JP2008153594A - イメージセンサic - Google Patents
イメージセンサic Download PDFInfo
- Publication number
- JP2008153594A JP2008153594A JP2006342747A JP2006342747A JP2008153594A JP 2008153594 A JP2008153594 A JP 2008153594A JP 2006342747 A JP2006342747 A JP 2006342747A JP 2006342747 A JP2006342747 A JP 2006342747A JP 2008153594 A JP2008153594 A JP 2008153594A
- Authority
- JP
- Japan
- Prior art keywords
- receiving
- light
- pixel region
- image sensor
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 35
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 29
- 239000010409 thin film Substances 0.000 claims abstract description 29
- 230000001681 protective effect Effects 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
Abstract
【解決手段】 フォトダイオードからなる複数の赤色光受光用の画素領域、緑色光受光用の画素領域、および青色光受光用の画素領域、それぞれの保護膜の下面には、全て同一の電位に固定された多結晶シリコン薄膜を配置した。また多結晶シリコン薄膜の膜厚は、赤色光受光用の画素領域、緑色光受光用の画素領域、および青色光受光用の画素領域、それぞれの受光波長を選択的に透過するように異なった膜厚で形成した。
【選択図】 図1
Description
11 リセットトランジスタ
12 フォトダイオード
13 増幅回路
20 保持回路
21 保持容量
22A、22B スイッチトランジスタ
401 赤色光受光用の画素領域
402 緑色光受光用の画素領域
403 青色光受光用の画素領域
501 赤色光を選択的に透過する膜厚を有する多結晶シリコン薄膜
502 緑色光を選択的に透過する膜厚を有する多結晶シリコン薄膜
503 青色光を選択的に透過する膜厚を有する多結晶シリコン薄膜
Claims (4)
- フォトダイオードやトランジスタなどの素子を同一シリコン基板上に構成するイメージセンサICにおいて、前記フォトダイオードからなる複数の赤色光受光用の画素領域、緑色光受光用の画素領域、および青色光受光用の画素領域、それぞれの保護膜の下面には、全て同一の電位に固定された多結晶シリコン薄膜が配置されており、前記赤色光受光用の画素領域、前記緑色光受光用の画素領域、および前記青色光受光用の画素領域、それぞれの上に配置された前記多結晶シリコン薄膜の膜厚は、前記赤色光受光用の画素領域、前記緑色光受光用の画素領域、および前記青色光受光用の画素領域、それぞれの受光波長を選択的に透過するように異なった膜厚で形成されていることを特徴とするイメージセンサIC。
- 前記赤色光受光用の画素領域、前記緑色光受光用の画素領域、および前記青色光受光用の画素領域、それぞれの上に配置された前記多結晶シリコン薄膜は、連続した膜であることを特徴とする請求項1記載のイメージセンサIC。
- 前記赤色光受光用の画素領域、前記緑色光受光用の画素領域、前記青色光受光用の画素領域、それぞれの上に配置された前記多結晶シリコン薄膜は、それぞれ形状的に独立分離した膜であることを特徴とする請求項1記載のイメージセンサIC。
- 前記赤色光受光用の画素領域、前記緑色光受光用の画素領域、前記青色光受光用の画素領域、それぞれの上に配置された前記多結晶シリコン薄膜の電位は前記シリコン基板の電位と同一になるように電気的に接続されていることを特徴とする請求項2または請求項3記載のイメージセンサIC。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006342747A JP2008153594A (ja) | 2006-12-20 | 2006-12-20 | イメージセンサic |
US12/004,152 US20080150068A1 (en) | 2006-12-20 | 2007-12-19 | Image sensor IC |
KR1020070134253A KR20080058234A (ko) | 2006-12-20 | 2007-12-20 | 이미지 센서 ic |
CNA2007101646957A CN101236979A (zh) | 2006-12-20 | 2007-12-20 | 图像传感器ic |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006342747A JP2008153594A (ja) | 2006-12-20 | 2006-12-20 | イメージセンサic |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2008153594A true JP2008153594A (ja) | 2008-07-03 |
Family
ID=39541626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006342747A Pending JP2008153594A (ja) | 2006-12-20 | 2006-12-20 | イメージセンサic |
Country Status (4)
Country | Link |
---|---|
US (1) | US20080150068A1 (ja) |
JP (1) | JP2008153594A (ja) |
KR (1) | KR20080058234A (ja) |
CN (1) | CN101236979A (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5369526A (en) * | 1976-12-03 | 1978-06-21 | Hitachi Ltd | Solid pickup unit |
JPH01158770A (ja) * | 1987-12-16 | 1989-06-21 | Seiko Epson Corp | カラーイメージセンサの製造方法 |
JP2005175430A (ja) * | 2003-11-18 | 2005-06-30 | Matsushita Electric Ind Co Ltd | 受光素子 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5941351B2 (ja) * | 1976-09-13 | 1984-10-06 | 株式会社日立製作所 | カラ−用固体撮像素子 |
FR2781929B1 (fr) * | 1998-07-28 | 2002-08-30 | St Microelectronics Sa | Capteur d'image a reseau de photodiodes |
US6864557B2 (en) * | 2001-06-18 | 2005-03-08 | Foveon, Inc. | Vertical color filter detector group and array |
US6914314B2 (en) * | 2003-01-31 | 2005-07-05 | Foveon, Inc. | Vertical color filter sensor group including semiconductor other than crystalline silicon and method for fabricating same |
US20050057671A1 (en) * | 2003-09-17 | 2005-03-17 | Cole Bryan G. | Method to filter EM radiation of certain energies using poly silicon |
KR100538150B1 (ko) * | 2003-12-31 | 2005-12-21 | 동부아남반도체 주식회사 | 이미지 센서 및 그 제조방법 |
US20070238035A1 (en) * | 2006-04-07 | 2007-10-11 | Micron Technology, Inc. | Method and apparatus defining a color filter array for an image sensor |
US7642582B2 (en) * | 2007-09-06 | 2010-01-05 | International Business Machines Corporation | Imagers having electrically active optical elements |
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2006
- 2006-12-20 JP JP2006342747A patent/JP2008153594A/ja active Pending
-
2007
- 2007-12-19 US US12/004,152 patent/US20080150068A1/en not_active Abandoned
- 2007-12-20 CN CNA2007101646957A patent/CN101236979A/zh active Pending
- 2007-12-20 KR KR1020070134253A patent/KR20080058234A/ko not_active Application Discontinuation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5369526A (en) * | 1976-12-03 | 1978-06-21 | Hitachi Ltd | Solid pickup unit |
JPH01158770A (ja) * | 1987-12-16 | 1989-06-21 | Seiko Epson Corp | カラーイメージセンサの製造方法 |
JP2005175430A (ja) * | 2003-11-18 | 2005-06-30 | Matsushita Electric Ind Co Ltd | 受光素子 |
Also Published As
Publication number | Publication date |
---|---|
KR20080058234A (ko) | 2008-06-25 |
CN101236979A (zh) | 2008-08-06 |
US20080150068A1 (en) | 2008-06-26 |
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