JP2008149417A - Method of grinding platelike glass optical element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately and efficiently perform a grinding step of grinding an optical transmitting surface of a platelike glass optical element where a lens part is not inscribed. <P>SOLUTION: The method is for grinding the platelike glass optical element 1 having a plate surface serving as the optical transmitting surface, an approximately rectangular platelike base part and the lens part having a plurality of small lenses formed on one of the optical transmitting surfaces of the base part. Two platelike glass optical elements 1 are placed such that their lens parts face each other, and arranged between opposite rotary grinders of a double-sided grinding machine while an elastic material 21 is sandwiched between the lens parts. Thus, the optical transmitting surfaces where none of lens parts of the elements 1 are formed are ground. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an optical polishing method for a light transmission surface on which a lens of a plate-like glass optical element such as a lens array is not formed.

  A lens array, which is a plate-like glass optical element, is used in a projection display device using liquid crystal, that is, a liquid crystal projector. The lens array includes a base portion and a lens portion in which a plurality of small lenses bulging on the base portion are arranged in a matrix. The lens array is also called an integrator lens or fly-eye lens.

  In general, a lens array is manufactured by press-molding glass in a softened state with a mold engraved with a matrix-like lens shape and polishing a light transmitting surface on which no lens is formed.

  What is called an Oscar-type polishing apparatus is generally used for the polishing process of the light transmitting surface on which the lenses of the lens array are not formed. The polishing apparatus includes a lower surface plate having an upper surface as a polishing surface, and an upper surface plate that is disposed to face the upper surface of the lower surface plate and holds a lens array. Then, the upper surface plate is rotatably supported on the lower end portion of the support shaft suspended from the tip portion of the swinging arm, and the light transmitting surface (surface to be processed) of the lens array is pressed against the polishing surface of the lower surface plate. Rotate the lower platen at a constant speed while supplying slurry containing an abrasive such as cerium oxide on the polishing surface from above the lower platen, and rotate the upper platen using the rotation of the lower platen or actively Oscillate on the lower surface plate. Thus, the light transmitting surface of the lens array is polished by the polishing surface of the lower surface plate and the abrasive.

Patent Document 1 discloses a step of polishing a second surface of a glass optical element in which a plurality of irregularities of a predetermined shape are formed on the first surface, and the polishing step prepares two glass optical elements. In addition, a polishing method is described in which the second surface is flatly polished in a state where the first surface is overlapped with the inner surface facing inward.
JP 2001-166117 A

  With the spread of video equipment such as personal computers and DVDs, the use of liquid crystal projectors has expanded from various business use for presentations to home use. Along with this, the price of liquid crystal projectors is being reduced. Against this background, a reduction in cost is also required for lens arrays used in liquid crystal projectors.

In Japanese Patent Application No. 2003-343669, the applicant press-molded the softened glass integrally with a mold and formed into a square shape in which four plate-like glass optical elements are arranged adjacent to each other. A press molding step for obtaining a molded body, an optical polishing step for optically polishing the plate surface of the molded body on which the cellular lens is not formed, and a separation step for separating into four plate-like glass optical elements are provided. We propose a method for manufacturing a sheet glass optical element, which makes it possible to rely on precise post-processing for a sheet glass optical element that is excellent in molding accuracy, particularly the end face that is the standard for assembly in an optical system and assembly accuracy. It states that it can be manufactured with high productivity.
And the applicant examined the manufacturing method which productivity improves further, and paid its attention to the grinding | polishing process of the light transmissive surface in which the lens is not formed.

  In the polishing method using the above-described Oscar-type polishing apparatus, the lens array is fitted and held on the upper surface plate for each one and the light transmission surface is polished, so that the efficiency is very low. In order to prevent the lens part from being scratched during polishing, when the lens array is fitted and held on the upper surface plate, the concave holder having the same shape as the lens part is filled with a fixing agent, and the lens array is fitted and fixed. Yes. Therefore, an operation of fixing the lens array to the concave holder, an operation of removing the lens array from the concave holder after polishing, and an operation of removing the fixing agent attached to the lens portion are necessary. In particular, when a thermosetting adhesive is used as the fixing agent, it takes time to heat and melt the thermosetting adhesive and to cool and solidify the lens array when attaching or detaching the lens array. As described above, the setup work for the polishing further deteriorates the efficiency of the polishing process.

  Further, in the polishing method of Patent Document 1, since the work surface may be curved by a load applied to the prism array during grinding or polishing, the sawtooth surfaces of the two prism arrays are used for the purpose of avoiding this. They are piled up so as to engage each other and integrated with solid wax. However, with this method, it is difficult to fix the processed surfaces of the two prism arrays in a parallel state. Even if the surfaces to be processed are not in a parallel state, there is no problem when polishing one surface at a time as in the above polishing apparatus, but when the upper and lower surfaces are simultaneously polished using a double-side polishing machine, the surfaces to be processed If they are not parallel to each other, the polishing cloth of the polishing apparatus acts only on a part of the processed surface, and the entire processed surface cannot be uniformly polished. The amount to be processed in the final polishing process is several μm to several tens of μm, and fixing the parallelism between the processed surfaces of the two prism arrays in that order is a very difficult task. is there.

  The present invention solves the above-described conventional problems and provides a polishing method capable of polishing a light-transmitting surface on which a lens of a plate-like glass optical element such as a lens array is not formed with high productivity by using a double-side polishing machine. The purpose is to do.

The method for polishing a plate-like glass optical element according to the present invention comprises a plate portion having a light transmission surface, a substantially rectangular plate-like base portion, and a lens portion having a plurality of small lenses formed on one light transmission surface of the base portion. A method for polishing a sheet glass optical element having two lens apparatus facing each other with the lens parts of the two sheet glass optical elements facing each other and an elastic body sandwiched between the lens parts. It arrange | positions between the rotary grinding | polishing discs which perform, and grind | polishes the light transmissive surface in which the lens part of both of this plate-shaped glass optical element is not formed. Furthermore, the said elastic body consists of a nonwoven fabric, rubber | gum, or a resin foam.
Thereby, since the light transmission surface in which the lens part of the plate-like glass optical element is not formed can be polished using a double-side polishing machine, productivity is good. In addition, by sandwiching the elastic body between the lens portions, an excessive load is not applied to the lens portions due to the load during polishing, so that it is possible to prevent the plate-like glass optical element from being damaged. In addition, the repulsive force (spring action) of the elastic body against the pressure in the thickness direction absorbs the variation in the plate thickness of the plate-like glass optical element, and the entire surface to be processed acts uniformly on the polishing cloth of the polishing apparatus. Therefore, a good work surface can be obtained. Further, since the elastic body is made of non-woven fabric, rubber or resin foam, it can be used multiple times with little settling.

The method for polishing a plate-like glass optical element according to the present invention comprises a plate portion having a light transmission surface, a substantially rectangular plate-like base portion, and a lens portion having a plurality of small lenses formed on one light transmission surface of the base portion. And a flat surface surrounding the periphery of the lens portion formed on the base portion, and a polishing method for a plate-like glass optical element, wherein the lens portions of the two plate-like glass optical elements face each other, A plate that is in contact with the flat surface of the double-sided polishing machine with a support that is in contact with the flat surface and is not in contact with the lens portion interposed between the plate-like glass optical elements. The other light-transmitting surface on which the lens portions of the glass optical element are not formed is polished. Furthermore, the said support body contacts the side end surface of the base part of a plate-shaped glass optical element.
Thereby, since the light transmission surface in which the lens part of the plate-like glass optical element is not formed can be polished using a double-side polishing machine, productivity is good. Further, the flat surface of the plate-like glass optical element is formed by a mold, and the support is disposed in the double-side polishing machine in contact with each flat surface of the plate-like glass optical element facing each other. The positioning accuracy of the parallelism of the processed surface is high, so that the processed surface can be processed uniformly. In addition, since the lens portions that are light transmission surfaces of the plate-like glass optical element are polished in a non-contact state, the lens portions are not scratched during polishing. Further, since the support is in contact with the side end surface of the base portion of the plate-like glass optical element, the two plate-like glass optical elements and the support are integrated, and the plate-like glass optical element is the hole of the carrier during polishing. Never jump out of it.

  According to the method for polishing a plate-like glass optical element of the present invention, a polishing process for a light transmitting surface in which a lens portion of a lens array that has been very poor in productivity is not engraved can be efficiently performed using a double-side polishing machine. It can be processed with high accuracy.

  A lens array that is an embodiment of a plate-like glass optical element will be described.

As shown in FIG. 5, the lens array 1 has a substantially rectangular plate-like outer shape, and the plate surface is a light transmission surface. A lens portion 2 in which a plurality of small lenses are arranged in a matrix is formed on one surface of the plate surface. The light transmission surface on the side where the lens part 2 is not formed is an optically polished plane. Some have a flat surface 5 surrounding the periphery of the lens unit 2 on the base unit 3. Further, as shown in FIG. 6, there is a lens portion 2 that is recessed with respect to a flat surface 5 surrounding the lens portion 2.
The typical size of the lens array used in the liquid crystal projector is described as follows: the lens array is 40 to 70 mm square, the size of the small lens is 3 to 5 mm in length, and the aspect ratio of the lens is 4: 3 to 16: 9. The flat surface around the lens part is about 2 mm on one side. In addition, some lens arrays have a size of about 20 mm to 40 mm.

Such a lens array is used by being incorporated in an illumination optical apparatus such as a liquid crystal projector as follows.
The illumination optical device is provided with a frame made of a metal sheet metal part or molded part having an opening corresponding to the lens part of the lens array. Then, the reference surface of the lens array is brought into contact with the reference surface of the frame, and is fixed to the frame using an adhesive, a leaf spring, or the like. Then, the frame is fixed in the illumination optical device so that the optical axis coincides with other optical components.

  Next, as an embodiment of a method for manufacturing a plate-like glass optical element according to the present invention, the manufacturing process of the lens array for a liquid crystal projector includes glass material production, press molding, grinding / polishing, optical functional film formation, An outline of these steps will be described in the order of cutting.

(Production of glass material)
A lump glass material 17 having a product weight of 2 to 5 times the product weight is prepared in advance. The massive glass material 17 is obtained by casting glass melted by a known method into a mold. It can also be obtained by a method in which the tip of the rod-shaped molded body continuously drawn from the melting furnace is heated and melted and softened and cut into an appropriate length. In addition, the thing of a suitable kind is used for the lump glass raw material 17 according to a use. For example, in the case of a lens array for use in a liquid crystal projector, borosilicate glass having a thermal expansion coefficient of 32 × 10 ⁻⁷ / ° C. is preferably used.

(Press molding)
FIG. 7 schematically shows a state during press molding using a mold. In FIG. 7, the mold includes an upper mold 19 and a lower mold 18, and the upper mold 19 includes a plunger 15 having a matrix lens molding surface and a ring 16 forming a side end surface. The lower mold 18 corresponds to the light transmission surface side where the lens portion 2 is not formed. The lower mold 18 shown in FIG. 7 is an example in which a convex portion having a trapezoidal cross section is formed at the center of each lens array 1. When the massive glass material 17 is placed on the lower mold 18 at the time of press molding, the convex part can sufficiently apply the pressing force applied in the vertical direction to the massive glass material 17, and the convex part surface in the normal direction. The glass softened by the reaction force is spread all over the upper mold 19 to prevent the lack of meat and improve the transfer accuracy. 7 includes the plunger 15 that forms the lens portion 2 and the ring 16 that forms the side end surface of the lens array. However, these may be integrally formed.

  In the press molding step, the massive glass material 17 obtained by the production of the glass material is heated until the required viscosity is obtained. Then, the heated bulk glass material 17 is placed on the lower mold 18 of the mold, the upper mold 19 is lowered and a pressing force is applied, and the mold shape is transferred and press molded. At this time, in order to perform transfer with high accuracy, the upper die 19 is held for a predetermined time while the pressing force is applied. Although the holding time depends on the material of the glass and the product size, it is about ten to several tens of seconds, for example. The upper mold 19 is raised after the glass is cooled. Since an excessive glass material is pressed compared to the product weight, the upper die 19 and the lower die 18 are not in direct contact with each other, and the outer edge of the lower die 18 is not particularly defined. Further, the ring 16 of the upper mold 19 has a shape in which the molded portion is convex and recedes outward. For this reason, during pressing, the glass does not rapidly cool and solidify due to contact with the mold, but is spread inside the mold, and excess gas protrudes out of the mold, reducing flow resistance and increasing transfer accuracy. Obtainable.

(Grinding / polishing)
Next, the light transmitting surface where the lens portion 2 of the press-molded lens array 1 is not formed is ground and polished. First, the lens array 1 is ground using a surface grinder to the vicinity of the side end surface formed by the upper mold. Thereafter, rough polishing is performed by lapping, the thickness is adjusted to a product shape, and finally optical polishing is performed by polishing. The lapping process is performed using an Oscar type single-side polishing machine or a lap master type single-side polishing machine. The polishing process performed in the polishing process will be described in detail later.

(Deposition of optical functional film)
An optical functional film such as an antireflection film or an ultraviolet / infrared reflective film is formed on one or both surfaces of the plate surface, which is a light transmitting surface of the lens array 1, by a method such as vacuum deposition or sputtering.

(Cut)
As shown in FIG. 8, when a plurality of lens arrays 1 are integrally formed by press molding, they are cut into individual lens arrays 1 using a precision cutting device such as a slicer or a dicing saw. Further, as a simple method, cutting by cleaving by making a straight scratch on the surface with a cutter, bending and breaking the surface is also possible. Further, after cutting, the ridge portion of the cut surface may be chamfered as necessary. Note that the optical functional film may be formed or polished after cutting. Further, when the lens array is formed in units of one by press molding, this cutting step is unnecessary.
Further, the bulk glass material prepared in the glass material production process is not limited to the above, and may be obtained by grinding the glass cast with a mold so as to be substantially the same as the product weight. In this case, since a desired product shape can be obtained in the press molding process, there is no need to grind the excess part in the grinding / polishing process, and only the polishing process of the light transmitting surface where the lens part is not formed is performed. Good.
As a result, the lens portion 2 is formed on one surface of the light transmission surface, and the lens array 1 is obtained in which the other surface of the light transmission surface is optically polished.

  Hereinafter, the polishing method used for the polishing process of the sheet glass optical element of the present invention will be described in detail.

  In the polishing method of the present invention, a double-side polishing machine 10 as shown in FIG. 9 is used. The double-side polishing machine 10 sets a carrier 14 having a plurality of holes having an inner diameter slightly larger than the lens array 1 on the lower surface plate 12 to which the polishing cloth 13 is attached, and sets the lens array 1 in the hole of the carrier 14. Thereafter, the upper surface plate 13 with the polishing cloth 13 attached is lowered, pressure is applied, and the upper surface plate 13, the lower surface plate 12, and the carrier 14 are rotated to polish both surfaces while flowing a polishing liquid such as cerium oxide. Here, the carrier 14 is a gear having teeth on the outer periphery, and is arranged at equal intervals between the sun gear 41 positioned inside the carrier 14 and the internal gear 42 positioned outside the carrier. Further, it meshes with the internal gear 42 and makes a planetary motion around the sun gear 41. Then, each lens array 1 contacts and moves evenly with the polishing cloth 13 affixed to the upper and lower surface plates, so that the processing surface is optically polished flat.

In the lens array 1 set in the hole portion of the carrier 14, one light transmitting surface is a lens portion 2 formed by press molding, and the other light transmitting surface is a surface that is roughly polished by lapping.
When the lens array 1 is set in the hole portion of the carrier 14, the lens portions of the two lens arrays 1 are faced to each other, and are overlapped with both processed surfaces facing outward. At this time, since the load acts in the thickness direction of the lens array 1 at the time of polishing in the double-side polishing machine 10, if both lens parts 2 come into contact with each other, the lens array 1 is polished in a deformed state or the lens part 2 is scratched. May occur. Moreover, in order to grind | polish a to-be-processed surface uniformly, both the to-be-processed surfaces and the polishing cloth of an upper and lower surface plate need to act uniformly.
Therefore, in the polishing method of the present invention, the lens array is supported by the method shown in the following examples.

[Example 1]
As shown in FIG. 1, the polishing method of Example 1 is set in the hole of the carrier 14 of the double-side polishing machine 10 with the elastic body 21 sandwiched between both lens portions 2 of the lens array. Polish the work surface. The elastic body 21 is required to have a so-called cushioning property that generates a certain repulsive force when a load is applied. As a material used for the elastic body, felt which is a nonwoven fabric having a single layer structure, various rubbers such as natural rubber and synthetic resin rubber, and resin foam such as urethane sponge can be used. In addition, a combination of these, for example, a base layer made of a three-dimensional non-woven fabric formed of synthetic fibers and synthetic rubber, and a surface layer in which many fine holes are formed in a resin such as polyurethane having excellent wear resistance Suede type composite structures can also be suitably used.

  The outer shape of the elastic body 21 needs to have a dimension that covers at least the lens unit 2. The thickness of the elastic body 21 is required to be at least that the lens portion 2 does not bottom against the load during polishing, but the thickness dimension in rough polishing in the previous process (lapping process) of polishing. For the purpose of absorbing the processing variations, an appropriate thickness can be selected and used. The elastic body 21 is preferably in the form of a sheet with no irregularities, but the thickness near the center is reduced corresponding to the shape of the lens part 2 or through holes are provided so that the lens parts 2 do not contact each other. You may do it.

The lens arrays 1 facing each other may have the same lens part shape, or may have a combination of a lens part 2 having a concave lens part near the center and a lens part having a convex lens part near the center.
When combining lens arrays that have convex lens parts near the center (the trajectory connecting the vertices of small lenses arranged in a matrix is convex), the posture of the lens array 1 facing each other is stable. As such, one lens array 1 may be rotated 90 ° with respect to the other lens array 1.

  As described above, since the elastic body 21 is sandwiched between both lens portions of the lens array 1, both the lens portions 2 can be brought into a non-contact state, so that the setup work for polishing is simple. Further, due to the cushioning effect of the elastic body 21, when the load of the double-side polishing machine 10 acts on the lens array 1, the slight inclination between the processing surface and the upper and lower surface plates is corrected, and both are in uniform contact with each other. The surface is uniformly polished. Further, the lens array 1 is not deformed with respect to the load during polishing, and the surface to be processed is curved without being polished. Further, since the lens portions do not directly contact each other, the lens portion 2 is not scratched.

Next, the polishing methods of Examples 2 to 4 will be described.
In Examples 2 to 4, a lens array 1 having a flat surface 5 surrounding the periphery of the lens unit 2 on the base unit 3 as shown in FIG. This flat surface 5 is on the same light transmission surface side as the lens portion 2 on the plate surface, and is a flat surface formed by a mold simultaneously with the lens portion 2 by press molding. Since the lens array 1 is used in an optical system, accurate positioning is required so that the lens array 1 does not deviate from the optical axis. For this reason, in the lens array 1, the flat surface 5 and the side end surface 4 formed by the metal mold are positioned by contacting the frame of the illumination optical device. The flat surface 5 of the lens array 1 is a surface perpendicular to the thickness direction that is the optical axis.

In the polishing methods of Examples 2 to 4, both lens portions 2 of the lens array 1 are faced to each other, a support that is in contact with the flat surface 5 of each lens array 1 and is not in contact with the lens portion 2 is used as a lens. In a state of being sandwiched between the arrays 1, it is set in the hole portion of the carrier 14 of the double-side polishing machine 10, and both processed surfaces are polished.
The support acts as a spacer that supports the load during polishing so that both lens portions 2 do not come into contact with each other.

  As a material of the support, it is required that processing accuracy is easily obtained and that it is difficult to deform during use. For example, a thermosetting resin such as an epoxy resin or a phenol resin, a hard resin such as polyacetal, polyethylene terephthalate, polybutylene terephthalate, polyimide, or polysulfone is preferably used.

Regarding the shape of the support, there are those shown in the polishing methods of Examples 2 to 4.
[Example 2]
As shown in FIG. 2, the support 31 used in the polishing method of Example 2 is a frame-like body that is in contact with both flat surfaces 5 of the lens array 1. The support 31 has a thickness larger than twice the height of the lens unit 2 (the distance in the thickness direction from the flat surface 5 to the top of the lens unit 2) so that the two lens units do not come into contact with each other. It is necessary.

[Example 3]
As shown in FIG. 3, the support 32 used in the polishing method of the third embodiment is in contact with both flat surfaces 5 of the lens array 1 and has a concave step for preventing both lens portions 2 from contacting each other. The concave step of the support 32 needs to be deep enough that the top of the lens unit 2 does not contact the support 32.

[Example 4]
As shown in FIG. 4, the support 33 used in the polishing method of Example 4 is in contact with both flat surfaces 5 of the lens array 1, and has a concave step to prevent both lens portions 2 from contacting each other. There is a step that contacts the side end face 4 of the array 1. The level difference of the support 33 at the portion that contacts the side end surface 4 of the lens array 1 needs to be deep enough to allow the processing surface of the lens array 1 to protrude so that the support 33 does not come into contact with the polishing cloth 13 of the polishing apparatus. is there. In addition, in FIG. 4, although the concave step is provided in the part corresponding to the lens part 2 of the support body 33, the frame-like body which this part penetrated may be sufficient.

As described above, since the support is brought into contact with each flat surface 5 formed by the mold, the processing surface of the lens array 1 is positioned without being inclined with respect to the polishing cloth 13 of the polishing apparatus, and The processed surface can be uniformly polished. Moreover, since the both lens parts 2 can be made into a non-contact state by inserting a support body between the both lens parts 2 of the lens array 1, the setup operation for grinding | polishing is simple. Further, since the lens portions do not directly contact each other, the lens portion 2 is not scratched. Further, since the support body surrounds the outer periphery of the lens unit 2, the load resistance is high.
Further, the support body is in contact with the side end surface 4 of the lens array 1 so that the two lens arrays 1 and the support body are integrated, and the lens array 1 protrudes from the hole of the carrier 14 during polishing. It is easy to handle when attaching to and detaching from the double-side polishing machine 10.

  In each of the embodiments described above, the lens array 1 is used as a plate-like glass optical element. Is possible. Further, it can also be used for a polishing method for a lens array obtained by integrally press-molding a large number of lenses before being finally cut into a single lens, or a similar prism array. Further, the shape of the plate-like glass optical element can be applied to a shape in which the lens portion 2 is recessed from the flat surface 5 as shown in FIG.

  According to the polishing method for a plate-like glass optical element of the present invention, it is possible to efficiently and accurately process a plurality of lens arrays by using a double-side polishing machine.

In the grinding | polishing method of Example 1, it is typical sectional drawing and the perspective view of an elastic body which show the arrangement | positioning state of the lens array in a double-side polisher. In the grinding | polishing method of Example 2, it is a typical sectional view which shows the arrangement | positioning state of the lens array in a double-side polisher, and a perspective view of a support body. In the grinding | polishing method of Example 3, it is a typical sectional view which shows the arrangement | positioning state of the lens array in a double-side polisher, and a perspective view of a support body. In the grinding | polishing method of Example 4, it is a typical sectional view which shows the arrangement | positioning state of the lens array in a double-side polisher, and a perspective view of a support body. It is the typical top view and typical sectional view of a lens array. It is the typical top view and typical sectional view of a lens array. It is the figure which showed typically the state of the press molding at the time of performing press molding using a metal mold | die. It is the figure which showed obtaining the lens array of 1 sheet by cut | disconnecting the lens array of 4 integrally molded. It is the figure which showed typically the arrangement | positioning and cross section of the outline | summary of a double-side polisher, and the carrier pinched | interposed into an up-and-down rotary disk.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Lens array (plate glass optical element), 2 ... Lens part, 3 ... Base part, 4 ... Side end surface, 5 ... Flat surface, 10 ... Double-side polisher, 11 ... Upper surface plate, 12 ... Lower surface plate, 13 ... polishing cloth, 14 ... carrier, 15 ... plunger, 16 ... ring, 17 ... lump glass material, 18 ... lower mold, 19 ... upper mold, 21 ... elastic body, 31 ... support, 32 ... support, 33 ... support Body 41 ... sun gear 42 ... internal gear.

Claims (4)

A polishing method for a plate-like glass optical element having a plate surface as a light transmission surface, a base portion having a substantially rectangular plate shape, and a lens portion in which a plurality of small lenses are formed on one light transmission surface of the base portion. And
Two plate-like glass optical elements are arranged so that the lens parts face each other, and an elastic body is sandwiched between the lens parts, and is disposed between opposing rotary polishing disks of a double-side polishing machine. A polishing method for a plate-like glass optical element, comprising polishing a light transmitting surface on which both lens portions of the glass optical element are not formed.   The said elastic body consists of a nonwoven fabric, rubber | gum, or a resin foam, The polishing method of the plate-shaped glass optical element of Claim 1 characterized by the above-mentioned. The plate surface is a light transmission surface, a substantially rectangular plate-shaped base portion, a lens portion in which a plurality of small lenses are formed on one light transmission surface of the base portion, and the periphery of the lens portion formed on the base portion A flat surface surrounding the plate-like glass optical element,
Double-side polisher with lens parts of two sheet-like glass optical elements facing each other, abutting each flat surface, and a non-contacting support member sandwiched between the sheet-like glass optical elements A polishing method for a plate-like glass optical element, comprising: a polishing plate disposed between opposite rotating polishing plates, wherein a light transmitting surface on which both lens portions of the plate-like glass optical element are not formed is polished. .   4. The method for polishing a plate-like glass optical element according to claim 3, wherein the support is in contact with a side end surface of the base portion.

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