JP2014071200A - Support apparatus, drawing system, and support method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique capable of supporting a checking work of data used in drawing to be smoothly performed.SOLUTION: A support apparatus 3 is an apparatus which supports checking of pattern data 8 provided for a drawing apparatus 4, and comprises: a position list generating section which generates a position list 6 with which one or more positions in the pattern data are registered; a list display control section which displays the position list 6 on a display section; a selection accepting section which accepts any of one or more positions registered with the position list 6; and a region display control section which displays a partial region of the pattern data corresponding to a position that the selection accepting section accepted on the display section.

Description

  The present invention relates to a substrate for a color filter provided in a semiconductor substrate, a printed board, a liquid crystal display device, etc., a glass substrate for a flat panel display provided in a liquid crystal display device or a plasma display device, a magnetic disk substrate, an optical disk substrate. The present invention relates to a technique for supporting confirmation of data provided to a drawing apparatus that draws a pattern on various substrates such as solar cell panels (hereinafter also simply referred to as “substrate”).

  When exposing a pattern such as a circuit to a photosensitive material coated on a substrate, the photosensitive material on the substrate is scanned with light (drawing light) modulated according to data describing the pattern without using a mask or the like. In recent years, a drawing apparatus that directly exposes (draws) a pattern on the photosensitive material has attracted attention.

  By the way, data describing a pattern to be drawn on the substrate is provided to the drawing apparatus as raster format data. In general, since a pattern to be drawn on a substrate is created as vector format data (design data) such as CAD data at the design stage, for example, a RIP (converted into raster format data (pattern data)). Raster Image Processor) processing is required.

  Here, the design data in the vector format and the raster format pattern data obtained by performing the RIP process on the design data are not always completely matched.

  For example, each graphic (that is, a graphic representing a pattern) described in the design data has a line segment (hereinafter also referred to as “run”) along the first direction orthogonal to the first direction in the pattern data. Since it is expressed by arranging one or more along the second direction, the pattern data cannot include a run shorter than the minimum length that can be drawn by the drawing apparatus. There is a case where a minute shape portion that can be expressed is expressed in a form that is truncated in the pattern data.

  Further, for example, RIP processing parameters (RIP parameters) may be adjusted so that the width (line width) of the graphic described in the design data is narrowed (or thickened). The data is intentionally generated as different from the design data.

  Further, for example, due to an error in the RIP processing, there may be a portion that differs from the design data in the pattern data.

  As described above, the pattern data may include a portion different from the design data for various reasons. In this regard, various techniques for detecting a difference between CAD data and data obtained by RIP processing have been proposed (see, for example, Patent Documents 1 to 3).

JP-A-9-190526 JP 2007-52469 A JP 2009-8735 A

  As described above, the pattern data provided to the drawing apparatus may include a portion different from the design data due to various reasons, and the operator should follow the intention regarding the different portion. It is necessary to confirm whether or not the pattern is actually drawn on the substrate using the pattern data.

  By the way, in recent years, patterns formed on a substrate have been miniaturized, and the data size of pattern data used for drawing on a single substrate has become very large. Therefore, it takes much time and effort for the operator to check whether the pattern data having a very large data size is in accordance with the intention.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of assisting an operator to smoothly check data used for drawing.

  The first aspect is the confirmation of the pattern data provided to the drawing apparatus that draws the pattern expressed in the pattern data on the substrate using the raster pattern data obtained by RIP processing the vector design data. A position list generation unit that generates a position list in which one or more positions in pattern data are registered, a list display control unit that displays the position list on a display unit, and a position list A selection receiving unit that receives selection of one of the registered one or more positions, and a region display control unit that displays the partial area of the pattern data corresponding to the position received by the selection receiving unit on the display unit And comprising.

  A second aspect is the support device according to the first aspect, wherein the position list generation unit receives a designation of one or more positions to be registered in the position list, and the position reception unit An evaluation unit that compares the pattern data with the design data at each of the received one or more positions, and gives a positive evaluation to the position when the difference between the two data is within an allowable value range; A registration unit that registers, in the position list, the evaluation information given by the evaluation unit for each of the one or more positions in association with the one or more positions received by the position reception unit.

  A 3rd aspect is an assistance apparatus which concerns on a 2nd aspect, Comprising: In the said pattern data, the line segment which follows a 1st direction is 1 or more along the 2nd direction orthogonal to the said 1st direction Assuming that the graphic represented by the arrangement is called a conversion graphic, the evaluation unit passes through the position of the evaluation target in the pattern data, and the length of the first line segment whose both ends coincide with the edge of the conversion graphic. , Passing through a position corresponding to the position of the evaluation object in the design data, extending in a direction parallel to the first line segment, and having both ends coincide with edges of a graphic included in the design data A difference between the length of the line segment is calculated, and when the difference is within an allowable range, a positive evaluation is given to the position to be evaluated.

  A fourth aspect is the support device according to any one of the first to third aspects, wherein the position list generation unit receives an area designation in the pattern data, and the area reception unit Includes an extraction unit that extracts a feature portion having a predetermined feature that exists in the area received by and a registration unit that registers the position of the feature portion extracted by the extraction unit in the position list.

  A fifth aspect is the support device according to the fourth aspect, in which the position list generation unit collects the characteristic portions extracted by the extraction unit that are not more than a predetermined distance. A grouping unit for grouping, and when the registration unit combines a plurality of feature parts into one group by the grouping unit, a single position representative of the plurality of feature parts, Register in the location list.

  A 6th aspect is an assistance apparatus which concerns on a 4th or 5th aspect, Comprising: In the said pattern data, as for the figure contained in the said design data, the line segment which follows a 1st direction is said 1st direction. A portion expressed by arranging at least one along a second direction orthogonal to each other, and the extraction unit is not generated because the length of the line segment is less than a predetermined value. Are extracted as the feature portions.

  A seventh aspect is the support apparatus according to the fourth or fifth aspect, wherein in the pattern data, a line segment along the first direction is along a second direction orthogonal to the first direction. Assuming that a figure expressed by arranging one or more is called a conversion figure, the extraction unit uses a conversion figure whose length along the second direction is smaller than an allowable value as the characteristic part. Extract.

  An eighth aspect is the support device according to any one of the first to seventh aspects, wherein the selection receiving unit receives the geometric center of a display area where the partial area of the pattern data is displayed. The position is displayed.

  A ninth aspect is the support device according to any one of the first to eighth aspects, wherein the area display control unit overlaps the partial area of the pattern data and corresponds to the partial area. Display a partial area of data.

  A tenth aspect is a drawing system, which uses a raster format pattern data obtained by RIP processing vector design data, and draws a pattern expressed in the pattern data on a substrate; A support apparatus according to any one of the first to ninth aspects.

  In an eleventh aspect, confirmation of the pattern data provided to a drawing apparatus that draws a pattern expressed in the pattern data on a substrate using raster format pattern data obtained by RIP processing vector format design data. A) generating a position list in which one or more positions in the pattern data are registered, b) displaying the position list on a display unit, and c) adding the position list to the position list. Receiving a selection of any one of the registered one or more positions; d) displaying a partial area of the pattern data corresponding to the position received in the c) on the display unit; Is provided.

  A twelfth aspect is the support method according to the eleventh aspect, wherein the step a) includes a1) accepting designation of one or more positions to be registered in the position list, and a2) the a1) process. A step of comparing the pattern data with the design data at each of the one or more positions received in step, and giving a positive evaluation to the position when the difference between the two data is within an allowable value range And a3) registering the evaluation information given in step a2) for each of the one or more positions in association with the one or more positions received in step a1) in the position list; .

  A thirteenth aspect is the support method according to the twelfth aspect, and in the pattern data, one or more line segments along the first direction are along the second direction orthogonal to the first direction. Assuming that the graphic represented by the arrangement is called a converted graphic, in the a2) step, the length of the first line segment that passes through the position of the evaluation target in the pattern data and whose both ends coincide with the edge of the converted graphic. And a second line that passes through a position corresponding to the position of the evaluation object in the design data, extends in a direction parallel to the first line segment, and has both ends coincide with the edges of the graphic included in the design data. When the difference is within an allowable range, a positive evaluation is given to the position of the evaluation target.

  A fourteenth aspect is a support method according to any one of the eleventh to thirteenth aspects, wherein the step a) includes a4) a step of receiving designation of an area in the pattern data, and a5) the a4). A step of extracting a feature portion having a predetermined feature existing in an area received in the step; a6) a step of registering the position of the feature portion extracted in the step a5) in the position list; .

  A fifteenth aspect is the support method according to the fourteenth aspect, wherein the step a) is a characteristic distance extracted from the a7) step a5) and the separation distance is equal to or less than a predetermined value. A step of grouping them together, and in the step a6), in the step a7), when a plurality of feature portions are grouped into one group, one position representing the plurality of feature portions Is registered in the position list.

  A sixteenth aspect is a support method according to the fourteenth or fifteenth aspect, wherein in the pattern data, the graphic included in the design data has a line segment along the first direction as the first direction. It is expressed by arranging one or more pieces along the second direction orthogonal to each other. In the step a5), the line segment is not generated because its length is less than a predetermined value. A part is extracted as the characteristic part.

  A seventeenth aspect is a support method according to the fourteenth or fifteenth aspect, wherein a line segment along a first direction is along a second direction perpendicular to the first direction in the pattern data. Assuming that a figure expressed by arranging one or more is called a conversion figure, in the step a5), a conversion figure whose length along the second direction is smaller than an allowable value is set as the characteristic portion. Extract as

  An eighteenth aspect is a support method according to any one of the eleventh to seventeenth aspects, wherein in the step d), the geometric center of the display area where the partial area of the pattern data is displayed is c) The position received in the process is displayed.

  A nineteenth aspect is a support method according to any one of the eleventh to eighteenth aspects, wherein in the step d), the design data corresponding to the partial area overlapped with the partial area of the pattern data. The partial area is displayed.

  According to the first, tenth, and eleventh aspects, the position list in which one or more positions in the pattern data are registered is displayed on the display unit, and the position selected by the operator among the positions registered in the position list is displayed. The partial area of the pattern data corresponding to is displayed on the display unit. According to this configuration, the operator can confirm the state of the partial area corresponding to the selected position in the pattern data only by selecting an arbitrary position while looking at the position list. Therefore, the operator can smoothly check the pattern data.

  According to the second and twelfth aspects, one or more positions in the pattern data and a position list including the evaluation results of the one or more positions are displayed on the display unit. Therefore, the operator can grasp at a glance whether or not the pattern data matches the design data within the allowable range at each of one or more positions included in the position list.

  According to the third and thirteenth aspects, since the difference between the pattern data and the design data is evaluated by comparing the lengths of the line segments, the position in the pattern data is appropriately adjusted while suppressing the processing load for the evaluation. Can be evaluated.

  According to the fourth and fourteenth aspects, the position list in which the positions of the characteristic portions existing in the designated area in the pattern data are registered is displayed on the display unit. Therefore, the operator can smoothly check the state of each feature portion existing in the designated area.

  According to the fifth and fifteenth aspects, when feature portions having a distance less than or equal to a predetermined value are grouped, one feature representing a plurality of feature portions grouped into one group in the position list Is registered. Therefore, the operator can collectively check the state of the group of characteristic portions existing at relatively close positions in the pattern data.

  According to the sixth and sixteenth aspects, when there is a portion that is not generated because the length of the line segment is less than the predetermined value in the designated area of the pattern data, the portion Are extracted as feature parts. Therefore, the operator can check the state of such a characteristic part smoothly.

  According to the seventh and seventeenth aspects, when there is a converted figure having a length that is smaller than the allowable value along the second direction in the designated area of the pattern data, the converted figure is characterized. Extracted as part. Therefore, the operator can check the state of such a characteristic part smoothly.

  According to the eighth and eighteenth aspects, the position selected by the operator is displayed at the geometric center of the display area. Therefore, the operator can appropriately confirm the situation around the selected position.

  According to the ninth and nineteenth aspects, the partial area of the design data corresponding to the partial area is displayed so as to overlap the partial area of the pattern data. Therefore, the operator can appropriately confirm the partial area of the pattern data corresponding to the selected position while comparing it with the design data.

It is a figure which shows the whole structure of a drawing system. It is a figure for demonstrating the relationship between the original figure contained in design data, and the conversion figure contained in pattern data. It is a block diagram which shows the hardware constitutions of an assistance apparatus. It is a block diagram which shows the function structure of a assistance apparatus. It is a figure which shows the structural example of a 1st assistance screen. It is a figure which shows the structural example of a 2nd assistance screen. It is a figure which shows the structural example of a 2nd assistance screen. It is a figure which shows the structural example of a 2nd assistance screen. It is a figure which shows the structural example of a 3rd assistance screen. It is a figure which shows the structural example of a 4th assistance screen. It is a figure which shows the flow of the process which produces | generates a dimension evaluation list | wrist. It is a figure which shows the flow of the process which produces | generates a minimum run list. It is a figure which shows the flow of the process which produces | generates a narrow figure list. It is a figure which shows the flow of the process performed with a assistance apparatus. It is a figure which shows the structural example of the 1st assistance screen which concerns on a modification.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. The following embodiment is an example embodying the present invention, and is not an example of limiting the technical scope of the present invention. In the drawings, the size and number of each part may be exaggerated or simplified for easy understanding.

<1. Drawing System 100>
A drawing system 100 according to an embodiment will be described with reference to FIG. FIG. 1 is a diagram illustrating an overall configuration of the drawing system 100.

  The drawing system 100 includes a design data creation device 1, a RIP device 2, a support device 3, and a drawing device 4. These devices 1 to 4 are connected to each other via a network such as a LAN. However, these devices 1 to 4 are not necessarily configured separately, and may be configured by integrating at least two devices.

<Design data creation device 1>
The design data creation device 1 is a device that creates and edits data describing a figure to be drawn on the substrate W (specifically, for example, a pattern such as a circuit) using, for example, CAD (Computer Aided Design). Then, vector format data (specifically, for example, CAD data) describing a figure to be drawn on the substrate W is output. The CAD data is expressed in, for example, a data format having a cell hierarchy called a stream format (for example, GDSII), and each cell hierarchy has information on at least one graphic (for example, information on the position and shape of the graphic). Specifically, it holds information such as the vertex position coordinates of the figure) and cell reference information. The data output from the design data creation device 1 is hereinafter also referred to as “design data 7”.

<RIP device 2>
The RIP device 2 acquires the design data 7 from the design data creation device 1 and outputs the acquired design data 7 after RIP processing. More specifically, the RIP process is a process of converting vector format data into raster format data. In raster format data (hereinafter also referred to as “pattern data 8”) obtained by RIP processing of the design data 7, as schematically shown in FIG. 2, each figure (hereinafter “original”) included in the design data 7 is shown. 71 (also referred to as “figure”) is converted into a figure (hereinafter also referred to as “converted figure”) 81 expressed by a plurality of line segments (run 80). That is, each original figure 71 included in the design data 7 has a second direction in which a pattern in which one or more pixels are arranged along the first direction in the pattern data 8 is orthogonal to the first direction. It is expressed by arranging one or more along the line (so-called “run-length data”). In the following description, the first direction, that is, the run extending direction is defined as the Y direction. Further, the second direction, that is, the arrangement direction of the runs is defined as the X direction. The RIP device 2 performs a run-length encoding process on the raster format data obtained by performing the RIP process on the design data 7 and outputs the data to the drawing device 4.

<Supporting device 3>
The support device 3 is a device that supports confirmation of the pattern data 8 provided to the drawing device 4. That is, before the RIP device 2 performs the RIP process on the design data 7, the operator confirms that the intended pattern data 8 is obtained by the RIP process, and changes the RIP parameters as necessary. The support device 3 supports the operator's confirmation work. The configuration of the support device 3 will be specifically described later.

<Drawing device 4>
The drawing device 4 is a device that exposes (draws) a pattern on a substrate W on which a photosensitive material is formed. Specifically, the drawing apparatus 4 generates pattern data 8 obtained by RIP processing of the design data 7 (that is, pattern data 8 that is a data representing a figure to be drawn on the substrate W by the presence or absence of exposure at each pixel position). Obtained from the RIP device 2, modulates light according to the pattern data 8 to generate drawing light, and irradiates the drawing light toward the substrate W on which the photosensitive material is formed while sensitizing the light on the substrate. The material is scanned to draw a pattern on the substrate W.

  The configuration of the drawing device 4 will be specifically described. The drawing apparatus 4 includes a stage 41, a stage drive mechanism 42, and a drawing head 43. In addition, the drawing device 4 includes, for example, a general computer, and includes a drawing control unit 44 that controls the operation of each unit included in the drawing device 4 while executing various arithmetic processes.

  The stage 41 has a flat plate-like outer shape, and a substrate W that is a drawing target is placed and held on the upper surface of the stage 41 in a horizontal posture. On the upper surface of the stage 41, for example, a plurality of suction holes (not shown) are formed. By forming a negative pressure (suction pressure) in the suction holes, the substrate W placed on the stage 41 is moved. It can be fixedly held on the upper surface of the stage 41.

  The stage drive mechanism 42 is a mechanism for moving the stage 41 with respect to the base, and each of the stage 41 in the main scanning direction, the sub-scanning direction orthogonal to the main scanning direction, and the rotation direction (rotation direction around the vertical axis). Move in each direction.

  The drawing head 43 is a mechanism for drawing a pattern on the substrate W by irradiating drawing light onto the upper surface of the substrate W placed on the stage 41. The drawing head 43 mainly includes a light source 431 and a modulation unit 432.

  The light source 431 emits laser light. The light emitted from the light source 431 is converted into linear light having a uniform intensity distribution (line beam whose light beam cross section is linear light) via an illumination optical system (not shown), and then the modulation unit 432. Is incident on.

  The modulation unit 432 is a functional unit that performs spatial modulation on the light emitted from the light source 431. However, spatially modulating light specifically means changing the spatial distribution of light (amplitude, phase, polarization, etc.). The modulation unit 432 is, for example, a GLV (Grating Light Valve) (“GLV” is a registered trademark) which is a diffraction grating type spatial light modulator in which a fixed ribbon and a movable ribbon are arranged one-dimensionally. ) Or a spatial light modulator such as a DMD (Digital Micromirror Device) in which micromirrors that are modulation units are two-dimensionally arranged.

  For example, when a diffraction grating type spatial light modulator is used as the modulation unit 432, the spatial light modulator has a configuration in which a plurality of modulation elements are arranged one-dimensionally. The operation of each modulation element is controlled by turning on / off the voltage. By switching the voltage state, a state in which necessary light contributing to pattern drawing is emitted and unnecessary light not contributing to pattern drawing are emitted. It can be switched between the outgoing state. The spatial light modulator includes a driver circuit unit that can independently apply a voltage to each of the plurality of modulation elements, and the voltage of each modulation element can be switched independently.

  In the drawing head 43, the line beam emitted from the light source 431 is incident on a plurality of modulation elements arranged in a line so that the long-width direction of the linear beam cross section is along the arrangement direction of the modulation elements. Then, the drawing control unit 44 switches the state of each modulation element according to the pattern data 8. Thus, drawing light having a band-like cross section including light individually modulated by each modulation element is formed and emitted toward the substrate W. The drawing light expresses a pattern described in the pattern data 8, and the drawing head 43 scans the substrate W while irradiating the drawing light to the substrate W, whereby the drawing target on the substrate W is drawn. The pattern described in the pattern data 8 is drawn over the entire area.

<2. Flow of processing>
The flow of processing executed in the drawing system 100 will be described with reference to FIG.

  The design data 7 created by the design data creation device 1 is first sent to the support device 3. The operator performs an operation of confirming whether the pattern data 8 obtained by the RIP processing of the design data 7 is in accordance with the intention in the support device 3. If it is determined that the pattern data 8 according to the intention is not obtained, the operator changes the RIP parameter and then the new pattern data 8 obtained by performing the RIP process with the new RIP parameter is determined to conform to the intention. Check if it becomes. When it is confirmed that the desired pattern data 8 is obtained, the operator determines the RIP parameter that gives the pattern data 8 as the RIP parameter of the RIP process executed by the RIP device 2.

  When the RIP parameter is determined, the RIP device 2 performs RIP processing on the design data 7 acquired from the design data creation device 1 with the determined RIP parameter.

  The RIP device 2 successively sends pattern data 8 obtained by RIP processing the design data 7 to the drawing device 4, and the drawing device 4 performs drawing processing on the substrate W based on the acquired pattern data 8. As described above, before the RIP process is executed in the RIP device 2, the operator performs a confirmation operation in the support device 3, and the pattern data 8 according to the intention is obtained in the RIP process. I have confirmed. Therefore, in this drawing process, a pattern as intended by the operator is drawn on the substrate W.

  Specifically, the drawing process on the substrate W is performed as follows, for example. That is, when the substrate W to be drawn is held by the stage 41, the drawing control unit 44 causes the stage drive mechanism 42 to start an operation (main scanning) for moving the stage 41 along the main scanning direction. . When the stage 41 starts to move along the main scanning direction, the drawing control unit 44 applies drawing light to the drawing head 43 (in the sub-scanning direction, which is subjected to spatial modulation according to the pattern data 8 by the modulation unit 432). Light for a plurality of pixels along the line) is generated, and this is intermittently irradiated toward the substrate W. Therefore, when one main scanning is completed, a pattern is drawn in one strip region (a strip region having a width corresponding to a plurality of pixels along the main scanning direction) in the surface of the substrate W. . When the main scanning is completed, the stage drive mechanism 42 moves the stage 41 along the sub-scanning direction by a distance corresponding to, for example, the width of the band-like region (sub-scanning). When the sub-scanning is completed, the main scanning is performed again. Here, the drawing head 43 irradiates the drawing light to the substrate W, and this causes the pattern area to be adjacent to the previously drawn band-like area. Drawing is performed. A pattern is drawn on the entire surface of the substrate W by repeatedly performing the main scanning accompanied with the irradiation of the drawing light while interposing the sub scanning.

<3. Support Device 3>
<3-1. Hardware configuration>
The hardware configuration of the support apparatus 3 will be described with reference to FIG.

  The support device 3 includes, for example, a general computer in which a CPU 301, a ROM 302, a RAM 303, a storage device 304, and the like are interconnected via a bus line 305. The ROM 302 stores basic programs and the like, and the RAM 303 is used as a work area when the CPU 301 performs predetermined processing. The storage device 304 is configured by a nonvolatile storage device such as a flash memory or a hard disk device. A program Pr is stored in the storage device 304, and various functions are realized by the CPU 301 as the main control unit performing arithmetic processing according to the procedure described in the program Pr. The program Pr is normally stored and used in advance in a memory such as the storage device 304, but is recorded in a recording medium such as a CD-ROM or DVD-ROM or an external flash memory (program product). (Or provided by downloading from an external server via a network) and stored in a memory such as the storage device 304 in an additional or exchange manner. Note that some or all of the functions realized in the support device 3 may be realized in hardware by a dedicated logic circuit or the like.

  Further, an input unit 306, a display unit 307, and a communication unit 308 are connected to the bus line 305. The input unit 306 is an input device configured by, for example, a keyboard and a mouse, and accepts various operations (operations such as inputting commands and various data) from the operator. Note that the input unit 306 may be configured by various switches, a touch panel, and the like. The display unit 307 is a display device that includes a liquid crystal display device, a lamp, and the like, and displays various types of information under the control of the CPU 301. The communication unit 308 has a data communication function for transmitting / receiving commands and data to / from an external device via a network.

<3-2. Functional configuration>
As described above, the support device 3 assists the operator in confirming whether the pattern data 8 obtained by the RIP processing of the design data 7 is in accordance with the intention. A functional configuration realized by the support device 3 will be described with reference to FIG. FIG. 4 is a block diagram illustrating a functional configuration included in the support device 3. Each unit shown in the figure is realized, for example, when the CPU 301 performs arithmetic processing according to a procedure described in the program Pr.

  The support device 3 includes a list generation unit 30 that generates the position list 6. Further, the support device 3 performs a selection operation for selecting any one of one or more positions included in the position list 6 and a list display control unit 35 that displays the position list 6 generated by the list generation unit 30 on the display unit 307. A selection receiving unit 36 that receives from the operator, and a region display control unit 37 that causes the display unit 307 to display a partial region of the pattern data 8 corresponding to the position selected by the operator.

  5 to 10 show configuration examples of the confirmation support screen 5 displayed on the display unit 307 under the control of these units 30 to 37. On the confirmation support screen 5, a list display area 510 that is a display area of the position list 6 and a pattern data display area 520 that is a display area of a partial area of the pattern data 8 are juxtaposed. Furthermore, an input item display area 500 in which various icons relating to generation of the position list 6 are displayed on the confirmation support screen 5. The confirmation support screen 5 has a plurality of tabs 540 for switching display contents. Depending on the selected tab 540, the type of the position list 6 displayed in the list display area 510 changes, and the type of the icon displayed in the input item display area 500 also changes.

<I. List generator 30>
The list generation unit 30 generates the position list 6. The position list 6 is a list in which one or more positions in the pattern data 8 are registered. That is, in the position list 6, one position in the pattern data 8 is associated with one record, and each record includes at least information (coordinate information) for specifying a position in the pattern data 8. It is.

  The list generation unit 30 can generate a plurality of types of position lists 6. That is, the list generation unit 30 generates the first generation unit 31 that generates the “dimension evaluation list 61” that is the first position list 6 and the “minimum run list 62” that generates the second position list 6. 2 generation unit 32, a third generation unit 33 that generates “narrow figure list 63” that is the third position list 6, and a fourth generation that generates “mark list 64” that is the fourth position list 6. Unit 34. But the list production | generation part 30 does not necessarily need to be provided with all these four production | generation parts 31-34, and can be set as the structure containing at least 1 production | generation part.

  Hereinafter, when the four types of position lists (that is, the dimension evaluation list 61, the minimal run list 62, the narrow graphic list 63, and the mark list 64) are not distinguished, they are simply referred to as “position list 6”.

<A. First Generation Unit 31>
The first generation unit 31 will be described with reference to FIG. 5 in addition to FIG. FIG. 5 is a configuration example of the confirmation support screen 5 (specifically, the confirmation support screen 5 in a state where the tab 540 displayed as “Manual” is selected, and is also referred to as a “first support screen 51”). FIG. The first support screen 51 functions as a display screen for displaying the dimension evaluation list 61 and also functions as an input screen for receiving various inputs related to generation of the dimension evaluation list 61 from the operator.

  The first generation unit 31 is a processing unit that generates the dimension evaluation list 61 and includes a position reception unit 311, an evaluation unit 312, and an evaluation information registration unit 313.

  In the dimension evaluation list 61, one position in the pattern data 8 is associated with one record, and each record includes information (coordinate information) for specifying a position in the pattern data 8 and the position. Evaluation information. Specifically, in the dimension evaluation list 61, item fields “X” and “Y” for registering position coordinates in the pattern data 8 and item fields for registering evaluation information (specifically, evaluation target and The “Dir” item field for registering the direction to be registered, the “CAD” item field for registering the length of the line segment specified in the design data 7, and the length of the line segment specified in the pattern data 8 are registered “ "Measure" item column and "Judgement" item column for registering evaluation results).

  In addition to the item fields described above, the dimension evaluation list 61 includes an item field “View” that accepts an operation for selecting one or more records included in the dimension evaluation list 61 from the operator. Is provided. The operator can select the record by checking the check box 60 displayed in the “View” item of the record to be selected.

  The dimension evaluation list 61 may be provided with further item columns in addition to the item columns described above. For example, an item column of “NO.” In which a number for identifying each record is registered may be provided. Further, for example, an item column of “Approve” in which information such as whether or not the operator has confirmed the position corresponding to each record can be registered may be provided. Further, for example, an item column of “Comment” in which an operator can register a comment for a position corresponding to each record may be provided.

<Position reception unit 311>
The position receiving unit 311 receives the designation of the position to be included in the dimension evaluation list 61 and registers it in the dimension evaluation list 61. Here, the operator directly inputs the designation of the position via the first support screen 51, or reads separately created data (data in which the position to be registered in the dimension evaluation list 61 is registered). By instructing and inputting this, the position to be included in the dimension evaluation list 61 can be designated.

  That is, the position receiving unit 311 creates a new record in the dimension evaluation list 61 when the operator operates the icon 515 displayed as “Add”. Subsequently, when the operator designates one position in the pattern data 8, the position receiving unit 311 registers the coordinates of the designated position in the items “X” and “Y” of the new record. . The designation of the position from the operator may be made in any manner. For example, the operator may input the coordinate value of the position in the pattern data 8 to be designated for each item “X” and “Y” of the newly created record in the list display area 510. . Further, for example, when the pattern data 8 is displayed in the pattern data display area 520, the operator may place the cursor on a position to be specified in the displayed area and perform a click operation.

  Further, when the operator operates the icon 513 displayed as “Load”, the position receiving unit 311 reads predetermined data stored in the storage device 304 or the like, and reads one or more registered in the data. The position is registered in the dimension evaluation list 61. That is, the position receiving unit 311 creates the same number of records as the number of one or more positions registered in the data in the dimension evaluation list 61, and the coordinates of the registered positions are set to “ Register each item of “X” and “Y”. Therefore, for example, when creating the design data 7, the operator creates data that lists one or more positions to be registered in the dimension evaluation list 61, and stores the data in the storage device 304. One or more desired positions can be immediately registered in the dimension evaluation list 61 simply by operating. Further, in this case, the common data is used in the confirmation work of each of the plurality of pattern data 8 created from the common design data 7 (for example, the plurality of pattern data 8 subjected to RIP processing with different RIP parameters). The position can be registered in the dimension evaluation list 61.

  The position receiving unit 311 deletes the selected record from the dimension evaluation list 61 when the operator selects the record in the dimension evaluation list 61 and operates the icon 516 displayed as “Remove”. .

<Evaluation unit 312>
The evaluation unit 312 evaluates each of one or more positions registered in the dimension evaluation list 61 and acquires evaluation information of each position. A mode in which the evaluation unit 312 evaluates each position will be specifically described with reference to FIG.

  The evaluation unit 312 performs evaluation in the X direction and evaluation in the Y direction of a position to be evaluated (hereinafter also referred to as “target position P”).

  When evaluating the target position P in the X direction, the evaluation unit 312 first passes through the target position P in the pattern data 8, extends along the X axis, and both ends coincide with the edges of the converted figure 81. A line segment (first X-line segment) X1 is defined, and the length of the line segment X1 is stored. In the illustrated example, since the target position P exists inside the converted figure 81, the length of the first X-ray segment indicates the length along the X axis of the converted figure 81. When the target position P exists outside the conversion figure 81, the length of the first X-ray segment indicates the length along the X axis of the gap between the conversion figures 81. On the other hand, the evaluation unit 312 passes through the position Q corresponding to the target position P in the design data 7, extends along the X axis, and has a line segment (second second) that matches the edge of the original graphic 71. X-ray segment) X2 is defined, and the length of the line segment X2 is stored. Then, the evaluation unit 312 calculates a difference ΔX (ΔX = X1−X2) between the length of the first X-ray segment X1 and the length of the second X-ray segment X2. Then, the evaluation unit 312 determines whether or not the obtained difference ΔX is within an allowable range (more specifically, whether or not the absolute value of the difference ΔX is equal to or less than a predetermined threshold D1), When it is within the allowable range, a positive evaluation is given to the X direction of the target position P.

  Similarly, when evaluating the target position P in the Y direction, the evaluation unit 312 first passes through the target position P in the pattern data 8 and extends along the Y axis, and both ends are edges of the converted figure 81. Is defined, and the length of the line segment Y1 is stored. On the other hand, the evaluation unit 312 passes through the position Q corresponding to the target position P in the design data 7, extends along the Y axis, and has a line segment (second second) that matches the edges of the original graphic 71. Y line segment) Y2 is defined, and the length of the line segment Y2 is stored. Then, the evaluation unit 312 calculates a difference ΔY (ΔY = Y1−Y2) between the length of the first Y line segment Y1 and the length of the second Y line segment Y2. Then, the evaluation unit 312 determines whether or not the obtained difference ΔY is within an allowable range (more specifically, whether or not the absolute value of the difference ΔY is equal to or less than a predetermined threshold D1), When it is within the allowable range, a positive evaluation is given to the Y direction of the target position P.

  As described above, the evaluation unit 312 compares the pattern data 8 with the design data 7 at each position in the pattern data 8 registered in the dimension evaluation list 61, and the difference between the two data 7 and 8 is within the allowable value range. If it is within, give a positive rating for the position. Note that the value of the threshold value D <b> 1 used for this evaluation is received by the evaluation unit 312 from the operator via the first support screen 51, for example. Specifically, the evaluation unit 312 receives the value input by the operator in the input box 511 displayed as “Delta” as the threshold D1 used for the evaluation.

<Evaluation information registration unit 313>
The evaluation information registration unit 313 registers evaluation information obtained by the evaluation unit 312 evaluating each of one or more positions in the pattern data 8 registered in the dimension evaluation list 61 in the dimension evaluation list 61. However, here, the evaluation information registration unit 313 compares the first X-ray segment X1 along the X-axis with the first Y-line segment Y1 along the Y-axis to give a short line segment. Are registered, and only the evaluation information about the direction set as the registration target is registered in the evaluation unit 312. In many cases, what is important in the confirmation of the pattern data 8 is the width in the short direction of the converted figure 81 (that is, the dimension in the short direction of the pattern). Can be confirmed. However, the evaluation unit 312 may be configured to register both the evaluation information about the X direction and the evaluation information about the Y direction in the dimension evaluation list 61.

  The evaluation information registration unit 313 registers evaluation information obtained by evaluating the position in the record of the position to be evaluated in the dimension evaluation list 61. Specifically, information indicating whether the registration target direction is the X direction or the Y direction is registered in the item “Dir”. The length of the line segment specified in the design data 7 (however, the line segment along the direction to be registered) is registered in the “CAD” item, and the pattern data 8 is specified in the “Measure” item. The length of the line segment (however, the line segment along the direction to be registered) is registered. Also, the evaluation result in the direction to be registered is registered in the item “Judgement”. For example, when the direction to be registered is the X direction, the evaluation information registration unit 313 registers the length of the second X-ray segment X2 in the “CAD” item field and sets the length in the “Measure” item. The length of the first X-ray segment X1 is registered, and the evaluation result in the X direction (that is, the difference between the length of the first X-ray segment X1 and the length of the second X-ray segment X2 is registered in the item “Judgement”. The determination result of whether or not the absolute value of ΔX is equal to or less than the threshold value D1 is registered.

<Flow of processing for generating dimension evaluation list 61>
A flow of processing in which the first generation unit 31 generates the dimension evaluation list 61 will be described with reference to FIG. FIG. 11 is a diagram showing the flow of the processing.

  First, the position receiving unit 311 receives designation of a position to be included in the dimension evaluation list 61 and registers it in the dimension evaluation list 61 (step S11).

  When the operator operates the icon 512 displayed as “Measure” in a state where one or more positions are registered in the dimension evaluation list 61, the evaluation unit 312 displays one or more positions registered in the dimension evaluation list 61. Each of these is evaluated (step S12).

  When the evaluation information is obtained by performing the position evaluation, the evaluation information registration unit 313 registers the obtained evaluation information in the dimension evaluation list 61 in association with the position to be evaluated (step S13).

  When the evaluation information is registered in the dimension evaluation list 61 for all positions registered in the dimension evaluation list 61 (YES in step S14), the process of generating the dimension evaluation list 61 ends. As shown in FIG. 5, the generated dimension evaluation list 61 is displayed in the list display area 510 under the control of the list display control unit 35 described later.

  After the dimension evaluation list 61 is generated, when the operator operates the icon 514 displayed as “Save”, the generated dimension evaluation list 61 is stored in the storage device 304. In addition, when the operator operates the icon 515 displayed as “Load”, the list display control unit 35 reads the dimension evaluation list 61 stored in the storage device 304 and displays it in the list display area 510.

<B. Second Generation Unit 32>
The second generation unit 32 will be described with reference to FIGS. 6 to 8 in addition to FIG. Each of FIGS. 6 to 8 is the confirmation support screen 5 (specifically, the confirmation support screen 5 in a state where the tab 540 displayed as “Minimum Run” is selected. It is a figure which shows the structural example. The second support screen 52 functions as a display screen for displaying the minimal run list 62 and also functions as an input screen for receiving various inputs related to generation of the minimal run list 62 from the operator.

  The second generation unit 32 is a processing unit that generates the minimum run list 62, and includes an area reception unit 321, a minimum run extraction unit 322, a grouping processing unit 323, and an extraction information registration unit 324.

  In the minimal run list 62, one position in the pattern data 8 is associated with one record, and each record includes information (coordinate information) for specifying a position in the pattern data 8. Specifically, the minimum run list 62 includes item columns “X” and “Y” for registering position coordinates in the pattern data 8.

  In the minimum run list 62, the position in the pattern data 8 included in each record is the position of the “minimum run” in the specified area of the pattern data 8 (if a plurality of minimum runs are grouped, 1 position representing a plurality of minimum runs. Here, the “minimal run” will be described. In RIP processing, the minimum run length that can be generated is defined by RIP parameters. Normally, the value of the RIP parameter is set in the pattern data 8 so that a run shorter than the minimum length that can be drawn by the drawing device 4 is not generated. For example, it is assumed that the minimum run length that can be generated is set to, for example, “5 μm” by the RIP parameter. In this case, the pattern data 8 obtained by RIP processing the design data 7 with the RIP parameter is ideal pattern data (that is, an ideal RIP parameter in which the minimum length of a run that can be generated is set to “zero”). From the pattern data obtained by RIP processing of the design data 7), a minimum run whose length is smaller than “5 μm” is missing. Thus, in an ideal case (ie, the minimum length of a run that can be generated is assumed to be zero), the minimum run that should be generated is set to a value where the minimum length of a run that can be generated is greater than zero. To be cut. That is, in the pattern data 8, there may occur a run that has not been generated because the length is less than a predetermined value (that is, a cut). It is called “minimal run”.

  In addition to the item fields described above, the minimal run list 62 is provided with an item column “View” that accepts an operation for selecting one or more records included in the minimal run list 62 from the operator. It is done. The operator can select the record by checking the check box 60 displayed in the “View” item of the record to be selected.

  The minimum run list 62 may be provided with further item columns in addition to the item columns described above. For example, an item column of “NO.” In which a number for identifying each record is registered may be provided. Further, for example, an item column of “Approve” in which information such as whether or not the operator has confirmed the position corresponding to each record can be registered may be provided. Further, for example, an item column of “Comment” in which an operator can register a comment for a position corresponding to each record may be provided.

<Area reception unit 321>
The area receiving unit 321 receives designation of an area (in this case, a rectangular area) in the pattern data 8 to be searched for a minimum run. Here, the operator can designate an area to be searched for the minimum run by inputting the designation of the position via the second support screen 52.

  That is, when the operator inputs a numerical value in each of the input boxes 521 of the items “Left”, “Right”, “Bottom”, and “Top” displayed under “Wafer Area”, the area receiving unit 321 displays each direction. A rectangular area in which the coordinate position of the side is defined from each input value is received as an area to be searched for a minimum run. Further, as illustrated in FIG. 6, when the pattern data 8 is displayed in the pattern data display area 520, the operator selects “Left” and “Bottom”, for example, and displays the pattern data 8. Move the cursor to the first position E1 in the area and click, select “Right” and “Top”, then move the cursor to the second position E2 in the displayed area When the click operation is performed, the area receiving unit 321 receives a rectangular area E having the first position E1 as a lower left vertex and the second position E2 as an upper right vertex as an area to be searched for a minimum run.

<Minimal run extraction unit 322>
The minimum run extraction unit 322 extracts a minimum run existing in an area (hereinafter also referred to as “designated area”) in the pattern data 8 received by the area reception unit 321.

  Specifically, the minimum run extraction unit 322 generates the design data 7 corresponding to the designated area by using the RIP parameter given by the operator (that is, the run performance that can be generated in consideration of the drawing performance of the drawing device 4). RIP processing is performed using a RIP parameter whose minimum length is set to a value larger than zero, and pattern data 8 of the designated area is generated. On the other hand, the minimum run extraction unit 322 converts the design data 7 corresponding to the designated region with an ideal RIP parameter (that is, a RIP parameter in which the minimum length of a run that can be generated is set to “zero”), RIP processing is performed to generate ideal pattern data of the designated area. Then, the minimum run extraction unit 322 compares the pattern data 8 with the ideal pattern data for the specified region, and extracts a run that exists in the ideal pattern data but does not exist in the pattern data 8 as a minimum run. To do. Further, the minimum run extraction unit 322 acquires the position of each run extracted as the minimum run (specifically, for example, the position of the center of the run) as the position information of the minimum run.

<Grouping processing unit 323>
The grouping processing unit 323 groups the minimum runs extracted by the minimum run extraction unit 322. That is, the grouping processing unit 323 groups together the minimum runs having a value R1 or less in which the separation distance (for example, the separation distance between the midpoints of the runs) is determined among the extracted minimum runs. Then, one position (representative position) representing a plurality of minimum runs collected in one group is acquired. Specifically, as this representative position, for example, the position of the center of the smallest rectangular area that can surround a plurality of minimum runs collected in one group, for example, the average coordinate position of the plurality of minimum runs Position, etc. can be adopted.

  For example, the grouping processing unit 323 receives the size of the separation distance serving as a grouping reference from the operator via the second support screen 52. Specifically, the grouping processing unit 323 accepts the value input by the operator in the input box 522 displayed as “Integrated Range” as the separation distance value R1 as a grouping reference.

  However, an arbitrary value greater than or equal to zero can be input in the input box 522 displayed as “Integrated Range”. When the operator inputs zero in the input box 522, the grouping processing unit 323 displays the minimum value. Do not group runs.

<Extraction information registration unit 324>
The extraction information registration unit 324 is configured to display the position of each minimum run extracted by the minimum run extraction unit 322 (in the case where the minimum runs are grouped, a single representative of a plurality of minimum runs grouped into one group). Position) is registered in the minimal run list 62.

  In other words, the extracted information registration unit 324 creates one record for one minimum run in the minimum run list 62 for the minimum runs that are not grouped, and sets the coordinates of the position of the minimum run in the record. Register each item of “X” and “Y”. Further, the extracted information registration unit 324 creates one record for the plurality of minimum runs in the minimum run list 62 for the plurality of grouped minimum runs, and coordinates of the representative positions of the plurality of minimum runs Is registered in each item of “X” and “Y” of the record.

<Processing flow for generating the minimal run list 62>
A flow of processing in which the second generation unit 32 generates the minimal run list 62 will be described with reference to FIG. 12 in addition to FIGS. 4 and 6 to 8. FIG. 12 is a diagram showing the flow of the processing.

  First, the area receiving unit 321 receives designation of an area in the pattern data 8 to be searched for a minimum run (see FIG. 6) (step S21).

  Subsequently, when the operator operates the icon 523 displayed as “Make List”, the minimum run extraction unit 322 extracts the minimum runs existing in the designated area received in step S21 and extracts each extracted run. The position information of the minimum run is acquired (step S22).

  When the operator has not instructed grouping (specifically, as shown in FIG. 7, when zero is input in the input box 522 displaying “Integrated Range”) (NO in step S23) ), The extraction information registration unit 324 registers the position of each minimum run extracted in step S22 in the minimum run list 62. Specifically, the extraction information registration unit 324 creates the same number of records as the number of minimum runs extracted in step S22 in the minimum run list 62, and sets the coordinates of the positions of each minimum run as “X” of each record. ”And“ Y ”.

  On the other hand, when the operator has instructed grouping (specifically, as shown in FIG. 8, when a value larger than zero is input in the input box 522 displayed as “Integrated Range”). (YES in step S23), the grouping processing unit 323 groups the minimal runs extracted in step S22 (step S24).

  When the grouping of the minimum runs is completed, the extraction information registration unit 324 then determines the position of each minimum run extracted in step S22 (if a plurality of minimum runs are grouped, the plurality of grouped Are registered in the minimum run list 62 (step S25). Specifically, the extraction information registration unit 324 creates one record for one minimum run in the minimum run list 62 for the minimum runs not grouped among the minimum runs extracted in step S22. Then, the coordinates of the position of the minimum run are registered in each item of “X” and “Y” of the record. Also, the extracted information registration unit 324 creates one record for the plurality of minimum runs in the minimum run list 62 for the plurality of minimum runs extracted from the minimum runs extracted in step S22. The coordinates of the representative positions of the plurality of minimum runs are registered in the items “X” and “Y” of the record.

  When the positions (or representative positions) of all the minimum runs extracted from the designated area are registered in the minimum run list 62, the process for generating the minimum run list 62 ends. The generated minimal run list 62 is displayed in the list display area 510 under the control of the list display control unit 35 described later, as shown in FIGS.

  After the minimal run list 62 is generated, when the operator operates the icon 525 displayed as “Save”, the generated minimal run list 62 is stored in the storage device 304. When the operator operates the icon 524 displayed as “Load”, the list display control unit 35 reads out the minimal run list 62 stored in the storage device 304 and displays it in the list display area 510.

<C. Third Generation Unit 33>
The third generation unit 33 will be described with reference to FIG. 9 in addition to FIG. FIG. 9 is a configuration example of the confirmation support screen 5 (specifically, the confirmation support screen 5 in a state where the tab 540 displayed as “Sliver” is selected, and is also referred to as a “third support screen 53”). FIG. The third support screen 53 functions as a display screen for displaying the narrow graphic list 63 and also functions as an input screen for receiving various inputs related to generation of the narrow graphic list 63 from the operator.

  The third generation unit 33 is a processing unit that generates the narrow graphic list 63, and includes an area reception unit 331, a narrow graphic extraction unit 332, a grouping processing unit 333, and an extraction information registration unit 334.

  In the narrow graphic list 63, one position in the pattern data 8 is associated with one record, and each record includes information (coordinate information) for specifying the position in the pattern data 8. . Specifically, the narrow graphic list 63 includes “X” and “Y” item fields for registering position coordinates in the pattern data 8.

  In the narrow graphic list 63, the position in the pattern data 8 included in each record is the position of the “narrow graphic” in the specified area of the pattern data 8 (if a plurality of narrow graphics are grouped, It is a single position representing a plurality of the narrow figures grouped). Here, the “narrow figure” will be described. Of the converted figures 81 included in the pattern data 8, a streak-like figure whose length in the X direction (run arrangement direction) is extremely small is highly likely not intended by the operator. For example, a figure that does not exist in the design data 7 may be formed as the converted figure 81 in the pattern data 8 due to erroneous conversion of the RIP process. Often appear as streak-like figures with extremely small lengths and extremely long lengths in the Y direction. In addition, even when the line width is too thin, there is a possibility that a streak-like converted figure 81 having an extremely small length in the X direction may be formed. Here, the converted figure 81 having a length in the X direction (run arrangement direction) smaller than a predetermined allowable value is referred to as a “narrow figure”.

  In the narrow graphic list 63, in addition to the item fields described above, an item field “View” that accepts an operation for selecting one or more records included in the narrow graphic list 63 from the operator. Is provided. The operator can select the record by checking the check box 60 displayed in the “View” item of the record to be selected.

  The narrow graphic list 63 may be provided with further item fields in addition to the item fields described above. For example, an item column of “NO.” In which a number for identifying each record is registered may be provided. Further, for example, an item column of “Approve” in which information such as whether or not the operator has confirmed the position corresponding to each record can be registered may be provided. Further, for example, an item column of “Comment” in which an operator can register a comment for a position corresponding to each record may be provided.

<Area reception unit 331>
The area receiving unit 331 receives designation of an area (in this case, a rectangular area) in the pattern data 8 to be searched for narrow figures. Here, the operator can designate an area to be searched for a narrow graphic by inputting designation of a position via the third support screen 53.

  That is, when the operator inputs a numerical value in each of the input boxes 531 of the items “Left”, “Right”, “Bottom”, and “Top” displayed under “Wafer Area”, the area receiving unit 331 displays each direction. A rectangular area in which the coordinate position of the side is defined from each input value is received as an area to be searched for a narrow graphic. When the pattern data 8 is displayed in the pattern data display area 520, the operator selects “Left” and “Bottom”, for example, and then moves the cursor to the first position in the displayed area. The region accepting unit 331 selects the “Right” and “Top”, moves the cursor to the second position in the displayed region, and performs the click operation. A rectangular area having the position 1 as the lower left vertex and the second position as the upper right vertex is received as an area to be searched for a narrow graphic (see FIG. 6).

<Narrow figure extraction unit 332>
The narrow graphic extracting unit 332 extracts a narrow graphic existing in an area (hereinafter also referred to as “designated area”) in the pattern data 8 received by the area receiving unit 331.

  Specifically, the narrow figure extraction unit 332, for example, determines the dimension along the X direction of all the converted figures 81 existing in the designated area (that is, the converted figure 81 in which at least a part is included in the designated area). measure. And the conversion figure 81 whose said dimension is smaller than the predetermined threshold value D2 is extracted as a narrow figure. The narrow graphic extracting unit 332 further acquires the position of each converted graphic 81 extracted as a narrow graphic (specifically, for example, the center position of the converted graphic 81) as position information of the narrow graphic.

  Note that the value of the threshold value D <b> 2 used for determining whether or not the converted graphic 81 is a narrow graphic is received by the narrow graphic extracting unit 332 from the operator via the third support screen 53, for example. Specifically, the narrow graphic extraction unit 332 uses the value input by the operator in the input box 532 displayed as “Judgement Width” to determine whether or not the converted graphic 81 is a narrow graphic. Accepted as the value of D2.

<Grouping processing unit 333>
The grouping processing unit 333 groups the narrow graphics extracted by the narrow graphic extraction unit 332. That is, the grouping processing unit 333 groups together the narrow graphics having a separation distance (for example, the separation distance between the centers of the narrow graphics) of a value R2 or less among the extracted narrow graphics. Turn into. Then, one position (representative position) representing a plurality of narrow figures collected in one group is acquired. Specifically, as this representative position, specifically, for example, the position of the center of the smallest rectangular area that can surround a plurality of narrow figures grouped in one group, for example, the coordinate position of the plurality of narrow figures It is possible to adopt a position that is averaged.

  For example, the grouping processing unit 333 receives the size of the separation distance serving as a reference for grouping from the operator via the third support screen 53. Specifically, the grouping processing unit 333 receives the value input by the operator in the input box 533 displayed as “Integrated Range” as the separation distance value R2 as a grouping reference.

  However, an arbitrary value greater than or equal to zero can be input in the input box 532 displayed as “Integrated Range”. When the operator inputs zero in the input box 532, the grouping processing unit 333 displays the width Do not group narrow figures.

<Extraction information registration unit 334>
The extraction information registration unit 334 represents the position of each narrow graphic extracted by the narrow graphic extraction unit 332 (if the narrow graphic is grouped, it represents a plurality of narrow graphics grouped into one group. Is registered in the narrow graphic list 63.

  That is, the extraction information registration unit 334 creates one record for one narrow graphic in the narrow graphic list 63 for the narrow graphic that is not grouped, and sets the coordinates of the position of the narrow graphic. , It is registered in each item of “X” and “Y” of the record. In addition, the extracted information registration unit 334 creates one record for the plurality of narrow graphics in the narrow graphic list 63 for the plurality of narrow graphics, and extracts the plurality of narrow graphics. The coordinates of the representative position are registered in the items “X” and “Y” of the record.

<Flow of processing for generating narrow graphic list 63>
A flow of processing in which the third generation unit 33 generates the narrow graphic list 63 will be described with reference to FIG. 13 in addition to FIGS. 4 and 9. FIG. 13 is a diagram showing the flow of the processing.

  First, the area receiving unit 331 receives designation of an area in the pattern data 8 to be searched for narrow figures (step S31).

  Subsequently, when the operator operates the icon 534 displayed as “Make List”, the narrow graphic extraction unit 332 extracts and extracts the narrow graphic existing in the designated area received in step S31. The position information of each narrow figure is acquired (step S32).

  When the operator does not instruct grouping (specifically, when zero is input in the input box 533 displayed as “Integrated Range”) (NO in step S33), the extraction information registration unit 334 The position of each narrow graphic extracted in step S32 is registered in the narrow graphic list 63. Specifically, the extraction information registration unit 334 creates the same number of records as the number of narrow graphics extracted in step S32 in the narrow graphic list 63, and sets the coordinates of the position of each narrow graphic for each record. Of “X” and “Y”.

  On the other hand, when the operator has instructed grouping (specifically, when a value greater than zero is entered in the input box 533 displaying “Integrated Range”) (YES in step S33), the group The processing unit 333 groups the narrow figures extracted in step S32 (step S34).

  When the grouping of the narrow figures is completed, the extraction information registration unit 334 subsequently determines the position of each narrow figure extracted in step S32 (if a plurality of narrow figures are grouped, the grouping is performed). The one position representing the plurality of narrow figures made) is registered in the narrow figure list 63 (step S35). Specifically, the extracted information registration unit 334 selects one record for one narrow graphic for a narrow graphic not grouped among the narrow graphic extracted in step S32. Created in the list 63, the coordinates of the position of the narrow figure are registered in each item of “X” and “Y” of the record. Also, the extracted information registration unit 334, for the plurality of narrow graphics grouped out of the narrow graphics extracted in step S32, records one record for the plurality of narrow graphics in the narrow graphics list 63. The coordinates of the representative positions of the plurality of narrow figures are registered in the items “X” and “Y” of the record.

  When the positions (or representative positions) of all the narrow graphics extracted from the designated area are registered in the narrow graphics list 63, the processing for generating the narrow graphics list 63 is completed. The generated narrow graphic list 63 is displayed in the list display area 510 under the control of the list display control unit 35 described later, as shown in FIG.

  After the narrow graphic list 63 is generated, when the operator operates the icon 536 displayed as “Save”, the generated narrow graphic list 63 is stored in the storage device 304. Further, when the operator operates the icon 535 displayed as “Load”, the list display control unit 35 reads out the narrow graphic list 63 stored in the storage device 304 and displays it in the list display area 510.

<D. Fourth Generation Unit 34>
The fourth generation unit 34 will be described with reference to FIG. 10 in addition to FIG. FIG. 10 is a configuration example of the confirmation support screen 5 (specifically, the confirmation support screen 5 in a state where the tab 540 displayed as “Alignment” is selected, and is also referred to as a “fourth support screen 54”). FIG. The fourth support screen 54 functions as a display screen that displays the mark list 64.

  The fourth generation unit 34 is a processing unit that generates the mark list 64 and includes a mark position registration unit 341.

  In the mark list 64, one position in the pattern data 8 is associated with one record, and each record includes information (coordinate information) for specifying a position in the pattern data 8. Specifically, the mark list 64 includes item columns “X” and “Y” for registering position coordinates in the pattern data 8.

  In the mark list 64, the position in the pattern data 8 included in each record is the position of the alignment mark AL in the pattern data 8. However, the alignment mark AL is a mark used for alignment of the substrate W in the drawing process, and is created at a predetermined position in the creation stage of the design data 7.

  In addition to the item fields described above, the mark list 64 is provided with a “View” item field that accepts an operation for selecting one or more records included in the mark list 64 from the operator. The operator can select the record by checking the check box 60 displayed in the “View” item of the record to be selected.

  The mark list 64 may be provided with further item fields in addition to the item fields described above. For example, an item column of “NO.” In which a number for identifying each record is registered may be provided. Further, for example, an item field “Kind” in which the type of the alignment mark AL at the position registered in each record can be registered may be provided. Further, for example, an item column of “Approve” in which information such as whether or not the operator has confirmed the position corresponding to each record can be registered may be provided. Further, for example, an item column of “Comment” in which an operator can register a comment for a position corresponding to each record may be provided.

<Mark position registration unit 341>
The mark position registration unit 341 registers the position of the alignment mark AL included in the design data 7 in the mark list 64. Specifically, when the operator selects the tab 540 on which “Alignment” is displayed and displays the fourth support screen 54, the mark position registration unit 341 displays the predetermined data stored in the storage device 304 or the like. The position of the alignment mark AL in the design data 7 registered in the data is read and registered in the dimension evaluation list 61. That is, the mark position registration unit 341 creates the same number of records in the mark list 64 as the number of one or more positions registered in the data, and the coordinates of the registered positions are set to “ Register each item of “X” and “Y”. Therefore, for example, when creating the design data 7, the operator creates data listing the positions of the alignment marks AL in the design data 7 and stores the data in the storage device 304. Can be immediately registered in the mark list 64.

  As shown in FIG. 10, the generated mark list 64 is displayed in the list display area 510 under the control of the list display control unit 35 described later.

<Ii. List display control unit 35>
Refer to FIG. 4 again. The list display control unit 35 controls the display unit 307 to display the position list 6 generated by the list generation unit 30 in the list display area 510 of the confirmation support screen 5. However, as described above, what type of position list 6 is displayed in the list display area 510 depends on the selected tab. That is, the list display control unit 35 displays the dimension evaluation list 61 in the list display area 510 of the first support screen 51 in a state where the tab 540 displayed as “Manual” is selected (FIG. 5). Further, the list display control unit 35 displays the minimal run list 62 in the list display area 510 of the second support screen 52 in a state where the tab 540 displayed as “Minimum Run” is selected (FIG. 7, FIG. 7). 8). Further, the list display control unit 35 displays the narrow graphic list 63 in the list display area 510 of the third support screen 53 in a state where the tab 540 displaying “Sliver” is selected (FIG. 9). In addition, the list display control unit 35 displays the mark list 64 in the list display area 510 of the fourth support screen 54 in a state where the tab 540 displaying “Alighment” is selected (FIG. 10).

  When the entire position list 6 is not displayed in the list display area 510, a scroll bar 50 having a function of switching the portion displayed in the list display area 510 is necessary around the list display area 510. Displayed accordingly. The user can display a hidden portion that is not displayed in the area in the list display area 510 by performing an operation of moving the scroll bar 50 by moving the cursor to the scroll bar 50.

<Iii. Selection Reception Unit 36>
The selection receiving unit 36 receives a selection operation for selecting one or more positions registered in the position list 6 displayed here from the operator via the list display area 510. That is, the list display area 510 also functions as a reception screen area that receives the selection operation from the operator.

  Specifically, each record of the position list 6 displayed in the list display area 510 has a check box 60 that accepts selection from the operator in the item column “View” as described above. When the operator selects one record in the position list 6 and inputs a check in the check box 60 of the record, the selection receiving unit 36 selects a position corresponding to the record in which the check is input. Accept as position. That is, the operator can select a position by checking the check box 60 of the record at the desired position among the positions registered in the position list 6.

<Iv. Region Display Control Unit 37>
The area display control unit 37 controls the display unit 307 so that the pattern data display area 520 of the confirmation support screen 5 has a partial area of the pattern data 8 corresponding to the position (selection position) received by the selection receiving unit 36 from the operator. And the partial area of the design data 7 corresponding to the partial area are displayed in an overlapping manner. However, in the pattern data display area 520 displayed under the control of the area display control unit 37, the selected position is displayed at the geometric center C. Therefore, when the pattern data display area 520 is a rectangular area, the partial area of the pattern data 8 corresponding to the selected position is a rectangular area centered on the selected position.

  The dimension of the partial area of the pattern data 8 displayed in the pattern data display area 520 is defined according to the number of pixels in the pattern data display area 520, for example. Specifically, for example, when it is specified that a 1 μm × 1 μm region in the pattern data 8 is displayed as a 10 pixel × 10 pixel region of the pattern data display region 520, the pattern data display region 530 is: Assuming that the display area is 500 pixels × 500 pixels, the partial area of the pattern data 8 displayed here has a size of 50 μm × 50 μm.

  In addition, a scroll bar 50 having a function of switching a portion displayed in the pattern data display area 520 is also displayed around the pattern data display area 520 as necessary. The user performs an operation of moving the scroll bar 50 by moving the cursor to the scroll bar 50, thereby performing a hidden part that is not displayed in the area (that is, around the partial area of the pattern data 8 corresponding to the selected position). ) Can be displayed in the pattern data display area 520.

<3-3. Flow of processing>
The flow of processing executed by the support device 3 will be described with reference to FIG. FIG. 14 is a diagram showing the flow of the processing.

  When the operator inputs RIP parameters and inputs an instruction to confirm the pattern data 8 obtained by performing RIP processing with the RIP parameters (YES in step S1), the confirmation support screen 5 is displayed on the display unit 307. It is displayed (step S2).

  When the confirmation support screen 5 is displayed, the list generation unit 30 generates the position list 6 in accordance with an instruction from the operator (step S3). The process in which the list generation unit 30 generates the position list 6 is as described above. The operator can select any tab 540 to generate any type of location list 6.

  When the position list 6 is generated, the list display control unit 35 controls the display unit 307 to display the generated position list 6 in the list display area 510 (step S4).

  When the selection receiving unit 36 receives a selection operation for selecting one or more positions included in the position list 6 displayed here from the operator via the list display area 510 (YES in step S5). The area display control unit 37 controls the display unit 307 to display the partial area of the pattern data 8 corresponding to the selection position received in step S5 in the pattern data display area 520 (step S6).

  The operator looks at the image displayed in the pattern data display area 520, confirms the state of the partial area corresponding to the selected position in the pattern data 8, and confirms that the pattern data 8 is appropriate. can do.

  For example, when the operator wants to confirm the presence / absence of a dimensional error between the converted graphic 81 and the original graphic 71, a list generation unit displays a dimensional evaluation list 61 in which positions in the pattern data 8 where dimensional errors are likely to occur are registered 30. Then, while looking at the evaluation information registered in the dimension evaluation list 61, the position to be worried about (for example, the position where a negative evaluation result is given) is selected one by one, and the state of the position is patterned. The data display area 520 may be checked one after another. Thereby, each position (for example, a position where a negative evaluation result is given) in the pattern data 8 can be efficiently confirmed.

  Further, for example, when the operator wants to check the existence portion of the run that has not been generated because the length is less than the predetermined value, the operator designates an area where such a run is likely to occur. Then, the list generation unit 30 is made to create the minimum run list 62. Then, the positions registered in the minimum run list 62 may be selected one by one, and the state of the positions may be confirmed one after another in the pattern data display area 520. Thereby, it is possible to efficiently confirm the existence portion of the run that is not generated because the length is less than the predetermined value in the pattern data 8. Therefore, when the conversion figure 81 has a shape that does not conform to the intention because the run is cut, this can be quickly detected.

  Further, for example, when the operator wants to confirm the formation portion of the narrow graphic in the pattern data 8, the operator designates an area where the narrow graphic is likely to be generated, and stores the narrow graphic list 63 in the list generation unit 30. Let it be created. Then, the positions registered in the narrow graphic list 63 may be selected one by one and the state of the positions may be confirmed one after another in the pattern data display area 520. As a result, it is possible to efficiently confirm the portion in the pattern data 8 where the narrow graphic is formed.

  For example, when the operator wants to confirm the formation portion of the alignment mark AL in the pattern data 8, the operator causes the list generation unit 30 to create the mark list 64. Then, the positions registered in the mark list 64 are selected one by one, and the state of the position where the alignment mark AL should be formed may be confirmed one after another in the pattern data display area 520. Thereby, it can be efficiently confirmed whether or not the alignment mark AL is appropriately formed at an appropriate position in the pattern data 8.

  When it is determined that the pattern data 8 is not intended, the operator changes the RIP parameter. When the RIP parameter change is received from the operator (YES in step S7), the process of step S2 to step S6 is performed on the pattern data 8 obtained by the RIP process of the new RIP parameter.

  On the other hand, when it is determined that the pattern data 8 is in accordance with the intention, the operator inputs that the RIP parameter given the pattern data 8 is determined as the RIP parameter actually used in the RIP device 2. When confirmation of the RIP parameter is accepted from the operator (YES in step S8), a series of processing ends.

  In the series of processes described above, the entire design data 7 is not necessarily subjected to the RIP process (the RIP process using the RIP parameters accepted in step S1 or step S7) to deal with the entire design data 7. There is no need to generate the pattern data 8 to be generated. That is, a partial area where the pattern data 8 is necessary (for example, a partial area of the pattern data 8 to be displayed in the pattern data display area 520, a partial area of the pattern data 8 to be compared with the design data 7, a minimum run, or a narrow width) The pattern data 8 may be partially generated by performing RIP processing only on the partial area of the design data 7 corresponding to the partial area of the pattern data 8 to be extracted from the figure.

<4. Effect>
According to the above embodiment, the position list 6 in which one or more positions in the pattern data 8 are registered is displayed on the display unit 307, and the operator has selected the positions registered in the position list 6 A partial area of the pattern data 8 corresponding to the position is displayed on the display unit 307. According to this configuration, the operator can confirm the state of the partial area corresponding to the selected position in the pattern data 8 only by selecting an arbitrary position while looking at the position list 6. Therefore, the operator can smoothly check the pattern data 8.

  In particular, according to the above embodiment, the position selected by the operator is displayed at the geometric center C of the pattern data display area 520. Therefore, the operator can appropriately confirm the situation around the selected position.

  In particular, according to the above embodiment, the partial area of the design data 7 corresponding to the partial area is displayed so as to overlap the partial area of the pattern data 8. Therefore, the operator can appropriately confirm the partial area of the pattern data 8 corresponding to the selected position while comparing with the design data 7.

  Further, according to the above embodiment, one or more positions in the pattern data 8 and the dimension evaluation list 61 including the evaluation results of the one or more positions are displayed on the display unit 307. Therefore, the operator can grasp at a glance whether or not the pattern data 8 matches the design data 7 within an allowable range at each of one or more positions included in the dimension evaluation list 61.

  In particular, since the evaluation unit 312 evaluates the difference between the pattern data 8 and the design data 7 by comparing the lengths of the line segments, each position in the pattern data 8 is determined while suppressing the processing load for the evaluation. Can be evaluated appropriately.

  Further, since the evaluation unit 312 evaluates the original figure 71 and the converted figure 81 with the degree of coincidence of dimensions along a predetermined direction, the original figure 71 and the converted figure 81 are minute with respect to each other although there is no dimensional error. If it is formed at a position deviated from, the positive evaluation is given. Accordingly, negative evaluation is given only to a substantially problematic difference portion, so that the operation of the operator confirming the pattern data 8 is performed more efficiently.

  Further, the evaluation unit 312 evaluates only the position registered in the dimension evaluation list 61, not the entire area of the pattern data 8. For example, the operator repeats the figure having the same shape in the pattern data 8. If it appears, the position in one of the figures is registered in the dimension evaluation list 61, and only the status of the partial area corresponding to the evaluation result and the position is checked. Can also be inferred. Therefore, waste of processing relating to evaluation can be omitted, and the operator can efficiently perform the work of confirming the pattern data 8.

  Further, according to the above-described embodiment, the minimal run list 62 in which the positions of the minimal runs that are characteristic portions existing in the designated area in the pattern data 8 are registered is displayed on the display unit 307. In addition, a narrow graphic list 63 in which the positions of narrow graphics that are characteristic portions existing in a specified area in the pattern data 8 are registered is displayed on the display unit 307. Therefore, the operator can smoothly check the state of each feature portion existing in the designated area. In addition, since the extraction target area is narrowed down in advance, the load required for the process of extracting the feature portion can be reduced.

  In particular, when feature parts having a separation distance equal to or less than a predetermined value are grouped, one position representing a plurality of feature parts grouped into one group is registered in the position lists 62 and 63. Is done. Therefore, the operator can collectively check the state of the group of characteristic portions present at relatively close positions in the pattern data 8.

<5. Modification>
In the above-described embodiment, the area display control unit 37 overlaps the partial area of the pattern data 8 corresponding to the selected position in the pattern data display area 520 to display the partial area of the design data 7 corresponding to the partial area. Although it is configured to display, the partial area of the design data 7 corresponding to the partial area is not necessarily displayed, and only the partial area of the pattern data 8 is displayed as shown in the pattern data display area 520a of FIG. It is good also as composition to do.

  In the above embodiment, a screen area for accepting RIP parameter settings may be further provided in the same screen as the confirmation support screen 5.

  In the above-described embodiment, the list display control unit 35 displays the dimension evaluation list 61 in the list display area 510, and records the position of the position where a negative evaluation result is given, and the positive evaluation. The record portion at the position where the result is given may be displayed in a different manner. For example, the former may be displayed in red.

  Further, in the above embodiment, the area display control unit 37 may display the characteristic part (minimal run or narrow figure) displayed in the pattern data display area 520 in a different form from the other parts. Good. For example, a minimum run or a narrow graphic portion may be displayed in red.

  Moreover, although the evaluation part 312 which concerns on said embodiment was set as the structure which performs each evaluation of the X direction and the Y direction about the object position P, it replaced with these each direction (or replaced with at least one of these) The third direction that is not parallel to the X direction and the Y direction may be evaluated.

  Further, in the above embodiment, among the converted figures 81 existing in the pattern data 8, those having a length along the X direction smaller than a predetermined allowable value are detected as narrow figures. Among the converted figures 81 existing in the pattern data 8, the converted figure 81 having an extremely small length in the X direction with respect to the length in the Y direction (that is, the length in the X direction is smaller than a predetermined allowable value). In addition, the converted graphic 81) whose length in the Y direction is larger than a predetermined allowable value may be detected as a narrow graphic.

DESCRIPTION OF SYMBOLS 100 Drawing system 1 Design data creation apparatus 2 RIP apparatus 3 Support apparatus 307 Display part 4 Drawing apparatus 7 Design data 8 Pattern data 30 List generation part 31 1st generation part 311 Position reception part 312 Evaluation part 313 Evaluation information registration part 32 2nd Generation unit 321 Area reception unit 322 Minimal run extraction unit 323 Grouping processing unit 324 Extraction information registration unit 33 Third generation unit 331 Area reception unit 332 Narrow figure extraction unit 333 Grouping processing unit 334 Extraction information registration unit 34 Fourth generation Section 341 Mark position registration section 35 List display control section 36 Selection receiving section 37 Area display control section 6 Position list 61 Dimension evaluation list 62 Minimal run list 63 Narrow figure list 64 Mark list 5 Confirmation support screen 510 List display area 520 Pattern data Display area W substrate

Claims (19)

An apparatus for supporting the confirmation of the pattern data provided to a drawing apparatus that draws a pattern expressed in the pattern data on a substrate using raster format pattern data obtained by RIP processing of vector format design data. And
A position list generator for generating a position list in which one or more positions in the pattern data are registered;
A list display control unit for displaying the position list on a display unit;
A selection accepting unit that accepts selection of any one of the one or more positions registered in the position list;
An area display control unit that causes the display unit to display a partial area of the pattern data corresponding to the position received by the selection receiving unit;
A support device comprising: The support device according to claim 1,
The position list generation unit
A position receiving unit that receives designation of one or more positions to be registered in the position list;
In each of the one or more positions received by the position receiving unit, the pattern data and the design data are compared, and if the difference between the two data is within an allowable value range, the position is positively evaluated. An evaluation section that gives
A registration unit that registers the evaluation information given by the evaluation unit for each of the one or more positions in association with the one or more positions received by the position reception unit in the position list;
A support device comprising: The support device according to claim 2,
In the pattern data, a graphic expressed by arranging one or more line segments along the first direction along a second direction orthogonal to the first direction is referred to as a converted graphic.
The evaluation unit is
The first line segment that passes through the position of the evaluation target in the pattern data and whose both ends coincide with the edge of the converted figure, and the position corresponding to the position of the evaluation target in the design data, passes through the first line segment. A difference between the length of the second line segment that extends in a direction parallel to the line segment and whose both ends coincide with the edge of the graphic included in the design data is calculated, and the difference is within an allowable range. Give a positive evaluation to the position of the evaluation target,
Support device. The support device according to any one of claims 1 to 3,
The position list generation unit
An area accepting unit for accepting designation of an area in the pattern data;
An extraction unit that extracts a feature portion having a predetermined feature that exists in the region received by the region reception unit;
A registration unit for registering the position of the feature portion extracted by the extraction unit in the position list;
A support device comprising: The support device according to claim 4,
The position list generation unit
Among the feature parts extracted by the extraction unit, a grouping unit that groups together those having a separation distance equal to or less than a predetermined value,
With
The registration unit
When a plurality of feature parts are grouped into one group by the grouping unit, one position representing the plurality of feature parts is registered in the position list.
Support device. The support device according to claim 4 or 5, wherein
In the pattern data, the graphic included in the design data is expressed by arranging one or more line segments along a first direction along a second direction orthogonal to the first direction. ,
The extraction unit is
A portion that is not generated because the length of the line segment is less than a predetermined value is extracted as the feature portion;
Support device. The support device according to claim 4 or 5, wherein
In the pattern data, a graphic expressed by arranging one or more line segments along the first direction along a second direction orthogonal to the first direction is referred to as a converted graphic.
The extraction unit is
Extracting a converted figure whose length along the second direction is smaller than a predetermined allowable value as the characteristic portion;
Support device. The support device according to any one of claims 1 to 7,
The position received by the selection receiving unit is displayed at the geometric center of the display area where the partial area of the pattern data is displayed.
Support device. The support device according to any one of claims 1 to 8,
The area display control unit
Overlaying the partial area of the pattern data, displaying the partial area of the design data corresponding to the partial area,
Support device. A drawing apparatus that draws a pattern expressed in the pattern data on a substrate by using raster format pattern data obtained by RIP processing vector format design data;
The support device according to any one of claims 1 to 9,
A drawing system comprising: This is a method for supporting confirmation of the pattern data provided to a drawing apparatus that draws a pattern expressed in the pattern data on a substrate using raster format pattern data obtained by RIP processing of vector format design data. And
a) generating a position list in which one or more positions in the pattern data are registered;
b) displaying the position list on a display unit;
c) receiving a selection of any of the one or more positions registered in the position list;
d) displaying the partial area of the pattern data corresponding to the position received in step c) on the display unit;
A support method. The support method according to claim 11, comprising:
Step a)
a1) receiving a designation of one or more positions to be registered in the position list;
a2) When the pattern data is compared with the design data at each of the one or more positions received in the step a1), and the difference between the two data is within an allowable value range, Giving a positive evaluation;
a3) registering the evaluation information given in step a2) for each of the one or more positions in association with the one or more positions received in step a1) in the position list;
A support method. The support method according to claim 12, comprising:
In the pattern data, a graphic expressed by arranging one or more line segments along the first direction along a second direction orthogonal to the first direction is referred to as a converted graphic.
In the step a2),
The first line segment that passes through the position of the evaluation target in the pattern data and whose both ends coincide with the edge of the converted figure, and the position corresponding to the position of the evaluation target in the design data, passes through the first line segment. A difference between the length of the second line segment that extends in a direction parallel to the line segment and whose both ends coincide with the edge of the graphic included in the design data is calculated, and the difference is within an allowable range. Give a positive evaluation to the position of the evaluation target,
Support method. The support method according to any one of claims 11 to 13,
Step a)
a4) receiving a designation of an area in the pattern data;
a5) extracting a feature portion having a defined feature that exists in the region received in the step a4);
a6) registering the position of the characteristic portion extracted in the step a5) in the position list;
A support method. The support method according to claim 14, comprising:
Step a)
a7) a step of grouping together the feature portions extracted in the step a5), those having a separation distance equal to or less than a predetermined value;
With
In the step a6),
When a plurality of feature parts are collected into one group in the step a7), one position representing the plurality of feature parts is registered in the position list.
Support method. The support method according to claim 14 or 15,
In the pattern data, the graphic included in the design data is expressed by arranging one or more line segments along a first direction along a second direction orthogonal to the first direction. ,
In the step a5),
A portion that is not generated because the length of the line segment is less than a predetermined value is extracted as the feature portion;
Support method. The support method according to claim 14 or 15,
In the pattern data, a graphic expressed by arranging one or more line segments along the first direction along a second direction orthogonal to the first direction is referred to as a converted graphic.
In the step a5),
Extracting a converted figure whose length along the second direction is smaller than a predetermined allowable value as the characteristic portion;
Support method. The support method according to any one of claims 11 to 17,
In the step d),
The position received in step c) is displayed at the geometric center of the display area where the partial area of the pattern data is displayed.
Support method. The support method according to any one of claims 11 to 18, comprising:
In the step d),
The partial area of the design data corresponding to the partial area is displayed so as to overlap the partial area of the pattern data.
Support method.

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