JP2008192485A - 加熱治具 - Google Patents
加熱治具 Download PDFInfo
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- JP2008192485A JP2008192485A JP2007026584A JP2007026584A JP2008192485A JP 2008192485 A JP2008192485 A JP 2008192485A JP 2007026584 A JP2007026584 A JP 2007026584A JP 2007026584 A JP2007026584 A JP 2007026584A JP 2008192485 A JP2008192485 A JP 2008192485A
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- heating
- jig
- holding board
- semiconductor element
- heating element
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Abstract
【解決手段】熱伝導性の良好な材料により外表面に複数の面積の異なる加熱面1を備えてブロック状に形成され、
発熱体挿入部2に保持された発熱体3の発熱が伝熱された加熱面1のいずれかを選択して加熱対象4に接触させて該加熱対象4を加熱する加熱治具A
【選択図】 図2
Description
2 発熱体挿入部
3 発熱体
4 加熱対象
5 素子保持ボード
7 半導体上面
8 治具保持ボード
9 評価装置
10 ソケット
A 加熱治具
Claims (6)
- 熱伝導性の良好な材料により外表面に複数の面積の異なる加熱面を備えてブロック状に形成され、
発熱体挿入部に保持された発熱体の発熱が伝熱された加熱面のいずれかを選択して加熱対象に接触させて該加熱対象を加熱する加熱治具。 - 前記発熱体挿入部が各加熱面に対応して複数形成される請求項1記載の加熱治具。
- 互いに直交する3個の平面を加熱面とする請求項1または2記載の加熱治具。
- 試験対象の半導体素子を着脱自在に保持する素子保持ボードと、
素子保持ボード上に保持され、請求項1、2または3記載の加熱治具を支持して加熱治具の加熱面を半導体上面に当接させる治具保持ボードとを有し、
前記半導体素子を所定の加熱条件に維持する半導体素子の熱試験装置。 - 前記素子保持ボードにはプリント配線を介して評価装置に接続される半導体素子装着用のソケットが実装される請求項4記載の熱試験装置。
- 前記治具保持ボードには、加熱治具への給電用プリント配線が形成される請求項4または5記載の半導体素子の熱試験装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007026584A JP5003188B2 (ja) | 2007-02-06 | 2007-02-06 | 加熱治具 |
PCT/JP2008/051581 WO2008093807A1 (ja) | 2007-02-01 | 2008-01-31 | モニターバーンイン試験装置およびモニターバーンイン試験方法 |
KR1020097016191A KR20090106407A (ko) | 2007-02-01 | 2008-01-31 | 모니터 번인 시험 장치 및 모니터 번인 시험 방법 |
CNA2008800039714A CN101601098A (zh) | 2007-02-01 | 2008-01-31 | 监视老化试验装置和监视老化试验方法 |
TW097103959A TW200846683A (en) | 2007-02-01 | 2008-02-01 | Monitoring burn-in test apparatus and method and heating test apparatus and method of controlling temperature therefor |
US12/533,504 US20090287362A1 (en) | 2007-02-01 | 2009-07-31 | Monitored burn-in test apparatus and monitored burn-in test method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007026584A JP5003188B2 (ja) | 2007-02-06 | 2007-02-06 | 加熱治具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008192485A true JP2008192485A (ja) | 2008-08-21 |
JP5003188B2 JP5003188B2 (ja) | 2012-08-15 |
Family
ID=39752380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007026584A Expired - Fee Related JP5003188B2 (ja) | 2007-02-01 | 2007-02-06 | 加熱治具 |
Country Status (1)
Country | Link |
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JP (1) | JP5003188B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013020854A (ja) * | 2011-07-12 | 2013-01-31 | Satoru Murayama | 電熱ヒーター用基板 |
KR102181036B1 (ko) * | 2019-05-29 | 2020-11-19 | 창원대학교 산학협력단 | 알루미늄 용접 가공용 예열 베드 장치 및 이를 이용한 알루미늄 용접 가공 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59173294U (ja) * | 1983-05-04 | 1984-11-19 | 住友電気工業株式会社 | 加熱装置の加熱用ヘツド |
JPH0536793A (ja) * | 1991-07-31 | 1993-02-12 | Sumitomo Electric Ind Ltd | バーンイン方法および装置 |
JP2000133420A (ja) * | 1998-10-29 | 2000-05-12 | Kyushu Nissho:Kk | 加熱装置 |
-
2007
- 2007-02-06 JP JP2007026584A patent/JP5003188B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59173294U (ja) * | 1983-05-04 | 1984-11-19 | 住友電気工業株式会社 | 加熱装置の加熱用ヘツド |
JPH0536793A (ja) * | 1991-07-31 | 1993-02-12 | Sumitomo Electric Ind Ltd | バーンイン方法および装置 |
JP2000133420A (ja) * | 1998-10-29 | 2000-05-12 | Kyushu Nissho:Kk | 加熱装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013020854A (ja) * | 2011-07-12 | 2013-01-31 | Satoru Murayama | 電熱ヒーター用基板 |
KR102181036B1 (ko) * | 2019-05-29 | 2020-11-19 | 창원대학교 산학협력단 | 알루미늄 용접 가공용 예열 베드 장치 및 이를 이용한 알루미늄 용접 가공 방법 |
Also Published As
Publication number | Publication date |
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JP5003188B2 (ja) | 2012-08-15 |
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