JP2008277730A5

JP2008277730A5 -

Info

Publication number: JP2008277730A5
Application number: JP2007276775A
Authority: JP
Filing date: 2007-10-24
Publication date: 2010-07-29
Anticipated expiration: 2027-10-24

Claims

A defect inspection apparatus for inspecting defects in run-length data used for drawing a figure,
Input data acquisition means for acquiring input data describing a figure to be drawn;
Run-length data acquisition means for acquiring the run-length data acquired by subjecting the input data to RIP processing;
A defect detection means for comparing the input data with the run length data and detecting the difference area as a defect area of the run length data when there is a difference area;
When the defective area is detected in the run-length data, repair means for repairing the defective area and obtaining repair run-length data;
A defect inspection apparatus comprising:

  The defect inspection apparatus according to claim 1,
  The defect detection means is
  Data format conversion means for performing a predetermined conversion process on at least one of the input data and the run-length data to align both data in a data format that can be compared with each other;
A defect inspection apparatus comprising:

  The defect inspection apparatus according to claim 2,
  The data format conversion means is
  Graphicizing means for performing graphic processing on the run-length data and acquiring graphic run-length data obtained by graphicizing the run-length data;
With
  The defect detection means is
  A difference area specifying means for acquiring difference area data specifying the difference area by calculating an exclusive OR of the graphic run-length data and the input data;
A defect inspection apparatus further comprising:

  The defect inspection apparatus according to claim 3,
  The defect detection means is
  By calculating a logical product of the difference area data and the graphic run length data, an extra defect area, which is an area in which run data is generated even though the input data does not exist in the run length data, is specified. Extra defect area identification means,
A defect inspection apparatus further comprising:

  The defect inspection apparatus according to claim 3 or 4,
  The defect detection means is
  A missing defect area that identifies a missing defect area that is an area in which run data is not generated even though the input data exists in the run length data by calculating a logical product of the difference area data and the input data. Specific means,
A defect inspection apparatus further comprising:

  The defect inspection apparatus according to claim 2,
  The data format conversion means is
  Graphicizing means for performing graphic processing on the run-length data and acquiring graphic run-length data obtained by graphicizing the run-length data;
With
  The defect detection means is
  First difference area acquisition means for acquiring first difference area data by subtracting a figure area defined by the input data from a figure area defined by the graphic run length data;
  By extracting a positive value area in the first difference area data, an extra defect that identifies an extra defect area in which run data is generated even though the input data does not exist in the run length data Area identification means,
A defect inspection apparatus further comprising:

  The defect inspection apparatus according to claim 2,
  The data format conversion means is
  Graphicizing means for performing graphic processing on the run-length data and acquiring graphic run-length data obtained by graphicizing the run-length data;
With
  The defect detection means is
  Second difference area acquisition means for acquiring second difference area data by subtracting the figure area defined by the graphic run length data from the figure area defined by the input data;
  By extracting a positive value area in the second difference area data, a missing defect that identifies a missing defect area that is an area in which run data is not generated although the input data exists in the run length data Area identification means,
A defect inspection apparatus further comprising:

  The defect inspection apparatus according to claim 3,
  The defect detection means is
  First difference difference area acquisition means for subtracting the figure area defined by the input data from the figure area defined by the difference area data to obtain first difference difference area data;
  By extracting a positive value area in the first difference difference area data, an extra defect area that is an area in which run data is generated even though the input data does not exist in the run length data is specified. Defect area identification means,
A defect inspection apparatus further comprising:

  The defect inspection apparatus according to claim 3,
  The defect detection means is
  Second difference difference area acquisition means for acquiring second difference difference area data by subtracting the figure area defined by the graphic run length data from the figure area defined by the difference area data;
  By extracting a positive value region in the second difference difference region data, a missing defect region that is a region in which run data is not generated even though the input data exists in the run length data is identified. Defect area identification means,
A defect inspection apparatus further comprising:

  The defect inspection apparatus according to claim 2,
  The data format conversion means is
  A run-length data imaging means for performing a first imaging process on the run-length data to obtain imaging run-length data obtained by imaging the run-length data;
  Input data imaging means for executing a second imaging process on the input data to obtain imaged input data obtained by imaging the input data;
With
  The defect detection means is
  A difference area specifying means for specifying the difference area by comparing the imaging run length data and the imaging input data in units of pixels;
A defect inspection apparatus further comprising:

  The defect inspection apparatus according to claim 10,
  The difference area specifying means is
  The imaging run-length data and the imaging input data are compared on a pixel-by-pixel basis, and an area in which pixels exist only in the imaging run-length data is run in the run-length data where the input data does not exist. A defect inspection apparatus characterized in that it is specified as an extra defect area, which is an area where data is generated.

  The defect inspection apparatus according to claim 10 or 11,
  The difference area specifying means is
  The imaging run-length data and the imaging input data are compared on a pixel-by-pixel basis, and an area where pixels are present only in the imaging input data A defect inspection apparatus characterized in that it is specified as a missing defect region that is a region in which no is generated.

  The defect inspection apparatus according to claim 2,
  The data format conversion means is
  Input data coordinate value conversion means for executing coordinate value conversion processing on the input data to obtain coordinate value input data in which each of one or more figures included in the input data is described by a set of coordinate values;
With
  The defect detection means is
  By comparing the start point and end point positions of a plurality of runs included in the run length data with a predetermined coordinate value among a plurality of coordinate values included in the coordinate value input data, An extra defect area that is an area in which run data is generated even though the input data does not exist, and a missing defect area that is an area in which run data is not generated although the input data exists in the run length data Different area specifying means for specifying each,
A defect inspection apparatus further comprising:

A defect inspection apparatus according to any one of claims 4, 6, 8, 11, and 13,
Extra defect repairing means for deleting run data generated in the extra defect area in the run length data when the extra defect area is specified;
A defect inspection apparatus comprising:

A defect inspection apparatus according to any one of claims 5, 7, 9, 12, and 13,
Missing defect repairing means for newly generating run data in the missing defect area in the run length data when the missing defect area is specified,
A defect inspection apparatus comprising:

  The defect inspection apparatus according to any one of claims 1 to 15,
  The input data is CAD data of a pattern to be drawn on the substrate;
  The defect inspection apparatus, wherein the run-length data is used to draw the pattern on a substrate.

  By being executed by a computer, the computer
  An input data acquisition function for acquiring input data describing a figure to be drawn;
  A run-length data obtaining function for obtaining run-length data obtained by subjecting the input data to RIP processing;
  A defect detection function for comparing the input data with the run length data and detecting the difference area as a defect area of the run length data when there is a difference area;
  When the defective area is detected in the run-length data, a repair function for repairing the defective area and obtaining repair run-length data;
Defect inspection program that can realize.

  A drawing apparatus for drawing a figure on an output medium based on run-length data,
  Input data acquisition means for acquiring input data describing a figure to be drawn;
  Run-length data acquisition means for acquiring the run-length data acquired by subjecting the input data to RIP processing;
  A defect detection means for comparing the input data with the run length data and detecting the difference area as a defect area of the run length data when there is a difference area;
  When the defective area is detected in the run-length data, repair means for repairing the defective area and acquiring repair run-length data;
  When the defective area is detected in the run-length data, the repair run-length data is acquired as drawing run-length data, and when the defective area is not detected in the run-length data, the run length data is acquired. A drawing run-length data acquisition means for acquiring length data as it is as drawing run-length data;
  Drawing means for drawing a figure on the output medium based on the drawing run-length data;
A graphic drawing apparatus comprising:

  The figure drawing apparatus according to claim 18,
  The input data is CAD data of a pattern to be drawn on the substrate;
  The graphic drawing apparatus, wherein the drawing means draws the pattern on a substrate based on the run-length data acquired by subjecting the CAD data to RIP processing.

  A graphics drawing system for drawing graphics on an output medium based on run-length data,
  A defect inspection apparatus for inspecting defects in the run-length data;
  A drawing device that obtains drawing run-length data from the defect inspection device and draws a figure on the output medium based on the drawing run-length data;
With
  The defect inspection apparatus is
  Input data acquisition means for acquiring input data describing a figure to be drawn;
  Run-length data acquisition means for acquiring the run-length data acquired by subjecting the input data to RIP processing;
  A defect detection means for comparing the input data with the run length data and detecting the difference area as a defect area of the run length data when there is a difference area;
  When the defective area is detected in the run-length data, repair means for repairing the defective area and acquiring repair run-length data;
  When the defective area is detected in the run-length data, the repair run-length data is acquired as drawing run-length data, and when the defective area is not detected in the run-length data, the run length data is acquired. A drawing run-length data acquisition means for acquiring length data as it is as drawing run-length data;
  Drawing run-length data transmitting means for transmitting the drawing run-length data to the drawing apparatus;
A graphic drawing system comprising:

  The figure drawing system according to claim 20,
  The input data is CAD data of a pattern to be drawn on the substrate;
  The graphic drawing system, wherein the drawing apparatus draws the pattern on a substrate based on the run-length data acquired by performing RIP processing on the CAD data.