JP2008047780A5 - - Google Patents
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- Publication number
- JP2008047780A5 JP2008047780A5 JP2006223534A JP2006223534A JP2008047780A5 JP 2008047780 A5 JP2008047780 A5 JP 2008047780A5 JP 2006223534 A JP2006223534 A JP 2006223534A JP 2006223534 A JP2006223534 A JP 2006223534A JP 2008047780 A5 JP2008047780 A5 JP 2008047780A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- interlayer insulating
- thin film
- film transistor
- microlens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims 12
- 239000004065 semiconductor Substances 0.000 claims 8
- 239000011229 interlayer Substances 0.000 claims 7
- 239000010409 thin film Substances 0.000 claims 7
- 239000010410 layer Substances 0.000 claims 5
- 239000007788 liquid Substances 0.000 claims 5
- 238000000034 method Methods 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 4
- 239000000126 substance Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000031700 light absorption Effects 0.000 claims 1
- 239000011344 liquid material Substances 0.000 claims 1
- 230000002940 repellent Effects 0.000 claims 1
- 239000005871 repellent Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223534A JP4969177B2 (ja) | 2006-08-18 | 2006-08-18 | 半導体装置の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223534A JP4969177B2 (ja) | 2006-08-18 | 2006-08-18 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008047780A JP2008047780A (ja) | 2008-02-28 |
| JP2008047780A5 true JP2008047780A5 (https=) | 2009-09-17 |
| JP4969177B2 JP4969177B2 (ja) | 2012-07-04 |
Family
ID=39181202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006223534A Expired - Fee Related JP4969177B2 (ja) | 2006-08-18 | 2006-08-18 | 半導体装置の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4969177B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118042890B (zh) * | 2024-01-17 | 2024-10-11 | 惠科股份有限公司 | 显示面板、显示面板的制备方法以及显示装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2755223B2 (ja) * | 1995-09-20 | 1998-05-20 | 日本電気株式会社 | バイアホール形成方法および装置 |
| JP4932173B2 (ja) * | 2004-03-25 | 2012-05-16 | 株式会社半導体エネルギー研究所 | 膜パターンの形成方法 |
| US7579224B2 (en) * | 2005-01-21 | 2009-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a thin film semiconductor device |
-
2006
- 2006-08-18 JP JP2006223534A patent/JP4969177B2/ja not_active Expired - Fee Related
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