JP2008115382A - 封止用エポキシ樹脂組成物及び電子部品装置 - Google Patents
封止用エポキシ樹脂組成物及び電子部品装置 Download PDFInfo
- Publication number
- JP2008115382A JP2008115382A JP2007265710A JP2007265710A JP2008115382A JP 2008115382 A JP2008115382 A JP 2008115382A JP 2007265710 A JP2007265710 A JP 2007265710A JP 2007265710 A JP2007265710 A JP 2007265710A JP 2008115382 A JP2008115382 A JP 2008115382A
- Authority
- JP
- Japan
- Prior art keywords
- group
- epoxy resin
- benzoquinone
- reaction product
- addition reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920000647 polyepoxide Polymers 0.000 title claims abstract description 166
- 239000003822 epoxy resin Substances 0.000 title claims abstract description 160
- 238000007789 sealing Methods 0.000 title claims abstract description 80
- 239000000203 mixture Substances 0.000 title claims abstract description 69
- 150000001875 compounds Chemical class 0.000 claims abstract description 61
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 50
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 48
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims abstract description 44
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 37
- 239000004593 Epoxy Substances 0.000 claims abstract description 25
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 23
- 125000004432 carbon atom Chemical group C* 0.000 claims description 66
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 52
- 239000005011 phenolic resin Substances 0.000 claims description 36
- 125000003545 alkoxy group Chemical group 0.000 claims description 33
- 229920005989 resin Polymers 0.000 claims description 30
- 239000011347 resin Substances 0.000 claims description 30
- 239000011256 inorganic filler Substances 0.000 claims description 8
- 229910003475 inorganic filler Inorganic materials 0.000 claims description 8
- 125000000962 organic group Chemical group 0.000 claims description 6
- 125000000524 functional group Chemical group 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 6
- 238000000034 method Methods 0.000 abstract description 33
- 230000008859 change Effects 0.000 abstract description 17
- 230000008569 process Effects 0.000 abstract description 8
- 238000007259 addition reaction Methods 0.000 description 216
- 239000007795 chemical reaction product Substances 0.000 description 211
- -1 2-ethylhexyl group Chemical group 0.000 description 148
- AZQWKYJCGOJGHM-UHFFFAOYSA-N para-benzoquinone Natural products O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 101
- VTWDKFNVVLAELH-UHFFFAOYSA-N 2-methylcyclohexa-2,5-diene-1,4-dione Chemical compound CC1=CC(=O)C=CC1=O VTWDKFNVVLAELH-UHFFFAOYSA-N 0.000 description 55
- NADHCXOXVRHBHC-UHFFFAOYSA-N 2,3-dimethoxycyclohexa-2,5-diene-1,4-dione Chemical compound COC1=C(OC)C(=O)C=CC1=O NADHCXOXVRHBHC-UHFFFAOYSA-N 0.000 description 43
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 42
- AIACLXROWHONEE-UHFFFAOYSA-N 2,3-dimethylcyclohexa-2,5-diene-1,4-dione Chemical compound CC1=C(C)C(=O)C=CC1=O AIACLXROWHONEE-UHFFFAOYSA-N 0.000 description 38
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Natural products P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 38
- 229940005561 1,4-benzoquinone Drugs 0.000 description 37
- RMMPZDDLWLALLJ-UHFFFAOYSA-N Thermophillin Chemical compound COC1=CC(=O)C(OC)=CC1=O RMMPZDDLWLALLJ-UHFFFAOYSA-N 0.000 description 36
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 33
- 125000000217 alkyl group Chemical group 0.000 description 31
- 150000002430 hydrocarbons Chemical group 0.000 description 31
- MYKLQMNSFPAPLZ-UHFFFAOYSA-N 2,5-dimethylcyclohexa-2,5-diene-1,4-dione Chemical compound CC1=CC(=O)C(C)=CC1=O MYKLQMNSFPAPLZ-UHFFFAOYSA-N 0.000 description 30
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 25
- 125000000547 substituted alkyl group Chemical group 0.000 description 25
- 239000000047 product Substances 0.000 description 24
- 125000003118 aryl group Chemical group 0.000 description 23
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 23
- RLQZIECDMISZHS-UHFFFAOYSA-N 2-phenylcyclohexa-2,5-diene-1,4-dione Chemical compound O=C1C=CC(=O)C(C=2C=CC=CC=2)=C1 RLQZIECDMISZHS-UHFFFAOYSA-N 0.000 description 21
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 21
- ZEGDFCCYTFPECB-UHFFFAOYSA-N 2,3-dimethoxy-1,4-benzoquinone Natural products C1=CC=C2C(=O)C(OC)=C(OC)C(=O)C2=C1 ZEGDFCCYTFPECB-UHFFFAOYSA-N 0.000 description 20
- ZZYASVWWDLJXIM-UHFFFAOYSA-N 2,5-di-tert-Butyl-1,4-benzoquinone Chemical compound CC(C)(C)C1=CC(=O)C(C(C)(C)C)=CC1=O ZZYASVWWDLJXIM-UHFFFAOYSA-N 0.000 description 19
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 19
- ZJKWJHONFFKJHG-UHFFFAOYSA-N 2-Methoxy-1,4-benzoquinone Chemical compound COC1=CC(=O)C=CC1=O ZJKWJHONFFKJHG-UHFFFAOYSA-N 0.000 description 18
- NCCTVAJNFXYWTM-UHFFFAOYSA-N 2-tert-butylcyclohexa-2,5-diene-1,4-dione Chemical compound CC(C)(C)C1=CC(=O)C=CC1=O NCCTVAJNFXYWTM-UHFFFAOYSA-N 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 17
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 17
- 239000000758 substrate Substances 0.000 description 17
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 16
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 16
- 125000003710 aryl alkyl group Chemical group 0.000 description 15
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 15
- RMZAYIKUYWXQPB-UHFFFAOYSA-N trioctylphosphane Chemical compound CCCCCCCCP(CCCCCCCC)CCCCCCCC RMZAYIKUYWXQPB-UHFFFAOYSA-N 0.000 description 15
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 14
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 14
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 13
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 13
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 13
- VPLLTGLLUHLIHA-UHFFFAOYSA-N dicyclohexyl(phenyl)phosphane Chemical compound C1CCCCC1P(C=1C=CC=CC=1)C1CCCCC1 VPLLTGLLUHLIHA-UHFFFAOYSA-N 0.000 description 13
- GAZSZCWRMSVQPJ-UHFFFAOYSA-N (4-methoxyphenyl)-diphenylphosphane Chemical compound C1=CC(OC)=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 GAZSZCWRMSVQPJ-UHFFFAOYSA-N 0.000 description 12
- QJIMTLTYXBDJFC-UHFFFAOYSA-N (4-methylphenyl)-diphenylphosphane Chemical compound C1=CC(C)=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 QJIMTLTYXBDJFC-UHFFFAOYSA-N 0.000 description 12
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 12
- ZXKWUYWWVSKKQZ-UHFFFAOYSA-N cyclohexyl(diphenyl)phosphane Chemical compound C1CCCCC1P(C=1C=CC=CC=1)C1=CC=CC=C1 ZXKWUYWWVSKKQZ-UHFFFAOYSA-N 0.000 description 12
- 238000002156 mixing Methods 0.000 description 12
- WLPUWLXVBWGYMZ-UHFFFAOYSA-N tricyclohexylphosphine Chemical compound C1CCCCC1P(C1CCCCC1)C1CCCCC1 WLPUWLXVBWGYMZ-UHFFFAOYSA-N 0.000 description 12
- WXMZPPIDLJRXNK-UHFFFAOYSA-N butyl(diphenyl)phosphane Chemical compound C=1C=CC=CC=1P(CCCC)C1=CC=CC=C1 WXMZPPIDLJRXNK-UHFFFAOYSA-N 0.000 description 11
- NKVOVJOFRHVNKV-UHFFFAOYSA-N dicyclohexyl-(4-methylphenyl)phosphane Chemical compound C1=CC(C)=CC=C1P(C1CCCCC1)C1CCCCC1 NKVOVJOFRHVNKV-UHFFFAOYSA-N 0.000 description 11
- 125000001664 diethylamino group Chemical group [H]C([H])([H])C([H])([H])N(*)C([H])([H])C([H])([H])[H] 0.000 description 11
- HXUARCOTWDKZOU-UHFFFAOYSA-N dioctyl(phenyl)phosphane Chemical compound CCCCCCCCP(CCCCCCCC)C1=CC=CC=C1 HXUARCOTWDKZOU-UHFFFAOYSA-N 0.000 description 11
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 11
- KEJVUXJFDYXFSK-UHFFFAOYSA-N octyl(diphenyl)phosphane Chemical compound C=1C=CC=CC=1P(CCCCCCCC)C1=CC=CC=C1 KEJVUXJFDYXFSK-UHFFFAOYSA-N 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- CEOZOEAOJLFZND-UHFFFAOYSA-N (4-methylphenyl)-dioctylphosphane Chemical compound CCCCCCCCP(CCCCCCCC)C1=CC=C(C)C=C1 CEOZOEAOJLFZND-UHFFFAOYSA-N 0.000 description 10
- 239000007983 Tris buffer Substances 0.000 description 10
- MHFBYODDORCOHT-UHFFFAOYSA-N butyl-bis(4-methylphenyl)phosphane Chemical compound C=1C=C(C)C=CC=1P(CCCC)C1=CC=C(C)C=C1 MHFBYODDORCOHT-UHFFFAOYSA-N 0.000 description 10
- ADHYEWYQOIXXJV-UHFFFAOYSA-N cyclohexyl-bis(4-methylphenyl)phosphane Chemical compound C1=CC(C)=CC=C1P(C=1C=CC(C)=CC=1)C1CCCCC1 ADHYEWYQOIXXJV-UHFFFAOYSA-N 0.000 description 10
- ORICWOYODJGJMY-UHFFFAOYSA-N dibutyl(phenyl)phosphane Chemical compound CCCCP(CCCC)C1=CC=CC=C1 ORICWOYODJGJMY-UHFFFAOYSA-N 0.000 description 10
- IRUZBSXYWMIFPP-UHFFFAOYSA-N dibutyl-(4-methylphenyl)phosphane Chemical compound CCCCP(CCCC)C1=CC=C(C)C=C1 IRUZBSXYWMIFPP-UHFFFAOYSA-N 0.000 description 10
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 10
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 10
- 239000012778 molding material Substances 0.000 description 10
- 125000001624 naphthyl group Chemical group 0.000 description 10
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 9
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 9
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 9
- 238000000465 moulding Methods 0.000 description 9
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 9
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 9
- 239000002994 raw material Substances 0.000 description 9
- WXAZIUYTQHYBFW-UHFFFAOYSA-N tris(4-methylphenyl)phosphane Chemical compound C1=CC(C)=CC=C1P(C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 WXAZIUYTQHYBFW-UHFFFAOYSA-N 0.000 description 9
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 8
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 8
- 0 CO*c1c(cccc2)c2c(*)c2c1CC=CC2 Chemical compound CO*c1c(cccc2)c2c(*)c2c1CC=CC2 0.000 description 8
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 8
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 8
- 125000004054 acenaphthylenyl group Chemical group C1(=CC2=CC=CC3=CC=CC1=C23)* 0.000 description 8
- HXGDTGSAIMULJN-UHFFFAOYSA-N acetnaphthylene Natural products C1=CC(C=C2)=C3C2=CC=CC3=C1 HXGDTGSAIMULJN-UHFFFAOYSA-N 0.000 description 8
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 8
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 8
- 125000003944 tolyl group Chemical group 0.000 description 8
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 8
- 125000006267 biphenyl group Chemical group 0.000 description 7
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 7
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 125000003277 amino group Chemical group 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 125000000582 cycloheptyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 6
- 125000000596 cyclohexenyl group Chemical group C1(=CCCCC1)* 0.000 description 6
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 6
- 125000002433 cyclopentenyl group Chemical group C1(=CCCC1)* 0.000 description 6
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 6
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 6
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 6
- DGQOCLATAPFASR-UHFFFAOYSA-N tetrahydroxy-1,4-benzoquinone Chemical compound OC1=C(O)C(=O)C(O)=C(O)C1=O DGQOCLATAPFASR-UHFFFAOYSA-N 0.000 description 6
- 125000003342 alkenyl group Chemical group 0.000 description 5
- 239000004305 biphenyl Substances 0.000 description 5
- 235000010290 biphenyl Nutrition 0.000 description 5
- 125000006165 cyclic alkyl group Chemical group 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 4
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- PJANXHGTPQOBST-VAWYXSNFSA-N Stilbene Natural products C=1C=CC=CC=1/C=C/C1=CC=CC=C1 PJANXHGTPQOBST-VAWYXSNFSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 4
- 239000013065 commercial product Substances 0.000 description 4
- 239000007822 coupling agent Substances 0.000 description 4
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 4
- 239000003063 flame retardant Substances 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000004898 kneading Methods 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 229920003986 novolac Polymers 0.000 description 4
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 229920005573 silicon-containing polymer Polymers 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 4
- 235000021286 stilbenes Nutrition 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 229910052717 sulfur Inorganic materials 0.000 description 4
- 125000004434 sulfur atom Chemical group 0.000 description 4
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 4
- KYLUAQBYONVMCP-UHFFFAOYSA-N (2-methylphenyl)phosphane Chemical compound CC1=CC=CC=C1P KYLUAQBYONVMCP-UHFFFAOYSA-N 0.000 description 3
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 3
- 229920000877 Melamine resin Polymers 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- UMHKOAYRTRADAT-UHFFFAOYSA-N [hydroxy(octoxy)phosphoryl] octyl hydrogen phosphate Chemical compound CCCCCCCCOP(O)(=O)OP(O)(=O)OCCCCCCCC UMHKOAYRTRADAT-UHFFFAOYSA-N 0.000 description 3
- 238000002835 absorbance Methods 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 125000003172 aldehyde group Chemical group 0.000 description 3
- 125000002723 alicyclic group Chemical group 0.000 description 3
- 125000002529 biphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C12)* 0.000 description 3
- 238000011088 calibration curve Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000013329 compounding Methods 0.000 description 3
- 238000006482 condensation reaction Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 150000004780 naphthols Chemical class 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
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- YZPARGTXKUIJLJ-UHFFFAOYSA-N n-[3-[dimethoxy(methyl)silyl]propyl]aniline Chemical compound CO[Si](C)(OC)CCCNC1=CC=CC=C1 YZPARGTXKUIJLJ-UHFFFAOYSA-N 0.000 description 1
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
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- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- IYMSIPPWHNIMGE-UHFFFAOYSA-N silylurea Chemical compound NC(=O)N[SiH3] IYMSIPPWHNIMGE-UHFFFAOYSA-N 0.000 description 1
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- 125000001424 substituent group Chemical group 0.000 description 1
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- 150000003505 terpenes Chemical class 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
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- 229910052718 tin Inorganic materials 0.000 description 1
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- 229910052723 transition metal Inorganic materials 0.000 description 1
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- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
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- FIQMHBFVRAXMOP-UHFFFAOYSA-N triphenylphosphane oxide Chemical compound C=1C=CC=CC=1P(C=1C=CC=CC=1)(=O)C1=CC=CC=C1 FIQMHBFVRAXMOP-UHFFFAOYSA-N 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- 239000005050 vinyl trichlorosilane Substances 0.000 description 1
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- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 150000003755 zirconium compounds Chemical class 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
【解決手段】(A)エポキシ樹脂、(B)フェノール性水酸基を有する硬化剤、及び(C)エポキシ基を有するシリコーン化合物を含有し、(A)エポキシ樹脂のエポキシ基と(B)硬化剤のフェノール性水酸基との当量比(水酸基/エポキシ基)が1.05〜1.2であり、(C)シリコーン化合物のエポキシ当量が600〜1400である封止用エポキシ樹脂組成物。
【選択図】なし
Description
本発明においては、(C)エポキシ基を有するシリコーン化合物として、例えば、下記の結合(a)及び(b)を有し、末端にR1、水酸基、及びアルコキシ基から選ばれた官能基を有する化合物を用いることが好ましい。
(C)エポキシ基を有するシリコーン化合物は、さらに結合(c)を有していてもよい。
また、本発明においては、(A)エポキシ樹脂として、例えば、下記一般式(I)で示されるエポキシ樹脂を含むエポキシ樹脂を用いることが好ましい。
さらに、本発明においては、(B)フェノール性水酸基を有する硬化剤として、例えば、下記一般式(II)で示されるフェノール樹脂を含む硬化剤を用いることが好ましい。
(B)フェノール性水酸基を有する硬化剤は、さらに下記一般式(III)で示されるフェノール・アラルキル樹脂を含んでいてもよい。
この場合、一般式(II)で示されるフェノール樹脂(α)の水酸基と一般式(III)で示されるフェノール・アラルキル樹脂(β)の水酸基のモル比が、(α)/(β)=0.1〜9であることが好ましい。
さらに、本発明においては、(D)無機充填材の含有量が、封止用エポキシ樹脂組成物の全重量に対し、85重量%〜95重量%であることが好ましい。
本発明の封止用エポキシ樹脂組成物は、エリア実装型の電子部品装置に好ましく用いられる。
また、本発明は、上記の封止用エポキシ樹脂組成物により封止された素子を備えた電子部品装置に関する。
また、炭素数1〜12のアルコキシ基としては、具体的には、メトキシ基、エトキシ基、プロポキシ基、ブトキシ基等が挙げられる。
さらに、炭化水素基又はアルコキシ基が有することのできる置換基として、たとえば、ハロゲン原子が挙げられる。
リルホスフィンと2,5−ジメトキシ−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンと1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンとメチル−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンと2,3−ジメチル−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンと2,5−ジメチル−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンとメトキシ−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンと2,3−ジメトキシ−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンと2,5−ジメトキシ−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンと1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンとメチル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンと2,3−ジメチル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンと2,5−ジメチル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンとメトキシ−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンと2,3−ジメトキシ−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンと2,5−ジメトキシ−1,4−ベンゾキノンとの付加反応物、トリフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、トリシクロヘキシルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、トリブチルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、トリオクチルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ジシクロヘキシルフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ジブチルフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ジオクチルフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、シクロヘキシルジフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ブチルジフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、オクチルジフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ジシクロヘキシル−p−トリルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ジブチル−p−トリルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ジオクチル−p−トリルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、シクロヘキシルジ−p−トリルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ブチルジ−p−トリルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、オクチルジ−p−トリルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、トリフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−トリルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、トリ−p−トリルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンとt−ブチル−1,4−ベンゾキノンとの付加反応物、トリフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、トリシクロヘキシルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、トリブチルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、トリオクチルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ジシクロヘキシルフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ジブチルフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ジオクチルフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、シクロヘキシルジフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ブチルジフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、オクチルジフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ジシクロヘキシル−p−トリルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ジブチル−p−トリルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ジオクチル−p−トリルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、シクロヘキシルジ−p−トリルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ブチルジ−p−トリルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、オクチルジ−p−トリルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、トリフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−トリルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、トリ−p−トリルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンと2,5−ジ−t−ブチル−1,4−ベンゾキノンとの付加反応物、トリフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、トリシクロヘキシルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、トリブチルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、トリオクチルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ジシクロヘキシルフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ジブチルフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ジオクチルフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、シクロヘキシルジフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ブチルジフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、オクチルジフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ジシクロヘキシル−p−トリルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ジブチル−p−トリルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ジオクチル−p−トリルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、シクロヘキシルジ−p−トリルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ブチルジ−p−トリルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、オクチルジ−p−トリルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、トリフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−トリルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、ジフェニル−p−メトキシフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、トリ−p−トリルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物、トリ−p−メトキシフェニルホスフィンとフェニル−1,4−ベンゾキノンとの付加反応物等が挙げられる。
(0<X≦0.5、mは正の数)
(ここで、M1、M2及びM3は互いに異なる金属元素を示し、a、b、c、d、p、q及びmは正の数、rは0又は正の数を示す。)
以下の成分をそれぞれ表1及び表2に示す重量部で配合し、混練温度80℃、混練時間10分の条件でロール混練を行い、実施例1〜4及び比較例1〜8の封止用エポキシ樹脂組成物を作製した。
(1)スパイラルフロー(流動性の指標)
EMMI−1−66に準じたスパイラルフロー測定用金型を用いて、封止用エポキシ樹脂組成物を上記条件で成形し、流動距離(cm)を求めた。
(2)熱時硬度
封止用エポキシ樹脂組成物を上記条件で直径50mm×厚さ3mmの円板に成形し、成形後直ちにショアD型硬度計を用いて測定した。
(3)耐リフロークラック性
10mm×10mm×0.3mmのシリコンチップを搭載した外形寸法40mm×40mm×1.8mmのBGA(基板厚0.5mm)を、封止用エポキシ樹脂組成物を用いて金型温度180℃、成形圧力6.9MPa、硬化時間90秒の条件で成形し、180℃で5時間の条件で後硬化して評価用半導体パッケージを得た。得られた半導体パッケージについて、85℃、85%RHの条件で加湿して48時間後に240℃、10秒の条件でリフロー処理を行い、クラックの有無を観察し、評価用半導体パッケージ数(8個)に対するクラック発生パッケージ数で評価した。
(4)反り量
基板サイズ60mm×90mm×0.4mmのガラス基材エポキシ樹脂基板(日立化成工業株式会社製商品名MCL−E−679)上に、封止用エポキシ樹脂組成物を用いて40mm×70mm×0.6mmの範囲に片面封止を行い、反り量の変化量を評価した。反り量の測定は封止範囲の長辺方向に、温度可変3次元形状測定機(株式会社ティーテック)を用いて高さ方向の変位を測定し、その最大値と最小値の差を反り量として評価した。室温の初期反り量、260℃加熱処理後の室温の反り量、260℃加熱時の反り量を測定した。
検量線:エポキシ樹脂全体の重量に対するエポキシ基の重量の割合(エポキシ(%))が既知のサンプル(数種類)をフーリエ変換型近赤外分光分析装置にてそれぞれ測定し、エポキシ基の吸収として6300〜6000−1領域の吸光度をそれぞれ求め、部分最小二乗法により検量線を作成した。
測定:試料を充填しない状態でフーリエ変換型近赤外分光分析装置にてブランク試験を行った。次に試料を充填して6300〜6000−1領域の吸光度を求めた。得られた吸光度から試料のエポキシ(%)を定量した。試料のエポキシ当量を下記式により求めた(エポキシ基の分子量:43)。
エポキシ当量=4300/エポキシ(%)
エポキシ樹脂と硬化剤の当量比がそれぞれ0.9及び1.0である比較例1及び2は、初期反り量が小さいが、加熱により反りが生じるために、加熱後反り変化量及び加熱時反り変化量がともに大きかった。エポキシ樹脂と硬化剤の当量比が1.3である比較例3は、加熱後の反り変化量と加熱時の反り変化量とがともに小さいが、熱時硬度が低かった。ポリシロキサンを含まない比較例4〜6は、流動性が低い、加熱後変化量、加熱時変化量が大きいなどの問題があった。ポリシロキサンの分子量がそれぞれ1780及び1530である比較例7及び8は、流動性が低く、加熱後反り変化量が大きかった。
Claims (10)
- (A)エポキシ樹脂、(B)フェノール性水酸基を有する硬化剤、及び(C)エポキシ基を有するシリコーン化合物を含有し、(A)エポキシ樹脂のエポキシ基と(B)硬化剤のフェノール性水酸基との当量比(水酸基/エポキシ基)が1.05〜1.2であり、(C)シリコーン化合物のエポキシ当量が600〜1400である封止用エポキシ樹脂組成物。
- 一般式(II)で示されるフェノール樹脂(α)の水酸基と一般式(III)で示されるフェノール・アラルキル樹脂(β)の水酸基のモル比が、(α)/(β)=0.1〜9である請求項6に記載の封止用エポキシ樹脂組成物。
- さらに、(D)無機充填材を、封止用エポキシ樹脂組成物の全重量に対し、85重量%〜95重量%含有する請求項1〜7のいずれかに記載の封止用エポキシ樹脂組成物。
- エリア実装型の電子部品装置に用いられる請求項1〜8のいずれかに記載の封止用エポキシ樹脂組成物。
- 請求項1〜9のいずれかに記載の封止用エポキシ樹脂組成物により封止された素子を備えた電子部品装置。
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JP2014133831A (ja) * | 2013-01-10 | 2014-07-24 | Panasonic Corp | 圧縮成形用エポキシ樹脂組成物と半導体装置 |
JP2023040078A (ja) * | 2019-01-21 | 2023-03-22 | 信越化学工業株式会社 | 樹脂組成物、樹脂フィルム、半導体積層体、半導体積層体の製造方法及び半導体装置の製造方法 |
JP7450697B2 (ja) | 2019-01-21 | 2024-03-15 | 信越化学工業株式会社 | 樹脂組成物、樹脂フィルム、半導体積層体、半導体積層体の製造方法及び半導体装置の製造方法 |
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