JP2008103755A5 - - Google Patents
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- JP2008103755A5 JP2008103755A5 JP2007319013A JP2007319013A JP2008103755A5 JP 2008103755 A5 JP2008103755 A5 JP 2008103755A5 JP 2007319013 A JP2007319013 A JP 2007319013A JP 2007319013 A JP2007319013 A JP 2007319013A JP 2008103755 A5 JP2008103755 A5 JP 2008103755A5
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- JP
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- Prior art keywords
- link body
- wafer
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- substrate
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000012546 transfer Methods 0.000 claims description 171
- 238000002360 preparation method Methods 0.000 claims description 167
- 238000012545 processing Methods 0.000 claims description 135
- 239000000758 substrate Substances 0.000 claims description 126
- 238000000034 method Methods 0.000 claims description 43
- 238000006073 displacement reaction Methods 0.000 claims description 30
- 235000012431 wafers Nutrition 0.000 description 301
- 239000004065 semiconductor Substances 0.000 description 38
- 230000002452 interceptive effect Effects 0.000 description 24
- 230000007246 mechanism Effects 0.000 description 17
- 230000033001 locomotion Effects 0.000 description 14
- 239000000428 dust Substances 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 230000003749 cleanliness Effects 0.000 description 9
- 230000032258 transport Effects 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007319013A JP4746027B2 (ja) | 2007-12-10 | 2007-12-10 | 基板搬送方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007319013A JP4746027B2 (ja) | 2007-12-10 | 2007-12-10 | 基板搬送方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006198771A Division JP4098338B2 (ja) | 2006-07-20 | 2006-07-20 | ウェハ移載装置および基板移載装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008103755A JP2008103755A (ja) | 2008-05-01 |
| JP2008103755A5 true JP2008103755A5 (enrdf_load_stackoverflow) | 2009-09-03 |
| JP4746027B2 JP4746027B2 (ja) | 2011-08-10 |
Family
ID=39437782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007319013A Active JP4746027B2 (ja) | 2007-12-10 | 2007-12-10 | 基板搬送方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4746027B2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5364769B2 (ja) | 2011-09-26 | 2013-12-11 | 株式会社安川電機 | 搬送ロボットおよび基板処理装置 |
| TWI629743B (zh) * | 2012-02-10 | 2018-07-11 | 布魯克斯自動機械公司 | 基材處理設備 |
| US9293355B2 (en) | 2012-11-09 | 2016-03-22 | Kabushiki Kaisha Yaskawa Denki | Substrate transfer system and substrate processing system |
| JP6468159B2 (ja) * | 2015-10-15 | 2019-02-13 | 株式会社安川電機 | 搬送システムおよび搬送方法 |
| WO2023188181A1 (ja) * | 2022-03-30 | 2023-10-05 | 平田機工株式会社 | 基板搬送システム及び移載ロボット |
| WO2025062703A1 (ja) * | 2023-09-20 | 2025-03-27 | 株式会社Kokusai Electric | 基板処理装置、基板処理ユニット、基板処理方法及びプログラム |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3453223B2 (ja) * | 1994-08-19 | 2003-10-06 | 東京エレクトロン株式会社 | 処理装置 |
| JPH11135595A (ja) * | 1997-10-30 | 1999-05-21 | Sankyo Seiki Mfg Co Ltd | 基板受渡し装置 |
| JP4364634B2 (ja) * | 2001-07-13 | 2009-11-18 | ブルックス オートメーション インコーポレイテッド | 二次元３自由度ロボットアームの軌道プラニング及び移動制御戦略 |
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2007
- 2007-12-10 JP JP2007319013A patent/JP4746027B2/ja active Active
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