JP2008084858A - Processing method of exhaust hole of display panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently carry out processing of an exhaust hole of a display panel, and to prevent a crack or breakage from being generated in heat treatment of a post-process by preventing burrs from being formed in a processing part. <P>SOLUTION: The exhaust hole is processed as follows by non-contact type processing by an ultraviolet laser. Marking head coordinates of a laser unit are set on a setting model basis of a substrate, and the laser unit is moved to a wait position for marking. The substrate is loaded on a transfer conveyer to proceed to a processing stage. The substrate is lifted by jetting air on the upper side of the processing stage, and aligned at the center of the processing stage. The substrate is fixed on the processing stage by vacuum suction, and the exhaust hole is processed by a laser by running the laser on the processing position of the substrate. The substrate is discharged by the transfer conveyer. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a method of processing an exhaust hole in a display panel. More specifically, the exhaust hole is efficiently processed by non-contact processing using a laser to eliminate the friction of the substrate when aligning the substrates. The present invention relates to a method of processing an exhaust hole for a display panel.

  Generally, a PDP (Plasma Display Panel) which is a flat display element is a panel which is a display part of a plasma display device, and a gas such as neon is sealed in a narrow gap between two thin glass substrates, and the inner surface of the glass substrate. Are provided with transparent electrodes arranged in a horizontal direction and a vertical direction.

  In the manufacturing process of the PDP, when two glass substrates are joined, the PDP includes a step of processing an exhaust hole in one of the glass substrates in advance in order to discharge the air remaining inside.

  In the processing of such an exhaust hole, mechanical drilling using diamond has been carried out conventionally, but this is a direct contact method with a glass substrate, so the processing is not precise and the glass is vibrated by vibration. There is a problem that the substrate is damaged, and a burr is formed in the processing portion of the exhaust hole, and the formation of such a burr acts as a factor of cracks and damage during the heat treatment performed in the manufacturing process of the PDP. There was a problem to do.

  In addition, since mechanical drilling is performed when the exhaust hole is formed, not only is glass dust generated and harmful to the work environment, there is a problem that the cleaning process must be performed. There was a problem that it was not easy to cope with the increase in size and the introduction of the multi-chamfer method.

  The present invention has been made in view of the above-mentioned problems, and its purpose is to improve the processing efficiency in exhaust hole processing by non-contact processing using a laser, and to efficiently transfer a substrate. Needless to say, the present invention is to provide a method for processing an exhaust hole for a display panel that eliminates the friction of the substrate and enables easy processing of the exhaust hole by increasing the size of the panel and introducing a multi-sided construction method.

  Further, the present invention prevents damage to the substrate by non-contact type substrate processing, enables precision processing, prevents the formation of a barr at the processing portion of the exhaust hole, and performs heat treatment in the subsequent process. There are other objectives to overcome the traditional problems of cracking or breaking.

  In order to achieve the above object, the present invention provides a process of setting marking head coordinates of a laser unit for each substrate setting model, moving the laser unit to a standby position for marking, and loading the substrate into a loading unit. Loading to a transfer conveyor divided into three stages of an alignment processing section that vertically moves up and down and a discharge section and confirming whether or not it has entered a processing stage disposed on the alignment processing section; and the processing stage If the entry of the substrate is confirmed, the process of lowering the alignment processing portion of the transfer conveyor to release the contact with the substrate and blowing the air above the processing stage to float the substrate, and the substrate In the floating state, adjust the X-axis and Y-axis centering of the substrate to align it with the center of the processing stage. After the confirmation process and the center alignment of the substrate are completed, the floating state of the substrate is released, the substrate is fixed to the processing stage by vacuum suction, and the processing position of the substrate is moved by the laser moved to the standby position. When the exhaust hole is processed by scanning the laser and the suction process for removing dust generated during processing is completed, and the exhaust hole processing of the substrate is completed, the vacuum suction of the substrate is released, and the lowered state And a step of bringing the substrate into contact with the transfer conveyor, and a step of discharging the substrate by the transfer conveyor and confirming the passage of the substrate through the end line.

  As described above, according to the method for processing an exhaust hole for a display panel according to the present invention, since non-contact processing using a laser is performed, the processing efficiency by processing the exhaust hole can be greatly improved, It can be easily aligned in the center without friction, and not only can precision processing be performed, but also allows easy processing of exhaust holes by increasing the size of the panel and introducing a multi-sided construction method. Since it is a destructive process, compared to existing mechanical contact drilling, it can prevent the formation of a bar (burr) in the exhaust hole machining site, and the problem of cracking or breakage during heat treatment in the subsequent process Provides usefulness that can be prevented in advance.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a flowchart showing a method for processing an exhaust hole for a display panel according to the present invention, FIG. 2 is a conceptual diagram of an apparatus for the method for processing an exhaust hole for a display panel according to the present invention, and FIG. FIG. 4 is a diagram for explaining the adjustment in the Z-axis direction during laser processing in the present invention.

  As shown in FIGS. 1 and 2, according to the method of processing an exhaust hole for a display panel according to the present invention, the laser unit 10 scans a two-dimensional plane of the substrate G with a laser whose focus can be adjusted. A step of setting the marking head coordinates of the laser unit 10 for each set model of the substrate G, and moving the laser unit 10 to a standby position for marking (S1); The substrate G is loaded onto a transfer conveyor 20 divided into three stages, ie, a loading unit 21, an alignment processing unit 22 that vertically moves up and down, and a discharge unit 23, and is mounted on the processing stage 30 disposed on the alignment processing unit 22. (S2) for confirming that the substrate G has entered, and the substrate G on the processing stage 30 If the entry is confirmed, the alignment processing unit 22 of the transfer conveyor 20 is lowered to stop the transfer of the substrate, and the process of blowing the air above the processing stage 30 to float the substrate G (S3), and the substrate The step of adjusting the centering of the X axis and the Y axis of the substrate in the floating state of G to align it with the center of the processing stage 30 and confirming whether the center alignment of the substrate G is completed (S4), When the center alignment of the substrate G is completed, the floating state of the substrate is released, the process of fixing the substrate to the processing stage 30 by vacuum suction (S5), and the processing position of the substrate by the laser unit 10 moved to the standby position. Scanning the laser to process the exhaust hole, and performing a suction for removing dust generated during processing (S6); When the processing of the exhaust hole of the substrate G is completed, the process of releasing the vacuum suction of the substrate, raising the lowered alignment processing unit 22 to contact the substrate with the transfer conveyor 20 (S7), and the transfer conveyor 20 (S8) including the step of discharging the substrate G and confirming the passage of the substrate through the end line.

  At this time, it is preferable to use an ultraviolet laser as a laser used when processing the exhaust hole of the substrate G. It acts to improve spatial resolution by high energy photons with the removal of materials that do not cause thermal damage and short wavelengths that allow sharp focus, especially with very fast maximum power and high pulse energy, By using an ultraviolet laser of the Q-switching group that reaches 10 W at 355 nm, the exhaust hole processing efficiency is increased and precise processing is performed.

  The ultraviolet laser is an optimal example of a laser source, and is not particularly limited thereto. Any laser source can be used as long as it is easy to process exhaust holes and can perform precise processing. It is.

  As shown in FIGS. 3 and 4, the laser unit 10 has a variable beam extender (BET) 13 disposed between a laser source 11 and an optical system 12 to focus on the Z-axis direction (up and down) of the laser. (Focusing) The adjustment is made early, and the laser position can be adjusted by the optical system 12 including the X-axis mirror 14 and the Y-axis mirror 15, the X-axis galvanometer 16, the Y-axis galvanometer 17, and the focus lens 18. Configured.

  The alignment of the substrate G in the X-axis and Y-axis directions is performed by stoppers 41 arranged at the front, rear and both sides of the processing stage 30, an X-axis aligner 42 having a tension structure, and a Y-axis aligner 43. The

  The substrate G applied to the present invention is mainly made of glass.

  The processing method of the display panel exhaust hole having the above-described configuration according to the present invention will be described in detail as follows.

  First, the laser unit 10 comprising a laser source, an optical system, and a variable BET is set in accordance with the setting model of the substrate G to be processed, the head coordinates for marking are set, and the laser head is placed at the standby position for marking. Move (S1).

  The processing substrate G in the exhaust hole is loaded and transferred by the loading unit 21 of the transfer conveyor 20, and it is confirmed whether the processing substrate 30 has entered the processing stage 30 arranged on the alignment processing unit 22 (S2).

  At this time, the entry confirmation of the substrate G is signal-processed by the detection of a photo sensor (not shown) installed immediately behind the stopper 41, and at the same time, the operation of the transfer conveyor 20 is stopped, and due to inertia The transferred substrate is regulated and stopped by a stopper 41 positioned in the UP state in front of the processing stage 30.

  If the entrance of the substrate G is confirmed on the processing stage 30, the alignment processing unit 22 of the transfer conveyor 20 is made to release the contact with the substrate, and air is blown upward from below the processing stage 30 to eject the substrate G. (S3).

  With the substrate G floating, the X-axis aligner 42 and the Y-axis aligner 43 are adjusted in position to align the substrate with the center of the processing stage 30 and confirm whether the center alignment of the substrate G is completed ( S4).

  At this time, the servo motor (not shown) is controlled by a value already set in the main control unit (not shown) according to the application model of the substrate G, and the X-axis aligner 42 and the Y-axis aligner 43 are positioned. The substrate is moved to attempt center alignment of the substrate, and the completion of the position movement of the servo motor becomes a signal notifying completion of center alignment of the substrate G.

  Here, by using the floating of the substrate G, the position of the substrate floating in the air is adjusted in a contact state, so that the position adjustment of the substrate is facilitated, and the substrate G and the processing stage 30 are aligned when the substrates are aligned. By removing the friction between them, scratching can be prevented and the advantage of eliminating the friction of the substrate is provided.

  When the center alignment of the substrates is completed, the air supply is shut off to release the floating of the substrate, and the substrate is tightly fixed to the processing stage 30 by vacuum suction (S5).

  Thereafter, a laser is generated from the laser unit 10 moved to the standby position, and the Z-axis focusing by the variable BET is adjusted, and at the same time, the positions of the X-axis mirror and the Y-axis mirror by the X and Y galvanometers are adjusted. The exhaust hole is processed with the laser focused on the processing position (S6).

  At this time, suction is performed to remove dust generated on the substrate during processing of the exhaust hole.

  When processing of the exhaust hole of the substrate G is completed, the vacuum suction of the substrate is cut off to release the tightly fixed state, the lowered alignment processing portion 22 is raised again, and the substrate G is brought into contact with the transfer conveyor 20 ( S7).

  At this time, the substrate is brought into contact with the transfer conveyor 20 and separated from the processing stage 30 by the raising operation of the transfer conveyor, and the stopper 41 in the raised state is lowered to discharge the substrate G, and the X-axis aligner 42 and The Y-axis aligner 43 returns to the initial position.

  By operating the transfer conveyor 20, the substrate G is transferred to the discharge unit and discharged, and the passage of the substrate through the end line is confirmed (S 8).

  At this time, the passage of the substrate G is signal-processed by sensing of a photosensor (not shown) installed immediately in front of the stopper 41, and the lowered stopper 41 is raised again.

  The processing method of the display panel exhaust hole according to the present invention has been described based on the above-described specific embodiments and the accompanying drawings. However, the present invention is not particularly limited thereto. Various changes and modifications in the technical field made within the scope of the technical idea can be said to belong to the present invention.

  INDUSTRIAL APPLICABILITY The present invention can be applied to a processing method of an exhaust hole for a display panel in which exhaust holes are efficiently processed by non-contact processing using a laser so that friction of the substrate is eliminated when the substrates are aligned. It is.

3 is a flowchart illustrating a method of processing an exhaust hole for a display panel according to the present invention. It is a conceptual diagram of the apparatus for the processing method of the exhaust hole for display panels of this invention. It is a conceptual diagram of the laser processing of a board | substrate in this invention. It is a figure explaining the adjustment of the Z-axis direction at the time of laser processing in this invention.

Explanation of symbols

10 Laser unit 11 Laser source 12 Optical system 13 Variable BET
14, 15 Mirror 16, 17 Galvanometer 18 Focus lens 20 Transfer conveyor 30 Processing stage 41 Stopper 42 X-axis aligner 43 Y-axis aligner

Claims (4)

The process of setting the marking head coordinates of the laser unit for each setting model of the substrate and moving the laser unit to the standby position for marking,
The substrate is loaded onto a transfer conveyor divided into three stages of a loading unit, an alignment processing unit that vertically moves vertically, and a discharge unit, and it is confirmed whether or not the substrate has entered a processing stage disposed on the alignment processing unit. Process,
If the entry of the substrate onto the processing stage is confirmed, the process of lowering the alignment processing portion of the transfer conveyor to release the contact with the substrate and blowing the air above the processing stage to float the substrate; ,
Adjusting the X-axis and Y-axis centering of the substrate to be aligned with the center of the processing stage in the floating state of the substrate, and checking whether the center alignment of the substrate is completed;
When the center alignment of the substrate is completed, the process of releasing the floating state of the substrate and fixing the substrate to the processing stage by vacuum suction;
A process of scanning the laser to the processing position of the substrate by the laser moved to the standby position to process the exhaust hole, and performing suction for removing dust generated during processing,
When the processing of the exhaust hole of the substrate is completed, the process of releasing the vacuum suction of the substrate, raising the lowered alignment processing portion and bringing the substrate into contact with the transfer conveyor,
A method of processing an exhaust hole for a display panel, comprising: discharging the substrate by the transfer conveyor and confirming the passage of the substrate through the end line.   The method of processing an exhaust hole for a display panel according to claim 1, wherein the laser is an ultraviolet laser.   When processing the exhaust hole, a variable BET for variably adjusting the beam focusing is arranged between the laser source and the optical system so that the laser focusing in the Z-axis direction can be adjusted, and the X-axis mirror and the Y-axis mirror. 2. The display panel exhaust hole according to claim 1, wherein the position of the laser in the X-axis and Y-axis directions is adjusted by an optical system including an X-axis galvanometer, a Y-axis galvanometer, and a focus lens. Processing method.   The exhaust hole for a display panel according to claim 1, wherein the substrate is centrally aligned by a stopper, an X-axis aligner, and a Y-axis aligner arranged at the front, rear, and both sides of the processing stage. Processing method.