JP2008030171A - Positioning stage and transfer system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To implement a transfer system which makes up for a shortage of a transfer stroke by a transfer beam by a supplementary transfer means. <P>SOLUTION: There is provided a positioning stage which is set up by arranging a pair of X axial linear motors for moving sliders in an X axial direction in parallel with each other, and arranging a Y axial linear motor on a bridge member bridging a gap between the sliders of the pairing X axial linear motors, and then on the positioning stage thus set up, a workpiece as a machining object mounted on a suction pad is subjected to predetermined processing by using a tool mounted on the slider of the Y axial linear motor. The positioning stage is composed of: a pair of transfer slider members movable in the X axial direction along the pairing X axial linear motor; a transfer bridge member bridging a gap between the transfer slider members; and an arm member mounted on the transfer bridge member to support a lower surface of the workpiece, and extending in the X axial direction. The positioning stage is further composed of: a workpiece transfer means for supporting the workpiece, moving in the X axial direction, and delivering the workpiece to the outside of the stage; and the supplementary transfer means for making up for a shortage of the transfer stroke of the arm member to transfer the workpiece. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  In the present invention, a pair of X-axis linear motors that move a slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member that is bridged between the sliders of the pair of X-axis linear motors. The present invention relates to a transfer system having a workpiece machining apparatus that performs a predetermined process on a workpiece to be machined using a tool mounted on the machine.

  Prior art documents related to a linear motor and a workpiece transfer system include the following.

JP 63-213490 A JP 2000-065970 A JP 2006-082148 A

Hereinafter, a description will be given of JP-A-2006-082148.
FIG. 7 shows a workpiece processing in which a pair of X-axis linear motors are arranged in parallel at a predetermined distance, the sliders of each X-axis linear motor are bridged by a bridge member, and a Y-axis linear motor is provided on the bridge member. It is an external appearance perspective view of an apparatus.

  Reference numeral 1 denotes a housing of a workpiece processing apparatus. Protrusions 1a and 1b arranged in parallel in the X-axis direction are formed at both ends of the upper surface in the X-axis direction so that the cross-section is concave. The workpiece 2 is set at a predetermined position.

Reference numeral 31 denotes an X1-axis linear motor in which a stator is installed on the upper surface of the protruding portion 1a, and 32 denotes an X2-axis linear motor in which a stator is installed on the upper surface of the protruding portion 1b.
Reference numerals 41 and 42 denote sliders that run in the X-axis direction on the stators of these linear motors.

  Reference numeral 5 denotes a bridge member, which bridges between the sliders 41 and 42 and is arranged in parallel to the Y-axis direction orthogonal to the X-axis. Reference numeral 6 denotes a Y-axis linear motor having a stator disposed on the upper surface of the bridge member. Reference numeral 7 denotes a slider that runs on the stator 6 in the Y-axis direction.

  A tool (not shown) for executing predetermined processing (production, inspection of liquid crystal, semiconductor, electronic parts, etc.) on the workpiece 2 is mounted on the slider 7 of the Y-axis linear motor. XY positioning control for the workpiece 2 is performed.

However, the above-described workpiece machining apparatus has the following problems.
(1) A loader, an unloader, and a transfer device for loading and unloading the workpiece into and out of the stage are separately required as dedicated devices between the positioning stages, and the space occupied by these dedicated devices increases when the number of workpiece processing devices to be connected increases. The number of work processing devices that can be installed is limited, and space efficiency is reduced.

(2) Further, when the number of dedicated devices increases, incidental costs other than the work processing device increase, which becomes an obstacle factor for cost reduction for constructing the transfer system.

FIG. 8 shows a transfer system that achieves space efficiency and cost reduction, and is described in Japanese Patent Application Laid-Open No. 2004-267137 described in [Patent Document 3].
In FIG. 8, reference numerals 101, 102, and 103 denote workpiece processing apparatuses having the same structure connected in the X-axis direction. The workpiece 2 set in the workpiece machining apparatus 101 is transferred in the X-axis direction as indicated by an arrow P when machining on this stage is completed, and is set to the position indicated by 2 ′ in the workpiece machining apparatus 102 and is moved to this stage. Is processed.

  Further, when machining at this stage is completed, it is transferred in the X-axis direction as indicated by an arrow P ′, set at a position indicated by 2 ″ in the workpiece machining apparatus 103, and machining at this stage is executed. It is transferred in the direction of arrow P ″.

  The interface unit 201 in which the workpiece machining apparatus 101 and the workpiece machining apparatus 102 are coupled and the interface unit 202 in which the workpiece machining apparatus 102 and the workpiece machining apparatus 103 are coupled have the same recess shape as the recess 103 c of the workpiece machining apparatus 103. It is possible to connect and connect an arbitrary number of workpiece processing apparatuses with a common interface.

FIG. 9 is a plan view showing the arrangement of transfer means 301 and 302 formed in the housing of the workpiece processing apparatus in the interface unit 201 and the interface unit 202 in FIG.
The transfer means is realized by means having an actuator function for accessing and transferring a workpiece set in the upstream workpiece machining apparatus and transferring it to a predetermined position of the downstream workpiece machining apparatus.

FIG. 10 is a perspective view showing a configuration example of the transfer means. An actuator 800 is mounted on a slider 700 that travels on parallel rails 601 and 602, and a work is placed and transferred by operating arms 901 and 902 that are extended and contracted by the actuator.
FIG. 11 is a perspective view showing a state in which the operation arms 901 and 902 are extended.

Next, the workpiece machining apparatus of application number 2006-112373 related to the prior application filed on April 14, 2006, in which the suction plate 60 is used, will be described.
FIG. 12 is a plan view (a), a front view (b), and a side view (c) showing an embodiment of a workpiece machining apparatus. In addition, the same code | symbol is attached | subjected to the same element as the prior art example demonstrated in FIG.

  In FIG. 12, the work 2 is displayed as a transparent body. The work 2 is disposed at a predetermined location on the suction disk 60. Reference numeral 30 denotes processing means that reciprocates in the Y-axis direction along the bridge member 5.

Reference numeral 50 denotes a tube. One end of the tube is attached to the back surface of the suction disk 60, and the other end is connected to a vacuum / pressure pump (not shown).
Reference numeral 70 denotes workpiece transfer means attached to the housing 1, and in the example shown in the figure, four are provided on opposing side surfaces in the vicinity of the longitudinal end of the rectangular workpiece 2.

The workpiece conveying means 70 is disposed at a position slightly away from the workpiece 2 during workpiece processing, and reciprocates in the direction of arrow A (see FIG. C).
In FIG. 12, the processing by the workpiece processing apparatus is completed, the bridge member 5 is moved upstream, the suction state by the suction plate 60 is released, the compressed gas is blown from the tube 50, and the workpiece is moved to the symbol K in the Z direction. And a tip of the workpiece transfer means 70a, 70a ′, 70b, 70b ′ extend in the direction of arrow A to support the side surface of the workpiece.

FIG. 13 shows a state in which the workpiece transfer means 70 moves in the direction of arrow G while supporting the workpiece 2 and moves the workpiece 2 to a device downstream of the two workpiece processing devices arranged side by side.
In this case, the workpiece conveying means 70 itself is moved by the linear motor alone or the workpiece conveying means 70a, 70a ′ and the workpiece conveying means 70b, 70b ′ move as a pair, and the downstream workpiece conveying means 70c, 70c ′, 70d. , 70d ′, when the workpiece 2 comes in front of itself, extends the tip toward the side surface of the workpiece 2, supports the workpiece and moves it to a predetermined position. In the state where the workpiece 2 is moving, the bridge member 5 stands by on the upstream side (the illustrated position) of each workpiece processing apparatus.

FIG. 14 shows a state in which the workpiece 2 is moved to a predetermined position of the workpiece processing apparatus on the downstream side, the workpiece conveying means 70 is separated from the side surface of the workpiece, and suction is started and the workpiece 2 is fixed to the suction plate 60. Yes.
Further, in this example, a state is shown in which a new workpiece is fixed at a predetermined position of the upstream workpiece processing apparatus, and each workpiece 2 is processed by the processing means 30 mounted on the bridge member 5. ing.

FIG. 15 shows an example in which a stopper 73 is provided on the workpiece conveying means 70. When the processing of the workpiece is completed, the extending member 70x constituting the workpiece conveying means is moved upward in the direction of arrow B toward the upper end of the workpiece. Moving.
Next, the suction of the workpiece is released, and the workpiece 2 is lifted by the injection of the compressed gas from the arrow Z direction. The floated work is prevented from floating by the stopper 73.

Next, the extending means 70x moves in the direction of arrow E to support the workpiece 2, and in the supported state, the stopper 73 moves slightly upward to be in a non-contact state with the workpiece.
Next, the work conveying means 70 moves in the X direction to move the work.

FIG. 16 is a plan view (a), a front view (b), and a side view (b) of a main part showing another embodiment of the work conveying means.
In this example, the work conveying means 71 itself having the rotating member 72 is fixed to the housing 1, and the work is supported by the rotating member 72 and conveyed by the rotation of the rotating member 72.

  In FIG. 16, the processing by the workpiece processing apparatus is completed, the bridge member 5 moves upstream, the suction state by the suction plate 60 is released, and compressed gas is blown from the tube 50 of the workpiece transfer means 70, thereby the workpiece 2. Shows a state in which it floats by a distance indicated by K in the arrow Z direction and abuts against the stopper 73.

FIG. 17 is a partial detailed explanatory view of the work conveying means 71. In this state, the rotating member 72 and the workpiece 2 are not in contact with each other.
Next, the stopper 73 moves slightly upward to be in a non-contact state with the workpiece 2, and the workpiece conveying means 71 moves in the direction of arrow E and contacts the side surface of the workpiece 2.
Then, the rotating member 72 rotates in the arrow C direction in the contact state, so that the workpiece 2 can move in the arrow D direction.

FIG. 18 shows a state in which a plurality of such workpiece processing devices (two in the illustrated example) are arranged in series, and the rotating member 72 is rotating and the workpiece 2 is being transferred in the direction of arrow G. Shows the state.
The workpiece 2 is supported by the rotating member 72 (see FIG. 5) of the conveying means 71a, 71a ′, 71b, 71b ′ before being transferred, but is supported by 71b, 71b ′, 71c, 71c ′ during the transfer. It will be in the state.

FIG. 19 shows a state in which the transfer is completed and the work described above with reference to FIG.
That is, the stopper 73 shown in FIG. 16 is brought into contact with the work 2, the rotating member 72 is separated from the side surface of the work 2, and the pressure of the compressed gas is lowered and placed on the suction disk 60 to be adsorbed and fixed.
The operations of these workpiece conveying members are controlled by a control device (not shown).
In addition, accurate positioning of the workpiece 2 in the XY directions is performed by another means.

  Next, a work processing apparatus of application number 2005-294543 related to the prior application filed on October 7, 2005, in which the arm members 87 and 88 are used, will be described.

FIG. 20 is an external perspective view showing an embodiment of a workpiece machining apparatus to which the present invention is applied. The same elements as those in FIGS. 7 and 8 are denoted by the same reference numerals and description thereof is omitted.
Hereinafter, the characteristic part of the present invention will be described.

The present invention is characterized in that the workpiece machining apparatus itself includes workpiece conveying means that supports the workpiece and moves in the X-axis direction and delivers the workpiece to the outside of the stage.
With reference to FIG. 20, the structure of the workpiece transfer means will be described.

  The basic configuration of the workpiece transfer means to which the present invention is applied is a bridge between the pair of transfer slider members 81 and 82 that move in the X-axis direction along the pair of X-axis linear motors 31 and 32 and the transfer slider member. The conveyance bridge member 83 includes arm members 87 and 88 that are attached to the conveyance bridge member and support the lower surface of the workpiece.

The pair of transport slider members 81 and 82 are operated to move in the X-axis direction on the pair of X-axis linear motors 31 and 32 in common with the sliders 41 and 42.
A transport bridge member 83 is disposed so as to bridge between the pair of transport slider members 81 and 82.

  Reference numeral 84 denotes a Y-axis linear motor, which is disposed on the transport bridge member 83 in the Y-axis direction. The Y-axis linear motor 84 can have the same structure as the Y-axis linear motor 5 arranged on the bridge member 5.

  Reference numerals 85 and 86 denote a pair of sliders that are independently moved on the Y-axis linear motor 84 in the Y-axis direction. These sliders can also have the same structure as the slider 7 disposed on the Y-axis linear motor 5.

  Reference numerals 87 and 88 denote a pair of arm members that support the lower surface of the lifted workpiece 2 and extend in the X-axis direction parallel to the surface of the recess 1c, and carry the workpiece 2 out of the stage or remove the workpiece 2 from the outside of the stage. Carry in. The pair of arm members 87 and 88 are coupled to the pair of sliders 85 and 86 by connecting members 87a and 88a, and the pair of sliders 85 and 86 are independently operated to move in the Y-axis direction.

  The pair of arm members 87 and 88 are in a standby state during the processing of the workpiece 2 and are shifted in the Y-axis direction outside the workpiece processing position. The transport bridge member 83 is also upstream of the stage in the X-axis direction. It is shifted at the end and set at a position that does not hinder the processing of the workpiece 2.

  The pair of arm members 87 and 88 support the work 2 from the lower surface by moving the gap generated in the lower surface of the work 2 lifted up in the Z-axis direction in the Y-axis direction when the work 2 is carried out / in. In this state, it is moved in the X-axis direction.

21 to 23 are plan views for explaining the movement of the workpiece machining bridge 6 and the workpiece transfer conveyance bridge member 83.
21 is a plan view showing a standby state before workpiece processing, FIG. 22 is a plan view showing a state during workpiece processing, and FIG. 23 is a plan view showing a state during workpiece transfer.

In the standby state shown in FIG. 21, the transport bridge member 83 is shifted and arranged at the upstream end of the stage.
Reference numeral 89 denotes a suction disk, which is formed on the surface of the recess 1c with a predetermined height in the Z-axis direction in accordance with the shape of the workpiece 2 (not shown). The workpiece 2 is suction-fixed to the upper surface of the suction disk 89 by a vacuum suction means (not shown) and processed.

  Reference numeral 90 denotes a plurality of lift pin means arranged in the lower surface side space of the suction disk 89. The pins protrude in the Z-axis direction from holes formed on the upper surface of the suction disk, and the workpiece 2 is lifted up in the Z-axis direction. Lift up.

  The plurality of lift pin means 90 are arranged in a grid at predetermined intervals in the X-axis direction and the Y-axis direction. The pair of rows 90A and 90A ′ in the X-axis direction is the outermost row A and row A ′ in the Y-axis direction. The pair of rows 90B and 90B ′ in the X-axis direction are the rows B and B ′ inside the rows A and A ′. The number of columns is arbitrary.

In the state during the workpiece machining shown in FIG. 22, the bridge member 5 is moved on the workpiece 2 (not shown) fixed to the suction plate 89 in the X-axis direction, and a predetermined machining process is executed.
During the processing period, the transport bridge means 83 maintains the standby position shown in FIG.

In the state during the workpiece conveyance shown in FIG. 23, the bridge member 6 that has been processed is moved to the most downstream position in the X-axis direction of the stage and stopped at that position (the state shown in the drawing).
When the processing is completed, the workpiece 2 is lifted up in the Z-axis direction by the lift pin means 90.

  In the standby state, the arm members 87 and 88 arranged at the end in the Y-axis direction outside the processing position of the workpiece have a predetermined gap between the workpiece 2 and the suction plate 89 generated by the lift-up toward the center in the Y-axis direction. Move to the position.

  When the arm member moving operation is completed, the work 2 is lifted down by the lift pin means 90 and mounted on the arm members 87 and 88. When the mounting is completed, the transfer bridge means 83 is moved downstream in the X-axis direction (arrow P), and the work 2 is carried out of the stage as shown in the state of being mounted on the arm members 87 and 88, Passed to the next process equipment.

24 to 26 are image diagrams for explaining the transition of the lift-up and lift-down of the workpiece 2 and the movement operation of the arm members 87 and 88 by the lift pin means 90. FIG.
For the sake of simplicity, each of the lift pins in the A row and the B row and the portion of the arm member 87 are shown.

24A to 24J show a transition from the initial position where the arm members 87 and 88 are in the standby state to the time when the workpiece 2 is supported.
At the initial position in FIG. 24A, the work 2 is held by suction on the suction disk 89.

  The lift pin means installed in the lower surface space of the suction board 89 is composed of a pin 91 extending in the Z-axis direction and a pin operation unit 92, and the pin 91 is in a state of being pulled down to the lowest position at this initial position. The arm member 87 (same for 88, the same applies hereinafter) is located at a position deviating from the processing position of the workpiece 2 in the Y-axis direction.

In FIG. 24B, all the pins of the lift pin means 90 are extended in the Z-axis direction, and the workpiece 2 whose suction is released is lifted up from the surface of the suction plate 89 in the Z-axis direction.
In FIG. 24C, only the pins in the A row are pulled to the initial position, so that a movement space to the B row of the arm member 87 appears.

In FIG. 24D, the arm member 87 is moved in the Y-axis direction to the front of the B row.
In FIG. 24 (E), the pins in the A row that have been pulled in are extended to the lower surface of the workpiece 2.
In FIG. 24 (F), only the pins in the B row are drawn to the initial position, so that a movement space of the arm members 87 to the C row (not shown) appears.

In FIG. 24G, the arm member 87 is moved in the Y-axis direction to the front of the C row.
In FIG. 24 (H), the pins in the B row that have been pulled in are extended to the lower surface of the workpiece 2.
FIG. 24 (I) shows the repetition of the above operation, and this operation sequentially moves the arm member 87 to the target Y-axis direction position.

  FIG. 24J shows a state in which the movement operation of the arm member 87 is completed and all the pins of the lift pin means 90 are pulled to the initial position, and the workpiece 2 is supported by the arm member 87 that has been moved. It becomes a state. In this state, the transfer bridge member 83 is moved in the X-axis direction, and the work 2 supported by the arm member 87 is carried out of the stage.

FIGS. 25A to 25J show a transition in which the lifted workpiece 2 is lifted down onto the suction plate 89 and the arm member 87 is moved to the standby position.
In the initial position of FIG. 25A, the work 2 is supported by the arm member 87 in a state where all the pins of the lift pin means 90 are pulled to the initial position.

In FIG. 25B, all the pins of the lift pin means 90 are extended in the Z-axis direction, and the workpiece 2 is further lifted up from the support surface of the arm member 87 in the Z-axis direction.
In FIG. 25C, since only the pins in the B row are drawn to the initial position, a movement space to the A row of the arm members 87 appears.

In FIG. 25D, the arm member 87 is moved in the Y-axis direction to the front of the A row.
In FIG. 25 (E), the pins in the B row that have been drawn are extended to the lower surface of the workpiece 2.
In FIG. 25 (F), since only the pins in the A row are drawn to the initial position, a movement space to the standby position of the arm member 87 appears.

In FIG. 25G, the arm member 87 is operated to move in the Y-axis direction to the standby position.
In FIG. 25H, the pins in the B row that have been pulled in are extended to the lower surface of the workpiece 2.
FIG. 25I shows the repetition of the above operation, and by this operation, the arm member 87 moves to the Y-axis direction position to the standby position.

  FIG. 25J shows a state in which the operation of moving the arm member 87 to the standby position is completed and all the pins of the lift pin means 90 are pulled to the initial position, and the work 2 is held on the upper surface of the suction disk 89. It will be in the state.

FIGS. 26A to 26D show transitions in which the work 2 unloaded from the upstream stage is placed on the suction plate of the downstream stage in the connected transfer system.
FIG. 26A shows a state in which the workpiece 2 is transferred to the position of the suction plate 89 of the downstream stage by the arm member 87 of the upstream stage, and all the pins of the lift pins 90 of the downstream stage are in the initial position. Has been drawn into.
Reference numeral 93 denotes an arm member of the downstream stage.

In FIG. 26B, all the pins that have been drawn are extended to the lower surface of the workpiece 2, and the workpiece 2 is separated by the arm member 87 and lifted up in the Z-axis direction.
In FIG. 26C, the arm member 87 of the upstream stage is returned to the upstream stage.
In FIG. 26D, all the pins of the lift pin means 90 are drawn to the initial position, and the workpiece 2 is held on the upper surface of the suction disk 89.

  In the embodiment shown in FIG. 20, the transport slider members 81 and 82 are configured to be moved and operated by sharing the pair of X-axis linear motors 31 and 32 that are shared with the sliders 41 and 42. However, the present invention is not limited to this. Is not to be done.

FIG. 27 is an external perspective view of a workpiece machining apparatus showing another embodiment of FIG.
Reference numerals 94 and 95 denote a pair of guide rails arranged in the X-axis direction on the inner walls of the projecting portions 1a and 1b of the housing 1, and the transport slider members 81 and 82 are attached to these guide rails and are arranged in the X-axis direction. Is moved to.
As the operation means, a linear motor, a ball screw, a timing belt, or the like can be adopted.

  FIG. 28 is a perspective view showing an embodiment of a transfer system in which a plurality of workpiece processing apparatuses of the present invention shown in FIG. 20 are connected in the X-axis direction. In this embodiment, a transfer system in which three stages S1, S2, and S3 are connected is shown.

  In the connected transfer system, each stage needs to have a common mechanical interface structure on the workpiece receiving side from the upstream stage and the workpiece transferring side to the downstream stage.

  In a general transfer system in which the processing for the workpiece 2 is sequentially transferred from the upstream stage to the downstream stage, the workpiece transfer means of each stage is configured to connect the workpiece processed in the upstream stage to the connected downstream side. After transporting to the processing position on the stage, it returns to the standby position.

  When a workpiece that has been processed on the downstream stage is returned to the upstream stage for reprocessing, the workpiece transfer means on the upstream stage moves the workpiece 2 to the processing position on the connected downstream stage. The workpiece 2 that has been transferred and processed on the downstream stage is transferred again to the processing position on the upstream stage, and then returned to the standby position.

Such an apparatus has the following problems.
As shown in FIG. 29, a case where the workpiece 2 is conveyed to three adjacent stages will be described. Hereinafter, the stages are sequentially referred to as a first stage, a second stage, and a third stage from the upstream side.

  The bridge member 5 of the first stage and the transfer bridge member 83 of the second stage become an obstacle and become a dead space, and as shown in FIG. 30, the workpiece 2 is moved relative to the stage relative position on the first stage. In the 2nd stage, it cannot convey to the same stage relative position.

Therefore, as shown in FIG. 31, when the workpiece 2 is transferred from the second stage to the third stage, it cannot be transferred to the third stage.
In short, when a plurality of stages are connected in the X-axis direction, the transport stroke with the transport beam becomes insufficient.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-described problems, and to provide a transfer system in which a supplementary transport means compensates for an insufficient transport stroke of a transport beam.

In order to achieve such a problem, in the present invention, in the positioning stage of claim 1,
A pair of X-axis linear motors that move the slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member bridged between the sliders of the pair of X-axis linear motors. A pair of transports that move in the X-axis direction along the pair of X-axis linear motors in a positioning stage that performs predetermined processing on a workpiece to be processed placed on a suction plate using a mounted tool A slider member, a transport bridge member bridged between the transport slider members, and an arm member attached to the transport bridge member to support the lower surface of the workpiece and extend in the X-axis direction, support the workpiece and support the X-axis. A workpiece transfer means for moving the workpiece in the direction and delivering the workpiece to the outside of the stage; Characterized by comprising a replenishment transport means for transporting.

In the positioning stage of claim 2 of the present invention, in the positioning stage of claim 1,
The replenishing and conveying means includes a second arm member having one surface supporting the lower surface of the workpiece, one surface connected to the other surface of the second arm member, and the other surface connected to the arm member. And a sliding means for sliding the second arm member in the X-axis direction.

In the positioning stage of claim 3 of the present invention, in the positioning stage of claim 2,
The sliding means includes a sliding block having one surface connected to the other surface of the second arm member and the other surface connected to the arm member, and a ball screw screwed to the sliding block. And a motor attached to one end of the ball screw rod and sliding the sliding block in the X-axis direction.

In the positioning stage according to claim 4 of the present invention, in the positioning stage according to claim 1,
The replenishing / conveying means includes a moving means for moving the suction plate in the X-axis direction to the stage end while the workpiece is placed during conveyance.

In the positioning stage according to claim 5 of the present invention, in the positioning stage according to any one of claims 1 to 4,
The pair of transport slider members are moved and operated by the pair of X-axis linear motors.

In the positioning stage according to claim 6 of the present invention, in the positioning stage according to any one of claims 1 to 5,
The arm member is disposed outside the processing position of the workpiece in the standby state, and is moved and operated to the lower surface of the workpiece lifted up in the Z-axis direction when the workpiece is transported.

In the positioning stage according to claim 7 of the present invention, in the positioning stage according to any one of claims 1 to 6,
A plurality of lift pin means for lifting up or down the workpiece in the Z-axis direction from its lower surface side is provided.

In the transfer system according to claim 8 of the present invention,
A plurality of positioning stages according to claim 1 to claim 7 are connected in the X-axis direction.

In the transfer system according to claim 9 of the present invention, the transfer system according to claim 8,
Each positioning stage has a common mechanical interface structure on the receiving side and the transferring side of the workpiece.

In the transfer system of claim 10 of the present invention, in the transfer system of claim 8 or claim 9,
The workpiece conveying means returns the workpiece processed by the upstream positioning stage to the standby position after conveying the workpiece to the processing position of the connected downstream positioning stage.

In the transfer system of claim 11 of the present invention, in the transfer system of claim 8 or claim 9,
The workpiece conveying means conveys the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage, and transfers the workpiece processed by the downstream positioning stage to the upstream side. It returns to the standby position after being conveyed to the processing position of the positioning stage.

According to claim 1 of the present invention, there are the following effects.
Since the replenishment transport means for replenishing the arm member transport stroke and transporting the work is provided, the influence of the transport dead space caused by the transport bridge member etc. can be eliminated, and the work between the continuously arranged stages can be eliminated. Thus, a positioning stage that makes it possible to convey the above is obtained.

According to claim 2 of the present invention, there are the following effects.
The replenishing and conveying means includes a second arm member having one surface supporting the lower surface of the workpiece, one surface connected to the other surface of the second arm member, and the other surface connected to the arm member. Since the sliding means for sliding the arm member in the X-axis direction is provided, a configuration in which the arm member is extended can be obtained, and an inexpensive positioning stage can be obtained by a simple configuration.

According to claim 3 of the present invention, there are the following effects.
The sliding means includes a sliding block having one surface connected to the other surface of the second arm member and the other surface connected to the arm member, a ball screw rod screwed to the sliding block, and a ball screw Since a motor that is attached to one end of the rod and slides the sliding block in the X-axis direction is provided, a positioning stage that can reliably perform replenishment conveyance is obtained.

According to claim 4 of the present invention, there are the following effects.
Since the replenishing / conveying means is provided with a moving means for moving the suction plate to the stage end in the X-axis direction while placing the work during transportation, a positioning stage capable of reliably performing replenishing / conveying is obtained.

According to claim 5 of the present invention, there are the following effects.
Since the pair of transport slider members are moved and operated by the pair of X-axis linear motors, there is no need to newly provide X-axis direction moving means, and an inexpensive positioning stage can be obtained.

According to claim 6 of the present invention, there are the following effects.
The arm member is disposed outside the workpiece processing position in the standby state, and is moved to the lower surface of the workpiece lifted in the Z-axis direction when the workpiece is transported, so that a positioning stage that can be easily processed is obtained.

According to claim 7 of the present invention, there are the following effects.
Since a plurality of lift pin means are provided for lifting and lowering the workpiece in the Z-axis direction from the lower surface side, a positioning stage capable of easily lifting or lifting the workpiece is obtained.

According to claim 8 of the present invention, there are the following effects.
Since a plurality of the positioning stages are connected in the X-axis direction, it is possible to eliminate the influence of the transfer dead space caused by the transfer bridge member and the like, and to reliably transfer the workpiece between the continuously arranged stages. A transfer system is obtained.

According to the ninth aspect of the present invention, the following effect can be obtained.
Since each positioning stage has a common mechanical interface structure on the workpiece receiving side and delivery side, parts can be shared and an inexpensive transfer system can be obtained.

According to the tenth aspect of the present invention, the following effects can be obtained.
The workpiece transfer means returns the workpiece to the standby position after transferring the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage. Therefore, there is a transfer system that can reliably transfer the workpiece. can get.

According to the eleventh aspect of the present invention, the following effects can be obtained.
The workpiece transfer means transfers the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage, and positions the workpiece processed by the downstream positioning stage on the upstream side. Since the sheet is returned to the standby position after being transported to the processing position on the stage, a transfer system capable of easily reworking on the upstream side is obtained.

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is an explanatory view of the main part configuration of an embodiment of the present invention, (a) is a plan view, (b) is a side view, FIGS. 2, 3, 4 and 4 are operation explanatory views of FIG. a) is a plan view, and (b) is a side view.
This is an embodiment in which a suction disk 60 similar to FIG. 12 is used.
In the figure, the same symbol structure as in FIG. 12 represents the same function.
Only the differences from FIG. 12 will be described below.

The workpiece transfer means 11 supports the workpiece 2 and moves in the X-axis direction, and delivers the workpiece 2 to the outside of the stage.
The workpiece transfer means 11 includes a pair of transfer slider members 111 and 112, a transfer bridge member 113, and an arm member 114.

The pair of transport slider members 111 and 112 move in the X-axis direction along the pair of X-axis linear motors 31 and 32.
The transport bridge member 113 is bridged between the transport slider members 111 and 112.

The arm member 114 is attached to the transport bridge member 113, supports the lower surface of the workpiece 2, and extends in the X-axis direction.
The replenishment conveyance means 12 replenishes the conveyance stroke of the arm member 114 and conveys the workpiece 2.

In this case, the replenishment transport unit 12 has a moving unit that moves the suction plate 60 to the stage end in the X-axis direction while the workpiece 2 is placed during transport.
For example, the moving means uses the X-axis linear motors 31 and 32 to move the suction plate 60 in the X-axis direction.

The pair of transport slider members 111 and 112 are moved and operated by the pair of X-axis linear motors 31 and 32.
Further, the arm member 114 is arranged outside the processing position of the workpiece 2 in the standby state, and is moved to the lower surface of the workpiece 2 lifted in the Z-axis direction when the workpiece 2 is transported.

Further, as explained in the positioning device of application No. 2005-294543 related to the prior application filed on October 7, 2005, the workpiece 2 is lifted up or down in the Z-axis direction from its lower surface side. A plurality of lift pin means.
In FIG. 1, a plurality of positioning stages are coupled in the X-axis direction.

Each positioning stage has a mechanical interface structure in which the receiving side and the delivery side of the workpiece 2 are common.
The workpiece transfer means 11 returns to the standby position after transferring the workpiece 2 processed by the upstream positioning stage to the processing position of the connected downstream positioning stage.

  The workpiece conveying means 11 conveys the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage, and the workpiece processed by the downstream positioning stage on the upstream side. It is also possible to return to the standby position after transporting to the processing position of the positioning stage.

In the above configuration, at the time of conveyance, as shown in FIG. 2, the suction plate 60 of the first stage is moved by the moving means to the conveyance end of the first stage.
Then, the suction plate 60 of the second stage is moved by the moving means to the conveyance end of the first stage.

As shown in FIG. 3, the workpiece conveying means 11 conveys the workpiece 2 of the first stage to the suction disk 60 of the second stage.
As shown in FIG. 4, the suction plate 60 of the second stage is moved to the processing position by the moving means.
The above operations are sequentially performed on the downstream stage, and the workpiece 2 is conveyed.

As a result,
The replenishing / conveying means 12 is provided with a moving means for moving the suction plate 60 to the stage end in the X-axis direction while the workpiece 2 is placed at the time of transportation. It is done.

  Since the pair of transport slider members 111 and 112 are moved by the pair of X-axis linear motors 31 and 32, there is no need to newly provide X-axis direction moving means, and an inexpensive positioning stage can be obtained.

  The arm member 114 is arranged outside the processing position of the workpiece 2 in the standby state, and is moved to the lower surface of the workpiece 2 lifted up in the Z-axis direction when the workpiece 2 is transported. Is obtained.

  Since a plurality of lift pin means for lifting up or down the workpiece 2 from the lower surface side in the Z-axis direction are provided, a positioning stage capable of easily lifting or lifting the workpiece is obtained.

  Since a plurality of positioning stages are connected in the X-axis direction, the influence of the dead space of the conveyance caused by the conveyance bridge member 113 and the like can be eliminated, and the workpiece can be reliably conveyed between the continuously arranged stages. A transfer system is obtained.

  Each positioning stage is characterized in that the receiving side and the receiving side of the workpiece 2 have a common mechanical interface structure, so that parts can be shared and an inexpensive transfer system can be obtained.

  Since the workpiece transfer means 11 returns the standby position after the workpiece processed by the upstream positioning stage is transferred to the processing position of the connected downstream positioning stage, the transfer system can reliably transfer the workpiece. Is obtained.

  The workpiece conveying means 11 conveys the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage, and the workpiece processed by the downstream positioning stage on the upstream side. Since it returns to the standby position after being conveyed to the processing position of the positioning stage, a transfer system that can facilitate reworking on the upstream side is obtained.

FIG. 5 is an explanatory view showing the configuration of the main part of another embodiment of the present invention.
In the present embodiment, the replenishing / conveying means 13 includes a second arm member 131 having one surface supporting the lower surface of the work 2, one surface connected to the other surface of the second arm member 131, and the other surface. This surface is connected to the arm member 114 and has a sliding means 132 that slides the second arm member 131 in the X-axis direction.

  Specifically, the sliding means 132 includes a sliding block 1321 having one surface connected to the other surface of the second arm member 131 and the other surface connected to the arm member 114, as shown in FIG. The ball screw rod 1322 is screwed to the sliding block 1321, and the motor 1323 is attached to one end of the ball screw rod 1322 and slides the sliding block 1321 in the X-axis direction.

As a result,
The replenishing / conveying means 13 includes a second arm member 131 having one surface supporting the lower surface of the workpiece 2, one surface connected to the other surface of the second arm member 131, and the other surface to the arm member 114. Since the connected sliding means 132 for sliding the second arm member 131 in the X-axis direction is provided, a configuration in which the arm member 131 is extended can be obtained, and an inexpensive positioning stage can be obtained with a simple configuration. .

  The sliding means 132 includes a sliding block 1321 having one surface connected to the other surface of the second arm member 131 and the other surface connected to the arm member 114, and a ball screwed to the sliding block 1321. Since a screw rod 1322 and a motor 1323 which is attached to one end of the ball screw rod 1322 and slides the sliding block 1321 in the X-axis direction are provided, a positioning stage capable of reliably performing replenishment conveyance is obtained. It is done.

The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention.
Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.

It is principal part structure explanatory drawing of one Example of this invention. It is operation | movement explanatory drawing of FIG. It is operation | movement explanatory drawing of FIG. It is operation | movement explanatory drawing of FIG. It is operation | movement explanatory drawing of the other Example of this invention. It is principal part structure explanatory drawing of the specific example of FIG. It is structure explanatory drawing of the prior art example generally used conventionally. It is composition explanatory drawing of the other conventional example generally used conventionally. It is a top view which shows arrangement | positioning of the transfer means formed in the interface part in FIG. It is a perspective view which shows the structural example of the conventional transfer means. It is a perspective view which shows the state by which the operation arm in FIG. 10 was extended. A plan view (a), a front view (b), and a side view showing an embodiment of a workpiece processing apparatus of application number 2006-112373 related to the prior application filed on April 14, 2006, using the suction plate 60 (C). It is explanatory drawing which shows operation | movement of the workpiece conveyance means shown in FIG. It is the top view (a), front view (b), and side view (c) which show the structural example of the transfer system which shows the state which connected the two workpiece | work processing apparatuses shown in FIG. It is detailed explanatory drawing which shows the example provided with the stopper in the workpiece conveyance means. It is the top view (a), front view (b), and side view (c) of the workpiece processing apparatus in the other embodiment of FIG. It is detail explanatory drawing which shows the example which provided the stopper in the workpiece conveyance means of the workpiece processing apparatus shown in FIG. It is a figure which shows the state in the middle of conveying the workpiece | work by the workpiece conveyance means shown in FIG. It is the top view (a), front view (b), and side view (c) which show the structural example of the transfer system which shows the state which connected the two workpiece | work processing apparatuses shown in FIG. It is an external appearance perspective view which shows one Embodiment of the workpiece processing apparatus of the application number 2005-294543 in connection with the prior application of October 7, 2005 using the arm members 87 and 88. FIG. It is a top view explaining a bridge for work processing, and a movement of a work conveyance bridge member. It is a top view explaining a bridge for work processing, and a movement of a work conveyance bridge member. It is a top view explaining a bridge for work processing, and a movement of a work conveyance bridge member. It is an image figure explaining the transition of the lift operation of the workpiece | work by the lift pin means, the lift down, and the movement operation of an arm member. It is an image figure explaining the transition of the lift operation of the workpiece | work by the lift pin means, the lift down, and the movement operation of an arm member. It is an image figure explaining the transition of the lift operation of the workpiece | work by the lift pin means, the lift down, and the movement operation of an arm member. It is an external appearance perspective view of the workpiece | work processing apparatus which shows other embodiment of FIG. FIG. 21 is a perspective view showing an embodiment of a transfer system in which a plurality of workpiece processing apparatuses in FIG. 20 are connected in the X-axis direction. FIG. 29 is an explanatory diagram illustrating a configuration of FIG. 28. It is operation | movement explanatory drawing of FIG. It is operation | movement explanatory drawing of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Housing | casing 1a Protrusion part 1b Protrusion part 1c Concavity 2 Workpiece 31 X1-axis linear motor 32 X2-axis linear motor 41 Slider 42 Slider 5 Bridge member 6 Y-axis linear motor 7 Slider 101 Work processing apparatus 102 Work processing apparatus 103 Work processing apparatus 103c Recess 201 Interface unit 202 Interface unit 203 Interface unit 301 Transfer unit 302 Transfer unit 601 Parallel rail 602 Parallel rail 700 Slider 800 Actuator 901 Operation arm 902 Operation arm 30 Processing unit 50 Tube 60 Suction plate 70 Work transfer unit 70a Work transfer unit 70a ' Work conveying means 70b Work conveying means 70b 'Work conveying means 70x Elongating member 71 Work conveying means 71a Work conveying means 71a' Workpiece conveying means 71b Work conveying means 71b 'Work conveying means 72 Rotating member 73 Stopper 81 Conveying slider member 82 Conveying slider member 83 Conveying bridge member 84 Y-axis linear motor 85 Slider 86 Slider 87 Arm member 88 Arm member 87a Connecting member 88a Connecting Member 89 Suction plate 90 Pin means 91 Pin 92 Pin operation section 93 Arm member 94 Guide rail 95 Guide rail 11 Work conveying means 111 Conveying slider member 112 Conveying slider member 113 Conveying bridge member 114 Arm member 12 Replenishing conveying means 13 Replenishing conveying means 131 Second arm member 132 Sliding means 1321 Sliding block 1322 Ball screw rod 1323 Motor

Claims (11)

A pair of X-axis linear motors that move the slider in the X-axis direction are arranged in parallel, and a Y-axis linear motor is provided on a bridge member bridged between the sliders of the pair of X-axis linear motors. In a positioning stage that performs predetermined processing on a workpiece to be processed placed on a suction plate using a mounted tool,
A pair of transport slider members that move in the X-axis direction along the pair of X-axis linear motors, a transport bridge member bridged between the transport slider members, and attached to the transport bridge member to support the lower surface of the workpiece An arm member extending in the X-axis direction, a workpiece transfer means that supports the workpiece and moves in the X-axis direction and delivers the workpiece to the outside of the stage;
And a replenishing / conveying means for replenishing the conveying stroke of the arm member and conveying the workpiece. The replenishing and conveying means includes a second arm member whose one surface supports the lower surface of the workpiece,
And a sliding means for sliding the second arm member in the X-axis direction with one surface connected to the other surface of the second arm member and the other surface connected to the arm member. The positioning stage according to claim 1, wherein: The sliding means includes a sliding block having one surface connected to the other surface of the second arm member and the other surface connected to the arm member;
A ball screw rod screwed into the sliding block;
The positioning stage according to claim 2, further comprising: a motor attached to one end of the ball screw rod and sliding the sliding block in the X-axis direction. 2. The positioning stage according to claim 1, wherein the replenishing and conveying unit includes a moving unit that moves the suction plate to the stage end in the X-axis direction while placing the workpiece during conveyance. The positioning stage according to any one of claims 1 to 4, wherein the pair of transport slider members are operated to move by the pair of X-axis linear motors. The arm member is disposed outside a processing position of the workpiece in a standby state, and is moved to the lower surface of the workpiece lifted up in the Z-axis direction when the workpiece is transported. The positioning stage according to claim 5. The positioning stage according to any one of claims 1 to 6, further comprising a plurality of lift pin means for performing a lift-up or lift-down operation of the workpiece in the Z-axis direction from the lower surface side thereof.   8. A transfer system comprising a plurality of positioning stages according to claim 1 connected in the X-axis direction.   9. The transfer system according to claim 8, wherein each positioning stage has a common mechanical interface structure on the receiving side and the transferring side of the workpiece.   The workpiece transfer means returns the workpiece to the standby position after transferring the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage. 9. The transfer system according to 9. The workpiece conveying means conveys the workpiece processed by the upstream positioning stage to the processing position of the connected downstream positioning stage, and transfers the workpiece processed by the downstream positioning stage to the upstream side. The transfer system according to claim 8 or 9, wherein the transfer system returns to the standby position after being conveyed to the processing position of the positioning stage.

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