TWI361889B - Defect inspection apparatus, pattern drawing apparatus, pattern drawing system and recording medium storing defect inspection program - Google Patents

Description

1361889 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a defect in which the inspection is performed by RIP processing of input data describing a pattern to be drawn, and for the run length of the graphic depiction. technology. The circuit for inspecting a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a hood, a glass substrate for a plasma display, a substrate for a disk, or the like (hereinafter, simply referred to as a "substrate")

Pattern, a technique for defecting the run length data when the CAD data is directly drawn on the resist layer. [Prior Art] With the recent integration and complication of semiconductor integrated circuits, it is necessary to convert from a business model with a large number of products such as dram (Dynamic Random Access Memory) to a system LSI. The commercial model of small-scale production of varieties... Bu, system (3) and other circuit patterns are refinement year by year, and its development costs are huge. Previously, the substrate drawing pattern (more specifically, the photolithography (exposure) pattern) was formed by drawing a circuit pattern created and edited by a CAD system on a film by laser. The cover is used to transfer the circuit pattern onto the substrate using the hood. However, since the hood is finely added with high precision, the price is very high, and it is not suitable for the production of a small variety of products in terms of cost. Therefore, the development of the system LSI is reduced, and the pattern drawing method is not used (that is, the method of drawing the circuit pattern directly on the resist layer from the CAD data without using the hood) is hereinafter referred to as "direct Drawing 128482.doc 1361889 Method j). The device that draws the circuit pattern by direct drawing (hereinafter referred to as "direct drawing device") interprets the RIP (raster image) of the CAD material that describes the circuit pattern to be drawn. The processor performs processing based on the run length data obtained by processing (the data described by the start position and length of the line segment in the horizontal direction (or the vertical direction)). * #者' In the run length data obtained by RIP processing, a defect may occur due to an error conversion in RIP processing (that is, a difference from the description of the CAD data). When a defect occurs in the run length data, it is impossible to perform a description of each read line. It is necessary to perform a step of verifying whether or not the correct insert can be performed based on the run length data without the defect. In the case of using the shading pattern, a hood must be produced before the drawing is performed. Therefore, by checking the hood, it can be verified whether the correct drawing can be performed. However, when the direct drawing method of the hood is not used, the drawing is not performed because the hood is not produced. Therefore, the defect of the running length data cannot be checked by the hood. Therefore, in the case of the previous direct drawing mode, the drawing of the substrate is performed first, and the circuit pattern depicted is checked. The defect is detected by visually confirming the circuit pattern ' of the substrate of the display (4) or by observing the image (photographic image) obtained by observing the circuit pattern of the substrate after the image is formed (see Patent Document 1). The defect can be checked by running the depiction by the structure of the structure. That is, even if a defect occurs in the run length data obtained by the RIP process, the defect cannot be detected before the drawing is performed, so 128482.doc 1361889 performs the drawing process based on the defective run length data, resulting in the drawing The substrate obtained by the treatment is wasteful. In order to prevent the occurrence of such waste, a technique for detecting defects in the length of the document is also proposed. For example, a run length data obtained from the (10) data is obtained by comparing the run length data obtained from the CAD department (the run length data for depicting green) by the (4) process, and the algorithm different from the RIp process ( Examine the operating length data of (4), in order to detect the defect used in the length of the poor material of the 1st Army P i #次伯τ according to the patent document 2). [Patent Document 1] Japanese Laid-Open Patent Publication No. 2001-56068 (Patent Document 2) Japanese Laid-Open Patent Publication No. 2004-56068 (Summary of the Invention) Before, it can detect defects in running long-term data, so there is an advantage that the sample is not wasted. However, in addition to the functional unit for performing the RIP processing for actually using the run length data for green, the two components need to execute the functional portion (10) which is different from the Rip processing. That is, it is necessary to perform a plurality of Rip processes for the plural (10) processing = energy portion "at the time of detecting a defect". Thus, the processing load of the defect detection is increased, and the processing time is also long. Therefore, a technique for detecting a defect of the run length data before performing the drawing with a simpler structure is required. SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object thereof is to provide a technique for detecting a defect of an operation length data 128482.doc 1361889 for drawing a figure before performing drawing in a simple structure. (Technical means for solving the problem) The invention of claim 1 is a type of defect inspection device for checking the run length data for graphical drawing, m comprising: an input data acquisition mechanism, which obtains a graphic describing the image of the green Input data; the operation length data acquisition institution obtains the above-mentioned input data by comparing the above-mentioned input data; and the defect inspection structure, which compares the aforementioned input data with the aforementioned operation length data, and has J : In the case of a different area, the difference area is detected as the defective area of the aforementioned running length. "The invention of the monthly claim 2 is a defect inspection device of the request item, wherein the step-by-step repairing mechanism repairs the defect area and obtains the repair when the defect=domain is detected in the running length data The invention relates to the defect inspection device of claim 2, wherein the defect detection mechanism includes a data format conversion mechanism that performs at least one of the input data and the run length data. The invention is the defect inspection device of claim 3, wherein the material j transformation mechanism includes a patterning mechanism, which is the operation of the foregoing The length material is scheduled to be graphically processed, and the graphical running length data obtained by patterning the running length data is obtained, and the front detecting component is inferior to the step packet a. The regional specifying institution 'by performing the foregoing graphic The run length data and the "mutual exclusion&" (x〇r) logical operation of the input data are taken, and the difference region data specifying the difference region is taken. The invention of claim 5 is the defect inspection device of claim 4, wherein the aforementioned lack of 128482.doc ooy is performed by the front =: zone excess defect area specifying mechanism by using ΔΧ, '" domain beaker and the foregoing graphic "Running length data" and "2" (4) 1... 咐 巾 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述 前述The invention of claim 6 is a defect inspection device that requests a trapping machine to push $, wherein the aforementioned defect V has a defect-deficient area specifying mechanism, and the bean performs the aforesaid difference area data to sit a 铒, by t~' code greed "and" logical operation of the input data, specifying the presence of the aforementioned input data in the foregoing run length data, the defect inspection device of the claim 4 of the invention item 4, wherein the defect detection is performed The mechanism further includes: a first difference difference region obtaining mechanism, wherein: the graphic area defined by the difference area data is subtracted from the graphic area specified by the output: the first differential difference area data; and The remaining defect area specifying means specifies the area of the running length data in which the input data does not exist but the area where the operating data is generated, that is, the redundant defect area, by extracting the positive value area in the first difference difference knife area data. . The invention of claim 4, wherein the defect detecting means further comprises: a second difference difference area obtaining means for subtracting the pattern from the pattern area defined by the difference area data And arranging the second differential difference region data; and the defect-deficient region specifying mechanism, which specifies the foregoing running length data by extracting the positive value region in the first difference difference region data The above-mentioned input data exists, but the area where the operation data is not generated 128482.doc 1361889 is the defect-deficient area. The invention of claim 9 is the defect inspection device of claim 3, wherein the fore-form form conversion mechanism includes a graphical mechanism for performing the graphical processing on the operation level, and obtaining the aforementioned operation length for the subject X = The graphical running length data after the 'the aforementioned defect detecting mechanism advance step 7 includes: a first-differential region obtaining mechanism, which is obtained from the graphic region defined by the aforementioned graphical operation: degree data, and the soil reading AA ^ Go to the map specified by the input data

The shape area 'and the first-differential area data, and the excess defect area designation mechanism, which specifies the aforementioned operation length by extracting the positive value area in the first-region data. The wheeled data does not exist, but the area with operational data, that is, the excess defect area. The invention of claim 10 is the defect inspection device of claim 3, wherein the data form conversion mechanism includes a patterning mechanism that performs a patterning process on the run length of the run length to obtain a map of the run length data. Graphical run length data, the aforementioned defect detection mechanism further

The method includes: a second difference region obtaining mechanism, wherein the second differential region is obtained from a graphic region defined by the graphic operation length data from a graphic region defined by the input data, and a graphic region defined by the graphic length data The information; and the defect-deficient area indexing mechanism' is obtained by extracting the positive value region in the second difference region data, and the region in which the input data exists in the running length data, but the region in which the operational data is not generated is lacking Defect area. The invention of claim 11 is the defect inspection device of claim 3, wherein the capital: form conversion mechanism includes: a run length data visualization mechanism, which is a J-transport #length> material to perform the first-image processing, and obtains Will the aforementioned 128482.doc 1361889

The imaging length data after the length data is imaged; and the input data imaging mechanism 'the second imaging process is performed on the wheeled data' to obtain the imaged input image after the input data is imaged The defect detecting mechanism further includes a difference area specifying unit that specifies the difference area by comparing the imaged run length data and the imaged input data in pixel units. The invention of claim 12 is the defect inspection device, wherein the difference area specifying unit compares the videoized running length data and the imaged input data in pixel units, and specifies that only pixels exist in the imaged running length data towel. The area is the excess defect area in the area where the above-mentioned input data does not exist in the aforementioned running length data, but the running data is generated.

The invention of claim 13 is the request item defect inspection device, wherein the difference area specifying unit compares the imaged run length data and the imaged input data in pixel units, and specifies an area in which only pixels are present in the imaged input data. As the area in which the aforementioned input data exists in the aforementioned run length data towel, the area where the operation data is not generated is the defect-deficient area. The invention of the invention of claim 14 is the defect inspection device of claim 3, wherein the data form switching mechanism includes an input data coordinate value organization, which performs coordinate value processing on the input data to obtain the input data Each of the one or more graphics included in each of the graphs is represented by a set of coordinate values, and the pre-designated mechanism compares the foregoing operation by further including a difference region between the position of the start point and the end point of the operation and the defect detecting mechanism. The length coordinate data includes a specific coordinate value included in the plurality of coordinate values of 128482.doc -12- 1361889 included in the coordinate input data, and specifies that the input data in the foregoing operation long material does not exist, but the operation data is generated. The area of the excess defect area and the aforementioned input data in the above-mentioned running length data, but the area where the operating data is not generated, that is, the missing defect area. The invention of claim 15 is the defect inspection apparatus according to any one of claims 5, 7, and l2, which includes an unnecessary defect repairing mechanism for deleting the data of the run length generated when the redundant defect area is specified The operational data of the aforementioned excess defect area. The invention of claim 16, wherein the defect inspection device of any one of claims 6, 8, 13, or 14 includes a defect repairing mechanism that newly generates an operation data in the trapped region when the defect-deficient region is specified . In the invention of the above-mentioned lack of claim 1 in the singularity of the singularity of the invention, the invention of the invention is based on the defect inspection device of the 求月1 item, and the aforementioned input data is drawn on the substrate, and the aforementioned running length is The data is provided for depicting the aforementioned figures on the substrate. The invention of the request item is a type of graphic material device, which is characterized in that: the image is drawn on the output medium according to the running length data, and the package is a capital; the structure is obtained, and the figure is obtained by describing the graphic of the image to be drawn. The input=transfer length poor material acquisition mechanism' is obtained by comparing the aforementioned input data by the input mechanism: the degree: material '· defect detection difference area as the defect of the aforementioned operation length data = area:: In the foregoing running length data, the above-mentioned $ 'repairing the defective area' is detected, and the repair running length I28482.doc material is obtained, and the running length data obtaining mechanism is drawn, and the system is used to detect the running length before the fourth (four) trapping (four) Obtaining the length of the pre-completion run length (4) the running length „, when the length of the front row (4) is not detected = the defect area is obtained, the obtained running length data is taken as the description The drawing depicts the drawing in the aforementioned output medium. The invention of claim 9 is a graphic drawing device of claim 18, which is based on the (10) data of the pattern on the substrate, and the aforementioned description : According to the aforementioned length data obtained by RIp processing the aforementioned CAD data, the foregoing pattern is drawn on the substrate. The invention of (4) is a graphic stroke system characterized in that it is a data length data pair output. The media carries out a graphic depiction and includes: a defect inspection device that checks for defects in the aforementioned run length data. And a drawing device that directly connects you Yu, +, from the lack of μ leaves, the production data, 'L, the inspection device obtains a depiction According to the operation length..., the description of the trace length in the run length data body; the defect check β output medium, which is obtained by inputting the input data of the input (4) obtaining the pattern of the machine drawing; Acquired the organization, the department obtained the clerk before the acquisition, "the president of the ❹ ❹ R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R R乍 is the defect area of the run length data; the repair machine repairs the defect area, and when the defect area is detected in the second::, the length data acquisition mechanism, its line/length When the first 128482.doc 1361889 trapped area is detected in the running length data, the repair running length data is obtained as the drawing length data, and when the defective area is not detected in the running length data, The running length data is used as the drawing running length data 2 and the drawing running length data transfer mechanism, and transmits the aforementioned running length data to the drawing device. The invention of claim 21 is a graphic of the request item 2 () In the fourth embodiment, the aforementioned wheeled data in the basin is drawn on the substrate (4), and the drawing device draws the aforementioned pattern on the substrate according to the running length data obtained by RIp processing the CAD data. The invention of 22 is executed by a computer, whereby the computer can be realized by: inputting a data acquisition function, obtaining an input data describing a graphic to be traced; and operating length data acquisition function, which is obtained by inputting the aforementioned data Run length data obtained by RIP processing; and defect detection function' Said input data and the run length data, when there is a difference area 'detects the lack of the difference area as run-length data of trap region. (Effect of the Invention) With the inventions of claims 1 to 22, since the data before and after the processing is compared (i.e., the input data and the running length data are compared, the defect of the running length data is detected], so even if the data is not based on the running length data Execution of the depiction, the defects generated in the run length data can still be detected. In particular, when the defect is detected in the run length data by the invention of claim 2, the defect is repaired, so that the run length without defects can be obtained. 128482.doc 15· 1361889, in particular, by the invention of claim 17, based on the length of operation data

Performing a depiction process to produce a wasteful sample

[Embodiment] [First Embodiment] <1. Structure><1 a. Overall Configuration of Graphic Drawing System> The graphic drawing system 1 according to the first embodiment of the present invention will be described with reference to Fig. 1 . Figure 1 is a block diagram showing the overall structure of the graphic drawing system i 00. The graphic drawing system 100 includes a CAD device 1, a RIP device 2, a defect inspection device 3, and a drawing device 4. These devices 1 to 4 are connected to each other via a network N such as a LAN. The CAD device 1 creates and edits a device that describes the data of the graphic to be drawn, and outputs the data as CAD data of the vector data. CAD data is presented in a data format called a stream format (such as GDSII) with a cell hierarchy. Each cell class maintains information about at least one graphic (such as information about the position and shape of the graphic, specifically the coordinates of the vertex position of the graphic, etc.) and cell reference information. Hereinafter, the CAD data output from the CAD device 1 is referred to as "input CAD data D1 128482.doc !361889. The RIP device 2 obtains the input CAD data D1 from the CAD device 1, and the obtained input CAD data D1 is RIP developed and converted into The length data is output and output. More specifically, the input CAD data D1 of the vector data is converted into raster image data (that is, the data (line data) of the binary image data of the plurality of pixels is arranged in the first direction, The data is formed by arranging a plurality of complex numbers in a second direction orthogonal to the first direction. Further, the raster image data is subjected to run length encoding processing and output as compressed run length data. More specifically, Taking the line data as the unit, the bitmap data is sequentially processed from the first line to the last line in the second direction, and converted into the compressed running length data. The obtained running length data is shown in Fig. 4. It is shown that the input of the CAD area of the CAD area is described by the starting point position and length of the line segment (running Li (i=l, 2, . . . )) in the horizontal direction. Below, run 2 output of the length of the device data from RIp called "run-length data 〇2." The defect inspection device 3 checks for defects in the run length data D 2 for drawing. That is, the input CAD data D1 is obtained from the CAD device, the run length data D2 is obtained from the Rip device 2, and the defect of the run length data D2 is checked based on the obtained two pieces of data. Further, the defect inspection device 3 transmits to the drawing device 4 the run length data ("drawing run length data T") to be used for drawing. In other words, when the defect is detected in the run length data 〇2, the data (the repair run length data D4) (see FIG. 6) in which the defect is repaired is transmitted to the drawing device 4 as the drawing run length data T. Further, when the defect is not detected in the operation length data D2, the operation length data D2 is transmitted to the drawing device* as the drawing operation length data τ. 128482.doc 1361889 The specific structure of the defect inspection device 3 is detailed later. The rendering device 4 is a device that draws graphics on an output medium. That is, the defect inspection device 3 acquires the riding run length data T, and performs drawing of the figure based on the acquired drawing run length data T. More specifically, the depiction is performed by using the run length | system _ T s 减 减 科 科 科 展开 展开 展开 展开 展开 , , , , , , , , 点 点 点 点 点 点 点 点 点 。 。 。 。 。 。 。 。 。

Further, in the embodiment, the CAD device 1 is a drawing material for creating a circuit pattern such as an LSI to be exposed on a substrate, and is a DW exporter of the input cad data. Further, the riding device 4 is a device that directly draws (exposes) the circuit pattern produced by the CAD device 1 on the substrate. <lb. Structure of defect inspection device><lb-1. Hardware structure> The hardware structure of the defect inspection device 3 will be described with reference to Fig. 2 . The figure shows a schematic view of the hardware structure of the defect inspection device 3. The defect inspection device 3 is configured to electrically connect the control unit 11, the ROM 12, the RAM 13, the media drive 14, the operation unit 15, and the display unit 16 via the bus bar 17. The control unit 11 is constituted by a CPU. The control unit 11 controls the respective portions of the hardware in accordance with the program stored in the R 〇 M 丨 2 (or the program read by the media drive 14) p to realize the function of the defect inspection device 3. The ROM 12 is a memory device dedicated to the reading of the program p and the data required to control the defect inspection device 3 in advance. The RAM 13 is a memory device that can be read and written, and temporarily stores data and the like which are generated when the control unit 11 performs processing. The RAM 13 is composed of SRAM and flash memory 128482.doc -18-1361889 memory. The media drive 14 is a functional unit that reads information stored therein from a recording medium (more specifically, a removable recording medium such as cd-R〇m, DVD (diversified digital optical disc), floppy disk, etc.) M. The operation unit 15 is an input device constituted by a keyboard, a mouse, or the like, and is operated by a user who inputs a command and various materials. The operation unit 15 receives the user's operation and inputs it to the control unit U as a signal. The display unit 16 is provided with a monitor or the like to display various materials and the operation state of the defect inspection device 3. <lb-2. Functional Structure> The functional configuration of the defect inspection device 3 will be described with reference to Figs. 3 and 4 . FIG. 3 is a schematic view showing a functional configuration of the defect inspection device 3. Fig. 4 is a diagram showing various materials and correlation diagrams obtained in the defect detection processing executed in the defect inspection device 3. The defect inspection device 3 includes a CAD data acquisition unit 3, an operation length data acquisition unit 32, a defect detection unit 33, a defect repair unit 34, a drawing operation length data acquisition unit 35, and a drawing operation length data transmission unit 36. The functions of these parts are realized by reading a program P stored in advance in r〇m12 or the program P recorded in the recording medium, and executing it in the control unit. The CAD data acquisition unit 31 & CAD device acquires the input CAD data D1 in which the pattern to be drawn is described via the network ν (that is, the data before the RIP development of the operation length data D2 to be the inspection object). The run length data acquisition unit 32 obtains 128482.doc -19· 1361889 run length data D2 for drawing of the graphic from the RIP device 2 via the network ^ (that is, the input CAD data describing the graphic to be drawn) D1 information obtained by RIP expansion). The defect detecting unit 33 detects the defect of the running length data D2. More specifically, when the input CAD data D1 and the running length data are compared, when there is a difference area, the difference area is detected as the defective area of the running length data D2. The defect detecting unit 33 includes a conversion processing unit 331, a different area specifying unit 332, an unnecessary defect area specifying unit 333, and a missing defect area specifying unit 334.

The conversion processing unit 331 performs a specific conversion process on at least one of the input cad data D1 and the run length asset #D2 described in a mutually different form, and obtains the comparison CAD data F1 and the comparison in the form of mutually comparable data. Run length data F2 (see Figure 4). The conversion processing unit 且 is configured to compare the input CAD data acquisition unit 3311 with the comparison operation acquisition unit 33 12 . The comparison input CAD data acquisition unit 3311 obtains the input CAD data m obtained by (10) 31, and makes a comparison of the CAD data F1 (see the map data acquisition unit 32), and acquires and executes the comparison operation length data acquisition unit 3 as the comparison operation. 3 12 pairs of run length data obtained from the run length data line "Graphic processing" The graphical run length data D22 obtained by this process, length data F2 (refer to Figure 4). Suihua treatment plant / | Ming 2 * . w. The operation of the running length data D2 of the data running Li (i = ! ; is converted into a 'corruptive form' processing. For the graphical processing, refer to Fig. 5 for description of 128482.doc 1361889. Fig. 5 is a graphic In the graphical processing, first, each of the complex running Lis constituting the running length data d2 is patterned into a rectangle, that is, the length of each running Li transform in the X direction is equal to the length of the line segment in which Li is run, The length in the γ direction is equal to the rectangular pattern Ri (i = 1, 2, · · · ) in which the distance in the Y direction between Li is operated. By this, the "running length data D2" is described by running Li in a plural number. The data is converted into the data D21 described by the plurality of rectangular patterns Ri. Continuing, the complex rectangular pattern Ri (the logical operation of the complex rectangular pattern Ri) is extracted, and the merged regions of the rectangular patterns are extracted. The graphically run length data D22 is obtained by patterning the area described by the run length data D2. Referring again to Fig. 3, the difference area specifying unit 332 compares the comparison cad data F1 with the comparison run length data F2 to detect the two data. The difference is more specific and s is compared with the comparison of the C AD data F1 (that is, the input c AD data D1 here) and the comparison of the running length data F2 (that is, here the graphical running length data D22). Mutually exclusive or "(X〇r) logic operation, and obtain the difference area data D3 (refer to Figure 4) of the difference area between the two data. When there is a difference between the two data, the difference area is detected as the running length data. The D2i defect area. The excess defect area specifying unit 333 performs the difference area data 〇3 and the comparison operation length data F2 (that is, the graphic operation length data D22). (AND) logical operation to obtain the excess defect area data D3a (refer to FIG. 4) specifying the "excess defect area Ae". However, the "excess defect area Ae", 128482.doc • 21 · 1361889 is in the RIP process. 'The data area that is created redundantly in the area that is not required to be produced (that is, in the running length data D2, although the input CAD data D1 does not exist, but the area where the operating data is generated). In other words, the redundant missing area specifying part 333 specifies the excess defect by extracting only the area existing in the graphical running length data D22 in the area defined by the difference area data D3 (that is, the difference area between the input CAD data D1 and the running length data D2). Area Ae. The defective area specifying unit 334 performs the "and" (AND) logical operation of the difference area data D3 and the comparison CAD data F1 (that is, the input CAD data m) to obtain the missing defect area data D3b specifying the "defective area Af". (Refer to Figure 4). However, the so-called r-deficient defect area Af" is not produced in the data area of the area to be originally created in the RIp processing (that is, in the running length data D2), although the input CAD data D1 exists, but no operational data is generated. Area). In other words, the defective area specifying unit 334 specifies the missing defective area Af by extracting only the area existing in the input CAD data D1 in the area defined by the different area data D3. The defect repairing unit 34 performs a defect repair process on the run length data D2 when the defect detecting unit 33 detects a defect in the run length data D2, and obtains the repair run length data D4. The defect repairing unit 34 includes an excess defect repairing unit 341 and a missing defect repairing unit 342. When the excess defect repairing portion 341 detects the excess defective region Ae, the unnecessary defective region Ae is repaired. More specifically, as shown in FIG. 6, the excess defect area Ae in the run length data D2 is specified based on the excess defect area data D3a obtained by the excess defect area specifying section 333 (eg, by the top of the defective area 128482.doc - 22- 1361889 Point coordinate value to specify the defect area) 'Execute the process of deleting the operation data existing in the area. Thereby, the excess defect of the running length data D2 is repaired.

When the defective defect repairing portion 342 detects the defective defective region Af, the defective defective region Af is repaired. More specifically, as shown in FIG. 6, the missing length region data D3b obtained by the defective portion specifying portion 334 is specified, and the running length is specified. The defect area Af in the data D2, and in this area, RIP processing is performed again, and new operational data is generated. Furthermore, in the case where there is operational data in the vicinity of the newly generated operational data, the newly generated operational data is combined with the operational data in the vicinity. Thereby, the repaired operation length data d4 of the defect defect of the running length data is obtained. The drawing length data acquisition unit 35 obtains the running length data of the required length data of the poem (4). More specifically, when the defect detecting unit 33 does not detect a defect in the running length data D2 of the inspection target, the running length data is acquired as the drawing running length data T, and the defect detecting unit 33 operates in the inspection target. In the case where the defect data is detected in the length data 〇 2, the repair operation length poor material D4' obtained by the defect repair (four) is obtained as the running length data for the drawing.得 = = = — The drawing device 4 is sent to the device 4 according to the description. - % 仃 枓 枓 枓 36 36 36 36 36 36 36 。 。 。 。 。 。 。 。 (4) <2. Processing Operation><2a Processing Operation in Graphic Drawing System> Referring to Fig. 7, here, the graphic drawing system 100 executes the genus 128482.doc • 23·1361889. Fig. 7 is a flow chart showing the processing from the acquisition of the input CAD data D1 to the execution of the interpolation of the graphics. First, the CAD device 1 creates a drawing material to be exposed to the circuit pattern recorded on the substrate, and transmits it to the Rip device 2 as the input CAD data (1 (step S1). Continue, get the input of CAD data from the RIP device 2...

The obtained input CAD data D1 is RIP developed, and the running length data D2 is output (step S2). Then, the defect inspection device 3 acquires the running length data D2 outputted from the RIP device 2 in step s2, and checks the obtained running length. After the defect of the asset is obtained, the drawing length data is obtained and transmitted to the edge device 4 (step S3). The specific processing flow of step S3 is detailed later. Continuing, the drawing device 4' which acquires the running length data τ for the drawing from the defect inspection device 3 performs the drawing processing in accordance with the acquired running length (step S4). That is, the circuit pattern of the two-dimensional image is exposed on the substrate.

In the above, a series of drawing processes are performed in the graphic drawing system 1A. Next, the processing executed in the defect inspection device 3 (step S3) will be described as 0 < 2b. The processing operation in the defect inspection device 3 > where the defect inspection device 3 is executed (ie, the defect inspection process and the repair process) ), as specifically described with reference to FIG. Figure 8 is a flow showing the defect inspection-processing and defect repair processing performed in the inspection device 3; First, the CAD data acquisition unit 3丨1 obtains the input cADj 128482.doc -24 - 1361889 material D1 from the cAD device (step S11). Further, the run length data acquisition unit 32 & Rlp device 2 acquires the run length data D2 (step S12). Continuing, the defect detecting unit 33 detects the defect of the operation length data D2 acquired in step S12 (steps S13 to S16). In other words, first, the conversion processing unit 331 acquires the comparison CAD data F1 and the comparison operation length data F2 which are arranged in a data format which can be compared with each other (step S13). More specifically, the comparison input cad data acquisition unit 3311 acquires the input CAD data D1 (that is, the data acquired by the CAD data acquisition unit 31 in step S11) as the comparison CAD data F1. Further, the comparison run length lean acquisition unit 3312 performs a patterning process on the run length data 〇2 (that is, the data acquired by the run length data acquisition unit 32 in step S12), and obtains the graphical run length obtained by executing the process. The data D22 is used as the comparison run length data F2. Continuing with the 'differential region specifying unit 3 3 2 ' performing a mutual exclusion or logical operation of comparing the CAD data F1 with the comparison running length data F2 to obtain the difference region data D3 specifying the difference region between the two data (step S14). The 'excess defect area specifying unit 333 performs the "and" (AND) logical operation of the difference area data D3 acquired in step S14 and the comparison running length data F2 (that is, the graphical running length data D22) obtained in step S13. The excess defect area data D3a of the specified excess defect area Ae is obtained (step S15). Continuing the 'defective area specifying unit 334 performs the difference area data D3 obtained in step S14 and the comparison C AD data F1 obtained in step s 13 (ie, And inputting the CAD data D1), and " (AND) logic operation, and obtaining the defect-deficient area data D3b of the defect area Af designated 128482.doc -25 - 1361889 (step S16). Further, the order of execution of the processing of step S15 and the processing of step S16 may be reversed. That is, the processing of obtaining the defective area data D3b and the processing of obtaining the defective area data D3a may be performed first. Continuing the defect repairing unit 34 judges whether or not the defect detecting unit 33 detects the defect of the running length data (i.e., whether or not the difference area is detected) based on the difference area data D3 acquired in step S14 (step s7).

When it is determined in step S17 that the defect is detected, the defect repairing portion "repairs the detected defect and acquires the repair running length data D4 (step S18). More specifically, first, the redundant defect repairing portion 341 repairs the excess defect. That is, according to the excess defect area data D3a obtained in step S15, the excess defect area core in the running length data D2 is specified, and the excess defect is repaired by deleting the operation data existing in the area. In addition, the under j defect repair is performed. Part 342 repairs the defect, that is, 'according to the defect-deficient area data D3b taken in the step, the person in the running length data is designated to have the defect area Af', and the area is generated by re-executing the Rlp process (4). By repairing the defect, the repair run length data D4 is obtained. The 'fourth run length data acquisition unit 35' obtains the repair run length _ obtained in the step Sichuan as the drawing run length data T (step S19) 〇 In addition, when it is determined in step sn that no defect is detected, step s8 is not taken, and step S2G is entered. In step S20, the drawing run length data acquisition unit 35 obtains the length of the material D2 obtained in step S12 as the riding run length data (step s2〇). When the drawing length data is obtained by performing the processing of one of the steps S19 or S20, the drawing running length data transmitting unit % transmits the acquired drawing running length data to the drawing device 4 (step S2D). The drawing device 4 performs drawing based on the drawing run length data (step S4 of Fig. 7). In the above, one of the series of processes is executed in the defect inspection device 3. <3. Effect> With the above embodiment, The defect inspection device 3 detects the defect of the run length data D2 by comparing the data before and after the RIP process, that is, comparing the input CAD data with the run length data D2, and therefore, before the drawing device 4 performs the drawing according to the run length data D2, (That is, even if the drawing is not performed), the defect generated in the running length data D2 can be detected. In addition, when detecting the defect, it is not necessary to have the plural RIp The processing function unit does not need to perform the RIP processing. Therefore, the defect generated in the running length data D2 can be detected by a simple structure. Further, since the defect is detected in the running length data D2, the defect is repaired, and the repair operation is generated. The length data D4 can be used to obtain the defect-free running length data. Further, when the defect is detected in the running length data D2, the repair running length data D4 is transmitted as the drawing running length data τ to the drawing device 4' This drawing is performed by the running length data τ. Therefore, the drawing device 4 does not perform the drawing of the pattern based on the defective running length data d2, and does not cause waste of the substrate. 128482.doc •27· 1361889 In addition, according to the above-described embodiment, when the correction processing is performed in the CAD data, the correction content can be effectively confirmed. That is, the correction content implemented in the CAD material can be confirmed by performing the second processing. First, the "CAD data before correction" is acquired from the CAD device 1 as the input CAD data D1, and the run length data obtained by RIP expansion of the "corrected CAD data" is obtained from the RIP device 2 (that is, after the correction) The running length data generated by the CAD data) is used as the running length data D2. Then, the obtained CAD data D1 and the running length data D2 are compared, and the difference between the two data is detected, and the difference region data D3 is obtained. In the difference area data D3, the part that corrects the CAD data should be checked as the difference area &gt; That is, 'when observing the difference zone D3 obtained at the time', it is possible to effectively confirm what kind of correction is made to the CAD data. In addition, by confirming whether or not the correction of the CAD data is correctly detected as the difference area, it is possible to verify whether the correction of the CAD data is correctly reflected in the generated run length data. In addition, it is a matter of course that the "corrected CAD data" is obtained from the CAD device 1 as the input CAD data D1, and when compared with the run length data generated from the corrected CAD data, it can be verified whether the corrected CAD data is correctly generated. Run length data (ie, defects in detecting run length data). [Second Embodiment] &lt;1. Structure&gt;&lt;la. Overall Structure of Graphic Drawing System> A graphic drawing system according to a second embodiment of the present invention will be described. Further, the following description is omitted for the same configuration as the first embodiment, and the description of the same configuration is omitted. Further, with the same configuration, the reference symbols used in the first embodiment are preferably used. Similarly to the graphic drawing system 100 of the first embodiment, the graphic drawing system of the second embodiment includes a CAD device 1 'Rip device 2, a defect inspection device 5, and a drawing device 4 that are connected to each other via a network such as a LAN. The structure of the CAD device 1, the rIP device 2, and the drawing device 4 is the same as that of the first embodiment. The defect inspection device 5 is the same as the defect inspection device 3 of the first embodiment. Defects of the data D2. Next, the specific structure of the defect inspection device 5 will be described. <lb. Structure of defect inspection device> The defect inspection device 5 has the same hardware structure as the defect inspection device 3 of the first embodiment. Further, the functional configuration of the defect inspection device 5 will be described with reference to Fig. 9 and Fig. 1. Fig. 9 is a schematic view showing the functional configuration of the defect inspection device 5. The pattern is not displayed in the various types of data acquired in the defect detection process executed by the defect inspection device 5 and the related relationship diagram. The defect inspection device 5 includes a CAD data acquisition unit 51 and an operation length resource acquisition unit 52. The defect detecting unit 53, the defect repairing unit 54, the drawing operation length data obtaining unit 55, and the drawing running length data transmitting unit 56. Each of the P-knives is stored in advance in the R〇M by reading. The program p such as 丨2 or the program recorded on the recording medium M is executed by the control unit u (see Fig. 2). The CAD data acquisition unit 51, the run length data acquisition unit missing repair unit 54, and the drawing operation Each of the functions of the length data acquisition unit 55 and the drawing service 128482.doc -29· 1361889, and the length data transfer unit 56, and the CAD data acquisition unit η, the operation length data acquisition unit 32, the defect repair unit 34, and the drawing operation The length data acquisition unit 35 and the trace operation length data transfer unit 36 are the same. The defect detection unit 53 detects the defect of the run length data D2. More specifically, it compares the input CAD data D1 with the run length data ^^, In the case of the difference area, the difference area is detected as the defect area of the running length data. The defect detecting unit 53 includes the conversion processing unit 531 and the difference area specifying unit 532. The conversion processing unit 531 is in a different form The input (10) data m and the run length are both subjected to a specific conversion process, and are obtained as a data form that can be compared with each other. #Comparison CAD data (1) and comparison run length data G2 (refer to FIG. 10). Conversion processing unit 531 The comparison input CAD data acquisition section training and comparison operation length data acquisition 5312. The comparison input CAD data acquisition unit 5311 performs "CAD data visualization processing" on the input CAD data D1 acquired by the data acquisition unit 51. The visualized CAD data D1〇1 obtained by performing the processing is obtained as the comparison data G1 (refer to FIG. 1A). As shown in Fig. u (4), the "CAD data visualization processing" is a process of converting the input CAD data D1 of the material described by the graphic into a data format described by the video. In the CAD data visualization processing, the processing of the inside of the polygon pattern is performed by inputting each polygon pattern data included in the CAD data D1. Thereby, an image of the polygon pattern defined by the graphic data of the wheel line is generated. That is, Figure 128482.doc -30- &gt;0^

Image data. The imaged CAD data D101 is obtained by performing the processing on all the maps/shells contained in the input CAD data 01. θ 2 operation length: # material acquisition unit 53 (10) operation length (4) acquisition unit 52: The operation length data D2 is executed by "running length imaging processing", and π is performed by the processing operation to obtain the imaging running length data (10) 2 as a comparison. Run length data G2 (refer to Figure 1〇). According to the worker (8), the running length (10) 2 of the data described by the plurality of operations L1 (1 = 1, 2, · · ·) is converted into The processing of the data form described in the image. More specifically, &quot;&apos; is based on the coordinate value information of the run Li of the run length data D2, and the processing of the corresponding pixel is applied. In the running length imaging processing, first, the rectangular area illusion (4), 2, · . . . (D2〇1) is defined according to the plural running Li(i = 1, 2, · · ·) of each of the running length data D2. And the pixels (D1〇2) corresponding to the respective rectangular regions Ri(i = l, 2, · · ·) are coated. Thereby, the run length data D2 is converted into the data D2〇2 described by the pixel set from the bead described by the plural Li. That is, the imaged run length data D2〇2 is obtained. Referring again to Figure 9. The difference area specifying unit 532 compares the comparison CAD data fi with the comparison run length data F2 to detect the difference between the two data. More specifically, comparing the CAD data G1 (that is, here the visualized CAD data D1〇i) and the comparison running length data G2 (that is, here the imaging running length data D202) are compared in pixel units ( More specifically, the difference between the two data points at the same coordinate position, and the difference between the specified two data areas (that is, the area where only one of the data exists in any of the data) 128482.doc • 31 - 1361889 Heterogeneous D3. In particular, the different area specifying unit 532 extracts the area ‘where only the pixel exists in the imaged run length data D202 as the unnecessary defective area Ae, and obtains the excess defective area data D3a specifying the unnecessary defective area Ae. Further, the area where the pixel exists only in the imaged CAD data D101 is extracted, and the missing defect area area Df is obtained as the missing defect area Af. &lt;2. Processing Operation&gt;&lt;2a. Processing Operation in Graphic Drawing System&gt; The flow of the entire processing executed by the graphic drawing system of the second embodiment is executed by the graphic drawing system 1 of the first embodiment. The processing flow (see Fig. 7) is the same. &lt;2b. Processing Operation in Defect Inspection Apparatus 3&gt; The processing executed by the defect inspection apparatus 5 (i.e., the defect inspection processing and the defect repair processing) will be described. Since the flow of the process performed by the defect inspection device 5 is substantially the same as the flow of the process performed by the defect inspection device 3 of the first embodiment (refer to Fig. 8), a description will be given below with reference to Fig. 8 . First, the CAD data acquisition unit 51|CAD device 1 acquires the input cad data D1, and the operation length data acquisition unit 52|RIp device 2 acquires the operation length data D2 (refer to steps SU to S12). Continuing, the defect detecting unit 53 detects the defect of the run length data 〇2 obtained in the previous step (refer to step si2) (refer to steps sn to S16). 128482.doc •32- 1361889 That is, the 'first' transformation processing unit 53 ^ ^ 1 is sorted into mutually comparable poorly-formed comparative CAD data G1^ cattle /, comparative transport length poor material G2 (refer to v S13). More specifically, the cad data acquisition unit 53 11 inputs the CAD data D1 (that is, the step of recognizing the post (refer to step s) ,), the cad data acquisition unit Obtained the ancestors, private ~ ^ Fu Zhibei) to order CAD data visualization

The image of the CAD data obtained by performing the processing is obtained as the comparison CAD data G1. Further, the comparison run length data acquisition unit executes the run length imaging process on the run length data D2 (that is, the data acquired by the run length data acquisition unit 52 in the previous step (refer to step si2)), and obtains the execution of the process. Obtain the imaged run length data D202' as the comparison run length data g2. The continuation' difference area specifying unit 532 compares the comparison CAD data G1 with the comparison operation length data G2, and acquires the difference area data D3 specifying the difference area between the two data (refer to step S14). Further, the 'differential region specifying unit 532 acquires the unnecessary defective region data D3a in which the region (excess defective region Ae) composed of the unnecessary pixels is extracted in the different region (refer to step S15). Further, in the difference region, the missing defect region data D3b of the region (the defective region Af) which is formed by the missing pixel is extracted (refer to step S16). Continuing, the defect repairing unit 54 determines whether or not the defect detecting unit 53 detects the defect of the running length resource D2 (that is, whether or not the difference area is detected) based on the difference area data D3 acquired in the previous step (refer to step S14) ( Refer to step S17). 128482.doc -33- Here, it is determined that the detected defect is detected: in the case of trapping, the defect repairing unit 34 repairs the S18), and the drawing uses the #repair run length data D4 (refer to the step line length data C acquisition unit 55). When the acquired repair call is obtained, the d-use run length data 1 is referred to (the step-by-step transfer operation is performed by the step-and-length material transfer unit 56 to the drawing device 4 (refer to step S21). When it is judged that the defect is not detected, the length of the material D2 taken in the "step (refer to (4) si2) is obtained as the running length data T (see step S20). The H-ride running length data transfer unit transmits the m-type device 4 for the drawing run length data T (see step S21). [Third embodiment] &lt;1 · Structure&gt;&lt; 1 a. Graphic drawing system (Embodiment) A description will be given of a pattern drawing system according to a second embodiment of the present invention. The following description is omitted for the configuration of the first embodiment, and the same configuration is omitted. Make In the same manner as the graphic drawing system 100 of the first embodiment, the graphic drawing system of the third embodiment includes a CAD device 1 and a RIP device that are connected to each other via a network N such as a LAN. 2. The defect inspection device 6 and the drawing device 4 (see Fig. 1). The respective configurations of the CAD device 1, the rip device 2, and the drawing device 4 are the same as those of the first embodiment. The defect inspection device 6 and the defect inspection device of the first embodiment 3 is the same. The defect for describing the running length data D2 is checked. 128482.doc -34- 1361889 Next, the specific structure of the defect inspection device 6 will be described. <lb. Structure of defect inspection device> Defect inspection device 6 This is realized by the same hardware configuration as that of the defect inspection device 3 of the first embodiment (see Fig. 2). The functional configuration of the defect inspection device 6 will be described with reference to Figs. 12 and 13. Fig. 12 shows A schematic diagram of the functional configuration of the defect inspection device 6. Fig. 13 is a diagram showing various materials and correlation diagrams acquired in the defect detection process performed by the defect inspection device 6. The inspection device 6 includes a CAD data acquisition unit 61, an operation length data acquisition unit 62, a defect detection unit 63, a defect repair unit 64, a drawing run length data acquisition unit 65, and a drawing run length data transfer unit 66. The function is realized by reading a program p stored in the R〇M 1 2 or the like, or a program recorded in the recording medium, and executing it in the control unit (see FIG. 2). The CAD data acquisition unit 61 The functions of the run length data acquisition unit 62, the defect repair unit 64, the drawing run length data acquisition unit 65, and the drawing operation length data transfer unit 66 are respectively associated with the CAD data acquisition unit 31 and the run length data acquisition unit 32. The defect repairing unit 34, the drawing run length data acquisition unit 35, and the drawing run length data transfer unit 邗 are the same. The defect detecting unit 63 detects the defect of the running length data D2. More specifically, it is compared with the input CAD data D1 and the running length data D2, and when there is a difference area, the difference area is detected as the defect area of the running length data 02. The defect detecting unit 63 includes the conversion processing unit 631 and the difference area specifying unit 632. The conversion processing unit 631 inputs at least one of the input cad 12482.doc • 35-1361889 material D1 and the running length data D2 in a mutually different format. (In this case, the cad data is input), the special conversion processing is performed, and the comparison CAD data H1 and the comparison operation length data H2 (see FIG. 13) which are collated into mutually comparable data forms are obtained. The conversion processing unit 631 includes a comparison input CAD data acquisition unit 6311 and a comparison operation length data acquisition unit 63丨2. The comparison input CAD data acquisition unit 6311 performs "coordinate value processing" on the input CAD data D1 obtained by the (:1) data acquisition unit 61, and acquires and executes the

The obtained coordinate-valued CAD data Du is processed as a comparison cad data Η1 (refer to FIG. 13). The kiss coordinate value processing J, as shown in Fig. 14 is a process of converting the input CAD data m of the data described by the graphic into a data form described by the set of coordinate values. In the coordinate value processing, first, when the CAD data D1 is input, s is set to be parallel to the scanning direction (or the sub-scanning direction), and the number is straight (Q, 2, · · ·) ((10)). Then, the coordinates of the intersection of each of the straight line and the polygon pattern (p〇lyg〇n) included in the input CAD data D1 are obtained. However, the straight line. · ·) and each polygon circle are in the 2 . Here, the coordinate values of the two points are used as a pair of coordinate value groups (hereinafter, "coordinate value group 2, · · ·)"). Further, in the coordinate value group Mi, the coordinate value of the smaller X coordinate value is used as the starting coordinate value ^ (1 L 2, ·)', and the other coordinate value is used as the end point coordinate value Mei (i = q, 2'). Thereby, the coordinate value of each polygon pattern included in the input CAD data D1 is specified by the complex coordinate value group Mi (starting point coordinate value and end point coordinate value Mei) (i=1, 2, · · ·). CAD data Dll. Referring again to Figure 12. The comparison operation length data acquisition unit acquisition operation 128482.doc • 36 · 1361889 The operation length data D2 obtained by the length data acquisition unit 52 is also used as the comparison operation length data H2 (see Fig. 13). The difference area specifying unit 632 compares the comparison CAD data H1 with the comparison operation length data H2 to detect the difference between the two data. More specifically, by comparing the comparison running length data H2 (that is, here the running length data D2), the plural running Li (i=l, 2, · · ·), and comparing the CAD data H1 (i.e., 'here the coordinate valued cad data D11') includes the complex coordinate value group Mi(i=l, 2, · · ·) (more specifically, by comparing the starting positions of the respective running Lis) And a starting coordinate value Msi of the coordinate value group Mi corresponding to the running u, and further, by comparing the end position of each running and the end point coordinate value Mei of the coordinate value group corresponding to the running Li, The difference area (the excess defect area heart and the defect area Af) is obtained, and the difference area data D3 is obtained. However, the position of the starting point and the end point of each coordinate value group Μι included in the coordinate value CAD data Dn and the running length data 1) 2 is the common φ coordinate system (such as the original CAD data) The point coordinates are expressed as a common coordinate system of the common benchmark.

Figure. Figure 17 is a diagram schematically illustrating a difference region. [Specify the difference area resulting from the -X side]

The starting point position of the running Li (i=l, 2, · · · ... sub-comparison running length data H2 package) and the coordinate value group Mi (i=i) included in the comparison CAD data 1281 128482.doc -37- 1361889 The starting coordinate value Msi of l, 2, · · ·) is used to privately generate the difference region generated on the _ side of the running length data H2 (more specifically, the -X side of the polygonal pattern to be drawn). The process of designating the difference region generated on the -χ side will be described with reference to Figs. 15 and 17 . The difference area specifying unit 632 first selects one of the operations Li (i=l, 2, . . . ) in which the running length data H2* is included, and obtains the starting point of the running ' (displayed as "running Lt"). The coordinate value (step S31). φ continues, in the coordinate value group Mi (i=l, 2, · · ·) included in the comparison CAD data H1, the coordinate value group Mi corresponding to the operation Lt obtained in step S31 is obtained (displayed as "coordinate value group" The starting coordinate value of Mt") is displayed (displayed as "starting coordinate value Mst") (step S32). The corresponding coordinate value group J is connected to the line segment area of the starting coordinate value Msi and the end point coordinate value Mei included in the coordinate value group Mi and the operation u original (that is, when the operation u is correctly generated). The coordinate value group is obtained as the coordinate value group Mtj corresponding to the coordinate value group which is the same as the running u and has the same or the closest to the #Lt. Continuing, judging the component of the starting coordinate value of the running U obtained from the comparison of the running length data in step S31, and the corresponding component of the starting coordinate value (the starting coordinate value obtained from the comparison CAD data m in step S32) If it is determined in step S33 that the two values are identical, it is determined that the operation is not the operation of the difference region on the _χ side (step S34) (the operation of FIG. 17 and the starting point coordinate value Msi, the operation L2 and The starting point coordinate value Ms2). When it is determined in step S33 that the two values do not match, it is determined that the operation u 128482.doc -38 - 1361889 is on the -x side to constitute the operation of the difference area. At this time, by judging the comparison operation length data H2 acquisition χ coordinate values of the starting point operation component Lt is larger than the starting point X coordinate component value of the Mst corresponding to Lai u is run: lack of defects constituting the operation (step S35) one of the regions or areas Af excess heart defect.

That is, in step S35, when the 乂 component of the starting point coordinate value of the ride is larger than the X component of the corresponding starting coordinate value MSt, it is determined that the operation (4) is the operation of constituting the defective area Af on the -X side (step S36). (Fig. 17 operation L22 and starting point coordinate value Ms22, running L23 and starting point coordinate value Ms23). At this time, the difference area specifying unit 632 extracts the starting point coordinate as the starting point position, and uses the coordinate value of the starting point of the running Lt as the line segment area of the end position as the missing defect area Af. Further, in step S35, it is determined that the χ component of the starting point coordinate value of the running Lt is smaller than the X component of the corresponding starting coordinate value Mst, and it is determined that the operation of "the 在-χ side constitutes the unnecessary defective area Ae" (step S37) ^ At this time, the different area specifying unit 632 extracts the coordinate value of the starting point of the running Lt as the starting point position 'the starting point coordinate value Mst as the end point position as the excess defect area Ae. Compares all the running Lis included in the running length data H2. (i = i, 2, · · ·) "Performs the processing of steps S31 to S37. When the processing of steps S3 1 to S37 is performed for all the operations, the processing is terminated (step S38). [Specification is generated at + X Difference area on the side] The difference area designation section 6 3 2 compares the end position of the running Li (i = l, 2, · · ·) and the comparison CAD by comparing the running length data H2 package 128482.doc • 39-1361889 The end point coordinate value Mei of the coordinate value group Mi (i = 1, 2, · · ·) contained in the data m is specified on the + X side of the running length data H2 (more specifically, the polygonal pattern to be depicted) + X side) difference zone area.

Referring to Fig. 16 and Fig. 17, the processing difference area specifying unit 632 which specifies the difference area generated on the + χ side first selects the operation Li (i = 1, 2, ...) included in the comparison run length data Η 2! Runs and gets the coordinate value of the end of the run (shown as "Run Lt") (step s4i). Continuing, in the coordinate value group Mi (i=i, 2' · · ·) included in the comparison CAD data m, 'the coordinate value group corresponding to the operation u obtained in step S41 is displayed as the "coordinate value group Mt". The end point coordinate value is (displayed as "end point coordinate value Met") (step S42). Continuing, it is judged that the X component ' of the end point coordinate value of the running Lt obtained from the comparison run length data H2 in step S41 and the corresponding end point coordinate value chest (in

In step S42, whether or not the further components of the end point coordinate value 取得) obtained from the comparison CAD data H1 are identical (step S43). When it is judged at step S43 that the two values coincide, it is determined that the operation u does not constitute the operation of the difference area on the + χ side (step S44) (the operation Η and the end point coordinate value Mel, the operation L22 and the end point coordinate value Me22 of Fig. 17). Further, when it is determined in step S43 that the two values do not match, it is determined that the operation u is on the + X side to constitute the operation of the difference region. At this time, by judging that the X value of the end point coordinate value of the operation Lt obtained from the comparison run length data H2 is eight, and g is larger than the χ component of the corresponding end point coordinate value Met, it is judged that the operation U is ^ to constitute the defect-deficient region. Af or one of the excess defect areas A, Dan 1f, 128482.doc -40 - 1361889 (step S45). That is, it is determined to be operational at step S45'. When the χ component of the end point coordinate value is larger than the Χ component of the corresponding end point coordinate value Met, it is determined that the operation Lt is on the + X side to constitute the operation of the excess defect area Ae (step S46) (operation L2 and end point coordinates as shown in FIG. 17) When the value Me2, the running L3, and the end point coordinate value are included, the difference area specifying unit 632 extracts the end point coordinate value as the starting point position • i, and sets the coordinate value of the end point of the running Lt as the line segment area of the end point position, • as an unnecessary defect In addition, when it is determined in step S45' that the component of the end point coordinate value of the running Lt is smaller than the corresponding end point coordinate value M_X component, it is determined that the operation is performed on the + χ side to constitute the operation of the defective area Af (step S47). At this time, the different area specifying unit 632 extracts the coordinate value of the end point of the running Lt as the starting point position, and uses the end point coordinate value Met as the line segment area of the end point position as the missing defect area Af. When u (i = i, • 2, · · ·) is executed, the processes of the above steps S41 to S47 are executed. When the processes of steps S41 to S47 are performed for the operation of the neighbors, the process is performed. Processing (Step S48). &lt;2. Processing Operation&gt;&lt;2a. Processing Operation in Graphic Drawing System&gt; The flow of the overall processing executed by the graphic drawing system of the third embodiment, and the graphic drawing of the first embodiment The processing flow (see Fig. 7) executed by the system 1 is the same. &gt; 2 &lt;2b. Processing operation in the defect inspection device 3&gt; 128482.doc -41 · 1361889 The processing performed by the defect inspection device 6 (ie, The process of performing the defect inspection device 6 is substantially the same as the flow of the process performed by the defect inspection device 3 of the first embodiment (see FIG. 8). In the first embodiment, the CAD data acquisition unit 61 acquires the input CAD data D1 from the CAD device 1, and the operation length data acquisition unit 62 acquires the operation length data D2 from the RIP device 2 (refer to steps S11-S12). Continuing, the defect detecting unit 63 detects a defect of the run length data D2 obtained in the previous step (refer to step si 2) (refer to steps sn to S16). That is, 'first' The processing unit 631 obtains the comparison CAD data Η1 and the comparison operation length data H2 arranged in a mutually comparable data opening type (refer to step S13). More specifically, the comparison input CAD data acquisition unit 〇丨丨 pairs the input CAD data D1. (In other words, in the previous step (refer to step sn), the data acquired by the CAD data acquisition unit 61) performs the coordinate value processing, and the coordinate valued CAD data D11 obtained by executing the processing is taken as the comparison CAD data H1. Further, the comparison run length data acquisition unit 6312 obtains the operation length data D2 (i.e., the data acquired by the run length data acquisition unit 52 in the previous step (refer to step S12) as the comparison run length data 112. Continuing, the difference area specifying unit 632 compares the coordinate value groups MKi^, 2, . . . included in each of the comparison CAD data H1 included in the comparison run length data H2. In each case, the difference area (excess defect area Ae&amp; lack defect area Af) of the designated two data is obtained 128482.doc • 42- difference area data D3 (reference processing). Continuing, the defect repairing unit 64 determines whether or not the defect detecting unit detects the defect of the running length data D2 based on the difference area data D3 obtained at the previous time (i.e., whether the difference area K is detected or not).

When the defect is detected, the defect repairing unit repairs the detected defect and obtains the repair running length data (refer to step = 18). The U uses the length data obtaining unit 65 to obtain the obtained repairing operation. The predetermined length of the billet D4' is used as the drawing run length data τ (refer to step S19). Then, the material running length data transfer unit 66 transmits the acquired drawing run length data τ to the riding device 4 (refer to step s2i). In the case where the defect is not detected, the drawing run length lean obtaining unit 65 acquires the transport length data D2' obtained in the previous step (refer to step S12) as the drawing run length data τ (refer to Step S2〇). Then, the drawing length data transfer unit 66 describes the acquisition

Fig. 15 and Fig. 16) (corresponding to the drawing run length data τ of steps S14 to 16 is transmitted to the Kawasaki device 4 (refer to step s2i). &lt;3. Effect&gt; By comparing the input (four) state's comparison with the input CAD The data acquisition unit 6311 converts the input CAD data D1 into a set of titanium values by means of "coordinate value processing" (more specifically, t is a coordinate value composed of a starting coordinate value and an end point coordinate value). The data described in the group) (coordinated CAD data D11) can be specified by comparing the coordinated CAD data 〇ιι with the running length data D2 (that is, the data described as a set of line segments) The defect area generated in the length data D2. 128482.doc -43· 1361889 In addition, the RIP process acquires the set of line segments from the polygon pattern. The RIP process may cause an error in the process of segmenting the information about the length. Or, due to the parameters such as the resolution, the width is generated in the interpretation, which becomes a defect of the running length data D2. In addition, since the coordinate value processing is processing for obtaining the set of coordinate values from the polygonal figure, The coordinate valued CAD data Dn obtained by the coordinate processing does not cause such a defect. Therefore, by comparing the coordinate value CAD data D1丨 with the running length data D2, the running length data d2 can be surely detected. [First Modification] The excess defect area specifying unit 333 and the missing defect area specifying unit 334 of the defect detecting unit 33 of the first embodiment respectively perform the difference area data D3 and the comparative running length data F2. &quot;Logical operation, and the difference area data D3 and the comparison of the CAD data F1&quot;and&quot; logical operation, and obtain the excess defect area Ae, the missing defect area data D3a, and the defect area data D3b respectively (the defect area Af) Referring to Fig. 3 and Fig. 4), each of the data S3a and D3b may be obtained by the second aspect. The defect detecting unit 8 of the modified example includes the conversion processing unit 8 1 and the first The difference area specifying unit 82, the unnecessary defect area specifying unit 83, the second difference area specifying unit 84, and the missing defect area specifying unit 85. The conversion processing unit 81 and the first embodiment The conversion processing unit 331 is the same. As shown in Fig. 19 (a), the first difference region specifying unit 82 subtracts the comparison C AD from the graphic region defined by the comparison of the run length data F2 (that is, the graphical run length data D22). The data area F1 (that is, the input C AD data D1) and the 128482.doc -44 - 1361889 graphics area (F2-F1) are obtained, and the first difference area data 1^ is obtained. The first difference area data Ka exists in the comparison operation. The length data F2, but not the area of the comparison CAD data F1, is "positive" (positive area). Further, it does not exist in the comparison run length data F2, but the value of the region existing in the comparison data Η is "negative" (negative region S2), and the value existing in the region comparing the CAD data F1 and the comparison run length data F2 is "〇". As shown in Fig. 19 (a), the unnecessary defect area specifying unit 83 acquires the unnecessary defect area data D3a specifying the unnecessary defective area Ae by extracting the area of the positive value in the first difference area Ka. As shown in FIG. 19(b), the second difference area specifying unit 84 subtracts the running length data F2 (that is, the graphic operation) from the graphic area specified by comparing the CAD data F1 (that is, the input CAD data D1). The length data D22) is defined by the graphic area (F1-F2), and the second differential area data size is obtained. The second difference area data Kb exists in the comparison CAD data F1, and the value in the area which does not exist in the comparison run length data F2 is "positive" (positive area 81). In addition, 'there is no comparison with the CAD data F1, and the value of the region existing in the comparison run length data F2 is "negative" (negative region s2), and exists in the region comparing the caD data F1 with the comparison run length data F2. It is "〇". As shown in Fig. 19 (b), the defective area specifying unit 85 obtains the missing defect area data D3b of the designated defective area Af by extracting the area of the "positive" value in the second differential area data Kb. In the modification, the processing operation for detecting defects (corresponding to the processing of steps S 13 to S 16 in Fig. 8) is as follows. That is, first, the conversion processing unit 81 acquires the input CAD data D1 as a comparison 128482.doc • 45-1361889 CAD data FI ′ and obtains the graphical run length data D22 as the comparison run length data F2. The continuation 'first difference area specifying unit 82 subtracts the pattern area defined by the comparison CAD data F1 from the pattern area defined by the comparison run length data F2 to obtain the first difference area data Ka. In the succession, the unnecessary defect area specifying unit 83 acquires the excess defective area data D3a specifying the unnecessary defective area Ae by extracting the area of the positive value in the first difference area data Ka. Continuing, the second difference area specifying unit 84 obtains the second difference area data Kb by subtracting the pattern area defined by the comparison run length data F2 by comparing the pattern area specified by the CAD data F1. Continuing the 'defective area specifying section 85 by using the data in the second differential area

In Kb, the area of the "positive" value is extracted, and the defect-deficient area data D3b of the eight bodies of the designated defect-deficient area is obtained. In addition, one of the processes of obtaining the defect-deficient area data D3b and obtaining the redundant defect area data D3a may be performed first. In the above-described modification, it is possible to specify the excess defect area and the defect area by performing the difference between the two data and the logical operation. In addition, the excess defect area data D3a and the missing defect area data D3b can be directly obtained based on the difference between the comparison CAD data F1 and the comparison running length data F2. Therefore, it is not necessary to generate the difference area data D3 as in the first embodiment. Further, in the above-described modification, the second difference area data Kb is obtained, and the missing defect area Af is specified by extracting the area of the "positive" value, which is not 128482.doc -46 - 1361889, and may be extracted by The area j of the value of the "negative" of the first difference area data is the missing defect area Af. Further, in the above modification, the data of = difference area is obtained. The excess defect area Ae is specified by extracting the area of the "positive" value, but the excess defect area a" may be specified by extracting the area of the "negative" value of the second differential area: Kb. Or one of the first difference area data^ or the second difference area data Kb may be obtained, and the excess defect is specified by extracting the area of the positive value of the obtained data and the area of the value of "negative", respectively. Area ^ and defect area Af. [Second Modification] The excess defect area data D3a and the missing defect area data D3b can also be obtained in the second aspect. As shown in FIG. 2A, the defect detecting unit 9 of the modified example includes a conversion processing unit 91, a different area specifying unit 92, a first difference difference area specifying unit 93, an unnecessary defect area specifying unit 94, and a second difference difference area designation. The part 95 and the defective area specifying unit 96 ^ conversion processing unit 91 and the different area specifying unit 92 are the same as the conversion processing unit 33 and the different area specifying unit 332 of the first embodiment. As shown in FIG. 21(a), the first difference-difference area specifying unit 93 subtracts the pattern area (D3_F1) defined by comparing the cad data F1 (that is, the input CAD data D1) from the pattern area defined by the difference area data D3. ), and obtain the first difference difference region data La. In the first difference difference region data La, the value of the region existing in the difference region data D3' and not present in the comparison CAD data F1 is "positive" (positive region S1). In addition, the value that does not exist in the difference area data D3' and exists in the area of the comparison CAD data F1 is "negative" (negative area 128482.doc •47·1361889 domain S2), and exists in the difference area data D3 and the comparison CAE) The value of the area of both fi is "0". As shown in Fig. 21 (a), the unnecessary defect area specifying unit 94 acquires the excess defect area data D3a of the specified excess defect area Ae by extracting the area of the "positive" value in the first difference difference area data La. As shown in FIG. 21(b), the second difference difference area specifying unit 95 subtracts the pattern specified by the comparison run length data F2 (that is, the graphic run length data D22) from the pattern area defined by the difference area data D3. The area (D3_F2) obtains the second difference difference area data ". The second difference difference area data Lb" exists in the difference area data d3, and the value which does not exist in the area of the comparison run length data F2 is "positive" ( Positive region "). In addition, there is no difference region data D3, and the value of the region existing in the comparison run length data F2 is "negative" (negative region S2), and exists in the difference region data D3 and the comparison run length data F2. The value of the area is "〇". As shown in Fig. 21 (b), the defective area specifying unit 96 obtains the missing defect area data D3b specifying the missing defective area Af by extracting the area of the "positive" value in the second differential difference area data Lb. In the modification, the processing operation for detecting a defect (corresponding to the processing of steps S13 to S16 in Fig. 8) is as follows. That is, first, the conversion processing unit 91 acquires the input CAD data 01 as the comparison CAD data F1' and obtains the graphical run length data d22 as the comparison run length data F2^, and the difference region specifying portion 92 compares the CAD data F1 with the comparison run length. The data F2's &quot;mutual exclusion or ''logical operation, and obtain the difference area data D3 of the difference area of 128482.doc -48-1361889 between the two data. Continuing, the first difference difference area specifying unit 93 subtracts the pattern area defined by the comparison CAD data n from the pattern area defined by the difference area data D3, and obtains the first difference difference area data Lae to continue, and the excess defect area specifying unit The excess defect area data D3a specifying the excess defect area Ae is obtained by extracting the area of the "positive" value in the first difference difference region lean material La. Continuing, the first difference-difference area specifying unit 95 subtracts the pattern area defined by the difference area data D3 to obtain the second difference-difference area data Lb by comparing the run length data to the predetermined figure area'. Continuing, the defective area specifying unit 96 acquires the missing defect area data D3b of the designated defective area Af by extracting the area of the "positive" value in the second difference difference area data Lb. In addition, the processing of obtaining the defect-deficient area data D3b and the processing of the redundant defect area data D3a may be performed first. In the above-described modification, the unnecessary defect area and the missing defect area can be specified by calculating the difference without performing two pieces of data and &quot;logic operation. [Other Modifications] In the above embodiments, the defect inspection devices 3, 5, and 6 are configured as separate devices from the drawing device 4, but the functional configurations of the defect inspection devices 3, 5, and 6 (see FIG. 3 and FIG. 9) It can also be implemented as the edge device 4. That is, the drawing device 4 can be configured as a device integrated with the defect inspection device 3 (or the defect inspection device 5 or the defect inspection device 6). 128482.doc • 49- 1361889

The structure of the performance device 7 of this modification is shown in FIG. The drawing device 7 includes a function unit (riding processing unit 71) for feeding a pattern on the output medium, and in each of the above embodiments, the defect inspection device defect inspection device 5, 6) has various parts (i.e., (10) data. Acquisition unit 3U51) (61), operation length data acquisition unit &amp; (9) (4) defect detection unit 33 (53) (63), defect repair unit call 64), drawing run length data acquisition unit 35 (55) (65)) In the function, the m-drawing processing unit 71 obtains the riding running length data obtained by the drawing (4) running length data acquiring unit 35 (55) (65) by the hardware configuration of the drawing device 7, and based on the obtained The rendering process is performed using the run length data. Further, in the above embodiments, the lack of the length data of each area Af' is performed by re-executing the Rip processing on the area to generate the operational data to repair the structure of the missing defect (step S26 of FIG. 8). However, it is also possible to generate a new operational data structure directly in the under-(four) domain... without RIP processing. Run length information can also be generated in the defect-deficient area Af by forcibly extending the operational data present in the vicinity of the defect area. Further, it is also possible to perform a repair of the defective area by accepting an operator's input operation. For example, if the defect area is indicated to the operator (if the running length data D2 is displayed on the top surface, the excess defect area Ae in the running length data D2 is displayed in red, and the defective area Af is blue. The screen of the color display is displayed on the display unit ,6, and the input of the operation data is instructed or the input of the instruction to delete the operation data is accepted from the operator in each defect area, and the defect area 128482.doc-50 is repaired as the input should be instructed. · Structure of the domain of 1361889>> In the above embodiments, the data of the graphic to be drawn is CAD data, but 'can also be a file file for processing images and text documents. At this time, the run length data D2 is obtained by processing the file file. Further, in the above embodiments, the pattern to be drawn is a circuit pattern, • However, the pattern to be drawn may not be a circuit pattern. In addition, in each of the above embodiments, the defect inspection devices 3' 5, 6 acquire the cad data D1 and the run length data D2 by the CAD device 1 and the 111 device 2 connected via the network N, respectively. However, the method of obtaining such information is not limited to this. It can also be obtained by reading from the recording medium (4) storing this information. Further, in each of the above-described embodiments, the device (drawing device 4) that performs drawing based on the drawing run length data is configured by drawing a direct drawing device of the circuit pattern on the substrate, but the device for performing the drawing is not limited. • These direct rendering devices can be constructed using a variety of devices that draw a graphical representation of the graphics on the output media based on the run length data. For example, it can be constructed by drawing a graphic printing device on a recording medium such as paper based on the running length data. Further, in each of the above embodiments, the functional units included in the defect inspection devices 3, 5, and 6 are realized by executing a specific program p by a computer, but may be realized by a dedicated hardware. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a block diagram showing the entire i2S482.doc 51 of the graphic drawing system according to the first embodiment of the present invention. Fig. 2 is a schematic view showing the structure of a defect inspection device. Fig. 3 is a schematic view showing a functional configuration of a defect inspection device. Fig. 4 is a diagram showing various kinds of data obtained in the defect detecting process and their related relationship diagrams. Fig. 5 is a schematic view for explaining a circularization process. • Figure 6 is a schematic diagram illustrating the defect repair process. φ Fig. 7 is a flowchart showing the processing from the acquisition of the input CAD data to the drawing of the execution pattern. Fig. 8 is a flow chart showing the defect inspection process and the defect repair process. Fig. 9 is a schematic view showing a functional configuration of a defect inspection device. Fig. 10 is a diagram showing various kinds of data acquired in the defect detecting process and their correlation diagrams. Fig. 11 is a schematic view showing the CAD data processing and the run length imaging processing. • Fig. 12 is a schematic view showing the functional configuration of the defect inspection device. Fig. 13 is a view showing various materials obtained in the defect detecting process executed in the defect inspecting apparatus and their correlation diagrams. Fig. 1 is a schematic diagram for explaining coordinate value processing. _ Fig. 1 is a flowchart showing the processing executed by the difference area specifying unit. Fig. 16 is a flowchart showing the processing executed by the difference area specifying unit. Figure 17 is a diagram schematically illustrating a difference region. Fig. 18 is a functional structural view showing a defect detecting portion of a first modification. Fig. 19 (a) and (b) are diagrams showing various materials and correlation diagrams obtained in the defect detection section 128482.doc - 52 - 1361889 in the first modification. Fig. 2 is a view showing a functional configuration of a defect detecting portion of a second modification. Fig. 21 (4) and (8) show various kinds of data acquired in the defect detecting process and their correlation diagrams in the second modification. Fig. 22 is a schematic view showing the structure of the drawing device. [Main component symbol description]

1 CAD device 2 RIP device 3, 5, 6 Defect inspection device 4, 7 Drawing device 31, 51, 61 CAD data acquisition unit 32, 52, 62 Operation length data acquisition unit 33, 53, 63 Defect detection unit 34, 54, 64 drawing run length data acquisition unit 100 graphic drawing system 33 1, 53 1, 63 1 conversion processing unit 332, 532, 632 difference area specifying unit 333 redundant defect area specifying unit 334 defective area specifying unit 341, 541 defect repairing unit 3311 Comparison input CAD data acquisition unit 3312 Comparison operation length data acquisition unit 3411 Excess defect repair unit 3412 Defect repair unit 128482.doc • 53 . 1361889

D1 Input CAD data D2 Run length data D3 Difference area data D3a Excess defect area data D3b Missing defect area data D4 Repair run length data FI, Gl, HI Compare CAD data F2, G2, H2 Compare run length data T Trace run length data P program M recording media

128482.doc -54-

Claims (1)

丄 889 10,000, the scope of application for patents: a lack of fe inspection device, characterized by: it is a defect in the length of the data for the graphical depiction - and includes: input data acquisition agency, which is the input data The input data is a vector data describing a pattern to be drawn; the running length data obtaining unit obtains the aforementioned running length data obtained by RIP processing the input data; and the φ defect detecting mechanism compares the foregoing When the input data and the running length data have a difference area between the input data and the running length data, the difference area is detected as a defect area of the running length data. 2. As requested! The defect inspection device, wherein the step further comprises a repairing mechanism for repairing the defective area when the defective area is detected in the running length data, and obtaining the repair running length data. 3' ^The defect inspection device of claim 2, wherein the defect detection mechanism package includes a data format conversion mechanism that performs a specific conversion process on at least one of the input data and the run length data, and The data is organized into mutually comparable forms of information. 4' The defect inspection device of claim 3, wherein the data form conversion mechanism 匕s graphical means performs graphic processing on the run length data to obtain a graphical operation for graphically patterning the run length data Length data; ^ 1 The defect detection mechanism further includes a difference area designation mechanism, which is a mutually exclusive or &quot;XOR logic by using the aforementioned graphical run length data and the aforementioned input data 128482-1001216.doc 1361889 The operation obtains the difference region data specifying the difference region. 5. The defect inspection apparatus of claim 4, wherein the defect detection mechanism further comprises an excess defect area specifying mechanism by performing the aforementioned difference-differential area data and the aforementioned graphical running length data, and &quot; The logical operation specifies that the aforementioned input data does not exist, but the area where the data is operated, that is, the redundant defect area is generated. 6. The defect inspection device of claim 4, wherein the defect detecting mechanism further comprises a defect-deficient region specifying mechanism by performing the &quot;and&quot; (AND) logic operation of the difference data and the input data; In the above-mentioned run length data, although the above-mentioned input data exists, the area where the operation data is not generated, that is, the defect-deficient area. 7. The defect inspection device of claim 4, wherein the aforementioned defect detection mechanism further comprises: a first difference difference area obtaining means for obtaining a first difference difference area data by subtracting a pattern area defined by the input data from a pattern area defined by the difference area data; and a redundant defect area specifying means, difference In the positive value area in the area data, the area where the aforementioned input data does not exist is the excess defect area. By extracting the aforementioned first difference, the aforementioned running length data is specified, but the operating data is generated. 8.=: The TM checking device, wherein the aforementioned defect detecting mechanism enters the second differential difference region to take the #mechanism Obtaining the second difference difference area data by subtracting the pattern area specified by the graphic running length data from the pattern area defined by the difference area 128482-1001216.doc 1361889; and the defect-deficient area specifying mechanism By extracting the positive value region in the second difference difference region data, the defect data region in which the input data is stored but the operation data is not generated is designated in the run length data. 9. The defect inspection apparatus of claim 3, wherein the data format conversion machine includes a graphical mechanism 'the system' performs a graphical process on the run length data, and obtains the graphic length of the run length data. Graphical running length data; The defect detecting mechanism further includes: a first-differential region obtaining mechanism that subtracts a graphic region defined by the input data from a graphic region defined by the graphical running length and degree data And obtaining the first difference area data; and the excess defect area specifying means, by extracting the positive value area in the foregoing difference domain data, specifying the aforementioned running length data, although the input data does not exist, #n? + Aberdeen, but the area where the operation data is generated in the crotch is the excess defect area. 10. In the case of the defect inspection of the claim 3, the Gans &amp; L-position, wherein the data format conversion mechanism includes a graphical mechanism, which performs the graphical processing on the aforementioned (four) degree data, and The running length data is graphically represented by the graphical running length data; the foregoing defect detecting mechanism includes: a differential knife area receiving mechanism, which is a graphic area defined by the aforementioned input data, 128482-10012I6.doc 1361889, Subtracting the pattern area defined by the graphically-oriented length data to obtain the second difference area data; and the defect-deficient area specifying mechanism, by extracting the positive value area in the second difference eight-area data, In the case of reducing the aforementioned running length data: Although the above-mentioned input data exists, it does not generate an area where the material f is operated, that is, a defect-deficient area. 11. The defect inspection device of claim 3, wherein the poor-form form conversion mechanism comprises: a run length data visualization mechanism that performs a first-image processing on the run length data to obtain the foregoing operation The image lengthening data after the length data is imaged; and the input data imaging mechanism, which performs the second image processing on the input data to obtain the shadow input data after imaging the input data; the foregoing defect The detecting mechanism further includes a difference area specifying unit that specifies the difference area by comparing the imaged running length data and the imaged input data in units of pixels. 12. The defect inspection apparatus of claim 11, wherein the difference area specifying means compares the imaged run length data and the imaged input data in pixel units to specify an area in which pixels are present only in the imaged run length data, In the aforementioned run length data, although the input lean material does not exist, the area where the operation data is generated, that is, the excess defect area is generated. 13. The request item of the defect inspection device, wherein the difference area specifying unit 128482-100l2I6.doc 1361889 constructs the imaged running length data and the imaged input data in pixel units, and specifies only in the imaged input data. The area where the pixel exists is the area where the input data exists in the aforementioned run length data, but the area where the operation data is not produced, that is, the defect area. 14. The defect inspection apparatus according to claim 3, wherein the data form conversion means includes an input data coordinate value means for performing coordinate value processing on the input data, and obtaining the above-mentioned input data The coordinate value input data described by each of the graphs is represented by a set of coordinate values; the defect detecting mechanism further includes a difference region specifying mechanism, which compares the position of the complex operation included in the running length data towel In the above-mentioned running length data, the above-mentioned running length data is specified in the above-mentioned operating length data, but the above-mentioned input data does not exist, but the area where the operating data is generated, that is, the redundant defect area is generated. In the 'pre-fat length data, although the above-mentioned input data exists, the area where the operation data is not generated, that is, the defect-deficient area. And a defect inspection device according to any one of clauses 7, 9, 12, and 14, wherein: the excess defect repairing mechanism is included in the area where the excess defect area is specified, and the excess defect area generated in the run length data is deleted. Running data. 16. The defect inspection device according to any one of the defects repairing machine 14, wherein the defective defect inspection device of any one of the defect repairing machines 14 is configured to have the aforementioned lack of 128482-1001216.doc In the trapped area, the operational data of the aforementioned defect-deficient area in the aforementioned running length data is newly generated. For example, the abs-inspecting apparatus of the first aspect of the invention, wherein the input data is to be drawn on the CAD data of the pattern on the substrate; and the run length data is used to draw the pattern on the substrate. A graphic drawing device characterized in that: the graphic is drawn on the output medium according to the running length data, and includes: inputting a material receiving mechanism, wherein the input data is obtained, and the input data is described The vector data of the graphic; the running length data obtaining institution obtains the aforementioned running length data obtained by RIP processing the input data; and the consulting institution compares the input data with the aforementioned operation area #Between the above materials and the above-mentioned running length data, there is a difference between the trapping area; 'Checking (4) the difference area as the missing area of the running length data, when the material is trapped; 'It is detected in the length of the front line. Repair the defect area, and obtain the length of the repair operation - the organization will use the length of the data acquisition mechanism, when the capital inspection in the above-mentioned defect area, the heart::... The data is used as the stroke length j, two Repair the long shoulders that have not been detected before; when the (4) field of the length data is read, the above operation is obtained as the length of the riding m. 8482-1001216 d〇c 1361889 and in the broadcasting mechanism, the drawing is drawn in the output medium according to the running length data described above. 19. The graphic drawing device of claim 18, wherein the input data is drawn The CAD drawing of the pattern on the substrate; the drawing means draws the pattern on the substrate according to the running length data obtained by processing the (10) data (10). Reference numeral 20--character (4) (4)' is characterized by: The money is graphically depicted on the output medium according to the running length data, and includes: a defect inspection device for inspecting the defect of the running length (4); and a drawing device for obtaining the running length data for drawing from the defect inspection device. According to the foregoing drawing, the running length data is used to draw a graphic on the output medium; the defect detecting device includes: an input data obtaining unit that acquires an input data, and the input material is a vector describing a graphic to be drawn Data; running length: #料取机构, which is obtained by giving the aforementioned input data The running length data obtained by the RIP processing; the defect detecting mechanism compares the input data with the running length data, and when the difference between the input data and the running length data is detected, detecting the difference area as the foregoing operation The defect area of the length data; the repairing mechanism, when detecting the defect area in the foregoing running length data, repairing the defect area, and obtaining the length of the repair operation 128482-100I216.doc 1361889; When the acquisition mechanism is in the aforementioned (4) region of the AW, the acquisition operation length is obtained, and the length of the repair operation is obtained, and when the operation length data is used to describe the defect area, the data of the operation length is obtained as a drawing. The running length data; and a drawing running length &quot; material mechanism, wherein the silk drawing is transmitted to the drawing device by using the running length data. : the graphic drawing system of the monthly claim 20, wherein the input data is a CAD material of a pattern to be drawn on a substrate; and the foregoing edge device is based on the run length data obtained by processing the CAD data (10), and Drawing on the substrate, the pattern 0 A - the type of f brain can be recorded (4), and the system has a defect inspection program, and the program is executed by a computer, thereby enabling the computer to realize: input data acquisition function, For the input data, the input data is the vector data describing the graphic to be drawn; the running length data obtaining function is to obtain the running length data obtained by RIP processing the input data; and the defect detecting function And comparing the input data with the running length data, and when there is a difference region between the input data and the running length data, detecting the difference region as the defect region of the running length data. 128482-1001216.doc