KR101607753B1 - Apparatus for processing glass substrate - Google Patents
Apparatus for processing glass substrate Download PDFInfo
- Publication number
- KR101607753B1 KR101607753B1 KR1020140071393A KR20140071393A KR101607753B1 KR 101607753 B1 KR101607753 B1 KR 101607753B1 KR 1020140071393 A KR1020140071393 A KR 1020140071393A KR 20140071393 A KR20140071393 A KR 20140071393A KR 101607753 B1 KR101607753 B1 KR 101607753B1
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- KR
- South Korea
- Prior art keywords
- glass substrate
- unit
- processed
- transfer
- stage
- Prior art date
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
Abstract
The glass substrate processing apparatus includes a transfer unit that moves along the X-axis direction and transfers the glass substrate to be processed and the processed glass substrate, and a processing unit that is provided at one side or both sides of the transfer path of the transfer unit, And a stage for transferring the processed glass substrate to the transfer unit and a stage for moving to the transfer unit along the Y axis direction for transferring the glass substrate to be processed, And camera portions for confirming the seating state of the glass substrate to be processed transferred from the transfer portion to the stage. Therefore, the transfer unit and the camera units can be operated independently without interference.
Description
The present invention relates to a glass substrate processing apparatus, and more particularly, to a glass substrate processing apparatus for processing a glass substrate used in a display apparatus.
Generally, in a glass substrate processing apparatus, a plurality of glass substrates mounted on a cassette are transferred to a processing section by using a transfer section, processed sequentially in the processing section, and then the transfer section is transferred to the cassette again . When the glass substrate is transferred to the processing section, a position where the glass substrate is seated on the stage of the processing section is confirmed using a camera. The processing of the glass substrate is performed using the position data of the glass substrate.
According to the related art, the transfer unit and the camera are integrally provided and move together. Therefore, while the transfer part is transferring the glass substrate, the camera can not confirm the position of the glass substrate that is seated on the stage, and while the camera confirms the position of the glass substrate, the transfer part transfers the glass substrate I can not. Therefore, since it takes more time to transport the glass substrate and to confirm the position of the glass substrate, the efficiency of the glass substrate processing process using the glass substrate processing apparatus may be reduced.
The moving axis of the camera may be parallel to the moving axis of the spindle for processing the glass substrate in the processing unit, but may be provided so that the moving axis of the camera and the moving axis of the spindle are not parallel. The processing of the glass substrate may not be accurately performed due to the rotation of the moving axis of the camera and the moving axis of the spindle. Therefore, it is inconvenient to correct the position data of the glass substrate so that the movement axis of the camera and the movement axis of the spindle are offset by using the reference member on the stage.
The present invention provides a glass substrate processing apparatus capable of improving the processing efficiency of a glass substrate and eliminating the need to correct the position data of the glass substrate that is placed on the stage.
A glass substrate processing apparatus according to the present invention includes: a transfer unit that moves along an X-axis direction and transfers a glass substrate to be processed and a processed glass substrate; and a transfer unit that is provided at one side or both sides of the transfer path of the transfer unit, And a stage for moving the processed glass substrate to the transfer unit and moving to the transfer unit along the Y axis direction for transferring the glass substrate to be processed, And camera portions for confirming the seating state of the glass substrate to be processed transferred from the transfer portion to the stage.
According to an embodiment of the present invention, each of the machining units may include a spindle disposed above the stage, the spindle for machining a glass substrate seated on the stage, and a first spindle for moving the spindle in the X- Each of the camera units may be mounted on the first transfer unit and moved simultaneously with the spindle.
According to an embodiment of the present invention, the camera units and the spindles may be disposed at positions opposite to each other with respect to the first transfer unit.
According to an embodiment of the present invention, each of the processing units may further include a second transfer unit provided in the first transfer unit, for moving the spindle in the Z-axis direction.
According to one embodiment of the present invention, the transfer section may include a first transfer section for transferring the glass substrate to be processed and a second transfer section for transferring the processed glass substrate.
According to one embodiment of the present invention, in order to load the glass substrate to be processed into the stage or to unload the processed glass substrate from the stage, the first transfer unit and the second transfer unit are moved along the Z-axis direction And can be raised and lowered.
According to one embodiment of the present invention, the glass substrate processing apparatus further includes a loading port portion for supporting a first cassette on which the glass substrate to be processed is loaded, and a transfer port portion for transferring the glass substrate to be processed from the first cassette to the transfer portion An unloading port portion for supporting a second cassette for loading the processed glass substrate and an unloader portion for transferring the processed glass substrate from the transfer portion to the second cassette have.
According to an embodiment of the present invention, the loader unit rotates the glass substrate supported in a state of being perpendicular to the first cassette and transfers the glass substrate in a horizontal state to the transfer unit, and the unloader unit transfers the glass The substrate can be rotated and transferred to the second cassette in a vertical state.
In the glass substrate processing apparatus according to the present invention, the camera portion is provided in the processing portion where the glass substrate is processed. Therefore, the transfer of the glass substrate of the transfer unit and the position of the glass substrate of the camera unit can be performed simultaneously. Therefore, the efficiency of the glass substrate processing step using the glass substrate processing apparatus can be improved.
Further, in the processing section, the camera section may be mounted on the first transfer unit and moved as a spindle. It is not necessary to provide a reference member on the stage because the moving axis of the camera unit is identical to the moving axis of the spindle and the positional data of the glass substrate is separately corrected to match the moving axis of the camera and the moving axis of the spindle. You do not have to.
1 is a plan view for explaining a glass substrate processing apparatus according to an embodiment of the present invention.
FIG. 2 is a side view for explaining the conveyance unit, the camera unit, and the processing unit shown in FIG. 1. FIG.
3 is a plan view for explaining the operation of the camera unit and the processing unit shown in FIG.
4 is a side view for explaining the operation of the camera unit and the machining unit shown in Fig.
Hereinafter, a glass substrate processing apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.
The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.
The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.
Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.
FIG. 1 is a plan view for explaining a glass substrate processing apparatus according to an embodiment of the present invention, and FIG. 2 is a side view for explaining a transfer part, a camera part and a processing part shown in FIG.
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FIG. 3 is a plan view for explaining the operation of the camera unit and the processing unit shown in FIG. 1, and FIG. 4 is a side view for explaining the operation of the camera unit and the processing unit shown in FIG.
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As described above, since the machining portions according to the present invention are disposed on both sides of the movement path of the conveyance portion, the movement path of the conveyance portion can be shortened, and the number of the machining portions that can be arranged can also be increased. Therefore, the space efficiency of the glass substrate processing apparatus can be improved.
Since the glass substrate processing apparatus loads and unloads the glass substrate by using the stage of the transfer section and the processing section, the time required for loading and unloading the glass substrate can be reduced. In addition, since the transfer part and the camera part are separated from each other, the transfer of the glass substrate of the transfer part and the photographing of the glass substrate seated on the stage of the camera part can be performed. Therefore, the productivity of the glass substrate processing apparatus can be improved by reducing the processing cycle time of the glass substrate.
In the glass substrate processing apparatus, the camera section may be mounted on the first transfer unit of the processing section and moved as a spindle. It is not necessary to provide a reference member on the stage because the moving axis of the camera unit is identical to the moving axis of the spindle and the positional data of the glass substrate is separately corrected to match the moving axis of the camera and the moving axis of the spindle. You do not have to.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.
100: Glass substrate processing apparatus 110: Loading port unit
112: first cassette 120: unloading port portion
130: loader unit 140: unloader unit
150: transfer part 152: first transfer part
154: second transfer part 160:
161: Maintenance space 162: Stage
164: spindle 166: first transfer unit
168: Second transfer unit 170:
180: sampling unit 10: glass substrate
Claims (8)
Processing parts provided at one side or both sides of the conveyance path of the conveyance part to perform a processing process on the glass substrate; And
And camera portions provided inside the processing portions and for confirming a seating state of the glass substrate to be processed transferred from the transfer portion to the stage,
The processing units transfer the processed glass substrate to the transfer unit and transfer the processed glass substrate along the Y axis direction between the processing position inside the processing units and the loading / unloading position under the transfer unit Each having a stage for supporting the glass substrate,
The transfer unit may directly transfer the glass substrate to be processed to the stage moved to a loading / unloading position below the transfer unit, or transfer the processed glass substrate from the stage moved to a loading / unloading position below the transfer unit And moves up and down along the Z-axis direction toward the stage moved to the loading / unloading position below the conveyance section for direct delivery.
When the conveying unit moves along the X-axis direction for loading and unloading the glass substrate, the stage is also moved along the Y-axis direction for loading and unloading the glass substrate to a loading / unloading position To the glass substrate processing apparatus.
A spindle disposed above the stage for machining a glass substrate seated on the stage; And
And a first transfer unit for moving the spindle in the X-axis direction,
Wherein each of the camera units is mounted on the first transfer unit and moved simultaneously with the spindle.
A loader unit for transferring the glass substrate to be processed from the first cassette to the transfer unit;
An unloading port portion for supporting a second cassette for loading the processed glass substrate; And
And an unloader unit for transferring the processed glass substrate from the transfer unit to the second cassette.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020140071393A KR101607753B1 (en) | 2014-06-12 | 2014-06-12 | Apparatus for processing glass substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020140071393A KR101607753B1 (en) | 2014-06-12 | 2014-06-12 | Apparatus for processing glass substrate |
Publications (2)
Publication Number | Publication Date |
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KR20150142883A KR20150142883A (en) | 2015-12-23 |
KR101607753B1 true KR101607753B1 (en) | 2016-03-31 |
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Application Number | Title | Priority Date | Filing Date |
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KR1020140071393A KR101607753B1 (en) | 2014-06-12 | 2014-06-12 | Apparatus for processing glass substrate |
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KR (1) | KR101607753B1 (en) |
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2014
- 2014-06-12 KR KR1020140071393A patent/KR101607753B1/en active IP Right Grant
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KR20150142883A (en) | 2015-12-23 |
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