JP2008032702A5 - - Google Patents

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Publication number
JP2008032702A5
JP2008032702A5 JP2007175160A JP2007175160A JP2008032702A5 JP 2008032702 A5 JP2008032702 A5 JP 2008032702A5 JP 2007175160 A JP2007175160 A JP 2007175160A JP 2007175160 A JP2007175160 A JP 2007175160A JP 2008032702 A5 JP2008032702 A5 JP 2008032702A5
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JP
Japan
Prior art keywords
defect
layer
defect information
manufacturing process
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007175160A
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English (en)
Japanese (ja)
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JP2008032702A (ja
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Publication date
Application filed filed Critical
Priority to JP2007175160A priority Critical patent/JP2008032702A/ja
Priority claimed from JP2007175160A external-priority patent/JP2008032702A/ja
Publication of JP2008032702A publication Critical patent/JP2008032702A/ja
Publication of JP2008032702A5 publication Critical patent/JP2008032702A5/ja
Pending legal-status Critical Current

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JP2007175160A 2006-07-03 2007-07-03 欠陥検査装置および欠陥検査方法 Pending JP2008032702A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007175160A JP2008032702A (ja) 2006-07-03 2007-07-03 欠陥検査装置および欠陥検査方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006183112 2006-07-03
JP2007175160A JP2008032702A (ja) 2006-07-03 2007-07-03 欠陥検査装置および欠陥検査方法

Publications (2)

Publication Number Publication Date
JP2008032702A JP2008032702A (ja) 2008-02-14
JP2008032702A5 true JP2008032702A5 (enExample) 2010-07-01

Family

ID=39122259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007175160A Pending JP2008032702A (ja) 2006-07-03 2007-07-03 欠陥検査装置および欠陥検査方法

Country Status (1)

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JP (1) JP2008032702A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602008004195D1 (de) * 2007-09-21 2011-02-10 Bobst Sa Verfahren zum Bestimmen der Oberflächengüte eines Trägers und zugehörige Maschine zur Transformation des Trägers
JP6123398B2 (ja) * 2013-03-18 2017-05-10 富士通株式会社 欠陥箇所予測装置、識別モデル生成装置、欠陥箇所予測プログラムおよび欠陥箇所予測方法
JP2014182219A (ja) * 2013-03-18 2014-09-29 Fujitsu Ltd 欠陥箇所予測装置、識別モデル生成装置、欠陥箇所予測プログラムおよび欠陥箇所予測方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2986410B2 (ja) * 1995-07-13 1999-12-06 松下電器産業株式会社 半導体ウェハの不良解析方法及びその装置
JP2000306964A (ja) * 1999-04-22 2000-11-02 Hitachi Ltd 検査データ処理方法および検査データ処理装置
JP3920003B2 (ja) * 2000-04-25 2007-05-30 株式会社ルネサステクノロジ 検査データ処理方法およびその装置
JP4649051B2 (ja) * 2001-03-21 2011-03-09 オリンパス株式会社 検査画面の表示方法及び基板検査システム

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