JP2008107728A - Device for prepeeling photosensitive web - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve satisfactory and assured peeling of a support layer from a substrate and to improve the sticking accuracy of a photosensitive material layer, by a simple configuration. <P>SOLUTION: A prepeeling device 144 is provided comprising a peeling member 150 which presses a remaining part 30b exposed between glass substrates 24 to peel the remaining part 30b from the glass substrates 24, and a movement mechanism 152 which can move the peeling member 150 in the direction of an arrow C. The peeling member 150 is housed in a casing 158 together with receiving rollers 162 and this casing 158 moves in the direction of the arrow C via a uniaxial robot 156 and is disposed corresponding to the remaining part 30b between the glass substrates 24. The peeling member 150 is in the form of a plate which is longer in the width direction of the remaining part 30b and the member is provided with corrugated ends 172a, 172b which come into contact with the remaining part 30b. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  In the present invention, the photosensitive web in which the support layer and at least the photosensitive material layer are laminated is bonded to the substrate with the photosensitive material layer side facing the substrate, and then the support layer is exposed between the substrates. The present invention relates to a pre-peeling device for a photosensitive web, in which a part of the photosensitive web is peeled from the substrate in advance before being peeled from the substrate integrally with a part of the photosensitive web.

  For example, a liquid crystal panel substrate, a printed wiring substrate, and a PDP panel substrate are configured by attaching a photosensitive sheet (photosensitive web) having a photosensitive material (photosensitive resin) layer to the substrate surface. In the photosensitive sheet body, a photosensitive material layer and a protective film are sequentially laminated on a flexible plastic support.

  Therefore, a pasting device (laminating device) used for pasting this type of photosensitive sheet body normally transports substrates such as a glass substrate and a resin substrate spaced apart from each other by a predetermined interval, and to the substrate. In accordance with the range of the photosensitive material layer to be pasted, a method of removing the protective film from the photosensitive sheet body is employed.

  For example, a photosensitive layer transfer device disclosed in Patent Document 1 is known. This photosensitive layer transfer apparatus cuts the photosensitive layer and the cover film in accordance with the transfer area of the substrate and the substrate supply means for supplying the substrate at regular intervals, and peels only the cut cover film of the transferred area. The film pre-processing means and the laminated film from which the cover film has been peeled off by the film pre-processing means are aligned with the substrate from the substrate supply means so that the photosensitive layer area from which the cover film has been peeled is aligned with the transfer area. The laminate film is peeled from the substrate between the thermocompression bonding means for thermocompression bonding the photosensitive layer area to the transfer area and each substrate on which the laminate film is thermocompression bonded by the thermocompression bonding means. Preliminary peeling means for extruding and peeling at least the cover film and the substrate, and peeling means for peeling the support constituting the laminated film from the substrate It is equipped with a.

  Thereby, at least the cover film and the substrate are peeled in advance between the substrates, so that the cover film is stably peeled off together with the support and falls within the process, resulting in a foreign matter defect, It is possible to prevent the substrate from remaining abnormal on the substrate and becoming abnormal in quality and quality.

Japanese Patent Laying-Open No. 2003-337411 (FIG. 6)

  The present invention relates to this type of pre-peeling, and is a photosensitive web which can peel off a support layer (support) from a substrate satisfactorily and surely with a simple configuration and can improve the laminating accuracy. An object is to provide a pre-peeling device.

  In the present invention, the photosensitive web in which the support layer and at least the photosensitive material layer are laminated is bonded to the substrate with the photosensitive material layer side facing the substrate, and then the support layer is exposed between the substrates. The present invention relates to a pre-peeling apparatus for a photosensitive web, in which a part of the photosensitive web is peeled from the substrate in advance before being peeled from the substrate integrally with a part of the photosensitive web.

  The pre-peeling device is capable of pressing a part of the photosensitive web exposed between the substrates to peel a part of the photosensitive web from the substrate, and the peeling member can be advanced and retracted in the substrate transport direction. A moving mechanism; and a detector for detecting a pressing position of the photosensitive web by the peeling member.

  The peeling member is formed in a plate shape that is long in the width direction intersecting the substrate transport direction of the photosensitive web, and is provided with a plurality of pressing portions that are in contact with a part of the photosensitive web.

  Moreover, it is preferable that a peeling member advances / retreats to the said photosensitive web side within the range of 7 mm-15 mm from the other surface on the opposite side to the one surface where the photosensitive web of a board | substrate is provided.

  Furthermore, it is preferable that a peeling member provides a wave-shaped front-end | tip part as a press part.

  Furthermore, the wave-shaped tip portion has a distance between ridges protruding to the photosensitive web side within a range of 20 mm to 50 mm, and a distance between the ridge portion and a valley portion within a range of 3 mm to 6 mm. It is preferable.

  Further, the peeling member is divided in the width direction, and a substrate detector for detecting whether or not a substrate exists within the movement range of the peeling member is disposed in the divided portion. preferable.

  Furthermore, it is preferable that the substrate detector includes a contact sensor that can be moved back and forth via the actuator and that can detect that the peeling member is displaced from the pressing position by contacting the substrate.

  In the present invention, the pressing position of the photosensitive web by the peeling member is detected via the detector, and the peeling member can be advanced and retracted in the substrate transport direction corresponding to the pressing position. For this reason, a peeling member does not contact a board | substrate and a part of photosensitive web exposed between board | substrates can be reliably pressed by the said peeling member.

  At that time, since the plurality of pressing portions of the peeling member are in contact with the photosensitive web, a concentrated load can be applied intermittently in the width direction of the photosensitive web, and a part of the photosensitive web can be satisfactorily removed from the substrate. Pre-peeling is possible. As a result, a part of the photosensitive web is peeled off in advance from the rear end of the substrate in the substrate transport direction. Therefore, in the subsequent peeling process, the support layer is easily and reliably removed from the substrate together with a part of the photosensitive web. Can be peeled off.

  FIG. 1 is a schematic configuration diagram of a photosensitive laminate manufacturing apparatus 20 incorporating a pre-peeling apparatus according to an embodiment of the present invention.

  In the manufacturing process of the color filter for liquid crystal or organic EL, the manufacturing apparatus 20 performs an operation of thermally transferring the photosensitive resin layers 28 (described later) of the long photosensitive webs 22a and 22b in parallel to the glass substrate 24. Do. Hereinafter, the glass substrate 24 on which the photosensitive webs 22a and 22b are laminated is also referred to as a bonded substrate 24a. The photosensitive webs 22a and 22b are each set to a predetermined width dimension. For example, the photosensitive web 22a is configured to be wider than the photosensitive web 22b.

  FIG. 2 is a cross-sectional view of the photosensitive webs 22 a and 22 b used in the manufacturing apparatus 20. The photosensitive webs 22a and 22b are basically configured by laminating a flexible base film (support) 26, a photosensitive resin layer (photosensitive material layer) 28, and a protective film 30.

  As shown in FIG. 1, the manufacturing apparatus 20 accommodates two (or more than two) photosensitive web rolls 23a and 23b obtained by winding photosensitive webs 22a and 22b in a roll shape. Width of the first and second web feed mechanisms 32a and 32b capable of synchronously feeding the photosensitive webs 22a and 22b from the photosensitive web rolls 23a and 23b, and the protective film 30 of each of the fed photosensitive webs 22a and 22b. Each protective film 30 includes first and second processing mechanisms 36a and 36b that form a half-cut portion 34 that is a boundary position that can be cut in the direction, and an adhesive label 38 (see FIG. 3) that partially includes a non-adhesive portion 38a. First and second label adhesion mechanisms 40a and 40b to be adhered to each other.

  Downstream of the first and second label adhering mechanisms 40a and 40b are first and second reservoir mechanisms 42a and 42b for changing the photosensitive webs 22a and 22b from tact feed to continuous feed, and the respective photosensitive webs. First and second peeling mechanisms 44a and 44b for peeling the protective film 30 from the 22a and 22b at a predetermined length interval, and a substrate transport mechanism 45 for transporting the glass substrate 24 to a pasting position while being heated to a predetermined temperature. And an affixing mechanism 46 for adhering the photosensitive resin layer 28 exposed by peeling off the protective film 30 to the glass substrate 24 integrally and in parallel.

  First and second detection mechanisms 47a and 47b that directly detect the respective half-cut portions 34, which are the boundary positions of the photosensitive webs 22a and 22b, are disposed in the vicinity of the attachment position in the attachment mechanism 46. The

  Near the downstream of the first and second web feed mechanisms 32a and 32b, the rear ends of the substantially used photosensitive webs 22a and 22b and the tips of the newly used photosensitive webs 22a and 22b are pasted, respectively. Is attached. A film terminal position detector 51 is disposed downstream of the attachment table 49 in order to control the displacement in the width direction due to the winding displacement of the photosensitive web rolls 23a and 23b. Here, the film terminal position adjustment is performed by moving the first and second web feed mechanisms 32a and 32b in the width direction, but may be performed by attaching a position adjustment mechanism combining rollers. The first and second web feed mechanisms 32a and 32b are configured with a multi-axis such as a biaxial or triaxial feeding shaft for loading the photosensitive web rolls 23a and 23b and feeding the photosensitive webs 22a and 22b. May be.

  The first and second processing mechanisms 36a and 36b are provided with a roller pair 50 for calculating the roll diameter of each photosensitive web roll 23a and 23b accommodated and wound in the first and second web feed mechanisms 32a and 32b. Arranged downstream. Each of the first and second processing mechanisms 36a and 36b includes a single round blade 52. The round blade 52 travels in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are predetermined. A half-cut portion 34 is formed at the position.

  As shown in FIG. 2, the half-cut portion 34 needs to cut at least the protective film 30. In practice, in order to cut the protective film 30 with certainty, the photosensitive resin layer 28 to the base film 26 are cut. The cutting depth of the round blade 52 is set. The round blade 52 is fixed without rotating and moves in the width direction of the photosensitive webs 22a and 22b to form a half-cut portion 34, or without sliding on the photosensitive webs 22a and 22b. A method of moving in the width direction while rotating to form the half-cut portion 34 is employed. In place of the round blade 52, the half-cut portion 34 may employ, for example, a method of forming with a knife blade, a push cutting blade (Thomson blade) or the like in addition to a cutting method using laser light or ultrasonic waves. .

  Two first and second processing mechanisms 36a and 36b are disposed at a predetermined distance apart in the conveying direction of the photosensitive webs 22a and 22b (in the direction of arrow A), respectively, and two are placed with the remaining portion 30b interposed therebetween. Two half-cut portions 34 may be formed simultaneously.

  The half-cut part 34 is set, for example, at a position where it enters the glass substrates 24 on both sides by 10 mm. A portion sandwiched between the half cut portions 34 between the glass substrates 24 functions as a mask when the photosensitive resin layer 28 is attached to the glass substrate 24 in a frame shape in an attaching mechanism 46 described later.

  The first and second label bonding mechanisms 40a and 40b connect the peeling portion 30aa at the front side of the peeling side and the peeling portion 30ab at the back side of the peeling side in order to leave the remaining portion 30b of the protective film 30 correspondingly between the glass substrates 24. An adhesive label 38 is supplied. As shown in FIG. 2, the protective film 30 has a remaining portion 30 b sandwiched between the first peeled portion 30 aa and the later peeled portion 30 ab.

  As shown in FIG. 3, the adhesive label 38 is formed in a strip shape, and is formed of, for example, the same resin material as the protective film 30. The adhesive label 38 has a non-adhesive portion (including a slight adhesion) 38a to which a pressure-sensitive adhesive is not applied at the center, and the front side of the non-adhesive portion 38a, that is, both ends in the longitudinal direction of the adhesive label 38 It has the 1st adhesion part 38b adhered to exfoliation part 30aa, and the 2nd adhesion part 38c adhered to back exfoliation part 30ab.

  As shown in FIG. 1, each of the first and second label bonding mechanisms 40a and 40b includes suction pads 54a to 54g, each of which can attach a maximum of seven adhesive labels 38 with a predetermined interval between them. A pedestal 56 for holding the photosensitive webs 22a and 22b from below is disposed so as to be movable up and down at the position where the adhesive label 38 is attached by the pads 54a to 54g.

  The first and second reservoir mechanisms 42a and 42b are configured to absorb the speed difference between the tact conveyance of the upstream photosensitive webs 22a and 22b and the continuous conveyance of the downstream photosensitive webs 22a and 22b. A movable dancer roller 60 is provided. The second reservoir mechanism 42b includes a dancer for adjusting the lengths of the conveyance paths until the photosensitive webs 22a and 22b sent from the first and second web delivery mechanisms 32a and 32b reach the attaching mechanism 46. A roller 61 is provided.

  The first and second peeling mechanisms 44a and 44b arranged downstream of the first and second reservoir mechanisms 42a and 42b block the tension fluctuation on the delivery side of the photosensitive webs 22a and 22b, respectively, and the tension at the time of lamination is reduced. A suction drum 62 is provided for stabilization. In the vicinity of each suction drum 62, a peeling roller 63 is disposed, and the protective film 30 peeled off from the photosensitive webs 22a and 22b via the peeling roller 63 is respectively wound on the protective film except for the remaining portion 30b. It is wound around the take-up portion 64.

  On the downstream side of the first and second peeling mechanisms 44a and 44b, first and second tension control mechanisms 66a and 66b capable of applying tension to the photosensitive webs 22a and 22b are disposed. Each of the first and second tension control mechanisms 66a and 66b includes a cylinder 68, and the tension dancer 70 swings and displaces under the driving action of the cylinder 68, whereby each tension dancer 70 is in sliding contact with the photosensitive web. The tension of 22a, 22b can be adjusted.

  The first and second detection mechanisms 47a and 47b are provided with photoelectric sensors 72a and 72b such as laser sensors and photosensors. The photoelectric sensors 72a and 72b are wedge-shaped groove-shaped portions of the half-cut portion 34, and are protected. A step due to the thickness of the film 30 or a change due to a combination thereof is directly detected, and this detection signal is used as a boundary position signal. The photoelectric sensors 72a and 72b are disposed to face the backup rollers 73a and 73b. In place of the photoelectric sensors 72a and 72b, an image inspection means such as a non-contact displacement meter or a CCD camera may be used. Further, the CCD camera may be disposed at a position not facing the backup rollers 73a and 73b.

  The substrate transport mechanism 45 includes a plurality of sets of substrate heating units (for example, heaters) 74 disposed so as to sandwich the glass substrate 24 and a transport unit 76 that transports the glass substrate 24 in the direction of arrow C. The substrate heating unit 74 constantly monitors the temperature of the glass substrate 24. When an abnormality occurs, the conveyance unit 76 is stopped or alarmed, and abnormal information is transmitted to cause the abnormal glass substrate 24 to be discharged NG in the subsequent process. It can be used for management or production management. An air levitation plate (not shown) is disposed in the conveyance unit 76, and the glass substrate 24 is levitated and conveyed in the direction of arrow C. The glass substrate 24 can be transported by a roller conveyor.

  The temperature measurement of the glass substrate 24 is preferably performed in the substrate heating unit 74 or immediately before the attachment position. The measuring method may be a contact type (for example, thermocouple) or a non-contact type.

  A substrate stocker 71 that accommodates a plurality of glass substrates 24 is provided upstream of the substrate heating unit 74. Each glass substrate 24 accommodated in the substrate stocker 71 is sucked and taken out by a suction pad 79 provided in the hand portion 75 a of the robot 75 and inserted into the substrate heating portion 74.

  Downstream of the substrate heating unit 74, a stopper 77 that contacts the tip of the glass substrate 24 and holds the glass substrate 24 and a position sensor 78 that detects the tip position of the glass substrate 24 are disposed. The position sensor 78 detects the leading edge of the glass substrate while the glass substrate 24 is heading to the attaching position, and sends the fixed amount therefrom to position it at a predetermined position between the laminating rubber rollers 80a and 80b. Here, it is preferable to arrange a plurality of position sensors 78 to monitor the arrival timing of the glass substrate 24 at each position, and to check a delay due to slip or the like at the start of substrate conveyance. The glass substrate 24 may be heated by a robot using a batch type oven in addition to the above-described transfer heating.

  The affixing mechanism 46 includes rubber rollers 80a and 80b that are arranged vertically and are heated to a predetermined temperature. The backup rollers 82a and 82b are in sliding contact with the rubber rollers 80a and 80b, and the backup roller 82b is pressed toward the rubber roller 80b by the pressure cylinders 84a and 84b constituting the roller clamp portion 83.

  In the vicinity of the rubber roller 80a, a contact prevention roller 86 for preventing the photosensitive webs 22a and 22b from contacting the rubber roller 80a is movably disposed. In the vicinity of the upstream of the attaching mechanism 46, a preheating unit 87 for preheating the photosensitive webs 22a and 22b to a predetermined temperature is disposed. This preheating part 87 is provided with heating means, such as an infrared bar heater, for example.

  The glass substrate 24 is transported in the direction of arrow C from the pasting mechanism 46 via the transport path 88. In the transport path 88, film transport rollers 90a and 90b and a substrate transport roller 92 are disposed. The distance between the rubber rollers 80 a and 80 b and the substrate transport roller 92 is preferably set to be equal to or less than the length of one glass substrate 24.

  A cooling mechanism 122 and a base automatic peeling mechanism 142 are provided downstream of the attaching mechanism 46 with the pre-peeling device 144 according to the present embodiment interposed therebetween. The automatic base peeling mechanism 142 continuously peels the long base film 26 to which the respective glass substrates 24 are attached at predetermined intervals, and includes a peeling roller 146 and a winding shaft 148. ing. The take-up shaft 148 preferably applies torque control during driving to apply tension to the base film 26, while providing a tension detector (not shown) on the peeling roller 146, for example, to perform tension feedback control. .

  The base automatic peeling mechanism 142 can advance and retract in the direction of arrow C via an actuator (not shown). By reheating the film surface to about 30 ° C. to 120 ° C. immediately before or after the peeling roller 146, peeling of the color material layer at the time of peeling is prevented, and a high-quality laminate surface can be obtained.

  As shown in FIG. 4, the pre-peeling device 144 presses the remaining portion 30 b of the protective film 30 exposed between the glass substrates 24 to integrate the remaining portion 30 b with the photosensitive resin layer 28 corresponding to the half-cut portion 34. The peeling member 150 to be peeled off from the glass substrate 24, the moving mechanism 152 capable of moving back and forth in the arrow C direction (substrate transport direction) of the peeling member 150, and the pressing position of the remaining portion 30b by the peeling member 150 are detected. For example, a CCD camera 154 (see FIG. 1).

  As shown in FIG. 4, the moving mechanism 152 includes a uniaxial robot 156 that can advance and retreat in the direction of arrow C, and a casing 158 coupled to the uniaxial robot 156 has an arrow through a guide rail (for example, an LM guide) 160. It is arranged to be able to advance and retreat in the C direction.

  A plurality of receiving rollers 162 are rotatably mounted on the casing 158, and a pair of right and left lifting cylinders 164a and 164b are disposed between the receiving rollers 162 as shown in FIGS.

  Frames 168a and 168b are swingably supported by rods 166a and 166b extending upward from the elevating cylinders 164a and 164b, and the frames 168a and 168b are connected to each other via a connecting portion 169. The peeling plates 170a and 170b constituting the peeling member 150 are fixed to the frames 168a and 168b, and the peeling plates 170a and 170b are wave-shaped tip portions 172a and 172b which are a plurality of pressing portions in contact with the remaining portion 30b. Is provided. A substrate detector 174 for detecting whether or not the glass substrate 24 exists is disposed between the peeling plates 170a and 170b, that is, in a portion divided in the width direction (arrow D direction) of the peeling member 150.

  The substrate detector 174 includes a cylinder (actuator) 176, and contact type sensors 178a and 178b are provided on a rod 176a extending upward from the cylinder 176 (see FIG. 5). The contact-type sensors 178a and 178b are set at positions higher than the height at which the contact sensors 178a and 178b are in contact with the glass substrate 24.

  When the peeling member 150 is disposed at the pressing position between the glass substrates 24, the contact sensors 178a and 178b do not contact either the glass substrate 24 or the remaining portion 30b. On the other hand, when the position of the peeling member 150 is displaced with respect to the pressing position between the glass substrates 24, the contact sensor 178a is disposed at the rear end of the upstream glass substrate 24, or the contact sensor 178b is disposed downstream. The tip of the side glass substrate 24 comes into contact.

  As shown in FIG. 4, the peeling member 150 has a height H (7 mm to 15 mm) from the other surface 179 opposite to the one surface on which the remaining portion 30b of the glass substrate 24 is provided via the lifting cylinders 164a and 164b. Within the range of the remaining portion 30b. The depth D to the receiving roller 162 and the other surface 179 of the glass substrate 24 is set within a range of 1 mm to 5 mm.

  As shown in FIG. 5, the wave-shaped tip portions 172a and 172b of the peeling plates 170a and 170b are set such that the distance L1 between the peak portions protruding toward the remaining portion 30b is set within a range of 20 mm to 50 mm. The distance L2 between the peak and valley is set within a range of 3 mm to 6 mm.

  As shown in FIG. 4, a holding member 177 for preventing substrate lifting that can come into contact with the base film 26 from the peeling roller 146 side is attached to the casing 158. The pressing member 177 has a function of preventing the glass substrate 24 from being pushed up more than necessary when the remaining portion 30 b is pushed up by the peeling member 150. Although not shown, the pressing member 177 is configured to be movable up and down via a cylinder, for example, and when the peeling member 150 is pushed up, the pressing member 177 is brought into contact with the base film 26 so that the glass substrate 24 can be displaced as much as possible. It can also be suppressed.

  As shown in FIG. 1, a measuring instrument 180 that measures the area position of the photosensitive resin layer 28 actually attached to the glass substrate 24 is disposed downstream of the automatic base peeling mechanism 142. The measuring instrument 180 includes a camera 182 such as a CCD, for example, and the camera 182 is disposed for photographing the glass substrate 24 on which the photosensitive resin layer 28 is attached.

  A photosensitive laminate stocker 190 that accommodates a plurality of photosensitive laminates 208 is provided downstream of the base peeling mechanism 124. The photosensitive laminate 208 from which the base film 26 and the remaining portion 30b have been peeled off from the attached substrate 24a by the base automatic peeling mechanism 142 is sucked and taken out by a suction pad 194 provided on the hand portion 192a of the robot 192. Is accommodated in the conductive laminate stocker 190.

  In the manufacturing apparatus 20, the first and second web feed mechanisms 32a and 32b, the first and second processing mechanisms 36a and 36b, the first and second label adhesion mechanisms 40a and 40b, and the first and second reservoir mechanisms 42a and 42b. The first and second peeling mechanisms 44a and 44b, the first and second tension control mechanisms 66a and 66b, and the first and second detection mechanisms 47a and 47b are arranged above the attaching mechanism 46. On the contrary, the first and second web feed mechanisms 32a and 32b to the first and second detection mechanisms 47a and 47b are arranged below the affixing mechanism 46, and the photosensitive webs 22a and 22b are moved up and down. However, the photosensitive resin layer 28 may be attached to the lower side of the glass substrate 24, or the entire manufacturing apparatus 20 may be configured in a straight line.

  The manufacturing apparatus 20 is entirely controlled via a laminating process control unit 200. For each functional unit of the manufacturing apparatus 20, for example, a laminating control unit 202, a substrate heating control unit 204, a base peeling control unit 206, and the like are provided. Provided, and these are connected by an in-process network. The laminating process control unit 200 is connected to a factory network, and performs information processing for production such as production management and operation management of instruction information (condition setting and production information) from a factory CPU (not shown).

  The substrate heating control unit 204 receives the glass substrate 24 from the upstream process, controls the operation of heating the glass substrate 24 to a desired temperature and supplying the glass substrate 24 to the pasting mechanism 46, the handling of information on the glass substrate 24, and the like.

  The laminating control unit 202 controls each functional unit as a master of the entire process, and the position of the half-cut portion 34 of the photosensitive webs 22a and 22b detected by the first and second detection mechanisms 47a and 47b. Based on the information, a control mechanism capable of controlling the relative position between each boundary position and the glass substrate 24 at the pasting position and the relative position between the respective boundary positions is configured.

  The base peeling control unit 206 controls the operation of peeling the base film 26 from the sticking substrate 24a supplied from the sticking mechanism 46, and discharging the photosensitive laminate 208 to the downstream process, and the sticking substrate. 24a and information on the photosensitive laminate 208 are controlled.

  The base peeling control unit 206 further measures the pressing position between the glass substrates 24 based on the image information of the pasting substrate 24a imaged by the CCD camera 154, and calculates the pressing position when the glass substrate 24 stops. To do. Based on the calculation result, the pre-peeling stop position of the peeling member 150 is obtained, and the moving mechanism 152 is controlled.

  The interior of the manufacturing apparatus 20 is partitioned into a first clean room 212a and a second clean room 212b through a partition wall 210. The first clean room 212a accommodates the first and second web feed mechanisms 32a and 32b to the first and second tension control mechanisms 66a and 66b, and the second clean room 212b includes the first and second detections. The mechanisms 47a and 47b and thereafter are accommodated. The first clean room 212a and the second clean room 212b communicate with each other through the penetration part 214.

  The operation of the manufacturing apparatus 20 configured as described above will be described below.

  First, the photosensitive webs 22a and 22b are sent out from the respective photosensitive web rolls 23a and 23b attached to the first and second web delivery mechanisms 32a and 32b. The photosensitive webs 22a and 22b are conveyed to the first and second processing mechanisms 36a and 36b.

  In the first and second processing mechanisms 36a and 36b, the round blade 52 moves in the width direction of the photosensitive webs 22a and 22b, and the photosensitive webs 22a and 22b are moved from the protective film 30 to the photosensitive resin layer 28 to the base film. Cut to 26 to form a half-cut portion 34 (see FIG. 2). Further, as shown in FIG. 1, the photosensitive webs 22a and 22b are stopped after being transported in the direction of the arrow A corresponding to the dimension of the remaining portion 30b of the protective film 30, and the half-blade 52 is halfway under the traveling action. A cut site 34 is formed. Thus, the photosensitive webs 22a and 22b are provided with a front peeling portion 30aa and a rear peeling portion 30ab with the remaining portion 30b interposed therebetween (see FIG. 2).

  Next, the respective photosensitive webs 22 a and 22 b are conveyed to the first and second label adhering mechanisms 40 a and 40 b, and a predetermined application site of the protective film 30 is arranged on the cradle 56. In the first and second label adhering mechanisms 40a and 40b, a predetermined number of adhesive labels 38 are adsorbed and held by the adsorbing pads 54a to 54g, and each adhering label 38 straddles the remaining portion 30b of the protective film 30, and a front peeling portion. 30aa and the rear peeling portion 30ab are integrally bonded (see FIG. 3).

  For example, the photosensitive webs 22a and 22b to which the seven adhesive labels 38 are bonded, as shown in FIG. 1, after the first and second reservoir mechanisms 42a and 42b are prevented from changing the tension on the delivery side, It is continuously conveyed to the first and second peeling mechanisms 44a and 44b. In the first and second peeling mechanisms 44a and 44b, as shown in FIG. 6, the base film 26 of the photosensitive webs 22a and 22b is adsorbed and held by the suction drum 62, and the protective film 30 leaves the remaining portion 30b. It peels from the said photosensitive webs 22a and 22b. The protective film 30 is peeled off via the peeling roller 63 and wound around the protective film take-up portion 64 (see FIG. 1).

  Under the action of the first and second peeling mechanisms 44a and 44b, after the protective film 30 is peeled from the base film 26 leaving the remaining portion 30b, the photosensitive webs 22a and 22b are moved to the first and second tension control mechanisms. The tension is adjusted by 66a and 66b, and the half-cut portion 34 is detected by the photoelectric sensors 72a and 72b by the first and second detection mechanisms 47a and 47b.

  Each photosensitive web 22a, 22b is quantitatively transported to the affixing mechanism 46 under the rotational action of the film transport rollers 90a, 90b based on the detection information of the half-cut region 34, respectively. On the other hand, the glass substrate 24 is transported to the affixing position in a heated state under the action of the substrate transport mechanism 45. The glass substrate 24 is temporarily disposed between the rubber rollers 80a and 80b corresponding to the portion where the photosensitive resin layer 28 of the photosensitive webs 22a and 22b arranged in parallel is attached.

  In this state, by raising the backup roller 82b and the rubber roller 80b, the glass substrate 24 is sandwiched between the rubber rollers 80a and 80b with a predetermined pressing pressure. Further, the photosensitive resin layers 28 arranged in parallel are transferred (laminated) to the glass substrate 24 under the rotating action of the rubber roller 80a.

  Here, as lamination conditions, the speed is 1.0 m / min to 10.0 m / min, the temperature of the rubber rollers 80a and 80b is 90 ° C to 140 ° C, the rubber hardness of the rubber rollers 80a and 80b is 40 ° to 90 °, The pressing pressure (linear pressure) of the rubber rollers 80a and 80b is 50 N / cm to 400 N / cm.

  When the lamination of one photosensitive web 22a, 22b is completed on the glass substrate 24 via the rubber rollers 80a, 80b, the rotation of the rubber roller 80a is stopped, while the photosensitive webs 22a, 22b are laminated. The glass substrate 24, that is, the attached substrate 24 a is clamped by the substrate transport roller 92.

  Then, the rubber roller 80b is retracted in the direction away from the rubber roller 80a to release the clamp, and the rotation of the substrate transport roller 92 is started, so that the bonded substrate 24a is quantitatively transported in the direction of arrow C, and the photosensitive web. The position between the substrates 22a and 22b moves to a predetermined position near the lower side of the rubber roller 80a. On the other hand, the next glass substrate 24 is transported toward the attaching position via the substrate transport mechanism 45.

  When the tip of the next glass substrate 24 is disposed between the rubber rollers 80a and 80b, the rubber roller 80b is raised, and the next glass substrate 24 and the photosensitive webs 22a and 22b are clamped by the rubber rollers 80a and 80b. Is done. Lamination is started under the rotational action of the rubber rollers 80a and 80b and the substrate transport roller 92, and the bonded substrate 24a is transported in the direction of arrow C.

  At that time, as shown in FIG. 4, the end portions of the pasting substrate 24 a are covered with the remaining portions 30 b. Therefore, when the photosensitive resin layer 28 is transferred to the glass substrate 24, the rubber rollers 80a and 80b are not soiled by the photosensitive resin layer 28.

  On the other hand, dripping may occur in the half-cut portion 34 of the photosensitive resin layer 28 due to heat during lamination, and the photosensitive resin layer 28 may adhere to the glass substrate 24. As a result, when the base film 26 is peeled from the bonded substrate 24a, the photosensitive resin layer 28 and the remaining portion 30b that adhere to the glass substrate 24 corresponding to the half-cut portion 34 may not be peeled from the glass substrate 24. is there.

  Here, in this embodiment, the pasted substrate 24 a laminated by the pasting mechanism 46 is cooled through the cooling mechanism 122 and then transferred to the pre-peeling device 144. In the pre-peeling device 144, when the bonded substrate 24a is temporarily stopped, first, as shown in FIG. 5, the cylinder 176 constituting the substrate detector 174 is driven, and the contact sensors 178a and 178b are integrated with the rod 176a. It rises to a predetermined rising end position.

  The rising end positions of the contact sensors 178a and 178b are set to positions equal to or higher than the bottom surface (the other surface 179) of the glass substrate 24. Therefore, when none of the contact sensors 178a and 178b are in contact with the glass substrate 24, the pressing position between the glass substrates 24 is arranged corresponding to the lifting range (moving range) of the peeling member 150. It is judged that

  Therefore, the substrate detector 174 is lowered to the retracted position via the cylinder 176, while the elevating cylinders 164a and 164b are driven. Therefore, the frames 168a and 168b are raised integrally with the rods 166a and 166b, and the peeling plates 170a and 170b fixed to the frames 168a and 168b are inserted between the glass substrates 24 so that the remaining portion 30b is moved vertically upward. Press in the direction (see FIG. 7).

  For this reason, the remaining portion 30 b exposed between the glass substrates 24 is peeled from the glass substrate 24 integrally with the photosensitive resin layer 28 that easily adheres to the glass substrate 24 corresponding to the half-cut portion 34. At that time, the peeling member 150 is disposed in the vicinity of the rear end portion of the upstream glass substrate 24 with the remaining portion 30b interposed therebetween, and in particular, the photosensitive member that is easily adhered to the rear end portion of the upstream glass substrate 24. The conductive resin layer 28 can be reliably peeled off.

  As described above, when the peeling member 150 rises and peels the remaining portion 30b from both the glass substrates 24, in the base automatic peeling mechanism 142, the peeling roller 146 is in the direction opposite to the arrow C direction (arrow C1 direction). (See FIG. 7). Then, after the pre-peeling is completed, the base film 26 is continuously wound from the pasting substrate 24a under the rotating action of the winding shaft 148 (see FIG. 1).

  In this case, in this embodiment, image information of the pasting substrate 24 a, that is, image information between the glass substrates 24 is obtained via the CCD camera 154, and this image information is sent to the base peeling control unit 206.

  The base peeling control unit 206 measures the pressing position between the glass substrates 24 based on the above image information, and calculates the pressing position when the glass substrate 24 stops in the pre-peeling device 144. Based on the calculation result, the position of the uniaxial robot 156 is adjusted in the direction of arrow C or in the direction opposite to the direction of arrow C, and the peeling member 150 is disposed at the pre-peeling stop position.

  Therefore, the peeling member 150 can reliably press the remaining portion 30b exposed between the glass substrates 24 without contacting the glass substrate 24, and the remaining portion 30b corresponding to the half-cut portion 34. It becomes possible to peel the photosensitive resin layer 28 laminated on the glass substrate 24 satisfactorily. Thereby, the photosensitive resin layer 28 corresponding to the remaining portion 30b and the half-cut portion 34 can be pre-peeled from the rear end portion of the glass substrate 24 on the upstream side in particular, and the base film 26 is made of glass by the base automatic peeling mechanism 142. When peeling from the substrate 24, the photosensitive resin layer 28 corresponding to the remaining portion 30b and the half-cut portion 34 can be easily and reliably peeled from the glass substrate 24.

  Further, as shown in FIG. 5, the peeling member 150 is divided into two peeling plates 170a and 170b, and the peeling plates 170a and 170b are provided with wave-shaped tip portions 172a and 172b. At that time, the wave-shaped tip portions 172a and 172b are set such that the distance L1 between the peaks is within a range of 20 mm to 50 mm, and the distance L2 between the peaks and the valleys is set between 3 mm and 6 mm. Yes.

  Accordingly, when the wave-shaped tip portions 172a and 172b come into contact with the remaining portion 30b, a large load can be applied intermittently and concentrated along the width direction to the remaining portion 30b. The photosensitive resin layer 28 corresponding to 30b and the half-cut part 34 can be more reliably peeled off. At that time, the peeling member 150 advances and retreats within the range of the height H (7 mm to 15 mm) from the bottom surface (the other surface 179) of the glass substrate 24, and the remaining portion 30b is peeled off satisfactorily. .

  Here, each peeling plate 170a, 170b can be raised / lowered via the individual raising / lowering cylinders 164a, 164b, respectively. Therefore, by driving and controlling the elevating cylinders 164a and 164b, for example, as shown in FIG. 8, it is possible to raise the peeling plates 170a and 170b in an inclined state.

  Furthermore, in this embodiment, the substrate detector 174 is disposed between the peeling plates 170a and 170b. Prior to the raising of the peeling member 150, first, the contact sensors 178 a and 178 b are raised under the driving action of the cylinder 176, and whether or not the glass substrate 24 exists within the rising range of the peeling member 150 is determined. It has been inspected.

  Accordingly, if the peeling member 150 is raised after the contact type sensors 178a and 178b detect that the glass substrate 24 does not exist, the peeling member 150 is prevented from contacting the glass substrate 24 as much as possible. be able to. This prevents the glass substrate 24 from cracking, the glass substrate 24 from rattling, and the like, and the continuous peeling of the base film 26 and the remaining portion 30b is stably performed, thereby improving the operating rate. .

  By the way, the glass substrate 24 from which the base film 26 has been peeled is placed in an inspection station corresponding to the measuring device 180. In this inspection station, images of the glass substrate 24 and the photosensitive resin layer 28 are captured by the camera 182 while the glass substrate 24 is positioned and fixed. Then, by applying image processing, the pasting position is calculated and the pasting state is inspected. Thereafter, the photosensitive laminate 208 is accommodated in the photosensitive laminate stocker 190 via the robot 192.

  In the present embodiment, the two photosensitive web rolls 23a and 23b are used. However, the present invention is not limited to this. One photosensitive web roll or three or more photosensitive web rolls are used. It may be adopted.

  Moreover, in this embodiment, although each peeling plate 170a, 170b has provided the waveform front-end | tip part 172a, 172b as a some press part, it is not limited to this. For example, as a plurality of pressing parts, a sawtooth triangular tip 220 having R at the end as shown in FIG. 9 may be adopted, and R at the end as shown in FIG. You may employ | adopt the comb-shaped front-end | tip part 222 which has.

It is a schematic block diagram of the manufacturing apparatus of the photosensitive laminated body incorporating the pre peeling apparatus which concerns on embodiment of this invention. It is sectional drawing of the elongate photosensitive web used for the said manufacturing apparatus. It is explanatory drawing of the state by which the adhesive label was adhere | attached on the said elongate photosensitive web. It is a structure explanatory view of the pre-peeling device. It is side surface explanatory drawing of the said pre peeling apparatus. It is explanatory drawing at the time of peeling a protective film from the said elongate photosensitive web. It is operation | movement explanatory drawing of the said pre peeling apparatus. It is a figure explaining an example of operation | movement of a peeling member. It is explanatory drawing of another shape of a press part. It is explanatory drawing of another shape of a press part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 20 ... Manufacturing apparatus 22a, 22b ... Photosensitive web 23a, 23b ... Photosensitive web roll 24 ... Glass substrate 26 ... Base film 28 ... Photosensitive resin layer 30 ... Protective film 32a, 32b ... Web delivery mechanism 40a, 40b ... Label adhesion Mechanism 44a, 44b ... Peeling mechanism 45 ... Substrate transport mechanism 46 ... Paste mechanism 63, 146 ... Peeling roller 80a, 80b ... Rubber roller 142 ... Base automatic peeling mechanism 144 ... Pre-peeling device 150 ... Peeling member 152 ... Movement mechanism 154 ... CCD Camera 162 ... Receiving rollers 164a, 164b ... Elevating cylinders 170a, 170b ... Release plates 172a, 172b ... Wave-shaped tip 174 ... Substrate detector 176 ... Cylinders 178a, 178b ... Contact type sensor

Claims (6)

The photosensitive web in which the support layer and at least the photosensitive material layer are laminated is bonded to the substrate with the photosensitive material layer side facing the substrate, and then the support layer is exposed between the substrates. A pre-peeling device for a photosensitive web that peels a part of the photosensitive web from the substrate in advance before peeling from the substrate integrally with the part,
A peeling member that presses a part of the photosensitive web exposed between the substrates to peel a part of the photosensitive web from the substrate;
A moving mechanism capable of moving the peeling member back and forth in the substrate transport direction;
A detector for detecting a pressing position of the photosensitive web by the peeling member;
With
The peeling member is configured in a plate shape that is long in the width direction intersecting the substrate transport direction of the photosensitive web, and is provided with a plurality of pressing portions that are in contact with a part of the photosensitive web. A photosensitive web pre-peeling device.   2. The pre-peeling device according to claim 1, wherein the peeling member advances and retracts toward the photosensitive web within a range of 7 mm to 15 mm from the other surface of the substrate opposite to the one surface on which the photosensitive web is provided. A pre-peeling device for a photosensitive web.   3. The pre-peeling device according to claim 1, wherein the peeling member is provided with a wave-shaped tip as the pressing portion. The pre-peeling device according to claim 3, wherein the wave-shaped tip portion has a distance between ridges protruding to the photosensitive web side within a range of 20 mm to 50 mm.
A photosensitive web pre-peeling apparatus, wherein a distance between the peak and valley is within a range of 3 mm to 6 mm. The pre-peeling device according to any one of claims 1 to 4, wherein the peeling member is divided in the width direction,
A pre-peeling device for a photosensitive web, wherein a substrate detector for detecting whether or not the substrate exists within a moving range of the peeling member is disposed in the divided portion. 6. The pre-peeling apparatus according to claim 5, wherein the substrate detector can be advanced and retracted via an actuator,
A pre-peeling device for a photosensitive web, comprising a contact-type sensor capable of detecting that the peeling member is displaced from the pressing position by contacting the substrate.

Images