JP2008140885A5

JP2008140885A5 -

Info

Publication number: JP2008140885A5
Application number: JP2006324125A
Authority: JP
Filing date: 2006-11-30
Publication date: 2010-01-28
Anticipated expiration: 2026-11-30

Claims

A solar cell panel manufacturing system for manufacturing a solar cell panel having a translucent substrate and a solar cell film formed on a main surface of the substrate and divided into a plurality of strip-shaped power generation cells by a cell dividing line There,
A transparent conductive layer forming apparatus for forming a transparent conductive layer on the main surface of the substrate;
A laser etching apparatus for a transparent conductive layer that performs laser etching of the transparent conductive layer in correspondence with the power generation cell;
A photoelectric conversion layer forming apparatus for forming a photoelectric conversion layer on the laser-etched substrate of the transparent conductive layer;
A laser etching device for a photoelectric conversion layer that performs laser etching of the photoelectric conversion layer in correspondence with the power generation cell;
A back electrode film forming apparatus for forming a back electrode film on the laser-etched substrate of the photoelectric conversion layer;
A laser etching device for a back electrode that performs laser etching of the back electrode film in correspondence with the power generation cell;
A substrate cleaning section having a plurality of substrate cleaners for cleaning the substrate by spraying cleaning water;
Comprising
The substrate cleaning unit
A first substrate cleaner disposed between the transparent conductive layer forming apparatus and the transparent conductive layer laser etching apparatus;
A second substrate cleaning device disposed between the back electrode film forming apparatus and the back electrode laser etching apparatus;
Have
The temperature difference between the substrate average temperature immediately before being introduced into the photoelectric conversion layer laser etching apparatus, the cleaning water temperature of the first substrate cleaning device, and the cleaning water temperature of the second substrate cleaning device is ± 10 ° C. or less. A solar cell panel manufacturing system.

A solar cell panel manufacturing system according to claim 1,
A cooling part for cooling the substrate after the photoelectric conversion layer is formed and before being introduced into the laser etching apparatus for photoelectric conversion layer;
A temperature sensor for a first substrate cleaning device that measures a cleaning water temperature of the first substrate cleaning device;
A temperature sensor for a second substrate cleaning device for measuring a cleaning water temperature of the second substrate cleaning device;
Comprising
Wherein even after the cooling section, the a substrate average temperature immediately before being put into the laser etching device for the photoelectric conversion layer, and the cleaning water temperature of which is measured by the first substrate cleaning dexterity temperature sensor, the second substrate cleaning dexterity so that the temperature difference between the wash water temperature measured by the temperature sensor below ± 10 ° C., solar panel manufacturing system for managing the substrate temperature of the cooling section.

A solar cell panel manufacturing system according to claim 2,
Furthermore,
A control device,
Based on the measurement results of the temperature sensor for the first substrate cleaner and the temperature sensor for the second substrate cleaner, the control device determines whether the cleaning water temperature of the first substrate cleaner and the second substrate cleaner is the photoelectric sensor. The solar cell panel manufacturing system which controls operation | movement of the said cooling part so that it may become less than +/- 10 degreeC with the board | substrate average temperature immediately before thrown into the laser etching apparatus for conversion layers.

A solar cell panel manufacturing system according to claim 1,
Furthermore,
A photoelectric conversion layer etching temperature sensor for measuring the substrate temperature immediately before being introduced into the photoelectric conversion layer laser etching device;
A control device;
Comprising
The substrate cleaning unit
A first temperature controller for managing a cleaning water temperature of the first substrate cleaner;
A second temperature controller for managing a cleaning water temperature of the second substrate cleaner;
Have
Based on the measurement result of the temperature sensor for photoelectric conversion layer etching , the control device is configured so that the cleaning water temperature of the first substrate cleaning device and the second substrate cleaning device is the measurement result of the temperature sensor for photoelectric conversion layer etching. The solar cell panel manufacturing system which controls operation | movement of the said 1st temperature controller and the said 2nd temperature controller so that it may become less than +/- 10 degreeC with the average temperature of.

A solar cell panel manufacturing system according to claim 1,
The substrate cleaning unit further includes:
A third substrate cleaning device disposed between the photoelectric conversion layer deposition apparatus and the photoelectric conversion layer laser etching apparatus;
The solar cell panel in which the temperature difference between the cleaning water temperature of the third substrate cleaner, the cleaning water temperature of the first substrate cleaner, and the cleaning water temperature of the second substrate cleaner is ± 5 ° C. or less. Manufacturing system.

The solar cell panel manufacturing system according to claim 5,
A photoelectric conversion layer etching temperature sensor for measuring the substrate temperature immediately before being introduced into the photoelectric conversion layer laser etching device;
A control device;
Comprising
The substrate cleaning unit
A first temperature controller for managing a cleaning water temperature of the first substrate cleaner;
A second temperature controller for managing a cleaning water temperature of the second substrate cleaner;
A third temperature controller for managing a cleaning water temperature of the third substrate cleaner;
Have
Based on the measurement result of the temperature sensor for photoelectric conversion layer etching , the control device is configured so that cleaning water temperatures of the first substrate cleaner, the second substrate cleaner, and the third substrate cleaner are the measured average temperature to be within ± 10 ℃ results, solar panel manufacturing system for controlling the operation of the first temperature controller and the second temperature controller and the third temperature controller.

A solar cell panel manufacturing system according to any one of claims 1 to 6,
In the solar cell panel, the solar cell film is formed on the main surface of the translucent substrate, and at least part of the periphery of the substrate near the substrate end on the main surface is the solar cell film before the laminating process. It is a removed area of
Each of the plurality of substrate cleaners has a transport roller,
The transport roller transports the substrate as a transport direction in a direction substantially parallel to the direction in which the cell division line is formed,
The transport rollers are arranged on both the main surface side of the substrate and the opposite surface side of the main surface so as to sandwich the substrate when transporting the substrate, and on the main surface side the removal region or the removal scheduled A solar cell panel manufacturing system that contacts in a region and does not contact in a region where the solar cell film is provided.

A solar cell panel manufacturing system according to claim 7,
Each of the substrate cleaners is at least
A high-pressure shower section for cleaning with high-pressure water;
A direct water rinse section for cleaning with pure water;
An air knife for draining water,
Have
The high-pressure shower unit has a high-pressure shower nozzle,
The high-pressure shower nozzle is provided such that high-pressure water is sprayed onto the substrate at an angle inclined toward the upstream side of conveyance,
The high-pressure shower nozzle is a solar cell panel manufacturing system provided such that an angle formed by a high-pressure water jetting direction and a surface perpendicular to the transport direction is 10 ° or more and 30 ° or less.

A solar cell panel manufacturing system according to claim 8,
The control device is a solar cell panel manufacturing system in which the high-pressure shower nozzle is swung in a direction substantially perpendicular to the substrate transport direction.

A solar cell panel manufacturing system according to any one of claims 7 to 9,
Each of the substrate cleaners further includes
Before the high-pressure shower unit, a roll brush unit that performs cleaning with a roll brush, an upstream unit that is provided on the upstream side of the roll brush unit, and exposes the substrate to a mist atmosphere of cleaning water,
Have
The said run-up part is a solar cell panel manufacturing system which has the space for 2 sheets or less by 1/2 or more of the conveyance direction length of the said board | substrate.

A solar cell panel manufacturing system according to any one of claims 1 to 10,
Furthermore,
It has a natural drying section,
The natural drying section is a section for naturally drying the substrate until the substrate unloaded from each substrate cleaner is loaded into the next downstream processing apparatus. system.

A solar cell panel manufacturing method for manufacturing a solar cell panel having a substrate and a solar cell film formed on a main surface of the substrate and divided into a plurality of strip-shaped power generation cells by a cell dividing line,
A transparent conductive layer forming step of forming a transparent conductive layer on the main surface of the substrate;
A transparent conductive layer etching step of laser etching the transparent conductive layer in correspondence with the power generation cell;
A photoelectric conversion layer forming step of forming a photoelectric conversion layer on the transparent conductive layer;
A photoelectric conversion layer etching step of performing laser etching on the photoelectric conversion layer in correspondence with the power generation cell;
A back electrode film forming step of forming a back electrode film on the photoelectric conversion layer;
A back electrode film etching step in which the back electrode film is laser-etched corresponding to the power generation cell;
A plurality of cleaning steps for cleaning the substrate by spraying cleaning water between each step;
Comprising
The multiple washing steps include:
A first cleaning step that is performed immediately before the transparent conductive layer etching step and that cleans the substrate at a cleaning water temperature within ± 10 ° C. with respect to the average substrate temperature immediately before the photoelectric conversion layer etching step;
A second cleaning step that is performed immediately before the back electrode film etching step and that cleans the substrate at a cleaning water temperature within ± 10 ° C. with respect to the average substrate temperature immediately before the photoelectric conversion layer etching step;
A method for manufacturing a solar cell panel.

A solar panel manufacturing method of claim 1 2,
In the solar cell panel, the solar cell film is formed on the main surface of the translucent substrate, and at least part of the periphery of the substrate near the substrate end on the main surface is the solar cell film before the laminating process. It is a removed area of
In each of the plurality of cleaning steps, the substrate is cleaned while being transported by a transport roller, with the transport direction being a direction substantially parallel to the direction in which the cell division line is formed,
The transport rollers are arranged on both the main surface side of the substrate and the opposite surface side of the main surface so as to sandwich the substrate,
When transporting the substrate in each of the cleaning steps, the transport roller is in contact with the removal region or the surface opposite to the main surface and transports so as not to contact in the region where the solar cell film is provided. Method.

A solar cell film formed on a main surface of the substrate, divided into a plurality of strip-shaped power generation cells by a cell dividing line, and provided on at least a part of the main surface of the substrate; In a solar cell panel manufacturing system for manufacturing a solar cell panel having a removal region from which a film has been removed, the substrate to be processed is cleaned ,
The substrate is cleaned while being transported by a transport roller with a direction substantially parallel to the direction in which the cell division lines are formed as transport direction, and the transport roller sandwiches the substrate when transporting the substrate. , Disposed on both the main surface side of the substrate and the opposite surface side of the main surface, contacting on the main surface side in the removal region or the region to be removed, and not contacting on the region where the solar cell film is provided A substrate cleaner,
A high-pressure shower section for cleaning with high-pressure water;
A direct water rinse section for cleaning with pure water;
An air knife for draining water,
Comprising
The high-pressure shower unit has a high-pressure shower nozzle,
The high-pressure shower nozzle is provided such that high-pressure water is sprayed onto the substrate at an angle inclined toward the upstream side of conveyance.
The high-pressure shower nozzle is a substrate cleaning device provided so that an angle formed between a jet direction of high-pressure water and a surface perpendicular to the transport direction is 10 ° or more and 30 ° or less.

The substrate cleaner according to claim 14 , comprising:
The high pressure shower nozzle is a substrate cleaning device that swings in a direction substantially orthogonal to the substrate transport direction .

The substrate cleaner according to claim 14 or 15 ,
Furthermore,
Before the high-pressure shower part, a roll brush part for cleaning with a roll brush,
Provided on the upstream side of the roll brush part, and a running part for exposing the substrate to a mist atmosphere of cleaning water;
Comprising
The runner is a substrate cleaner having a space of 1/2 or more of the length in the conveyance direction of the substrate and 2 or less.

The substrate cleaner according to any one of claims 14 to 16 , comprising:
Furthermore,
A substrate cleaner having a natural drying section which is a section for naturally drying the substrate before it is carried into the next downstream processing apparatus.