JP2008055593A5 - - Google Patents
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- Publication number
- JP2008055593A5 JP2008055593A5 JP2007191691A JP2007191691A JP2008055593A5 JP 2008055593 A5 JP2008055593 A5 JP 2008055593A5 JP 2007191691 A JP2007191691 A JP 2007191691A JP 2007191691 A JP2007191691 A JP 2007191691A JP 2008055593 A5 JP2008055593 A5 JP 2008055593A5
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- conditioner
- band
- diamond abrasive
- bonded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007191691A JP4441552B2 (ja) | 2006-07-31 | 2007-07-24 | ダイヤモンドコンディショナ |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006228412 | 2006-07-31 | ||
| JP2006228411 | 2006-07-31 | ||
| JP2007191691A JP4441552B2 (ja) | 2006-07-31 | 2007-07-24 | ダイヤモンドコンディショナ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008055593A JP2008055593A (ja) | 2008-03-13 |
| JP2008055593A5 true JP2008055593A5 (enExample) | 2009-04-16 |
| JP4441552B2 JP4441552B2 (ja) | 2010-03-31 |
Family
ID=39238928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007191691A Expired - Fee Related JP4441552B2 (ja) | 2006-07-31 | 2007-07-24 | ダイヤモンドコンディショナ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4441552B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4604122B2 (ja) * | 2009-02-12 | 2010-12-22 | 本田技研工業株式会社 | 再研磨方法 |
| JP5502987B2 (ja) * | 2009-03-24 | 2014-05-28 | サンーゴバン アブレイシブズ,インコーポレイティド | 化学機械平坦化パッドコンディショナとして使用するための研磨工具 |
| KR101052325B1 (ko) * | 2009-04-06 | 2011-07-27 | 신한다이아몬드공업 주식회사 | Cmp 패드 컨디셔너 및 그 제조방법 |
| GB201121637D0 (en) * | 2011-12-16 | 2012-01-25 | Element Six Ltd | Polycrystalline cvd diamond wheel dresser parts and methods of utilizing the same |
| JP2014147993A (ja) * | 2013-01-31 | 2014-08-21 | Shin Etsu Handotai Co Ltd | ドレッシングプレート及びドレッシングプレートの製造方法 |
| KR102304574B1 (ko) * | 2014-03-21 | 2021-09-27 | 엔테그리스, 아이엔씨. | 세장형 절삭 에지를 갖는 화학 기계 평탄화 패드 컨디셔너 |
| GB201701246D0 (en) | 2017-01-25 | 2017-03-08 | Fives Landis Ltd | Machine tools and methods of operation thereof |
-
2007
- 2007-07-24 JP JP2007191691A patent/JP4441552B2/ja not_active Expired - Fee Related
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