JP2008016752A - Manufacturing apparatus of laminated electronic component - Google Patents

Manufacturing apparatus of laminated electronic component Download PDF

Info

Publication number
JP2008016752A
JP2008016752A JP2006188882A JP2006188882A JP2008016752A JP 2008016752 A JP2008016752 A JP 2008016752A JP 2006188882 A JP2006188882 A JP 2006188882A JP 2006188882 A JP2006188882 A JP 2006188882A JP 2008016752 A JP2008016752 A JP 2008016752A
Authority
JP
Japan
Prior art keywords
green sheet
base
electrode
electronic component
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006188882A
Other languages
Japanese (ja)
Inventor
Kiyoshi Aoki
潔 青木
Toru Inoue
透 井上
Osamu Fujigaki
修 藤垣
Katsuhito Toshikura
且人 利倉
Shinya Maenami
信也 前波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2006188882A priority Critical patent/JP2008016752A/en
Publication of JP2008016752A publication Critical patent/JP2008016752A/en
Pending legal-status Critical Current

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of laminated electronic components which can form highly accurate electrode patterns. <P>SOLUTION: The manufacturing apparatus of laminated electronic components is provided with: a carrier 14 composed of rotatably connecting a plurality of bases 13 having smooth surfaces on their upper surfaces; a winding-out/supply means 10 for applying prescribed tension to a green sheet 7, and supplying the green sheet 7; an adhesive application means 11 for applying an adhesive to the green sheet 7 supplied from the winding-out/supply means 10; a depression means 12 for depressing the green sheet 7 to the bases 13; a cutting means 16 for cutting out the green sheet 7 into pieces in each base 13; an electrode formation means 18 for forming electrodes on the green sheet 7; and a drying means 21 for drying the green sheet 7. A part of the carrier 14 is composed of a horizontal carrying part 19, and the electrode forming means 18 is formed on the horizontal carrying part 19. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、セラミック積層コンデンサなど積層型電子部品の製造装置に関するものである。   The present invention relates to an apparatus for manufacturing a multilayer electronic component such as a ceramic multilayer capacitor.

積層型電子部品の製造装置の一例を図2に示す。   An example of an apparatus for manufacturing a multilayer electronic component is shown in FIG.

グリーンシート1bを所定の張力を付加して供給する巻き出し供給手段1と、グリーンシート1bを外周面に巻き付けて積層体を形成する積層ドラム2と、積層ドラム2の回転角を検出する回転角度検出装置3と、回転角度検出装置3の情報に基づき、グリーンシート1bを巻き付けながら積層ドラム2に巻き付けたグリーンシート1b上に内部電極を形成する内部電極印刷部4とを備えることにより、高速で積層体が製造できるものである。   Unwinding supply means 1 for supplying the green sheet 1b with a predetermined tension, a lamination drum 2 for forming a laminate by winding the green sheet 1b around the outer peripheral surface, and a rotation angle for detecting the rotation angle of the lamination drum 2 By providing the detection device 3 and the internal electrode printing unit 4 that forms the internal electrode on the green sheet 1b wound around the lamination drum 2 while winding the green sheet 1b based on the information of the rotation angle detection device 3, the high speed is achieved. A laminate can be produced.

なお、この出願の発明に関する先行技術文献情報としては、例えば、特許文献1が知られている。
特開2003−217992号公報
As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
JP 2003-217992 A

上記従来例では、積層体を形成する積層ドラム2を多面体とすることで、電極印刷部4で印刷するために、図3に示す平面6を得ている。そのため、平面5は間欠駆動されるため、平面6に対して面で印刷する必要があり、電極印刷部4にインクジェット方式などの吐出手段を選択した場合、積層ドラム2の回転方向に対して塗布距離が異なるため、図3に示す電極パターンのように所定のパターンが得られなくなる課題があった。   In the above-described conventional example, the plane 6 shown in FIG. 3 is obtained in order to perform printing by the electrode printing unit 4 by forming the stacking drum 2 forming the stack as a polyhedron. Therefore, since the plane 5 is intermittently driven, it is necessary to print on the plane 6 with respect to the plane 6, and when an ejection unit such as an ink jet method is selected for the electrode printing unit 4, coating is performed with respect to the rotation direction of the laminated drum 2. Since the distances are different, there is a problem that a predetermined pattern cannot be obtained like the electrode pattern shown in FIG.

そこで本発明は、電極パターンの精度を高めることを目的とする。   Therefore, an object of the present invention is to improve the accuracy of an electrode pattern.

そして上記目的を達成するために、本発明は、上面に平滑面を有する複数の基台を回動可能に連結してなる搬送部と、前記基台上に、張力を付加したグリーンシートを供給する巻き出し供給手段と、前記巻き出し供給手段から供給されるグリーンシートに接着剤を塗布する接着剤塗布手段と、前記グリーンシートを前記基台に押圧する押圧手段と、前記グリーンシートを前記基台毎に切断する切断手段と、前記グリーンシートの位置を検出する位置検出手段と、前記位置検出手段の情報から前記グリーンシートに電極を形成する電極形成手段と、前記グリーンシートを乾燥する乾燥手段とを備えた積層型電子部品の製造装置であって、前記搬送部の一部が水平搬送部からなり、前記水平搬送部に電極形成手段を設けた積層型電子部品の製造装置であって、前記搬送部の一部が水平搬送部とし、前記水平搬送部に電極形成手段を設けた構成としたので、水平搬送部で電極パターンを形成でき、その結果、電極パターンの精度を高めることができる。   In order to achieve the above object, the present invention supplies a conveyance unit formed by rotatably connecting a plurality of bases each having a smooth surface on the upper surface, and a green sheet to which tension is applied on the bases. Unwinding supply means, adhesive applying means for applying an adhesive to the green sheet supplied from the unwinding supply means, pressing means for pressing the green sheet against the base, and the green sheet as the base Cutting means for cutting each table, position detecting means for detecting the position of the green sheet, electrode forming means for forming an electrode on the green sheet from information of the position detecting means, and drying means for drying the green sheet A device for manufacturing a multilayer electronic component comprising: a part of the transport unit comprising a horizontal transport unit, wherein the horizontal transport unit is provided with electrode forming means. And since a part of said conveyance part was set as the horizontal conveyance part, and it was set as the structure which provided the electrode formation means in the said horizontal conveyance part, an electrode pattern can be formed in a horizontal conveyance part, As a result, the precision of an electrode pattern is improved. Can be increased.

本発明の積層型電子部品の製造装置は、上面に平滑面を有する複数の基台を回動可能に連結してなる搬送部と、前記基台上に、張力を付加したグリーンシートを供給する巻き出し供給手段と、前記巻き出し供給手段から供給されるグリーンシートに接着剤を塗布する接着剤塗布手段と、前記グリーンシートを前記基台に押圧する押圧手段と、前記グリーンシートを前記基台毎に切断する切断手段と、前記グリーンシートの位置を検出する位置検出手段と、前記位置検出手段の情報から前記グリーンシートに電極を形成する電極形成手段と、前記グリーンシートを乾燥する乾燥手段とを備えた積層型電子部品の製造装置であって、特に搬送部の一部を水平搬送部として電極形成手段を設けた構造とした。この搬送部の一部を水平搬送部とし、電極形成手段を搬送方向に対して直交するように配置することにより、例えば電極形成手段にインクジェット方式などの吐出方式を選択することで、連続搬送しながら基台上のグリーンシートに補正をせず、高い精度で電極パターンを形成することが可能となる。   The multilayer electronic component manufacturing apparatus of the present invention supplies a conveyance unit formed by rotatably connecting a plurality of bases each having a smooth surface on an upper surface, and a green sheet to which tension is applied on the bases. Unwinding supply means, adhesive application means for applying an adhesive to the green sheet supplied from the unwinding supply means, pressing means for pressing the green sheet against the base, and the green sheet as the base Cutting means for cutting every time, position detecting means for detecting the position of the green sheet, electrode forming means for forming an electrode on the green sheet from information of the position detecting means, and drying means for drying the green sheet; The apparatus for manufacturing a laminated electronic component having a structure in which an electrode forming unit is provided with a part of the transport unit as a horizontal transport unit. By arranging a part of this transport unit as a horizontal transport unit and arranging the electrode forming means so as to be orthogonal to the transport direction, for example, by selecting an ejection method such as an ink jet method for the electrode forming unit, continuous transport is performed. However, it is possible to form the electrode pattern with high accuracy without correcting the green sheet on the base.

以下、図1を用いて本発明の一実施の形態を説明する。   Hereinafter, an embodiment of the present invention will be described with reference to FIG.

図1は、本発明の一実施の形態を示す積層型電子部品の製造装置の側面図である。本装置に供給されるグリーンシート7は、グリーンシート7を巻き付けたシートロール8、グリーンシート7の巻き出し量と張力調整手段からなる巻き出し量調整装置9からなる巻き出し供給手段10から供給される。巻き出し供給手段10から供給されたグリーンシート7は、接着剤塗布手段11に供給され、一面全体に破線に示す接着剤を塗布される。本実施の形態では、接着剤の塗布方法として、スプレー法を選択したが、ローラーによる塗布などでもよい。この接着剤塗布手段11はグリーンシート7の略垂直下方に設置されており、接着剤塗布面を下方にした状態で押圧手段12へ供給される。このように、接着剤塗布面を下方にすることで、接着剤塗布後のダストの付着を防止できるため、積層不良を低減することが可能となる。   FIG. 1 is a side view of a multilayer electronic component manufacturing apparatus according to an embodiment of the present invention. The green sheet 7 supplied to the apparatus is supplied from a sheet roll 8 around which the green sheet 7 is wound, and an unwinding supply means 10 including an unwinding amount adjusting device 9 including an unwinding amount and tension adjusting means of the green sheet 7. The The green sheet 7 supplied from the unwinding supply means 10 is supplied to the adhesive application means 11, and the adhesive indicated by the broken line is applied to the entire surface. In this embodiment, the spray method is selected as the method for applying the adhesive, but it may be applied by a roller. This adhesive application means 11 is installed substantially vertically below the green sheet 7 and is supplied to the pressing means 12 with the adhesive application surface facing downward. In this way, by making the adhesive application surface downward, it is possible to prevent the adhesion of dust after application of the adhesive, and thus it is possible to reduce stacking faults.

押圧手段12へ供給されたグリーンシート7は、押圧手段12で反転され、接着剤塗布面が上面側となり、さらに基台13へ押圧することで貼り付けられる。この押圧手段12は、ゴムやシリコンなどの弾性体で製造したローラーとすることで、グリーンシート7の接着剤塗布面の反転と、基台13への押圧が同時に可能となる。さらに、押圧手段12に加熱手段を設けることで、基台13への接着をより強固なものとすることができるため、グリーンシート7の位置ずれを防止することができる。   The green sheet 7 supplied to the pressing unit 12 is reversed by the pressing unit 12, the adhesive application surface becomes the upper surface side, and is further pasted by pressing to the base 13. The pressing means 12 is a roller made of an elastic body such as rubber or silicon, so that the reverse of the adhesive application surface of the green sheet 7 and the pressing to the base 13 can be performed simultaneously. Furthermore, by providing the pressing means 12 with a heating means, the adhesion to the base 13 can be made stronger, so that the positional deviation of the green sheet 7 can be prevented.

本実施の形態では、基台13に直接グリーンシート7を接着・固定せず、薄い鉄板上に、両面が加熱により発泡することで粘着性が低下する発泡剥離シートを載置し、前記発泡剥離シート上にグリーンシート7を押圧手段12により押圧して接着した。鉄板は、基台13に埋め込まれた磁石と、角部に配置した係止ブロックにより一定位置に固定される。   In the present embodiment, the green sheet 7 is not directly bonded / fixed to the base 13, but a foam release sheet whose adhesiveness is reduced by foaming both surfaces by heating is placed on a thin iron plate, and the foam release The green sheet 7 was pressed and adhered to the sheet by the pressing means 12. The iron plate is fixed at a fixed position by a magnet embedded in the base 13 and a locking block arranged at the corner.

また、基台13は、その両端部が互いに回動可能に連結されており、全体として閉じたループ状の搬送部14を構成している。この搬送部14により、後述する複数の作業手段を経たグリーンシート7は、再度押圧手段12に戻り、積層工程を繰り返すことになる。   In addition, the base 13 is rotatably connected to both ends thereof, and constitutes a closed loop-shaped transport unit 14 as a whole. The green sheet 7 that has passed through a plurality of working means, which will be described later, is returned to the pressing means 12 again by the transport unit 14 and the lamination process is repeated.

基台13へ貼り付けられたグリーンシート7は、切断手段16で基台13毎に所定の形状の個片に切断される。尚、切断手段16には、加熱機構を設けることにより切断時のグリーンシート7の位置ずれを防止し、切断の精度を高めることができる。   The green sheet 7 attached to the base 13 is cut into pieces having a predetermined shape for each base 13 by the cutting means 16. The cutting means 16 can be provided with a heating mechanism to prevent the green sheet 7 from being displaced at the time of cutting and to improve the cutting accuracy.

切断手段16で個片に切断されたグリーンシート7は、基台13で搬送され、第一の方向転換部17を経由してグリーンシート7が基台13の上面側となり、電極形成手段18へ搬送される。この電極形成手段18の直前には、位置検出手段15が設けられている。位置検出手段15は、リニアセンサやフォトセンサなどでもよいし、グリーンシート7の端部に切り欠きや穴などを設けられるときは、カメラなどを用いて画像認識してもよい。さらに、電極形成手段18を複数設ける場合は、この位置検出手段15を、電極形成手段18毎に設けることで、さらに高い精度で電極を形成することが可能となる。   The green sheet 7 cut into individual pieces by the cutting means 16 is conveyed by the base 13, and the green sheet 7 becomes the upper surface side of the base 13 via the first direction changing portion 17, and goes to the electrode forming means 18. Be transported. A position detection means 15 is provided immediately before the electrode forming means 18. The position detection means 15 may be a linear sensor, a photo sensor, or the like, or when a cutout or a hole is provided at the end of the green sheet 7, the image may be recognized using a camera or the like. Further, when a plurality of electrode forming means 18 are provided, it is possible to form the electrodes with higher accuracy by providing this position detecting means 15 for each electrode forming means 18.

電極形成手段18は、インクジェット法などによる吐出方式でも良いし、グラビア印刷法を選択してもよい。本実施の形態では、電極形成手段18において基台13を水平に搬送する水平搬送部19とした。そのため、基台13上の個片に切断されたグリーンシート7は、水平方向に搬送されるため、上記インクジェット法やグラビア印刷法を選択すれば、塗布ノズルや印刷ロールを基台の搬送方向に対して直交するように配置することで連続的に電極をグリーンシート7に印刷することが可能となる。このように、基台が常に一定方向(水平方向)に搬送されるため、電極形成手段18になんら補正することがなく電極パターンを高精度にかつ連続的に基台13上のグリーンシート7に形成することが可能となる。この電極形成手段18は、積層する層数や電極パターン数を考慮して複数設けてもよい。   The electrode forming means 18 may be an ejection method such as an ink jet method or a gravure printing method. In the present embodiment, the electrode forming means 18 is the horizontal transport unit 19 that transports the base 13 horizontally. Therefore, since the green sheet 7 cut into individual pieces on the base 13 is transported in the horizontal direction, if the ink jet method or the gravure printing method is selected, the coating nozzle and the printing roll are moved in the transport direction of the base. The electrodes can be continuously printed on the green sheet 7 by arranging them so as to be orthogonal to each other. In this way, since the base is always conveyed in a certain direction (horizontal direction), the electrode pattern can be continuously and accurately applied to the green sheet 7 on the base 13 without any correction by the electrode forming means 18. It becomes possible to form. A plurality of electrode forming means 18 may be provided in consideration of the number of layers to be stacked and the number of electrode patterns.

電極パターンを形成したグリーンシート7は、基台13で搬送され、第二の方向転換部20に搬送され、グリーンシート7を下面側に方向転換し、再度押圧手段12へ搬送されることになる。この第二の方向転換部20の一部は、加熱を行う乾燥手段21を有しており、電極形成手段18で形成された電極パターンの乾燥と、接着剤塗布手段11で塗布された接着剤の乾燥を行う。乾燥手段21は、任意の温度プロファイルを作成できるように、複数の加熱手段から構成されている。温度プロファイルは、グリーンシート7を鉄板に固定している発泡剥離シートの発泡温度よりも低く設定する。さらに乾燥手段21は、酸化、還元の両雰囲気で電極パターンを乾燥できるように、基台13の周りを覆ったものであり、任意に酸素濃度や窒素濃度を制御して乾燥が可能である。この乾燥手段21は、電極形成手段18の直後に設けても良く、また、任意の温度プロファイルを作成するため、第二の方向転換部20とそれに続く水平搬送部へとその長さは適宜設計するものである。   The green sheet 7 on which the electrode pattern is formed is conveyed by the base 13, conveyed to the second direction changing unit 20, changes the direction of the green sheet 7 to the lower surface side, and is conveyed again to the pressing means 12. . A part of the second direction changing portion 20 has a drying means 21 for heating, and drying of the electrode pattern formed by the electrode forming means 18 and an adhesive applied by the adhesive applying means 11. Dry. The drying means 21 is composed of a plurality of heating means so that an arbitrary temperature profile can be created. The temperature profile is set lower than the foaming temperature of the foam release sheet that fixes the green sheet 7 to the iron plate. Further, the drying means 21 covers the base 13 so that the electrode pattern can be dried in both oxidizing and reducing atmospheres, and can be dried by arbitrarily controlling the oxygen concentration and the nitrogen concentration. The drying means 21 may be provided immediately after the electrode forming means 18, and in order to create an arbitrary temperature profile, the length of the drying means 21 is appropriately designed to the second direction changing portion 20 and the subsequent horizontal conveying portion. To do.

乾燥工程を経た後、基台13上のグリーンシート7は、再度押圧手段12に搬送され上記工程を数回繰り返すこととなる。   After the drying process, the green sheet 7 on the base 13 is conveyed again to the pressing means 12 and the above process is repeated several times.

所定の回数積層された上記の積層体は、鉄板ごと基台13から取り出し、グリーンシート7のバインダーを揮発、乾燥させるための乾燥工程と、前記積層体全体を加圧するプレス工程と、所定のサイズに切断する個片化工程を経て焼成することにより積層型電子部品を製造する。   The above laminated body laminated a predetermined number of times is taken out from the base 13 together with the iron plate, a drying step for volatilizing and drying the binder of the green sheet 7, a pressing step for pressurizing the whole laminated body, and a predetermined size A multilayer electronic component is manufactured by firing through an individualization step that is cut into pieces.

上記は、例えば積層セラミックコンデンサを例に説明したが、多層基板など、シート状の部品に任意のパターンを形成して積層する他の電子部品などにも適用が可能である。   The above has been described by taking, for example, a multilayer ceramic capacitor as an example. However, the present invention can also be applied to other electronic components such as a multilayer substrate in which an arbitrary pattern is formed and laminated on a sheet-like component.

本発明にかかる積層型電子部品の製造装置は、上面に平滑面を有する複数の基台を回動可能に連結してなる搬送部と、グリーンシートを所定の張力を付加して供給する巻き出し供給手段と、前記巻き出し供給手段から供給されるグリーンシートに接着剤を塗布する接着剤塗布手段と、前記グリーンシートを前記基台に押圧する押圧手段と、前記基台毎にグリーンシートを個片に切断する切断手段と、前記グリーンシートに電極を形成する電極形成手段と、前記グリーンシートを乾燥する乾燥手段とを備えた積層型電子部品の製造装置であって、特に搬送部の一部を水平搬送部として電極形成手段を設けた構造とした。この搬送部の一部を水平搬送部とし、電極形成手段を搬送方向に対して直交するように配置することにより、例えば電極形成手段にインクジェット方式などの吐出方式を選択することで、連続搬送しながら基台上のグリーンシートに補正をせず、高い精度で電極パターンを形成することが可能となるので、積層型電子部品の製造装置に有用である。   An apparatus for manufacturing a multilayer electronic component according to the present invention includes a transport unit formed by rotatably connecting a plurality of bases having smooth surfaces on an upper surface, and unwinding to supply a green sheet with a predetermined tension. A supply means; an adhesive application means for applying an adhesive to the green sheet supplied from the unwind supply means; a pressing means for pressing the green sheet against the base; and a green sheet for each base. A multilayer electronic component manufacturing apparatus comprising a cutting means for cutting into pieces, an electrode forming means for forming an electrode on the green sheet, and a drying means for drying the green sheet, particularly a part of a transport section As a horizontal transfer section, an electrode forming means is provided. By arranging a part of this transport unit as a horizontal transport unit and arranging the electrode forming means so as to be orthogonal to the transport direction, for example, by selecting an ejection method such as an ink jet method for the electrode forming unit, continuous transport is performed. However, since the electrode pattern can be formed with high accuracy without correcting the green sheet on the base, it is useful for an apparatus for manufacturing a multilayer electronic component.

本発明の一実施の形態における積層型電子部品の製造装置の側面図The side view of the manufacturing apparatus of the multilayer electronic component in one embodiment of this invention 従来装置の側面図Side view of conventional equipment 従来装置での電極パターンの形成例を示す模式図Schematic diagram showing an example of electrode pattern formation in a conventional device

符号の説明Explanation of symbols

7 グリーンシート
10 巻き出し供給手段
11 接着剤塗布手段
12 押圧手段
13 基台
14 搬送部
15 位置検出手段
16 切断手段
18 電極形成手段
19 水平搬送部
20 第二の方向転換部
21 乾燥手段
DESCRIPTION OF SYMBOLS 7 Green sheet 10 Unwinding supply means 11 Adhesive application means 12 Press means 13 Base 14 Conveyance part 15 Position detection means 16 Cutting means 18 Electrode formation means 19 Horizontal conveyance part 20 Second direction change part 21 Drying means

Claims (2)

上面に平滑面を有する複数の基台を回動可能に連結してなる搬送部と、前記基台上に、張力を付加したグリーンシートを供給する巻き出し供給手段と、前記巻き出し供給手段から供給されるグリーンシートに接着剤を塗布する接着剤塗布手段と、前記グリーンシートを前記基台に押圧する押圧手段と、前記グリーンシートを前記基台毎に切断する切断手段と、前記グリーンシートの位置を検出する位置検出手段と、前記位置検出手段の情報から前記グリーンシートに電極を形成する電極形成手段と、前記グリーンシートを乾燥する乾燥手段とを備えた積層型電子部品の製造装置であって、前記搬送部の一部が水平搬送部からなり、前記水平搬送部に電極形成手段を設けた積層型電子部品の製造装置。 From the conveyance part formed by connecting a plurality of bases having a smooth surface on the upper surface so as to be rotatable, unwinding supply means for supplying a green sheet with tension on the base, and from the unwinding supply means An adhesive applying means for applying an adhesive to the supplied green sheet; a pressing means for pressing the green sheet against the base; a cutting means for cutting the green sheet for each base; and An apparatus for manufacturing a multilayer electronic component, comprising: a position detecting means for detecting a position; an electrode forming means for forming an electrode on the green sheet from information of the position detecting means; and a drying means for drying the green sheet. An apparatus for manufacturing a multilayer electronic component, wherein a part of the transport unit is a horizontal transport unit, and the horizontal transport unit is provided with electrode forming means. 電極形成手段がインクジェット法による印刷手段である請求項1に記載の積層型電子部品の製造装置。 2. The multilayer electronic component manufacturing apparatus according to claim 1, wherein the electrode forming unit is a printing unit using an inkjet method.
JP2006188882A 2006-07-10 2006-07-10 Manufacturing apparatus of laminated electronic component Pending JP2008016752A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006188882A JP2008016752A (en) 2006-07-10 2006-07-10 Manufacturing apparatus of laminated electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006188882A JP2008016752A (en) 2006-07-10 2006-07-10 Manufacturing apparatus of laminated electronic component

Publications (1)

Publication Number Publication Date
JP2008016752A true JP2008016752A (en) 2008-01-24

Family

ID=39073463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006188882A Pending JP2008016752A (en) 2006-07-10 2006-07-10 Manufacturing apparatus of laminated electronic component

Country Status (1)

Country Link
JP (1) JP2008016752A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012069721A (en) * 2010-09-24 2012-04-05 Dainippon Screen Mfg Co Ltd Manufacturing method of multilayer ceramic capacitor and manufacturing apparatus of multilayer ceramic capacitor
KR20190100393A (en) * 2017-05-15 2019-08-28 가부시키가이샤 무라타 세이사쿠쇼 Manufacturing method of laminated electronic component and laminated electronic component

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012069721A (en) * 2010-09-24 2012-04-05 Dainippon Screen Mfg Co Ltd Manufacturing method of multilayer ceramic capacitor and manufacturing apparatus of multilayer ceramic capacitor
KR20190100393A (en) * 2017-05-15 2019-08-28 가부시키가이샤 무라타 세이사쿠쇼 Manufacturing method of laminated electronic component and laminated electronic component
CN110574131A (en) * 2017-05-15 2019-12-13 株式会社村田制作所 Laminated electronic component and method for manufacturing laminated electronic component
JPWO2018212119A1 (en) * 2017-05-15 2020-03-12 株式会社村田製作所 Multilayer electronic component and method of manufacturing multilayer electronic component
KR102267242B1 (en) * 2017-05-15 2021-06-21 가부시키가이샤 무라타 세이사쿠쇼 Multilayer electronic component and manufacturing method of multilayer electronic component
US11152157B2 (en) 2017-05-15 2021-10-19 Murata Manufacturing Co., Ltd. Stacked electronic component and method for manufacturing stacked electronic component
CN110574131B (en) * 2017-05-15 2022-05-17 株式会社村田制作所 Laminated electronic component and method for manufacturing laminated electronic component

Similar Documents

Publication Publication Date Title
JP4415126B2 (en) Laminating film laminating equipment
TW200904285A (en) Laminating apparatus and method for printed circuit board
JP2018506443A5 (en)
JP4486373B2 (en) LAMINATING METHOD AND LAMINATING APPARATUS USING THE METHOD
JP4675038B2 (en) Electronic component manufacturing method and electronic component manufacturing apparatus
JP2008016752A (en) Manufacturing apparatus of laminated electronic component
KR101479940B1 (en) Imprinter
JP6642198B2 (en) Workpiece supply device
KR101855844B1 (en) Roll to roll reverse offset printing apparatus and method of alignment for using the same
JP3948288B2 (en) Laminate manufacturing equipment for multilayer electronic components
KR101545500B1 (en) Imprinter
KR101342044B1 (en) Improved Both Sides Printing Apparatus, System, and Method
JP4501396B2 (en) Manufacturing method and manufacturing apparatus for multilayer electronic component
JPH10284346A (en) Laminating apparatus for ceramic green sheet
KR101530749B1 (en) Both sided printing apparatus and method
KR101479939B1 (en) Imprinter
KR101869821B1 (en) Roll To Roll Exposure System
JP4556999B2 (en) Method for manufacturing ceramic electronic component and gravure printing method
JP2014003145A (en) Method and device for manufacturing electronic component
CN113766735A (en) Thin film processing system and method
CN113752148A (en) Thin film processing system and method
JP2007027605A (en) Method for manufacturing stacked electronic component, and device thereof
JPH11145585A (en) Method for manufacturing flexible element substrate and manufacturing for the same
US20080230168A1 (en) Laminator and laminating method
CN212933489U (en) Touch control film