JP2008157831A5 - - Google Patents
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- Publication number
- JP2008157831A5 JP2008157831A5 JP2006348800A JP2006348800A JP2008157831A5 JP 2008157831 A5 JP2008157831 A5 JP 2008157831A5 JP 2006348800 A JP2006348800 A JP 2006348800A JP 2006348800 A JP2006348800 A JP 2006348800A JP 2008157831 A5 JP2008157831 A5 JP 2008157831A5
- Authority
- JP
- Japan
- Prior art keywords
- guide plate
- probe
- probe card
- tip
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 142
- 239000000758 substrate Substances 0.000 claims description 32
- 238000005259 measurement Methods 0.000 claims description 16
- 230000000875 corresponding Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 description 49
- 239000002344 surface layer Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006348800A JP2008157831A (ja) | 2006-12-26 | 2006-12-26 | プローブカード |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006348800A JP2008157831A (ja) | 2006-12-26 | 2006-12-26 | プローブカード |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008157831A JP2008157831A (ja) | 2008-07-10 |
JP2008157831A5 true JP2008157831A5 (de) | 2010-12-16 |
Family
ID=39658889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006348800A Pending JP2008157831A (ja) | 2006-12-26 | 2006-12-26 | プローブカード |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2008157831A (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201111790A (en) * | 2009-09-16 | 2011-04-01 | Probeleader Co Ltd | High-frequency vertical probe card structure |
KR101311735B1 (ko) * | 2011-12-20 | 2013-09-26 | 주식회사 기가레인 | 반도체 칩 테스트용 소켓 |
TW201537181A (zh) * | 2014-03-25 | 2015-10-01 | Mpi Corp | 垂直式探針裝置及使用於該垂直式探針裝置之支撐柱 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09138257A (ja) * | 1995-11-14 | 1997-05-27 | Nec Corp | プリント基板の検査装置および方法 |
JP3817338B2 (ja) * | 1997-06-19 | 2006-09-06 | 太洋工業株式会社 | プリント基板検査装置 |
JPH1164426A (ja) * | 1997-08-25 | 1999-03-05 | I C T:Kk | プリント基板の検査装置およびプリント基板の検査 装置の組み立てキット |
-
2006
- 2006-12-26 JP JP2006348800A patent/JP2008157831A/ja active Pending
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