JP2008205888A5 - - Google Patents

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Publication number
JP2008205888A5
JP2008205888A5 JP2007040432A JP2007040432A JP2008205888A5 JP 2008205888 A5 JP2008205888 A5 JP 2008205888A5 JP 2007040432 A JP2007040432 A JP 2007040432A JP 2007040432 A JP2007040432 A JP 2007040432A JP 2008205888 A5 JP2008205888 A5 JP 2008205888A5
Authority
JP
Japan
Prior art keywords
piezoelectric
substrate
etching
vibrating piece
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007040432A
Other languages
English (en)
Japanese (ja)
Other versions
JP5023734B2 (ja
JP2008205888A (ja
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Publication date
Application filed filed Critical
Priority to JP2007040432A priority Critical patent/JP5023734B2/ja
Priority claimed from JP2007040432A external-priority patent/JP5023734B2/ja
Publication of JP2008205888A publication Critical patent/JP2008205888A/ja
Publication of JP2008205888A5 publication Critical patent/JP2008205888A5/ja
Application granted granted Critical
Publication of JP5023734B2 publication Critical patent/JP5023734B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007040432A 2007-02-21 2007-02-21 圧電振動片の製造方法及び圧電振動素子 Expired - Fee Related JP5023734B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007040432A JP5023734B2 (ja) 2007-02-21 2007-02-21 圧電振動片の製造方法及び圧電振動素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007040432A JP5023734B2 (ja) 2007-02-21 2007-02-21 圧電振動片の製造方法及び圧電振動素子

Publications (3)

Publication Number Publication Date
JP2008205888A JP2008205888A (ja) 2008-09-04
JP2008205888A5 true JP2008205888A5 (ru) 2010-04-02
JP5023734B2 JP5023734B2 (ja) 2012-09-12

Family

ID=39782880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007040432A Expired - Fee Related JP5023734B2 (ja) 2007-02-21 2007-02-21 圧電振動片の製造方法及び圧電振動素子

Country Status (1)

Country Link
JP (1) JP5023734B2 (ru)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5347546B2 (ja) * 2009-02-12 2013-11-20 セイコーエプソン株式会社 振動片、振動片の製造方法および振動子
JP2010187195A (ja) * 2009-02-12 2010-08-26 Epson Toyocom Corp 振動片、振動片の製造方法および振動子
JP5786393B2 (ja) * 2011-03-18 2015-09-30 株式会社村田製作所 水晶デバイスの製造方法
JP6110663B2 (ja) * 2012-12-28 2017-04-05 京セラクリスタルデバイス株式会社 水晶振動子の製造方法
JP6004957B2 (ja) * 2013-01-31 2016-10-12 京セラクリスタルデバイス株式会社 水晶振動子及びその製造方法
KR102256902B1 (ko) * 2013-07-25 2021-05-28 엔지케이 인슐레이터 엘티디 복합 기판 및 그 제조방법
JP6528878B2 (ja) * 2018-03-22 2019-06-12 セイコーエプソン株式会社 電子デバイス、電子機器および移動体

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866410A (ja) * 1981-10-16 1983-04-20 Seiko Instr & Electronics Ltd 音又型屈曲水晶振動子
JPH06196963A (ja) * 1992-10-20 1994-07-15 Matsushita Electric Ind Co Ltd 圧電フィルタとその製造方法
JPH0746072A (ja) * 1993-08-03 1995-02-14 Matsushita Electric Ind Co Ltd 水晶振動子の製造方法
JPH0750438A (ja) * 1993-08-04 1995-02-21 Matsushita Electric Ind Co Ltd 薄板素材の製造方法
JPH10308640A (ja) * 1997-05-07 1998-11-17 Matsushita Electric Ind Co Ltd 圧電デバイスの製造方法
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP4316903B2 (ja) * 2003-03-11 2009-08-19 リバーエレテック株式会社 屈曲振動子
JP4515180B2 (ja) * 2004-07-20 2010-07-28 Ｎｅｃトーキン株式会社 音叉型圧電振動ジャイロ装置
US20060255691A1 (en) * 2005-03-30 2006-11-16 Takahiro Kuroda Piezoelectric resonator and manufacturing method thereof

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