KR20150142883A

KR20150142883A - Apparatus for processing glass substrate

Info

Publication number: KR20150142883A
Application number: KR1020140071393A
Authority: KR
Inventors: 김성태; 김기영; 장성호
Original assignee: 주식회사 휘닉스 디지탈테크
Priority date: 2014-06-12
Filing date: 2014-06-12
Publication date: 2015-12-23
Also published as: KR101607753B1

Abstract

The present invention relates to an apparatus for processing a glass substrate. The present invention may comprise: a transfer part moving along the X-axis direction for transferring a glass substrate either expected to be processed or finished processing; processors formed at one or both sides of a transfer path of the transfer part for performing a processing process of the glass substrate, and separately including stages which transfers the glass substrate finished processing to the transfer part and moves along the Y-axis direction toward the transfer part to receive the glass substrate expected to be processed; and a camera part formed inside each of the processors for checking how the glass substrate expected to be processed, transferred from the transfer part to the stages, are seated on. Therefore, the transfer part and the camera part can operate individually without interference.

Description

[0001] Apparatus for processing glass substrate [0002]

The present invention relates to a glass substrate processing apparatus, and more particularly, to a glass substrate processing apparatus for processing a glass substrate used in a display apparatus.

Generally, in a glass substrate processing apparatus, a plurality of glass substrates mounted on a cassette are transferred to a processing section by using a transfer section, processed sequentially in the processing section, and then the transfer section is transferred to the cassette again . When the glass substrate is transferred to the processing section, a position where the glass substrate is seated on the stage of the processing section is confirmed using a camera. The processing of the glass substrate is performed using the position data of the glass substrate.

According to the related art, the transfer unit and the camera are integrally provided and move together. Therefore, while the transfer part is transferring the glass substrate, the camera can not confirm the position of the glass substrate that is seated on the stage, and while the camera confirms the position of the glass substrate, the transfer part transfers the glass substrate I can not. Therefore, since it takes more time to transport the glass substrate and to confirm the position of the glass substrate, the efficiency of the glass substrate processing process using the glass substrate processing apparatus may be reduced.

The moving axis of the camera may be parallel to the moving axis of the spindle for processing the glass substrate in the processing unit, but may be provided so that the moving axis of the camera and the moving axis of the spindle are not parallel. The processing of the glass substrate may not be accurately performed due to the rotation of the moving axis of the camera and the moving axis of the spindle. Therefore, it is inconvenient to correct the position data of the glass substrate so that the movement axis of the camera and the movement axis of the spindle are offset by using the reference member on the stage.

The present invention provides a glass substrate processing apparatus capable of improving the processing efficiency of a glass substrate and eliminating the need to correct the position data of the glass substrate that is placed on the stage.

A glass substrate processing apparatus according to the present invention includes: a transfer unit that moves along an X-axis direction and transfers a glass substrate to be processed and a processed glass substrate; and a transfer unit that is provided at one side or both sides of the transfer path of the transfer unit, And a stage for moving the processed glass substrate to the transfer unit and moving to the transfer unit along the Y axis direction for transferring the glass substrate to be processed, And camera portions for confirming the seating state of the glass substrate to be processed transferred from the transfer portion to the stage.

According to an embodiment of the present invention, each of the machining units may include a spindle disposed above the stage, the spindle for machining a glass substrate seated on the stage, and a first spindle for moving the spindle in the X- Each of the camera units may be mounted on the first transfer unit and moved simultaneously with the spindle.

According to an embodiment of the present invention, the camera units and the spindles may be disposed at positions opposite to each other with respect to the first transfer unit.

According to an embodiment of the present invention, each of the processing units may further include a second transfer unit provided in the first transfer unit, for moving the spindle in the Z-axis direction.

According to one embodiment of the present invention, the transfer section may include a first transfer section for transferring the glass substrate to be processed and a second transfer section for transferring the processed glass substrate.

According to one embodiment of the present invention, in order to load the glass substrate to be processed into the stage or to unload the processed glass substrate from the stage, the first transfer unit and the second transfer unit are moved along the Z-axis direction And can be raised and lowered.

According to one embodiment of the present invention, the glass substrate processing apparatus further includes a loading port portion for supporting a first cassette on which the glass substrate to be processed is loaded, and a transfer port portion for transferring the glass substrate to be processed from the first cassette to the transfer portion An unloading port portion for supporting a second cassette for loading the processed glass substrate and an unloader portion for transferring the processed glass substrate from the transfer portion to the second cassette have.

According to an embodiment of the present invention, the loader unit rotates the glass substrate supported in a state of being perpendicular to the first cassette and transfers the glass substrate in a horizontal state to the transfer unit, and the unloader unit transfers the glass The substrate can be rotated and transferred to the second cassette in a vertical state.

In the glass substrate processing apparatus according to the present invention, the camera portion is provided in the processing portion where the glass substrate is processed. Therefore, the transfer of the glass substrate of the transfer unit and the position of the glass substrate of the camera unit can be performed simultaneously. Therefore, the efficiency of the glass substrate processing step using the glass substrate processing apparatus can be improved.

Further, in the processing section, the camera section may be mounted on the first transfer unit and moved as a spindle. It is not necessary to provide a reference member on the stage because the moving axis of the camera unit is identical to the moving axis of the spindle and the positional data of the glass substrate is separately corrected to match the moving axis of the camera and the moving axis of the spindle. You do not have to.

1 is a plan view for explaining a glass substrate processing apparatus according to an embodiment of the present invention.
FIG. 2 is a side view for explaining the conveyance unit, the camera unit, and the processing unit shown in FIG. 1. FIG.
3 is a plan view for explaining the operation of the camera unit and the processing unit shown in FIG.
4 is a side view for explaining the operation of the camera unit and the machining unit shown in Fig.

Hereinafter, a glass substrate processing apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

FIG. 1 is a plan view for explaining a glass substrate processing apparatus according to an embodiment of the present invention, and FIG. 2 is a side view for explaining a transfer part, a camera part and a processing part shown in FIG.

1 and 2, a glass substrate processing apparatus 100 for processing a glass substrate 10 includes a loading port unit 110, an unloading port unit 120, a loader unit 130, A loader unit 140, a transfer unit 150, a machining unit 160, a camera unit 170, and a sampling unit 180.

The loading port portion 110 and the unloading port portion 120 are disposed along the Y-axis direction perpendicular to the X-axis direction. For example, the X-axis direction may be a longitudinal direction, and the Y-axis direction may be a lateral direction.

The loading port portion 110 supports the first cassette 112. The first cassette 112 supports the glass substrate 10 to be processed in the processing unit 160. At this time, the glass substrate 10 is stacked so as to stand vertically in the first cassette 112.

The unloading port portion 120 supports the second cassette 122. The second cassette 122 supports the glass substrate 10 that has been processed in the processing unit 160. At this time, the glass substrate 10 is stacked so as to be vertically erected on the second cassette 122.

The loader portion 130 and the unloader portion 140 are disposed adjacent to the loading port portion 110 and the unloading port portion 120.

The loader unit 130 transfers the glass substrate 10 to be processed from the first cassette 112 to the transfer unit 150. The loader unit 130 fixes the glass substrate 10 for transferring the glass substrate 10. For example, the loader section 130 can fix the glass substrate 10 with a vacuum force.

The loader unit 130 is provided to be movable along the second direction. In addition, the loader unit 130 can rotate the glass substrate 10 supported in a vertical state in a horizontal state. Therefore, the loader unit 130 picks up the glass substrate 10 supported in a vertical state to the first cassette 112, and then moves the glass substrate 10 in the vertical state to the horizontal And then transfers it to the transfer unit 150. [

The unloader unit 140 transfers the processed glass substrate 10 from the transfer unit 150 to the second cassette 122. The unloader unit 140 also fixes the glass substrate 10 for transferring the glass substrate 10 in the same manner as the loader unit 130. For example, the unloader section 140 can fix the glass substrate 10 with a vacuum force.

The unloader section 140 is also provided so as to be movable along the second direction like the loader section 130. In addition, the unloader unit 140 can rotate the glass substrate 10 supported in a vertical state in a horizontal state. Accordingly, the unloader unit 140 fixes the glass substrate 10 fixed to the conveying unit 150 in a horizontal state, and moves the glass substrate 10 in the horizontal state in the vertical direction And then transmits it to the second cassette 122.

The transfer unit 150 is disposed adjacent to the loader unit 130 and the unloader unit 140. The transfer unit 150 moves along the X-axis direction and transfers the glass substrate 10. At this time, the transfer unit 150 can transfer the glass substrate 10 in a horizontal state.

The transfer unit 150 includes a first transfer unit 152 and a second transfer unit 154.

The first conveyance unit 152 and the second conveyance unit 154 can move along the X axis direction at the same time or separately along the X axis direction.

The first transferring unit 152 is horizontally disposed from the loader unit 130 and transfers the glass substrate 10 to be processed to the processing unit 160 along the X axis direction. The first transfer unit 152 can be moved up and down along the Z-axis direction to load the glass substrate 10 to be processed into the stage of the processing unit 160.

The second transfer unit 154 is horizontally disposed from the processing unit 160 and transfers the processed glass substrate 10 to the unloader unit 140 along the X axis direction. The second transfer unit 154 can be moved up and down along the Z-axis direction to unload the processed glass substrate 10 from the stage of the processing unit 160.

When the first transferring part 152 and the second transferring part 154 simultaneously move along the X axis direction, the first transferring part 152 transfers the glass substrate 10 to be processed from the loader part 130 The process of transferring the processed glass substrate 10 to the unloader unit 140 by the second transfer unit 154 can be performed at the same time.

When the first transferring part 152 and the second transferring part 154 move along the X axis direction individually, the first transferring part 152 transfers the glass substrate 10 to be processed from the loader part 130 And the second transfer unit 154 transfer the processed glass substrate 10 to the unloader unit 140 can be individually performed.

The processing unit 160 may be provided on both sides of the conveyance path of the conveyance unit 150, respectively. For example, the machining portion 160 may be symmetrical on both sides with respect to the conveying path of the conveying portion 150. [ Alternatively, for example, the machining portion 160 may be arranged to be offset from each other with reference to the conveying path of the conveying portion 150. [

The machining unit 160 is disposed on both sides of the conveyance path of the conveyance unit 150 so that the conveyance path of the conveyance unit 150 can be made shorter than when the machined unit 160 is disposed only on one side of the conveyance path of the conveyance unit 150 . Since the conveying path of the conveying unit 150 is shortened, the time required for conveying the glass substrate 10 by the conveying unit 150 can be shortened. Therefore, the conveyance efficiency of the conveyance unit 150 can be improved.

On the other hand, although not shown, the machining portion 160 can be provided along either one of the two sides of the conveyance path. At this time, the machining unit 160 may be disposed closely to one side of the conveying path of the conveying unit 150.

Even if the machining portions 160 are disposed closely to each other, the machining portions 160 are exposed to the outside of the surface opposite to the surface facing the conveyance path of the conveyance portion 150. [ The machined portion 160 is disposed only at one side of the conveyance path of the conveyance unit 150 and the other side of the conveyance path of the conveyance unit 150 is exposed to the outside. Therefore, even if an abnormality occurs in the transfer unit 150, the processing unit 160, and the camera unit 170, the transfer unit 150, the processing unit 160, and the camera unit 170 can be operated through the transfer path of the transfer unit 150 and the exposed part of the transfer unit 150, The camera unit 160 and the camera unit 170 can be easily maintained.

The width of the glass substrate processing apparatus 100 can be reduced since the processing unit 160 is disposed only on one side of the transfer path of the transfer unit 150. [ In addition, since it is not necessary to dispose a separate maintenance space 161 between the machining units 160, the machining units 160 can be closely contacted with each other, so that the length of the glass substrate machining apparatus 100 can be reduced. Therefore, the size of the glass substrate processing apparatus 100 can be minimized.

The processing unit 160 processes the glass substrate 10 transferred by the first transferring unit 152. For example, the processing section 160 can cut the glass substrate 10, polish the glass substrate 10, or form holes in the glass substrate 10. [

FIG. 3 is a plan view for explaining the operation of the camera unit and the processing unit shown in FIG. 1, and FIG. 4 is a side view for explaining the operation of the camera unit and the processing unit shown in FIG.

3 and 4, the machining portion 160 includes a stage 162 for supporting the glass substrate 10. The stage 162 includes a stage 162 for supporting the glass substrate 10, The stage 162 can move to the lower portion of the transfer unit 150 along the Y-axis direction for loading and unloading the glass substrate 10. That is, the stage 162 is disposed between the processing position in the processing part 160 where the processing of the glass substrate 10 is performed and the loading / unloading of the lower part of the transfer part 150 where the loading and unloading of the glass- Can be moved between positions.

Specifically, the stage 162 moves to the loading / unloading position of the lower portion of the first transferring unit 152 along the Y-axis direction to receive the glass substrate 10 to be processed from the first transferring unit 152. When the glass substrate 10 is placed on the upper surface of the stage 162, the stage 162 is moved to the machining position of the machining portion 160 along the Y-axis direction for machining the glass substrate 10.

When the glass substrate 10 is completely processed, the stage 162 is moved from the processing position of the processing unit 160 in the Y-axis direction to the second transfer unit 154 to the loading / unloading position of the lower portion of the glass substrate 10 to transfer the processed glass substrate 10 to the second transferring unit 154.

The first transfer part 152 and the second transfer part 154 can be moved up and down toward the stage 162 for transferring the glass substrate 10 at the loading / unloading position.

When the transfer unit 150 moves along the X-axis direction for loading and unloading the glass substrate 10, the stage 162 can also move in the Y-axis direction for loading and unloading the glass substrate 10 have. That is, the transfer unit 150 does not need to move to the inside of the processing unit 160 for loading and unloading the glass substrate 10. Therefore, the time required for loading and unloading the glass substrate 10 can be reduced.

When the first transferring part 152 and the second transferring part 154 simultaneously move along the X axis direction, the stage 162 moves to the lower part of the second transferring part 154, 10 to the second transfer unit 154 and then directly to the lower portion of the first transfer unit 152 to receive the glass substrate 10 to be processed from the first transfer unit 152. Since the stage 162 can continuously load the glass substrate 10 to be processed from the first transferring section 152 while unloading the processed glass substrate 10 to the second transferring section 154, The time required for loading and unloading the glass substrate 10 can be further reduced.

The processing unit 160 further includes a spindle 164 for processing the glass substrate 10, a first transfer unit 166 and a second transfer unit 166. [

The spindle 164 is disposed above the stage 162 and processes the glass substrate 10 on the stage 162. [ The spindle 164 can cut or grind the glass substrate 10 while rotating, or can form holes in the glass substrate 10.

The first transfer unit 166 is connected to the spindle 164 and moves the spindle 164 in the X-axis direction.

The second transfer unit 168 is provided in the first transfer unit 166 to move the spindle 164 in the Z-axis direction. Thus, the spindle 164 can be adjacent to or spaced from the glass substrate 10 on the stage 162. [

For example, the first transfer unit 166 moves the second transfer unit 188 and the spindle 164 together in the X-axis direction, and the second transfer unit 188 moves the spindle 164 to the Z- Direction.

The spindle 164 can move in the X-axis direction and the Z-axis direction and the stage 162 can move in the Y-axis direction so that the spindle 164 and the stage 162 can be moved in the X- The glass substrate 10 can be processed while relatively moving in the Z-axis direction and the Z-axis direction.

On the other hand, the machining portion 160 is provided so as to be detachable on both sides or one side of the conveying path of the conveying portion 150. When the transfer path of the transfer unit 150 is extended, the processing unit 160 can be easily provided on both sides or one side of the transfer path of the transfer unit 150. Therefore, if necessary, the number of the processing units 160 can be easily increased, so that the throughput of the glass substrate processing apparatus 100 can be increased.

Further, the machined portion 160 attached to both sides or one side of the conveyance path of the conveyance unit 150 can be easily separated. Therefore, when an abnormality occurs in such a degree that the machining unit 160 can not be maintained, the machining unit 160 in which the abnormality has occurred can be easily replaced.

When the processing units 160 are disposed on both sides of the conveyance path of the conveyance unit 150 and the processing units 160 are closely attached thereto, the conveyance path of the conveyance unit 150 is not exposed to the outside. Therefore, when an error occurs in the transfer unit 150 and the camera unit 170, the space is narrow and it is difficult for an operator to maintain the transfer unit 150 and the camera unit 170. Accordingly, the machining portions 160 are spaced apart from the adjacent machining portions 160 by a predetermined distance. That is, a maintenance space 161 is formed between the machining portions 160. The operator can easily adjust the conveyance unit 150 and the camera unit 170 through the maintenance space 161.

The camera unit 170 is provided in the first transfer unit 166 of the processing unit 160. Accordingly, the camera unit 170 moves along the X-axis direction, and confirms the seating state of the glass substrate 10 to be processed, which is transferred to the stage 162.

More specifically, when the stage 162 having received the glass substrate 10 to be processed from the first transferring unit 152 moves into the processing unit 160 along the Y-axis direction, the camera unit 170 moves the glass And photographs the stage 162 on which the substrate 10 is placed. It is possible to confirm the seating state of the glass substrate 10 by using the image photographed by the camera unit 170. The glass substrate 10 is processed using the spindle 164 in the processing unit 160 based on the position where the glass substrate 10 is placed. When the glass substrate 10 is in a bad state, an operator is notified via an alarm or the like.

Since the camera unit 170 is provided inside the processing unit 160, the transfer unit 150 and the camera unit 170 operate independently without interference. Therefore, after the transfer unit 150 loads the glass substrate 10 to be processed into the stage 162, the glass substrate 10 after the processing and the glass substrate 10 to be processed are transferred to the camera unit 170 can confirm the position of the glass substrate 10 loaded on the stage 162. Therefore, the efficiency of the glass substrate processing process using the glass substrate processing apparatus 100 can be improved.

The camera unit 170 and the spindle 164 can be moved in the X axis direction by the first transfer unit 166 because the camera unit 170 is provided in the first transfer unit 166. [ That is, the moving axis of the camera unit 170 and the moving axis of the spindle 164 are the same. Therefore, it is not necessary to correct the position data of the glass substrate obtained by the camera unit 170 to match the movement axis of the camera unit 170 and the movement axis of the spindle 164. That is, the spindle 164 can process the glass substrate 10 by using the position data of the glass substrate obtained by the camera unit 170 as it is. Therefore, the efficiency of the glass substrate processing process using the glass substrate processing apparatus 100 can be further improved.

Also, a reference member provided on the stage 162 for matching the movement axis of the camera unit 170 and the movement axis of the spindle 164 is unnecessary. Therefore, the structure of the stage 162 can be simplified.

The camera unit 170 and the spindle 164 may be disposed at positions opposite to each other with respect to the first transfer unit 166. Therefore, the glass substrate 10 on which the spindle 164 is placed on the stage 162 without interfering with the camera unit 170 can be processed.

The camera unit 170 and the spindle 164 are disposed at positions opposite to each other with respect to the first transfer unit 166 so that the first transfer unit 166 is disposed between the camera unit 170 and the spindle 164 As shown in FIG. In this case, the first transfer unit 166 may extend by a predetermined length in the Z-axis direction. Also, although not shown, a separate partition structure extending downward in the Z-axis direction may be provided on the lower surface of the first transfer unit 166. [

The first transfer unit 166 or the barrier structure may be configured such that the cutting oil supplied to the spindle 164 and the fume generated during the processing of the spindle 164 are transferred to the camera unit 170 Thereby blocking the supply. Accordingly, it is possible to prevent the screen of the camera unit 170 from being blurred or the camera unit 170 from being damaged by the cutting oil or the fumes.

The sampling unit 180 is disposed between the loading port unit 110 and the unloading port unit 120. The sampling unit 180 samples and stores the glass substrate 10 processed in the processing unit 160.

Specifically, the stage 162 of the processing unit 160 moves in the Y-axis direction according to an instruction from the sampling unit 180 to transfer the glass substrate 10 to the second transfer unit 154, and the second transfer unit 154 move in the X axis direction to transfer the glass substrate 10 to the unloader unit 140 and the unloader unit 140 to transfer the glass substrate 10 to the sampling unit 180. [ Therefore, by confirming the sampled glass substrate 10 in the sampling unit 180, it can be confirmed whether or not the machining unit 160 performs a normal machining process on the glass substrate 10.

Meanwhile, the sampling unit 180 can select the processing unit 160 to which the glass substrate 10 is to be sampled. Therefore, the process state of each processing unit 160 can be easily confirmed.

Hereinafter, a method of processing the glass substrate 10 using the glass substrate processing apparatus 100 will be briefly described.

First, a plurality of glass substrates 10 are loaded into a loading port portion 110 with a first cassette 112 loaded vertically. Further, the empty second cassette 122 is loaded into the unloading port portion 120.

Next, the loader unit 130 picks up the glass substrate 10 supported vertically to the first cassette 112, and moves the glass substrate 10 in the vertical direction while moving along the Y- And is transmitted to the first conveying unit 152 after rotating in a horizontal state.

The first transfer unit 152 transfers the horizontal glass substrate 10 transferred from the loader unit 130 along the X axis direction so as to be adjacent to the processing unit 160.

The stage 162 of the processing unit 160 moves to the lower portion of the first conveyance unit 152 along the Y axis direction when the glass substrate 10 is conveyed so as to be adjacent to the processing unit 160. [ The first transfer unit 152 is lowered to transfer the glass substrate 10 to be processed to the stage 162 in a state where the stage 162 is positioned below the first transfer unit 152.

Meanwhile, when the first transfer unit 152 moves along the X-axis direction for transferring the glass substrate 10, the stage 162 can also move in the Y-axis direction to receive the glass substrate 10. That is, the movement of the first transfer unit 152 and the movement of the stage 162 can be performed at the same time.

When the first transfer unit 152 transfers the glass substrate 10 to be processed to the lower stage 162 and then moves along the X axis direction, the stage 162 is also rotated And moves to the machining portion 160 along the Y-axis direction.

The camera unit 170 photographs the stage 162 on which the glass substrate 10 is placed in the processing unit 160. And confirms the seating state of the glass substrate 10 by using the image photographed by the camera unit 170. [

When it is ascertained that the glass substrate 10 is in the normal state, the processing of the glass substrate 10 is performed in the processing unit 160. Specifically, the glass substrate 10 is processed while relatively moving the stage 162 and the spindle 164 in the X-axis direction, the Y-axis direction, and the Z-axis direction.

When the glass substrate 10 has been processed, the stage 162 is moved from the processing unit 160 along the Y-axis direction in the state of supporting the processed glass substrate 10 to the second transfer unit 154 Move to the bottom. The second transfer unit 154 is lowered in a state where the stage 162 is positioned below the second transfer unit 154 and the processed glass substrate 10 is delivered from the stage 162.

The second transfer unit 154 transfers the processed glass substrate 10, which has been processed from the processing unit 160, to the unloader unit 140 along the X-axis direction.

The unloader unit 140 fixes the glass substrate 10 horizontally supported on the second transfer unit 154 and moves the glass substrate 10 in the vertical state in the vertical direction while moving along the second direction And then transmits it to the second cassette 122.

When the loading of the glass substrate 10 into the second cassette 122 is completed, the second cassette 122 is unloaded from the unloading port portion 120.

When the first transferring unit 152 and the second transferring unit 154 simultaneously move along the X axis direction, the first transferring unit 152 transfers the glass substrate 10 to be processed from the loader unit 130 And the second transfer unit 154 can simultaneously transfer the processed glass substrate 10 to the unloader unit 140.

When the first conveyance unit 152 and the second conveyance unit 154 simultaneously move along the X axis direction, the stage 162 moves to the lower portion of the second conveyance unit 154, The glass substrate 10 can be transferred from the first transferring part 152 to the lower part of the first transferring part 152 after the transferring part 10 is transferred to the second transferring part 154. Therefore, the time required for loading and unloading the glass substrate 10 between the transferring unit 150 and the stage 162 can be reduced.

As described above, since the machining portions according to the present invention are disposed on both sides of the movement path of the conveyance portion, the movement path of the conveyance portion can be shortened, and the number of the machining portions that can be arranged can also be increased. Therefore, the space efficiency of the glass substrate processing apparatus can be improved.

Since the glass substrate processing apparatus loads and unloads the glass substrate by using the stage of the transfer section and the processing section, the time required for loading and unloading the glass substrate can be reduced. In addition, since the transfer part and the camera part are separated from each other, the transfer of the glass substrate of the transfer part and the photographing of the glass substrate seated on the stage of the camera part can be performed. Therefore, the productivity of the glass substrate processing apparatus can be improved by reducing the processing cycle time of the glass substrate.

In the glass substrate processing apparatus, the camera section may be mounted on the first transfer unit of the processing section and moved as a spindle. It is not necessary to provide a reference member on the stage because the moving axis of the camera unit is identical to the moving axis of the spindle and the positional data of the glass substrate is separately corrected to match the moving axis of the camera and the moving axis of the spindle. You do not have to.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims. It can be understood that it is possible.

100: Glass substrate processing apparatus 110: Loading port unit
112: first cassette 120: unloading port portion
130: loader unit 140: unloader unit
150: transfer part 152: first transfer part
154: second transfer part 160:
161: Maintenance space 162: Stage
164: spindle 166: first transfer unit
168: Second transfer unit 170:
180: sampling unit 10: glass substrate

Claims

A transferring unit moving along the X-axis direction and transferring the glass substrate to be processed and the glass substrate having been processed;
The glass substrate is provided on one side or both sides of the conveyance path of the conveyance unit to perform a processing operation on the glass substrate and to transfer the processed glass substrate to the transfer unit, Processing sections each having a stage moving to a transfer section; And
And camera portions provided inside the processing portions and for confirming a seating state of the glass substrate to be processed transferred from the transfer portion to the stage.

The image forming apparatus according to claim 1,
A spindle disposed above the stage for machining a glass substrate seated on the stage; And
And a first transfer unit for moving the spindle in the X-axis direction,
Wherein each of the camera units is mounted on the first transfer unit and moved simultaneously with the spindle.

The glass substrate processing apparatus according to claim 2, wherein each of the camera units and the spindles are disposed at positions opposite to each other with respect to the first transfer unit.

The glass substrate processing apparatus according to claim 2, wherein each of the processing units further comprises a second transfer unit provided in the first transfer unit for moving the spindle in the Z-axis direction.

The glass substrate processing apparatus according to claim 1, wherein the transfer section includes a first transfer section for transferring the glass substrate to be processed and a second transfer section for transferring the processed glass substrate.

[6] The apparatus of claim 5, wherein the first transferring unit and the second transferring unit are movable up and down along the Z-axis direction to load the glass substrate to be processed into the stage or unload the processed glass substrate from the stage Wherein the glass substrate is a glass substrate.

The apparatus according to claim 1, further comprising: a loading port for supporting a first cassette on which the glass substrate to be processed is loaded;
A loader unit for transferring the glass substrate to be processed from the first cassette to the transfer unit;
An unloading port portion for supporting a second cassette for loading the processed glass substrate; And
And an unloader unit for transferring the processed glass substrate from the transfer unit to the second cassette.

[8] The apparatus according to claim 7, wherein the loader unit rotates the glass substrate supported in a state of being perpendicular to the first cassette and transfers the glass substrate in a horizontal state to the transfer unit, and the unloader unit rotates the transferred glass substrate in a horizontal state And the second cassette is vertically transferred to the second cassette.