JP2008267968A - Measurement target characteristic measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measurement target characteristic measuring apparatus miniaturized, and preventing a crosstalk from occurring independent of an aperture length of an input electrode. <P>SOLUTION: The measurement target characteristic measuring apparatus 10 is provided with a surface acoustic wave element 12 including: a first propagation path 20 formed between the input electrode 14 and a first output electrode 16; and a second propagation path 22 formed between the input electrode 14 and a second output electrode 18. While a measurement target 40 is a load between the first and second propagation paths 20, 22, a signal is input to the input electrode 14, and a physical characteristic of the measurement target 40 can be derived from output signals of the first and second output electrodes 16, 18. An apparatus can be miniaturized by using the measurement target characteristic measuring apparatus 10. The crosstalk can be prevented from occurring independent of the aperture length of the input electrode. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an object property measuring apparatus having a surface acoustic wave element for measuring a physical property of a liquid object to be measured.

  In general, a surface acoustic wave element includes a piezoelectric substrate, and an input electrode and an output electrode composed of comb-like electrode fingers provided on the piezoelectric substrate. In the surface acoustic wave element, when an electric signal is input to the input electrode, an electric field is generated between the electrode fingers, and the surface acoustic wave is excited by the piezoelectric effect and propagates on the piezoelectric substrate. Among these surface acoustic waves, detection of various substances and physical property values using surface acoustic wave elements that use a shear surface acoustic wave (SH-SAW) that is displaced in a direction perpendicular to the propagation direction An elastic wave sensor for performing measurement has been studied (Patent Document 1).

  In the acoustic wave sensor, the output output from the output electrode is either when the area of the liquid object to be measured loaded on the piezoelectric substrate is electrically open or short-circuited. By utilizing the difference in signal characteristics, the dielectric constant and conductivity can be obtained as physical characteristics of the object to be measured. Further, when a concavo-convex structure is formed on the propagation path between the input electrode and the output electrode of the surface acoustic wave element and the object to be measured is loaded in the concave portion, the loaded object to be measured forms a pseudo film. This film is excited together with the piezoelectric substrate, and the density of the object to be measured can be obtained using the mass load effect in which the resonance frequency changes based on the mass of the film.

  FIG. 12 is an explanatory diagram of the device characteristic measuring apparatus 100 that measures the relative dielectric constant and the electrical conductivity as the physical properties of the object to be measured. The measured object property measuring apparatus 100 includes a first surface acoustic wave element 110 and a second surface acoustic wave element 120 formed on a piezoelectric substrate 130. The first surface acoustic wave element 110 includes an input electrode 112 and an output electrode 114, and a short-circuit propagation path 116 is formed between the input electrode 112 and the output electrode 114. The second surface acoustic wave element 120 includes an input electrode 122 and an output electrode 124, and an open propagation path 126 is formed between the input electrode 122 and the output electrode 124. The short-circuit propagation path 116 is provided on the metal film 118 formed on the surface of the piezoelectric substrate 130, and the open propagation path 126 is formed on the surface of the piezoelectric substrate 130 and has a metal film 128 having an open area that is electrically opened. It is provided above.

  The measurement of the relative permittivity and conductivity of the measurement object in the measurement object property measuring apparatus 100 is performed by loading the measurement object to be measured on the short-circuit propagation path 116 and the open propagation path 126 with the input electrode 112 and 122, the same signal is input, and the amplitude ratio and phase difference of the signals output from the output electrodes 114 and 124 are measured by the amplitude ratio phase difference detector 144, so that the relative permittivity and conductivity of the object to be measured can be determined. Looking for.

Japanese Patent No. 3488554

  However, in the measurement object characteristic measuring apparatus 100 described above, in order to perform measurement by flowing the measurement object on the surfaces of the short-circuit propagation path 116 and the open propagation path 126 in a direction perpendicular to the propagation direction of the surface acoustic wave. The first surface acoustic wave element 110 and the second surface acoustic wave element 120 need to be arranged in a direction parallel to the propagation direction of the surface acoustic wave, and the apparatus becomes large.

  In the DUT characteristic measuring apparatus 100, since the electric signal from the oscillator 142 is distributed by the distributor 143 and inputted to the input electrodes 112 and 122, it is guaranteed that they are completely the same signal. As a result, the measurement accuracy may be reduced. To deal with this problem, the input electrode 132 may be formed by integrating the input electrodes 112 and 122 as shown in FIG. 13, but when the opening length of the metal film 118 is narrow, an excited surface acoustic wave is used. Propagates in the direction indicated by the arrow due to diffraction and is received by the output electrode 114 and the output electrode 124, and so-called crosstalk may cause a measurement error.

  The present invention has been made in consideration of the above-mentioned problems. The present invention reduces the size of the apparatus and does not depend on the diffraction phenomenon caused by the opening length of the input electrode or the propagation path length between the input and output electrodes. An object of the present invention is to provide an object characteristic measuring apparatus capable of preventing the occurrence of talk.

  An object property measuring apparatus according to the present invention includes a first propagation path formed between an input electrode and a first output electrode, and the first propagation formed between the input electrode and the second output electrode. A surface acoustic wave element having a second propagation path with different amplitude and phase characteristics from the path, and in a state where a liquid object to be measured is loaded on the first propagation path and the second propagation path, A signal is input, and physical characteristics of the object to be measured are obtained based on output signals output from the first output electrode and the second output electrode.

  According to the present invention, the first propagation path is formed between the input electrode and the first output electrode, and the second propagation path is formed between the input electrode and the second output electrode. It is possible to reduce the size of the measuring apparatus and prevent the occurrence of crosstalk regardless of the diffraction phenomenon caused by the opening length of the input electrode and the propagation path length between the input and output electrodes.

  The first propagation path may be a short-circuit propagation path that is electrically short-circuited, and the second propagation path may be an open propagation path that is electrically open. The first propagation path may be a short-circuit propagation path that is electrically short-circuited, and the second propagation path may be a lattice-shaped propagation path that is electrically short-circuited by forming a lattice-shaped uneven structure. Furthermore, the first propagation path may be an open propagation path that is electrically open, and the second propagation path may be a lattice propagation path that is electrically open with a lattice-shaped uneven structure formed thereon.

  Each of the input electrode and each of the output electrodes is sealed by a sealing member that prevents adhesion of the object to be measured, so that the object to be measured is immersed in the object to be measured. Can be measured.

  According to the present invention, the first propagation path is formed between the input electrode and the first output electrode, and the second propagation path is formed between the input electrode and the second output electrode. It is possible to reduce the size of the measuring apparatus and prevent the occurrence of crosstalk regardless of the diffraction phenomenon caused by the opening length of the input electrode and the propagation path length between the input and output electrodes. Further, each of the input electrode and each of the output electrodes is sealed by a sealing member that prevents adhesion of the object to be measured, so that the entire object to be measured is immersed in the object to be measured. Physical properties of objects can be measured.

  Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an explanatory diagram of a configuration of a measured physical property measuring apparatus 10 according to the first embodiment of the present invention. 2A and FIG. 2B are end views of IIA-IIA in FIG. 1, FIG. 2A is a diagram showing a state before loading a liquid object to be measured, and FIG. 2B is a object to be measured. It is a figure which shows the state after loading.

  As shown in FIG. 1, a physical property measuring apparatus 10 to be measured measures a surface acoustic wave element 12, an oscillator 42 that generates a high-frequency electric signal, and an amplitude ratio and a phase difference of an output signal corresponding to the surface acoustic wave. An amplitude ratio phase difference detector 44 is provided.

  The surface acoustic wave element 12 includes an input electrode 14, a first output electrode 16, and a second output electrode 18, and a first propagation path 20 is formed between the input electrode 14 and the first output electrode 16. A second propagation path 22 is formed between the input electrode 14 and the second output electrode 18.

  The input electrode 14 is composed of a comb-shaped electrode for exciting a surface acoustic wave by an electric signal input from the oscillator 42. The first output electrode 16 and the second output electrode 18 are composed of comb-shaped electrodes in order to receive surface acoustic waves excited and propagated by the input electrode 14.

  The input electrode 14, the first output electrode 16, and the second output electrode 18 are each first sealed to prevent the device under test 40 from adhering to the comb-shaped electrode when measuring the physical characteristics of the device under test 40. The sealing member 24, the second sealing member 26, and the third sealing member 28 are sealed.

  The first sealing member 24 includes a side wall portion 24 a and a lid portion 24 b. The side wall portion 24 a covers the periphery of the input electrode 14, and the lid portion 24 b covers the upper portion of the input electrode 14. The whole is sealed to prevent the DUT 40 from adhering to the comb-shaped electrode (see FIG. 2B). The second sealing member 26 and the third sealing member 28 are configured in the same manner as the first sealing member 24. The second sealing member 26 includes a side wall portion 26a and a lid portion 26b, and the third sealing member 28 includes It is comprised from the side wall part 28a and the cover part 28b. The shapes of the first sealing member 24, the second sealing member 26, and the third sealing member 28 are not particularly limited as long as the object to be measured 40 can be prevented from adhering to the comb-shaped electrode. Further, the material is not particularly limited, and may be, for example, resin, rubber or the like.

  The first propagation path 20 and the second propagation path 22 are respectively formed of metal films 32 and 34 deposited on the piezoelectric substrate 30, and the metal films 32 and 34 are electrically short-circuited (see FIG. 1). In particular, since the entire first propagation path 20 is formed of the metal film 32, the first propagation path 20 constitutes a short-circuit propagation path that is electrically short-circuited. Further, the metal films 32 and 34 are grounded in order to improve the measurement accuracy of the physical characteristics of the object 40 to be measured. The material of the metal films 32 and 34 is not particularly limited, but it is preferable that the metal films 32 and 34 are formed of gold that is chemically stable with respect to the object 40 to be measured.

  An open region 36 is formed in the second propagation path 22 so that a part of the metal film 34 is peeled off and the piezoelectric substrate 30 is exposed. Therefore, since the open region 36 where the piezoelectric substrate 30 is exposed is electrically open, the second propagation path 22 forms an open propagation path. The portion where the metal film 32 remains is electrically short-circuited as in the first propagation path 20.

The piezoelectric substrate 30 is not particularly limited as long as it can propagate a sliding surface acoustic wave, but is preferably a 36-degree rotated Y-plate X-propagating LiTaO ₃ .

  Next, measurement of the relative permittivity and conductivity of the device under test 40 using the device under test physical property measuring apparatus 10 will be described.

  First, an electric signal is input from the oscillator 42 to the input electrode 14 in a state where the surface acoustic wave element 12 is immersed in the measurement object 40 to be measured (see FIG. 2B). In the input electrode 14, the same surface acoustic wave is excited from both sides of the input electrode 14 based on the input signal, propagates on the first propagation path 20, is received by the first output electrode 16, and is transmitted in the second propagation. It propagates on the path 22 and is received by the second output electrode 18.

  Both output signals extracted from the surface acoustic waves received by the first output electrode 16 and the second output electrode 18 are compared by the amplitude ratio phase difference detector 44 to detect the amplitude ratio and the phase difference.

  Since the first propagation path 20 and the second propagation path 22 are different in configuration, the output signals from the first output electrode 16 and the second output electrode 18 are signals having different amplitudes and phases. That is, the output signal from the first output electrode 16 includes a signal component indicating a mechanical interaction, and the output signal from the second output electrode 18 is a signal indicating an electrical interaction and a mechanical interaction. Contains ingredients. Therefore, the difference signal detected from both the output signals is a signal that cancels the mechanical interaction and corresponds only to the electrical interaction. Based on the amplitude ratio and the phase difference detected from this signal, the signal to be measured The relative dielectric constant and conductivity can be calculated as physical characteristics of the object 40.

  As described above, the measured physical property measurement apparatus 10 according to this embodiment includes the first propagation path 20 formed between the input electrode 14 and the first output electrode 16, the input electrode 14, and the second output. A surface acoustic wave element 12 having a second propagation path 22 formed between the electrodes 18 is provided. In a state where the DUT 40 is loaded on the first propagation path 20 and the second propagation path 22, a signal is input from the input electrode 14, and each output signal output from the first output electrode 16 and the second output electrode 18 is output to each output signal. Based on this, the physical characteristics of the DUT 40 can be determined.

  In the conventional measured object property measuring apparatus 100, the input electrodes 112 and 118 and two input electrodes are necessary. However, according to the measured physical property measuring apparatus 10, the first propagation path 20 and the second propagation path 22 are used. By forming the input electrode 14 between the two, the number of input electrodes can be reduced to one, the distributor 143 is not required, and the apparatus can be downsized. Furthermore, since an electrical signal is input from the oscillator 42 without using the distributor 143, the same signal can be reliably input to the input electrode 14, and a decrease in measurement accuracy can be prevented. Furthermore, the occurrence of crosstalk in the first output electrode 16 and the second output electrode 18 can be prevented regardless of the diffraction phenomenon caused by the opening length of the input electrode 14 and the propagation path length between the input and output electrodes.

  Further, when measuring the relative permittivity and conductivity of the device under test 40 using the device under test physical property measuring apparatus 10, the first propagation path 20 is a short-circuit propagation path that is electrically short-circuited. The propagation path 22 is an open propagation path that is electrically open. Further, the input electrode 14, the first output electrode 16, and the second output electrode 18 are sealed by the first sealing member 24, the second sealing member 26, and the third sealing member 28 that prevent adhesion of the DUT 40. By doing so, the physical characteristics of the DUT 40 can be measured while the surface acoustic wave element 12 is immersed in the DUT 40.

  Although the second propagation path 22 shown in FIG. 1 forms an open propagation path, a signal component indicating an electrical interaction and a mechanical interaction can be obtained from the output signal from the second output electrode 18. For example, it is not limited to this propagation path, but may be a lattice propagation path as shown in FIG. 3A. In this lattice-shaped propagation path, a recess 50A formed so that a part of the metal film 34 is peeled off in a direction perpendicular to the propagation direction of the surface acoustic wave (arrow X direction) and the piezoelectric substrate 30 is exposed is X An uneven structure 54A is provided that is provided at equal intervals in the direction and is formed between adjacent recesses 50A and is formed of a protrusion 52A that is a part of the metal film 34.

  Further, as shown in FIG. 3B, the second propagation path 22 is formed between a recess 50B from which a part of the metal film 34 is peeled in a direction oblique to the X direction and the adjacent recess 50B. It is good also as a grid | lattice-like propagation path in which the uneven structure 54B comprised from the convex part 52B which is a part was formed.

  Furthermore, as shown in FIG. 3C, a checkered lattice-shaped propagation path may be formed as the second propagation path 22. In this checkered lattice-shaped propagation path, a concavo-convex structure 54 </ b> C composed of a concave portion 50 </ b> C from which a part of the metal film 34 is peeled and a convex portion 52 </ b> C formed between the adjacent concave portions 50 </ b> C. A checkered lattice is formed.

  Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 4 is an explanatory diagram of a configuration of a physical property measurement apparatus 10A according to the second embodiment of the present invention. 5A and 5B are end views of the VA-VA in FIG. 4, and FIG. 5A is a diagram illustrating a state before loading the object to be measured, and FIG. 5B is a diagram after loading the object to be measured. It is a figure which shows a state. The same components as those of the physical property measuring apparatus 10 to be measured are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the measured physical property measurement apparatus 10 </ b> A, a lattice-shaped propagation path 22 </ b> A is provided as the second propagation path 22 of the measured physical property measurement apparatus 10. In the lattice-shaped propagation path 22A, a concavo-convex structure 60 composed of convex portions 56 and concave portions 58 in the X direction is formed on the metal film 34A. An output signal based on the mass load effect can be obtained by forming the concavo-convex structure 60 and loading and confining the object 40 to be measured in the recess 58. The first propagation path 20 is a short-circuit propagation path formed of the metal film 32 </ b> A in the same manner as the measured physical property measuring apparatus 10.

  Similar to the measurement of the relative permittivity and conductivity of the DUT 40 described above, an electrical signal is input from the oscillator 42 to the input electrode 14 and is extracted from the surface acoustic waves received by the first output electrode 16 and the second output electrode 18. The two output signals are compared by an amplitude ratio phase difference detector 44 to detect a phase difference.

  The output signal from the first output electrode 16 includes a signal component based on the density viscosity product, and the output signal from the second output electrode 18 includes a signal component based on the density viscosity product and the mass load effect. Yes. Therefore, the difference signal detected from both output signals is a signal based on the mass load effect, and the density can be calculated as a physical characteristic of the DUT 40 based on the phase difference detected from this signal. .

  In the measurement of the density of the DUT 40, the lattice propagation path 22 </ b> A is a lattice propagation path in which the concavo-convex structure 60 is formed in the X direction. From the output signal from the second output electrode 18, the density viscosity If a signal component based on the product and the mass load effect is obtained, the propagation path is not limited to this propagation path, and a lattice propagation path as shown in FIG. 6A may be used. This lattice-shaped propagation path is provided with a concavo-convex structure 60A composed of convex portions 56A and concave portions 58A in a direction perpendicular to the X direction.

  Furthermore, the lattice-shaped propagation path 22A may be a checkered lattice-shaped propagation path in which an uneven structure is added in the X direction as shown in FIGS. 6B to 6D with respect to FIG. 6A. As shown in FIG. 6B, a cross section parallel to the metal film 34A of the lattice-shaped propagation path 22A may be a quadrangular shape to form a concavo-convex structure 60B composed of convex portions 56B and concave portions 58B. Further, as shown in FIG. 6C, a cross section parallel to the metal film 34A may be formed into a circular shape to form a concavo-convex structure 60C composed of a convex portion 56C and a concave portion 58C, and a cross section parallel to the metal film 34A as shown in FIG. May be formed in a rhombus shape to form a concavo-convex structure 60D composed of a convex portion 56D and a concave portion 58D. Note that the shape of the cross section of the recess parallel to the metal film 34A is not limited to these shapes as long as a checkered lattice-shaped propagation path can be formed.

  In addition, if the difference signal detected from each output signal of the first output electrode 16 and the second output electrode 18 is a signal based on the mass load effect, the configuration of the first propagation path 20 and the lattice propagation path 22A is particularly It is not limited. In the second embodiment, the first propagation path 20 includes the electrically short-circuited short-circuit propagation path and the electrically short-circuited lattice-shaped propagation path 22A, but the first propagation path 20 is electrically opened. The open propagation path 20B may be used, and the lattice propagation path 22A may be electrically opened to form a lattice propagation path 22B.

  FIG. 7 is an explanatory diagram of a configuration of a measured physical property measuring apparatus 10B that is a modified example of the second embodiment of the present invention. 8A is an end view of VIIIA-VIIIA in FIG.

  The physical property measurement apparatus 10B to be measured includes an open propagation path 20B (first propagation path) and a lattice-shaped propagation path 22B (second propagation path). In addition, the same code | symbol is attached | subjected to the component same as the to-be-measured physical property measuring apparatus 10A.

  The open propagation path 20B includes an open region 70 and a convex portion 72. The open region 70 is a region where the metal film 32B is peeled off, and the convex portion 72 is a portion that remains without being peeled off by the metal film 32B.

  In the lattice-shaped propagation path 22B, recesses 74 formed so as to expose a part of the metal film 34B in a direction perpendicular to the X direction to expose the piezoelectric substrate 30 are provided at equal intervals in the X direction. A convex portion 76 is formed between adjacent concave portions 74. In other words, the lattice-shaped propagation path 22B is formed with a concavo-convex structure 78 composed of the concave portions 74 and the convex portions 76 in the X direction, and the concave portions 74 where the metal film 34B is exposed are electrically opened. Yes.

  The sum of the areas of the region 70 a and the region 70 b constituting the open region 70 is formed to be equal to the sum of the bottom areas of all the concave portions 74 in the convex portion 76.

The convex portion 76 is formed as a part of the metal film 34B, but is not limited to metal, and may be a resin such as SiO ₂ .

  Further, if a signal component based on the density-viscosity product and the mass load effect can be obtained from the output signal from the second output electrode 18, the propagation path is not limited to this propagation path. A lattice-like propagation path as shown in 9A may be used. This lattice-shaped propagation path includes a concavo-convex structure 78A composed of a concave portion 74A and a convex portion 76A in a direction perpendicular to the X direction.

  Furthermore, the lattice-shaped propagation path 22B may be a checkered lattice-shaped propagation path in which an uneven structure is added in the X direction as shown in FIGS. 9B to 9D with respect to FIG. 9A. As shown in FIG. 9B, the cross section of the lattice-shaped propagation path 22B parallel to the piezoelectric substrate 30 may be a quadrangular shape to form a concavo-convex structure 78B composed of a concave portion 74B and a convex portion 76B. Further, as shown in FIG. 9C, a cross section parallel to the piezoelectric substrate 30 may be formed into a circular shape to form a concavo-convex structure 78C including a concave portion 74C and a convex portion 76C. May be formed in a rhombus shape and may be a concavo-convex structure 78D constituted by the concave portion 74D and the convex portion 76D. The shape of the cross section of the recess parallel to the piezoelectric substrate 30 is not limited to these shapes as long as a checkered lattice propagation path can be formed.

  Furthermore, as shown in FIG. 9A, the present invention is not limited to the case where the concavo-convex structure 78A is formed by peeling a part of the metal film 34B. FIG. 10 is an explanatory diagram of a configuration of a modified example of the physical property measurement apparatus 10B to be measured according to the second embodiment of the present invention. 11A and 11B are XIA-XIA end views of FIG. 10, and FIG. 11A is a diagram showing a state before the object to be measured is loaded, and FIG. 11B is a state in which the object to be measured is loaded. It is a figure which shows a back state.

  As shown in FIG. 10, the open propagation path 20 </ b> C includes a flat open region 80 where the piezoelectric substrate 30 is exposed. In addition, as shown in FIG. 10, the lattice-shaped propagation path 22 </ b> C is provided with concave portions 82 formed in the direction perpendicular to the X direction at equal intervals, and the convex portions 84 are provided between adjacent concave portions 82. The concavo-convex structure 86 is formed and includes the concave portion 82 and the convex portion 84.

  In the first and second embodiments, the surface acoustic wave element 12 is immersed in the device under test 40 and the device under test 40 is loaded on the first propagation path 20 and the second propagation path 22. The state in which the DUT 40 is loaded on the first propagation path 20 and the second propagation path 22 is not particularly limited as long as the physical characteristics of the measurement object 40 can be measured. For example, a load caused by dropping the object to be measured 40 on the first propagation path 20 and the second propagation path 22 or a load caused by flowing the object 40 to be measured on the first propagation path 20 and the second propagation path 22. May be.

  In addition, the physical properties of the object to be measured that can be measured using the object property measuring apparatus 10 are not limited to the above-described relative dielectric constant, conductivity, and density. For example, it is possible to measure the viscosity of the object to be measured.

  Furthermore, the liquid object to be measured is not particularly limited, and may be either a pure liquid or a mixed liquid. When measuring physical properties of alcohol such as methanol and ethanol, It is particularly effective. Furthermore, it goes without saying that physical characteristics can be measured even in a state in which an object to be measured contains antigens, antibodies, bacteria, and the like.

  In this case, for example, when charged bacteria are contained in the object to be measured, the content of bacteria can be measured by measuring the conductivity of the object to be measured. In addition, when bacteria charged with different polarities are included, it is possible to specify the type of bacteria most contained in the measurement object by measuring the conductivity of the measurement object. Furthermore, when bacteria are attached to the propagation path loaded with the object to be measured, by measuring the density and viscosity of the object to be measured that has changed due to the mass load effect, Can be specified.

  Note that the present invention is not limited to the above-described embodiment, and it is needless to say that various configurations can be adopted without departing from the gist of the present invention.

It is explanatory drawing of a structure of the to-be-measured object characteristic measuring apparatus which concerns on 1st Embodiment of this invention. 2A and FIG. 2B are end views of IIA-IIA in FIG. 1, FIG. 2A is a diagram showing a state before loading the object to be measured, and FIG. 2B is a diagram after loading the object to be measured. It is a figure which shows a state. 3A to 3C are explanatory diagrams of other configurations of the second propagation path in the device property measuring apparatus according to the first embodiment. It is explanatory drawing of a structure of the to-be-measured object characteristic measuring apparatus which concerns on 2nd Embodiment of this invention. 5A and 5B are end views of the VA-VA in FIG. 4, and FIG. 5A is a diagram illustrating a state before loading the object to be measured, and FIG. 5B is a diagram after loading the object to be measured. It is a figure which shows a state. 6A to 6D are explanatory diagrams of other configurations of the lattice-shaped propagation path in the device property measuring apparatus according to the second embodiment. FIG. 7 is an explanatory diagram of a configuration of a modified example of the device property measuring apparatus according to the second embodiment of the present invention. 8A and 8B are end views of VIIIA-VIIIA in FIG. 7, in which FIG. 8A is a diagram showing a state before loading the object to be measured, and FIG. 8B is a diagram after loading the object to be measured. It is a figure which shows a state. 9A to 9D are explanatory diagrams of other configurations of the lattice-shaped propagation path in the modification according to the second embodiment. FIG. 10 is an explanatory diagram of a configuration of a modified example of the device property measuring apparatus according to the second embodiment of the present invention. 11A and 11B are XIA-XIA end views of FIG. 10, in which FIG. 11A is a diagram showing a state before loading the object to be measured, and FIG. 11B is a diagram after loading the object to be measured. It is a figure which shows a state. It is explanatory drawing of the conventional to-be-measured object characteristic measuring apparatus. In the conventional to-be-measured object characteristic measuring apparatus, it is explanatory drawing at the time of using one input electrode.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10, 10A, 10B, 100 ... Device-to-be-measured characteristic measuring apparatus 12 ... Surface acoustic wave element 14, 112, 122, 132 ... Input electrode 16 ... First output electrode 18 ... Second output electrode 20 ... First propagation path 20B, 20C ... Open propagation path 22 ... Second propagation paths 22A, 22B, 22C ... Lattice-like propagation path 24 ... First sealing members 24a, 26a, 28a ... Side wall parts 24b, 26b, 28b ... Lid part 26 ... Second sealing Member 28 ... Third sealing member 30, 130 ... Piezoelectric substrate 32, 32A, 32B, 34, 34A, 34B, 118, 128, ... Metal film 36, 70, 80 ... Open region 40 ... DUT 42, 142 ... Oscillators 44, 144... Amplitude ratio phase difference detectors 50A-50C, 58, 58A-58D, 74, 74A-74D, 82 ... Recesses 52A-52C, 56, 56A-56D, 72, 76, 76A- 6D, 84 ... convex portions 54A to 54C, 60, 60A to 60D, 78, 78A to 78D, 86 ... uneven structure 110 ... first surface acoustic wave element 114, 124 ... output electrode 116 ... short-circuit propagation path 120 ... second elasticity Surface wave element 126 ... Open propagation path 143 ... Distributor

Claims (5)

A first propagation path formed between the input electrode and the first output electrode, and a second propagation path formed between the input electrode and the second output electrode and having different amplitude and phase characteristics from the first propagation path. A surface acoustic wave element having
In a state where a liquid object to be measured is loaded on the first propagation path and the second propagation path,
Measuring a characteristic of an object to be measured, wherein a signal is input from the input electrode and a physical characteristic of the object to be measured is obtained based on each output signal output from the first output electrode and the second output electrode apparatus. In the to-be-measured object characteristic measuring device according to claim 1,
The first propagation path is a short-circuit propagation path that is electrically short-circuited;
The measured object property measuring apparatus, wherein the second propagation path is an open propagation path that is electrically opened. In the to-be-measured object characteristic measuring device according to claim 1,
The first propagation path is a short-circuit propagation path that is electrically short-circuited;
The device for measuring characteristics of an object to be measured is characterized in that the second propagation path is a grid-like propagation path in which a lattice-shaped uneven structure is formed and electrically short-circuited. In the to-be-measured object characteristic measuring device according to claim 1,
The first propagation path is an open propagation path that is electrically open,
The device for measuring characteristics of an object to be measured is characterized in that the second propagation path is a lattice-shaped propagation path in which a lattice-shaped uneven structure is formed and electrically opened. In the to-be-measured object characteristic measuring apparatus of any one of Claims 1-4,
Each of the input electrode and each of the output electrodes is sealed with a sealing member that prevents adhesion of the device to be measured.

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