JP2008130767A - 振動体の製造方法、振動体および振動型駆動装置 - Google Patents

振動体の製造方法、振動体および振動型駆動装置 Download PDF

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Publication number
JP2008130767A
JP2008130767A JP2006313367A JP2006313367A JP2008130767A JP 2008130767 A JP2008130767 A JP 2008130767A JP 2006313367 A JP2006313367 A JP 2006313367A JP 2006313367 A JP2006313367 A JP 2006313367A JP 2008130767 A JP2008130767 A JP 2008130767A
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Japan
Prior art keywords
elastic body
manufacturing
vibrating body
energy conversion
electromechanical energy
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Pending
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JP2006313367A
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English (en)
Japanese (ja)
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JP2008130767A5 (enExample
Inventor
Takuji Okamoto
卓治 岡本
Yoshibumi Nishimoto
義文 西本
Eiichi Yanagi
栄一 柳
Takasumi Ishida
孝純 石田
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Canon Inc
Canon Precision Inc
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Canon Inc
Canon Precision Inc
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Application filed by Canon Inc, Canon Precision Inc filed Critical Canon Inc
Priority to JP2006313367A priority Critical patent/JP2008130767A/ja
Publication of JP2008130767A publication Critical patent/JP2008130767A/ja
Publication of JP2008130767A5 publication Critical patent/JP2008130767A5/ja
Pending legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP2006313367A 2006-11-20 2006-11-20 振動体の製造方法、振動体および振動型駆動装置 Pending JP2008130767A (ja)

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JP2006313367A JP2008130767A (ja) 2006-11-20 2006-11-20 振動体の製造方法、振動体および振動型駆動装置

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JP2008130767A true JP2008130767A (ja) 2008-06-05
JP2008130767A5 JP2008130767A5 (enExample) 2010-01-07

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011004052A (ja) * 2009-06-17 2011-01-06 Nec Corp 触覚情報装置及び、それを用いた電子機器
CN106253739A (zh) * 2015-06-05 2016-12-21 佳能株式会社 适于在磁场环境中使用的振动致动器以及医疗系统
CN106253740A (zh) * 2015-06-05 2016-12-21 佳能株式会社 容易进行导电性检查的振动致动器
US20210305493A1 (en) * 2020-03-31 2021-09-30 Mitsubishi Heavy Industries, Ltd. Method of manufacturing dielectric film

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186572A (ja) * 1987-01-28 1988-08-02 Canon Inc 超音波モ−タ−
JPS63253880A (ja) * 1987-04-07 1988-10-20 Canon Inc 動力発生装置
JPH02281769A (ja) * 1989-04-24 1990-11-19 Oki Electric Ind Co Ltd 多孔質圧電材料の製造方法
JPH05336597A (ja) * 1992-05-28 1993-12-17 Japan Vilene Co Ltd 複合圧電体及びその製造方法
JPH07231684A (ja) * 1994-02-21 1995-08-29 Kanagawa Kagaku Gijutsu Akad 超音波マイクロモータ及びその固定子の製造方法
JPH11146673A (ja) * 1997-11-10 1999-05-28 Nikon Corp 振動アクチュエータ
JPH11330577A (ja) * 1998-05-13 1999-11-30 Seiko Instruments Inc 圧電アクチュエータ
JP2000200930A (ja) * 1998-10-26 2000-07-18 Seiko Instruments Inc 圧電体装置及びその製造方法
JP2006173249A (ja) * 2004-12-14 2006-06-29 Fuji Photo Film Co Ltd 圧電アクチュエータ及びその製造方法並びに液体吐出ヘッド
JP2006179856A (ja) * 2004-11-25 2006-07-06 Fuji Electric Holdings Co Ltd 絶縁基板および半導体装置
JP2006297915A (ja) * 2005-03-22 2006-11-02 Brother Ind Ltd 圧電アクチュエータ、インクジェットヘッドおよびそれらの製造方法
JP2006298747A (ja) * 2005-03-22 2006-11-02 Fuji Photo Film Co Ltd 配向膜の製造方法、及び、液体吐出ヘッドの製造方法
JP2007158167A (ja) * 2005-12-07 2007-06-21 Nec Tokin Corp 超音波モータ素子およびその製造方法

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63186572A (ja) * 1987-01-28 1988-08-02 Canon Inc 超音波モ−タ−
JPS63253880A (ja) * 1987-04-07 1988-10-20 Canon Inc 動力発生装置
JPH02281769A (ja) * 1989-04-24 1990-11-19 Oki Electric Ind Co Ltd 多孔質圧電材料の製造方法
JPH05336597A (ja) * 1992-05-28 1993-12-17 Japan Vilene Co Ltd 複合圧電体及びその製造方法
JPH07231684A (ja) * 1994-02-21 1995-08-29 Kanagawa Kagaku Gijutsu Akad 超音波マイクロモータ及びその固定子の製造方法
JPH11146673A (ja) * 1997-11-10 1999-05-28 Nikon Corp 振動アクチュエータ
JPH11330577A (ja) * 1998-05-13 1999-11-30 Seiko Instruments Inc 圧電アクチュエータ
JP2000200930A (ja) * 1998-10-26 2000-07-18 Seiko Instruments Inc 圧電体装置及びその製造方法
JP2006179856A (ja) * 2004-11-25 2006-07-06 Fuji Electric Holdings Co Ltd 絶縁基板および半導体装置
JP2006173249A (ja) * 2004-12-14 2006-06-29 Fuji Photo Film Co Ltd 圧電アクチュエータ及びその製造方法並びに液体吐出ヘッド
JP2006297915A (ja) * 2005-03-22 2006-11-02 Brother Ind Ltd 圧電アクチュエータ、インクジェットヘッドおよびそれらの製造方法
JP2006298747A (ja) * 2005-03-22 2006-11-02 Fuji Photo Film Co Ltd 配向膜の製造方法、及び、液体吐出ヘッドの製造方法
JP2007158167A (ja) * 2005-12-07 2007-06-21 Nec Tokin Corp 超音波モータ素子およびその製造方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011004052A (ja) * 2009-06-17 2011-01-06 Nec Corp 触覚情報装置及び、それを用いた電子機器
CN106253739A (zh) * 2015-06-05 2016-12-21 佳能株式会社 适于在磁场环境中使用的振动致动器以及医疗系统
CN106253740A (zh) * 2015-06-05 2016-12-21 佳能株式会社 容易进行导电性检查的振动致动器
CN106253739B (zh) * 2015-06-05 2019-07-02 佳能株式会社 适于在磁场环境中使用的振动致动器以及医疗系统
US10363105B2 (en) 2015-06-05 2019-07-30 Canon Kabushiki Kaisha Vibration actuator suitable for use in magnetic field environment and medical system
US10396270B2 (en) 2015-06-05 2019-08-27 Canon Kabushiki Kaisha Vibration actuator that is easy in conduction inspection
CN106253740B (zh) * 2015-06-05 2019-10-18 佳能株式会社 容易进行导电性检查的振动致动器
US20210305493A1 (en) * 2020-03-31 2021-09-30 Mitsubishi Heavy Industries, Ltd. Method of manufacturing dielectric film

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