JP2008064694A - 干渉計測装置 - Google Patents

干渉計測装置 Download PDF

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Publication number
JP2008064694A
JP2008064694A JP2006244980A JP2006244980A JP2008064694A JP 2008064694 A JP2008064694 A JP 2008064694A JP 2006244980 A JP2006244980 A JP 2006244980A JP 2006244980 A JP2006244980 A JP 2006244980A JP 2008064694 A JP2008064694 A JP 2008064694A
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JP
Japan
Prior art keywords
temperature
measured
vacuum chamber
lens
interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006244980A
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English (en)
Japanese (ja)
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JP2008064694A5 (enrdf_load_stackoverflow
Inventor
Hitoshi Iijima
仁 飯島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2006244980A priority Critical patent/JP2008064694A/ja
Publication of JP2008064694A publication Critical patent/JP2008064694A/ja
Publication of JP2008064694A5 publication Critical patent/JP2008064694A5/ja
Pending legal-status Critical Current

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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2006244980A 2006-09-11 2006-09-11 干渉計測装置 Pending JP2008064694A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006244980A JP2008064694A (ja) 2006-09-11 2006-09-11 干渉計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006244980A JP2008064694A (ja) 2006-09-11 2006-09-11 干渉計測装置

Publications (2)

Publication Number Publication Date
JP2008064694A true JP2008064694A (ja) 2008-03-21
JP2008064694A5 JP2008064694A5 (enrdf_load_stackoverflow) 2009-11-12

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ID=39287526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006244980A Pending JP2008064694A (ja) 2006-09-11 2006-09-11 干渉計測装置

Country Status (1)

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JP (1) JP2008064694A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011127901A (ja) * 2009-12-15 2011-06-30 Canon Inc 干渉測定装置
KR101248369B1 (ko) 2011-07-21 2013-04-01 주식회사 현대케피코 감압 시험기

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190318A (en) * 1981-05-19 1982-11-22 Toshiba Mach Co Ltd Electron beam exposure device
JPS61239624A (ja) * 1985-04-16 1986-10-24 Toshiba Mach Co Ltd ロ−デイング装置およびロ−デイング方法
JPH07318308A (ja) * 1994-05-23 1995-12-08 Canon Inc 干渉測定方法及びそれを用いた干渉測定装置
JPH10312960A (ja) * 1997-05-13 1998-11-24 Toshiba Mach Co Ltd 電子ビーム描画装置の試料恒温化装置
JPH11168056A (ja) * 1997-12-03 1999-06-22 Nikon Corp ウェハ保持装置
JPH11312640A (ja) * 1998-02-25 1999-11-09 Canon Inc 処理装置および該処理装置を用いたデバイス製造方法
JP2000088512A (ja) * 1998-09-17 2000-03-31 Nikon Corp 干渉計測装置
JP2000161230A (ja) * 1998-11-30 2000-06-13 Toshiba Ceramics Co Ltd 真空装置及び真空排気方法
JP2003234282A (ja) * 2002-02-08 2003-08-22 Canon Inc 半導体露光装置、およびそれに用いるロードロックチャンバー
JP2006086387A (ja) * 2004-09-17 2006-03-30 Nikon Corp 基板搬送装置、露光装置及び基板搬送方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190318A (en) * 1981-05-19 1982-11-22 Toshiba Mach Co Ltd Electron beam exposure device
JPS61239624A (ja) * 1985-04-16 1986-10-24 Toshiba Mach Co Ltd ロ−デイング装置およびロ−デイング方法
JPH07318308A (ja) * 1994-05-23 1995-12-08 Canon Inc 干渉測定方法及びそれを用いた干渉測定装置
JPH10312960A (ja) * 1997-05-13 1998-11-24 Toshiba Mach Co Ltd 電子ビーム描画装置の試料恒温化装置
JPH11168056A (ja) * 1997-12-03 1999-06-22 Nikon Corp ウェハ保持装置
JPH11312640A (ja) * 1998-02-25 1999-11-09 Canon Inc 処理装置および該処理装置を用いたデバイス製造方法
JP2000088512A (ja) * 1998-09-17 2000-03-31 Nikon Corp 干渉計測装置
JP2000161230A (ja) * 1998-11-30 2000-06-13 Toshiba Ceramics Co Ltd 真空装置及び真空排気方法
JP2003234282A (ja) * 2002-02-08 2003-08-22 Canon Inc 半導体露光装置、およびそれに用いるロードロックチャンバー
JP2006086387A (ja) * 2004-09-17 2006-03-30 Nikon Corp 基板搬送装置、露光装置及び基板搬送方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011127901A (ja) * 2009-12-15 2011-06-30 Canon Inc 干渉測定装置
KR101248369B1 (ko) 2011-07-21 2013-04-01 주식회사 현대케피코 감압 시험기

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