JP2008157831A5 - - Google Patents

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Publication number
JP2008157831A5
JP2008157831A5 JP2006348800A JP2006348800A JP2008157831A5 JP 2008157831 A5 JP2008157831 A5 JP 2008157831A5 JP 2006348800 A JP2006348800 A JP 2006348800A JP 2006348800 A JP2006348800 A JP 2006348800A JP 2008157831 A5 JP2008157831 A5 JP 2008157831A5
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JP
Japan
Prior art keywords
guide plate
probe
probe card
tip
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006348800A
Other languages
English (en)
Japanese (ja)
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JP2008157831A (ja
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Publication date
Application filed filed Critical
Priority to JP2006348800A priority Critical patent/JP2008157831A/ja
Priority claimed from JP2006348800A external-priority patent/JP2008157831A/ja
Publication of JP2008157831A publication Critical patent/JP2008157831A/ja
Publication of JP2008157831A5 publication Critical patent/JP2008157831A5/ja
Pending legal-status Critical Current

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JP2006348800A 2006-12-26 2006-12-26 プローブカード Pending JP2008157831A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006348800A JP2008157831A (ja) 2006-12-26 2006-12-26 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006348800A JP2008157831A (ja) 2006-12-26 2006-12-26 プローブカード

Publications (2)

Publication Number Publication Date
JP2008157831A JP2008157831A (ja) 2008-07-10
JP2008157831A5 true JP2008157831A5 (de) 2010-12-16

Family

ID=39658889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006348800A Pending JP2008157831A (ja) 2006-12-26 2006-12-26 プローブカード

Country Status (1)

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JP (1) JP2008157831A (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201111790A (en) * 2009-09-16 2011-04-01 Probeleader Co Ltd High-frequency vertical probe card structure
KR101311735B1 (ko) * 2011-12-20 2013-09-26 주식회사 기가레인 반도체 칩 테스트용 소켓
TW201537181A (zh) * 2014-03-25 2015-10-01 Mpi Corp 垂直式探針裝置及使用於該垂直式探針裝置之支撐柱

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09138257A (ja) * 1995-11-14 1997-05-27 Nec Corp プリント基板の検査装置および方法
JP3817338B2 (ja) * 1997-06-19 2006-09-06 太洋工業株式会社 プリント基板検査装置
JPH1164426A (ja) * 1997-08-25 1999-03-05 I C T:Kk プリント基板の検査装置およびプリント基板の検査 装置の組み立てキット

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