JP2008193118A5 - - Google Patents

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Publication number
JP2008193118A5
JP2008193118A5 JP2008111347A JP2008111347A JP2008193118A5 JP 2008193118 A5 JP2008193118 A5 JP 2008193118A5 JP 2008111347 A JP2008111347 A JP 2008111347A JP 2008111347 A JP2008111347 A JP 2008111347A JP 2008193118 A5 JP2008193118 A5 JP 2008193118A5
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JP
Japan
Prior art keywords
vacuum processing
cassette
wafer
wafers
transfer means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008111347A
Other languages
English (en)
Japanese (ja)
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JP2008193118A (ja
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Publication date
Application filed filed Critical
Priority to JP2008111347A priority Critical patent/JP2008193118A/ja
Priority claimed from JP2008111347A external-priority patent/JP2008193118A/ja
Publication of JP2008193118A publication Critical patent/JP2008193118A/ja
Publication of JP2008193118A5 publication Critical patent/JP2008193118A5/ja
Withdrawn legal-status Critical Current

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JP2008111347A 2008-04-22 2008-04-22 真空処理装置及び真空処理方法 Withdrawn JP2008193118A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008111347A JP2008193118A (ja) 2008-04-22 2008-04-22 真空処理装置及び真空処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008111347A JP2008193118A (ja) 2008-04-22 2008-04-22 真空処理装置及び真空処理方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2008011462A Division JP4252103B2 (ja) 2008-01-22 2008-01-22 真空処理方法及び真空処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009104066A Division JP5107961B2 (ja) 2009-04-22 2009-04-22 真空処理装置及び真空処理方法

Publications (2)

Publication Number Publication Date
JP2008193118A JP2008193118A (ja) 2008-08-21
JP2008193118A5 true JP2008193118A5 (enrdf_load_stackoverflow) 2009-05-07

Family

ID=39752839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008111347A Withdrawn JP2008193118A (ja) 2008-04-22 2008-04-22 真空処理装置及び真空処理方法

Country Status (1)

Country Link
JP (1) JP2008193118A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015138856A (ja) * 2014-01-22 2015-07-30 株式会社ディスコ 切削装置

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