value set” means that the line segment region connecting the start point coordinate value Msi and the end point coordinate value Mei included in the coordinate value set Mi and the run Lt are essentially (that is, the run Lt is It is a coordinate value set that has a matching relationship if it is generated correctly. For example, a coordinate value set derived from the same polygonal figure as the run Lt and having a Y coordinate value equal to (or closest to) the run Lt is acquired as the “corresponding coordinate value set Mt”.

  Subsequently, the X component of the start point coordinate value of the run Lt acquired from the comparison run length data H2 in step S31 and the X component of the corresponding start point coordinate value Mst (start point coordinate value Mst acquired from the comparison CAD data H1 in step S32). Is matched (step S33).

  If it is determined in step S33 that both values match, it is determined that the run Lt is not a run that forms a difference area on the −X side (step S34) (for example, run L1 in FIG. 17 and start point coordinate value Ms1, Run L2 and start point coordinate value Ms2).

  On the other hand, if it is determined in step S33 that the two values do not match, it is determined that the run Lt is a run that forms a difference area on the -X side. In this case, by determining whether or not the X component of the start point coordinate value of the run Lt acquired from the comparative run length data H2 is larger than the X component of the corresponding start point coordinate value Mst, the run Lt is missing defect area Af. Then, it is determined which of the excess defect areas Ae constitutes the run (step S35).

  That is, if it is determined in step S35 that the X component of the start point coordinate value of the run Lt is larger than the X component of the corresponding start point coordinate value Mst, the run Lt is a run that constitutes the missing defect area Af on the -X side. (Step S36) (for example, run L22 and start point coordinate value Ms22, run L23 and start point coordinate value Ms23 in FIG. 17). In this case, the different area specifying unit 632 extracts a line segment area having the start point coordinate value Mst as the start point position and the start point coordinate value of the run Lt as the end point position as the missing defect area Af.

  On the other hand, if it is determined in step S35 that the X component of the start point coordinate value of the run Lt is smaller than the X component of the corresponding start point coordinate value Mst, the run Lt is a run that forms an extra defect area Ae on the -X side. (Step S37). In this case, the different area specifying unit 632 extracts a line segment area having the start point coordinate value of the run Lt as the start point position and the start point coordinate value Mst as the end point position as the extra defect area Ae.

  The processes in steps S31 to S37 are executed for all the runs Li (i = 1, 2,...) Included in the comparison run length data H2. When the processes in steps S31 to S37 are performed for all the runs, the process is terminated (step S38).

[Identify the difference area occurring on the + X side]
The different area specifying unit 632 includes the position of the end point of the run Li (i = 1, 2,...) Included in the comparison run length data H2 and the coordinate value set Mi (i = 1, 2) included in the comparison CAD data H1. ,... Are compared with the end point coordinate value Mei to identify a difference area generated on the + X side of the run-length data H2 (more specifically, on the + X side of the polygonal figure to be drawn).

  A process for identifying the difference area occurring on the + X side will be described with reference to FIGS. First, the different area specifying unit 632 selects one run from the runs Li (i = 1, 2,...) Included in the comparison run length data H2, and the run (shown as “run Lt”). The coordinate value of the end point of is acquired (step S41).

  Subsequently, among the coordinate value sets Mi (i = 1, 2,...) Included in the comparison CAD data H1, the coordinate value set Mi (“coordinate value set Mt”) corresponding to the run Lt acquired in step S41. The end point coordinate value Mei (shown as “end point coordinate value Met”) is acquired (step S42).

  Subsequently, the X component of the end point coordinate value of the run Lt acquired from the comparison run length data H2 in step S41 and the corresponding end point coordinate value Met (the end point coordinate value Met acquired from the comparison CAD data H1 in step S42). It is determined whether or not the components match (step S43).

  If it is determined in step S43 that the two values match, it is determined that the run Lt is not a run that forms a difference area on the + X side (step S44) (for example, run L1 in FIG. 17 and end point coordinate value Me1, run L22 and end point coordinate value Me22).

  On the other hand, if it is determined in step S43 that the two values do not match, it is determined that the run Lt is a run that forms a difference area on the + X side. In this case, by determining whether the X component of the end point coordinate value of the run Lt acquired from the comparative run length data H2 is larger than the X component of the corresponding end point coordinate value Met, the run Lt is missing defect area Af. Then, it is determined which of the excess defect areas Ae constitutes the run (step S45).

  That is, when it is determined in step S45 that the X component of the end point coordinate value of the run Lt is larger than the X component of the corresponding end point coordinate value Met, the run Lt is a run that forms the extra defect area Ae on the + X side. It is determined (step S46) (for example, run L2 and end point coordinate value Me2, run L3 and end point coordinate value Me3 in FIG. 17). In this case, the different area specifying unit 632 extracts a line segment area having the end point coordinate value Met as the start point position and the end point coordinate value of the run Lt as the end point position as the extra defect area Ae.

  On the other hand, if it is determined in step S45 that the X component of the end point coordinate value of the run Lt is smaller than the X component of the corresponding end point coordinate value Met, the run Lt is a run that forms the missing defect area Af on the + X side. It is determined that there is (step S47). In this case, the different area specifying unit 632 extracts a line segment area having the end point coordinate value Met as the start point position and the end point coordinate value Met as the end point position as the missing defect area Af.

  The processes in steps S41 to S47 described above are executed for all the runs Li (i = 1, 2,...) Included in the comparison run length data H2. When the processes in steps S41 to S47 are performed for all the runs, the process is terminated (step S48).

<2. Processing action>
<2a. Processing operation in figure drawing system>
The overall flow of processing executed by the graphic drawing system according to the third embodiment is the same as the flow of processing executed by the graphic drawing system 100 according to the first embodiment (see FIG. 7).

<2b. Processing operation in defect inspection apparatus 3>
Processing (that is, defect inspection processing and defect repair processing) executed by the defect inspection apparatus 6 will be described. Since the flow of processing executed by the defect inspection apparatus 6 is substantially the same as the flow of processing executed by the defect inspection apparatus 3 according to the first embodiment (see FIG. 8), in the following, refer to FIG. However, differences from this will be described.

  First, the CAD data acquisition unit 61 acquires the input CAD data D1 from the CAD device 1, and the run-length data acquisition unit 62 acquires the run-length data D2 from the RIP device 2 (see steps S11 to S12).

  Subsequently, the defect detection unit 63 detects a defect in the run-length data D2 acquired in the previous step (see step S12) (see step S13 to step S16).

  That is, first, the conversion processing unit 631 acquires the comparison CAD data H1 and the comparison run-length data H2 that are arranged in a data format that can be compared with each other (see step S13). More specifically, the comparison input CAD data acquisition unit 6311 performs coordinate value conversion processing on the input CAD data D1 (that is, data acquired by the CAD data acquisition unit 61 in the previous step (see step S11)). Then, the coordinated CAD data D11 obtained by executing the process is acquired as the comparison CAD data H1. Also, the comparative run length data acquisition unit 6312 acquires the run length data D2 (that is, the data acquired by the run length data acquisition unit 52 in the previous step (see step S12)) as the comparative run length data H2.

  Subsequently, the different area specifying unit 632 includes each of the runs Li (i = 1, 2,...) Included in the comparison run length data H2 and the coordinate value set Mi (i = 1, 1) included in the comparison CAD data H1. 2,... Are obtained, and the difference area data D3 specifying the difference area (excess defect area Ae and missing defect area Af) between the two data is acquired (see FIG. 15 and FIG. 16) (step) Process corresponding to S14-16).

  Subsequently, the defect repair unit 64 determines whether or not the defect detection unit 63 has detected a defect in the run-length data D2 (that is, whether or not a difference region has been detected). (See step S17).

  If it is determined that a defect has been detected, the defect repair unit 64 repairs the detected defect and acquires repair run-length data D4 (see step S18), and a drawing run-length data acquisition unit. 65 acquires the acquired repair run-length data D4 as drawing run-length data T (see step S19). Then, the drawing run-length data transmission unit 66 transmits the acquired drawing run-length data T to the drawing device 4 (see step S21).

  On the other hand, if it is determined that no defect has been detected, the drawing run-length data acquisition unit 65 acquires the run-length data D2 acquired in the previous step (see step S12) as the drawing run-length data T. (See step S20). Then, the drawing run-length data transmission unit 66 transmits the acquired drawing run-length data T to the drawing device 4 (see step S21).

<3. effect>
According to the above embodiment, the comparison input CAD data acquisition unit 6311 performs a “coordinate value conversion process” on the input CAD data D1, thereby converting this into a set of coordinate values (more specifically, the start point coordinates). Converted into data (coordinate-valued CAD data D11) described by a set of coordinate value sets made up of values and end point coordinate values. By comparing this coordinate-valued CAD data D11 with run-length data D2 (that is, data described as a set of line segments), it is possible to identify a defective area occurring in run-length data D2.

  The RIP process is a process for acquiring a set of line segments from a polygonal figure. In the RIP process, an error may occur in the process of linearizing information on the length, and there is a possibility that the range of interpretation may vary depending on parameters such as resolution, which become defects in the run-length data D2. On the other hand, since the coordinate value conversion process is a process of acquiring a set of coordinate values from a polygonal figure, such a defect does not occur in the coordinate value conversion CAD data D11 obtained by the coordinate process. Therefore, by comparing the coordinate-valued CAD data D11 and the run-length data D2, it is possible to reliably detect defects occurring in the run-length data D2.

[First Modification]
In the defect detection unit 33 according to the first embodiment, the extra defect region specifying unit 333 and the missing defect region specifying unit 334 calculate the logical product of the difference region data D3 and the comparison run length data F2, The area Ae and the missing defect area Af are acquired as extra defect area data D3a and missing defect area data D3b for specifying the area Ae and the missing defect area Af respectively (see FIGS. 3 and 4), but the data S3a and D3b are acquired in the following manner. Also good.

  As shown in FIG. 18, the defect detection unit 8 according to this modification includes a conversion processing unit 81, a first difference region specifying unit 82, an extra defect region specifying unit 83, a second difference region specifying unit 84, And a missing defect area specifying unit 85. The conversion processing unit 81 is the same as the conversion processing unit 331 according to the first embodiment.

  As shown in FIG. 19A, the first difference area specifying unit 82 uses the comparison CAD data F1 (that is, the input) from the graphic area defined by the comparison run-length data F2 (that is, the graphic run-length data D22). The graphic area defined by the CAD data D1) is subtracted (F2-F1) to obtain the first difference area data Ka. In the first difference area data Ka, the value of the area that exists in the comparison run length data F2 and does not exist in the comparison CAD data F1 is “positive” (primary area S1). In addition, the value of the area that does not exist in the comparison run length data F2 and exists in the comparison CAD data F1 is “negative” (negative area S2), and exists in both the comparison CAD data F1 and the comparison run length data F2. The value of “0” is “0”.

  As shown in FIG. 19A, the excess defect area specifying unit 83 extracts an area having a value of “positive” in the first difference area data Ka, thereby specifying the excess defect area data D3a specifying the excess defect area Ae. To get.

  As shown in FIG. 19B, the second difference area specifying unit 84 compares the comparison run length data F2 (ie, the graphic run) from the graphic area defined by the comparison CAD data F1 (ie, the input CAD data D1). The graphic area defined by the length data D22) is subtracted (F1-F2) to obtain the second difference area data Kb. In the second difference area data Kb, the value of the area that exists in the comparison CAD data F1 and does not exist in the comparison run length data F2 is “positive” (primary area S1). Further, the value of the area that does not exist in the comparison CAD data F1 and exists in the comparison run length data F2 is “negative” (negative area S2), and exists in both the comparison CAD data F1 and the comparison run length data F2. The value of “0” is “0”.

  As shown in FIG. 19B, the missing defect area specifying unit 85 extracts the area of “positive” value in the second difference area data Kb, thereby identifying the missing defect area data D3b specifying the missing defect area Af. To get.

  In this modification, the processing operation for detecting defects (processing corresponding to steps S13 to S16 in FIG. 8) is performed as follows.

  That is, first, the conversion processing unit 81 acquires the input CAD data D1 as the comparison CAD data F1, and acquires the graphic run-length data D22 as the comparison run-length data F2.

  Subsequently, the first difference area specifying unit 82 subtracts the figure area defined by the comparison CAD data F1 from the figure area defined by the comparison run length data F2 to obtain the first difference area data Ka.

  Subsequently, the excess defect area specifying unit 83 acquires the excess defect area data D3a specifying the excess defect area Ae by extracting an area having a “positive” value in the first difference area data Ka.

  Subsequently, the second difference area specifying unit 84 subtracts the figure area defined by the comparison run length data F2 from the figure area defined by the comparison CAD data F1 to obtain the second difference area data Kb.

  Subsequently, the missing defect area specifying unit 85 acquires the missing defect area data D3b specifying the missing defect area Af by extracting a region having a “positive” value in the second difference area data Kb.

  Note that either the process of acquiring the missing defect area data D3b or the process of acquiring the excess defect area data D3a may be performed first.

  In the above modification, the extra defect area and the missing defect area can be specified by calculating the difference instead of calculating the logical product of the two data. Further, the extra defect area data D3a and the missing defect area data D3b can be directly acquired based on the difference between the comparison CAD data F1 and the comparison run length data F2. Therefore, it is not necessary to generate the difference area data D3 as in the first embodiment.

  In the above-described modification, the second difference area data Kb is acquired, and the “positive” value area is extracted to identify the missing defect area Af. However, the first difference area data Ka The missing defect area Af may be specified by extracting an area having a “negative” value. In the above modification, the first difference area data Ka is acquired, and the area having the “positive” value is extracted to identify the extra defect area Ae. However, the second difference area data Kb The extra defect area Ae may be specified by extracting an area having a “negative” value. That is, either the first difference area data Ka or the second difference area data Kb is acquired, and the “positive” value area and the “negative” value area of the acquired data are respectively extracted. Thus, the extra defect area Ae and the missing defect area Af may be specified.

[Second Modification]
The excess defect area data D3a and the missing defect area data D3b may be acquired in the following manner. As shown in FIG. 20, the defect detection unit 9 according to this modification includes a conversion processing unit 91, a different area specifying unit 92, a first different difference area specifying unit 93, an extra defect area specifying unit 94, A two-difference difference area specifying unit 95 and a missing defect area specifying unit 96 are provided. The conversion processing unit 91 and the different area specifying unit 92 are the same as the conversion processing unit 331 and the different area specifying unit 332 according to the first embodiment, respectively.

  As shown in FIG. 21 (a), the first difference / difference area specifying unit 93 selects a graphic area defined by comparison CAD data F1 (ie, input CAD data D1) from a graphic area defined by the difference area data D3. Is subtracted (D3-F1) to obtain the first difference area data La. In the first difference / difference area data La, the value of the area that exists in the difference area data D3 and does not exist in the comparison CAD data F1 is “positive” (primary area S1). Further, the value of the area that does not exist in the difference area data D3 and exists in the comparison CAD data F1 is “negative” (negative area S2), and the value of the area that exists in both the difference area data D3 and the comparison CAD data F1. Becomes “0”.

  As shown in FIG. 21A, the excess defect area specifying unit 94 extracts the area of “positive” value in the first difference area data La, thereby identifying the excess defect area data specifying the excess defect area Ae. D3a is acquired.

  As shown in FIG. 21B, the second difference / difference area specifying unit 95 is defined by comparison run length data F2 (that is, graphic run length data D22) from a graphic area defined by the difference area data D3. The second difference difference area data Lb is acquired by subtracting the figure area to be acquired (D3-F2). In the second difference area data Lb, the value of the area that exists in the difference area data D3 and does not exist in the comparison run length data F2 is “positive” (primary area S1). Further, the value of the area that does not exist in the difference area data D3 and exists in the comparison run length data F2 is “negative” (negative area S2), and exists in both the difference area data D3 and the comparison run length data F2. The value of “0” is “0”.

  As shown in FIG. 21B, the missing defect area specifying unit 96 extracts missing defect area data that identifies the missing defect area Af by extracting a “positive” area in the second difference area data Lb. D3b is acquired.

  In this modification, the processing operation for detecting defects (processing corresponding to steps S13 to S16 in FIG. 8) is performed as follows.

  That is, first, the conversion processing unit 91 acquires the input CAD data D1 as the comparison CAD data F1, and acquires the graphic run-length data D22 as the comparison run-length data F2.

  Subsequently, the different area specifying unit 92 calculates the exclusive OR of the comparison CAD data F1 and the comparison run length data F2, and acquires the difference area data D3 specifying the difference area between the two data.

  Subsequently, the first difference difference area specifying unit 93 subtracts the figure area defined by the comparison CAD data F1 from the figure area defined by the difference area data D3 to obtain the first difference difference area data La.

  Subsequently, the excess defect area specifying unit 94 acquires the excess defect area data D3a specifying the excess defect area Ae by extracting an area having a “positive” value in the first difference difference area data La.

  Subsequently, the second difference difference area specifying unit 95 obtains second difference difference area data Lb by subtracting the figure area defined by the comparison run length data F2 from the figure area defined by the difference area data D3. .

  Subsequently, the missing defect region specifying unit 96 extracts a region having a value of “positive” in the second difference difference region data Lb, thereby acquiring missing defect region data D3b specifying the missing defect region Af.

  Note that either the process of acquiring the missing defect area data D3b or the process of acquiring the excess defect area data D3a may be performed first.

  In the above modification, the extra defect area and the missing defect area can be specified by calculating the difference instead of calculating the logical product of the two data.

[Other variations]
In each of the above embodiments, the defect inspection apparatuses 3, 5, and 6 are configured as apparatuses independent of the drawing apparatus 4, but the functional configuration of the defect inspection apparatuses 3, 5, and 6 (FIGS. 3 and 9). (See) may be realized in the drawing apparatus 4. That is, the drawing apparatus 4 may be configured as an apparatus integrated with the defect inspection apparatus 3 (or the defect inspection apparatus 5 or the defect inspection apparatus 6).

  FIG. 22 shows the configuration of the drawing apparatus 7 according to this modification. As shown in FIG. 22, the drawing device 7 includes a functional unit (drawing processing unit 71) for drawing a graphic on an output medium, and in each of the above embodiments, the defect inspection device 3 (or the defect inspection device 5, 6) each part (that is, CAD data acquisition unit 31 (51) (61), run length data acquisition unit 32 (52) (62), defect detection unit 33 (53) (63), defect repair unit 34 (54) (64), the function of the drawing run length data acquisition unit 35 (55) (65)) is realized by the hardware configuration of the drawing device 7. Here, the drawing processing unit 71 acquires the drawing run-length data T acquired by the drawing run-length data acquisition unit 35 (55) (65), and the drawing process is performed based on the acquired drawing run-length data T. Will be executed.

  Further, in each of the above embodiments, the missing defect area Af of the run-length data D2 is configured to repair missing defects by executing RIP processing on the area again to generate run data. (Step S26 in FIG. 8), it is possible to generate new run data directly in the missing defect area Af without using the RIP process. For example, run length data may be generated in the missing defect area Af by forcibly extending run data existing in the vicinity of the defect area.

  Further, the defect area may be repaired by receiving an operator input operation. For example, a screen indicating the defect area to the operator (for example, the entire run length data D2 is displayed on the screen, the extra defect area Ae in the run length data D2 is displayed in red, and the missing defect area Af is displayed in blue. Screen) is displayed on the display unit 16, and an instruction to generate run data for each defective area or an instruction to delete run data is received from an operator, and the defective area is repaired in accordance with the instruction input. Good.

  Further, in each of the above embodiments, the data describing the graphic to be drawn is CAD data, but it may be a document file that handles images and text documents. In this case, the run-length data D2 is data obtained by performing RIP processing on the document file.

  In each of the above embodiments, the figure to be drawn is a circuit pattern, but the figure to be drawn may not be a circuit pattern.

  In each of the above embodiments, the defect inspection apparatuses 3, 5, and 6 acquire the input CAD data D1 and the run-length data D2 from the CAD apparatus 1 and the RIP apparatus 2 connected via the network N, respectively. However, the method of acquiring these data is not limited to this. For example, you may read and acquire from the recording medium M which stored these data.

  In each of the above embodiments, the apparatus (drawing apparatus 4) that performs drawing based on the drawing run-length data T is configured by a direct drawing apparatus that draws a circuit pattern on the substrate. The apparatus for performing drawing is not limited to these direct drawing apparatuses, and can be constituted by various apparatuses that employ a drawing method for drawing a graphic on an output medium based on run-length data. For example, it may be configured by a printing apparatus that draws a graphic on a recording medium such as paper based on run-length data.

  In each of the above embodiments, each functional unit included in the defect inspection apparatuses 3, 5, and 6 is realized by executing a predetermined program P by a computer. It may be realized.

1 is a diagram showing an overall configuration of a graphic drawing system according to a first embodiment of the present invention. It is the schematic which shows the structure of a defect inspection apparatus. It is the schematic which shows the functional structure of a defect inspection apparatus. It is a figure which shows typically the various data acquired in a defect detection process, and its correlation. It is a schematic diagram for demonstrating a graphics process. It is a schematic diagram for demonstrating a defect repair process. It is a figure which shows the flow of a process after acquiring input CAD data until drawing drawing. It is a figure which shows the flow of a defect inspection process and a defect repair process. It is the schematic which shows the functional structure of a defect inspection apparatus. It is a figure which shows typically the various data acquired in a defect detection process, and its correlation. It is a schematic diagram for demonstrating CAD data imaging processing and run length imaging processing. It is the schematic which shows the functional structure of a defect inspection apparatus. It is a figure which shows typically the various data acquired in the defect detection process performed in a defect inspection apparatus, and its correlation. It is a schematic diagram for demonstrating a coordinate value conversion process. It is a figure which shows the flow of the process which a different area specific | specification part performs. It is a figure which shows the flow of the process which a different area specific | specification part performs. It is a figure which illustrates a difference field typically. It is a figure which shows the functional structure of the defect detection part which concerns on a 1st modification. It is a figure which shows typically the various data acquired in a defect detection process, and its correlation in a 1st modification. It is a figure which shows the functional structure of the defect detection part which concerns on a 2nd modification. It is a figure which shows typically the various data acquired in a defect detection process, and its correlation in a 2nd modification. It is the schematic which shows the structure of a drawing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 CAD apparatus 2 RIP apparatus 3, 5, 6 Defect inspection apparatus 4, 7 Drawing apparatus 31, 51, 61 CAD data acquisition part 32, 52, 62 Run length data acquisition part 33, 53, 63 Defect detection part 34, 54, 64 Drawing run-length data acquisition unit 100 Graphic drawing system 331, 531, 631 Conversion processing unit 332, 532, 632 Difference region specifying unit 333 Extra defect region specifying unit 334 Missing defect region specifying unit 341, 541 Defect repairing unit 3311 Comparison input CAD data acquisition unit 3312 Comparison run length data acquisition unit 3411 Extra defect repair unit 3412 Missing defect repair unit D1 Input CAD data D2 Run length data D3 Difference area data D3a Extra defect area data D3b Missing defect area data D4 Repair run length data F1, G1, H1 Comparison CAD data F 2, G2, H2 Comparative run length data T Drawing run length data P Program M Recording medium

Claims (22)

A defect inspection apparatus for inspecting defects in run-length data used for drawing a figure,
Input data acquisition means for acquiring input data describing a figure to be drawn;
Run-length data acquisition means for acquiring the run-length data acquired by subjecting the input data to RIP processing;
A defect detection means for comparing the input data with the run length data and detecting the difference area as a defect area of the run length data when there is a difference area;
A defect inspection apparatus comprising: The defect inspection apparatus according to claim 1,
When the defective area is detected in the run-length data, repair means for repairing the defective area and obtaining repair run-length data;
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 1 or 2,
The defect detection means is
Data format conversion means for performing a predetermined conversion process on at least one of the input data and the run-length data to align both data in a data format that can be compared with each other;
A defect inspection apparatus comprising: The defect inspection apparatus according to claim 3,
The data format conversion means is
Graphicizing means for performing graphic processing on the run-length data and acquiring graphic run-length data obtained by graphicizing the run-length data;
With
The defect detection means is
A difference area specifying means for acquiring difference area data specifying the difference area by calculating an exclusive OR of the graphic run-length data and the input data;
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 4,
The defect detection means is
By calculating a logical product of the difference area data and the graphic run length data, an extra defect area, which is an area in which run data is generated even though the input data does not exist in the run length data, is specified. Extra defect area identification means,
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 4 or 5,
The defect detection means is
A missing defect area that identifies a missing defect area that is an area in which run data is not generated even though the input data exists in the run length data by calculating a logical product of the difference area data and the input data. Specific means,
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 3,
The data format conversion means is
Graphicizing means for performing graphic processing on the run-length data and acquiring graphic run-length data obtained by graphicizing the run-length data;
With
The defect detection means is
First difference area acquisition means for acquiring first difference area data by subtracting a figure area defined by the input data from a figure area defined by the graphic run length data;
By extracting a positive value area in the first difference area data, an extra defect that identifies an extra defect area in which run data is generated even though the input data does not exist in the run length data Area identification means,
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 3,
The data format conversion means is
Graphicizing means for performing graphic processing on the run-length data and acquiring graphic run-length data obtained by graphicizing the run-length data;
With
The defect detection means is
Second difference area acquisition means for acquiring second difference area data by subtracting the figure area defined by the graphic run length data from the figure area defined by the input data;
By extracting a positive value area in the second difference area data, a missing defect that identifies a missing defect area that is an area in which run data is not generated although the input data exists in the run length data Area identification means,
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 4,
The defect detection means is
First difference difference area acquisition means for subtracting the figure area defined by the input data from the figure area defined by the difference area data to obtain first difference difference area data;
By extracting a positive value area in the first difference difference area data, an extra defect area that is an area in which run data is generated even though the input data does not exist in the run length data is specified. Defect area identification means,
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 4,
The defect detection means is
Second difference difference area acquisition means for acquiring second difference difference area data by subtracting the figure area defined by the graphic run length data from the figure area defined by the difference area data;
By extracting a positive value region in the second difference difference region data, a missing defect region that is a region in which run data is not generated even though the input data exists in the run length data is identified. Defect area identification means,
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 3,
The data format conversion means is
A run-length data imaging means for performing a first imaging process on the run-length data to obtain imaging run-length data obtained by imaging the run-length data;
Input data imaging means for executing a second imaging process on the input data to obtain imaged input data obtained by imaging the input data;
With
The defect detection means is
A difference area specifying means for specifying the difference area by comparing the imaging run length data and the imaging input data in units of pixels;
A defect inspection apparatus further comprising: The defect inspection apparatus according to claim 11,
The difference area specifying means is
The imaging run-length data and the imaging input data are compared on a pixel-by-pixel basis, and an area in which pixels exist only in the imaging run-length data is run in the run-length data where the input data does not exist. A defect inspection apparatus characterized in that it is specified as an extra defect area, which is an area where data is generated. The defect inspection apparatus according to claim 11 or 12,
The difference area specifying means is
The imaging run-length data and the imaging input data are compared on a pixel-by-pixel basis, and an area in which pixels exist only in the imaging input data is determined as run data when the input data is present in the run-length data. A defect inspection apparatus characterized in that it is specified as a missing defect region that is a region in which no is generated. The defect inspection apparatus according to claim 3,
The data format conversion means is
Input data coordinate value conversion means for executing coordinate value conversion processing on the input data to obtain coordinate value input data in which each of one or more figures included in the input data is described by a set of coordinate values;
With
The defect detection means is
By comparing the start point and end point positions of a plurality of runs included in the run length data with a predetermined coordinate value among a plurality of coordinate values included in the coordinate value input data, An extra defect area that is an area in which run data is generated even though the input data does not exist, and a missing defect area that is an area in which run data is not generated although the input data exists in the run length data Different area specifying means for specifying each,
A defect inspection apparatus further comprising: The defect inspection apparatus according to any one of claims 5, 12, and 14,
Extra defect repairing means for deleting run data generated in the extra defect area in the run length data when the extra defect area is specified;
A defect inspection apparatus comprising: The defect inspection apparatus according to claim 6, wherein:
Missing defect repairing means for newly generating run data in the missing defect area in the run length data when the missing defect area is specified,
A defect inspection apparatus comprising: The defect inspection apparatus according to any one of claims 1 to 16,
The input data is CAD data of a pattern to be drawn on the substrate;
The defect inspection apparatus, wherein the run-length data is used to draw the pattern on a substrate. By being executed by a computer, the computer
An input data acquisition function for acquiring input data describing a figure to be drawn;
A run-length data obtaining function for obtaining run-length data obtained by subjecting the input data to RIP processing;
A defect detection function for comparing the input data with the run length data and detecting the difference area as a defect area of the run length data when there is a difference area;
Defect inspection program that can realize. A drawing apparatus for drawing a figure on an output medium based on run-length data,
Input data acquisition means for acquiring input data describing a figure to be drawn;
Run-length data acquisition means for acquiring the run-length data acquired by subjecting the input data to RIP processing;
A defect detection means for comparing the input data with the run length data and detecting the difference area as a defect area of the run length data when there is a difference area;
When the defective area is detected in the run-length data, repair means for repairing the defective area and acquiring repair run-length data;
When the defective area is detected in the run-length data, the repair run-length data is acquired as drawing run-length data, and when the defective area is not detected in the run-length data, the run length data is acquired. A drawing run-length data acquisition means for acquiring length data as it is as drawing run-length data;
Drawing means for drawing a figure on the output medium based on the drawing run-length data;
A graphic drawing apparatus comprising: The figure drawing apparatus according to claim 19,
The input data is CAD data of a pattern to be drawn on the substrate;
The graphic drawing apparatus, wherein the drawing means draws the pattern on a substrate based on the run-length data acquired by subjecting the CAD data to RIP processing. A graphics drawing system for drawing graphics on an output medium based on run-length data,
A defect inspection apparatus for inspecting defects in the run-length data;
A drawing device that obtains drawing run-length data from the defect inspection device and draws a figure on the output medium based on the drawing run-length data;
With
The defect inspection apparatus is
Input data acquisition means for acquiring input data describing a figure to be drawn;
Run-length data acquisition means for acquiring the run-length data acquired by subjecting the input data to RIP processing;
A defect detection means for comparing the input data with the run length data and detecting the difference area as a defect area of the run length data when there is a difference area;
When the defective area is detected in the run-length data, repair means for repairing the defective area and acquiring repair run-length data;
When the defective area is detected in the run-length data, the repair run-length data is acquired as drawing run-length data, and when the defective area is not detected in the run-length data, the run length data is acquired. A drawing run-length data acquisition means for acquiring length data as it is as drawing run-length data;
Drawing run-length data transmitting means for transmitting the drawing run-length data to the drawing apparatus;
A graphic drawing system comprising: The figure drawing system according to claim 21,
The input data is CAD data of a pattern to be drawn on the substrate;
The graphic drawing system, wherein the drawing device draws the pattern on a substrate based on the run-length data acquired by performing RIP processing on the CAD data.

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