KR101479939B1 - Imprinter - Google Patents

Abstract

A printing apparatus is disclosed. A printing apparatus according to an embodiment of the present invention includes a substrate on which a pattern is formed by contacting a web on which an imprint pattern circle for forming an imprint pattern is formed on a web or a web on which an imprint pattern is formed, A stage unit arranged as far as possible; And an imprinting pattern is formed on the web by pressing the web against the master as the stage unit is moved in the web direction or a pattern is formed on the substrate by pressing the web on which the imprint pattern is formed And a web pressurizing unit.

Description

Printing device {IMPRINTER}

The present invention relates to a printing apparatus, and more particularly, to a printing apparatus capable of forming a pattern on a substrate.

In recent years, imprinting technology that can replace technologies based on existing lithography processes has become an issue in order to realize low cost products mainly in the display and semiconductor industries.

The imprinting technique is a pattern forming technique by press molding used for manufacturing displays such as liquid crystal display (LCD), plasma display panel (PDP), organic light emitting diode (OLED)

Various electronic devices such as an electronic circuit, a sensor, a solar cell, a flexible display, and an RFID can be easily manufactured using such a printing technique.

Further, the printing technique can simplify the process as compared with the existing lithography process, and can significantly reduce the production time and the production cost of the product. In addition, printing technology can mass produce a product with low manufacturing cost.

Unlike the conventional glass substrate, when printing technology is used, various materials such as plastic, fiber, and paper can be used as a substrate.

In the imprinting technique according to the related art, a planar mold in which a pattern to be implemented is formed in a reversed phase is pressed onto a substrate coated with an imprinting resin to form a pattern on the substrate.

The imprint process using the planar mold according to the related art is easy in mold construction and equipment construction but voids are formed in the pattern formed on the substrate by bubbles flowing between the mold and the substrate at the time of imprinting And there is a problem that a separate peeling means for peeling the mold and the substrate is necessary.

Therefore, in order to solve the problems of the imprint process using a flat mold, a roll imprint method using a pressure roller at the time of imprinting has been proposed.

The imprint process using the roll imprint according to the related art forms a pattern on the substrate while transferring the patterned web and the substrate together between the two pressure rollers so that when the pattern formed on the web surface is damaged, It is troublesome to increase the working time required for the printing process.

[Document 1] Korean Patent Laid-Open No. 10-2013-0019298 (Samsung Electronics Co., Ltd.) 2013.02.26.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a printing apparatus capable of easily replacing a web on which an imprint pattern is formed, reducing the cost of a printing process, and improving printing quality.

According to an aspect of the present invention, there is provided a substrate on which a pattern is formed by contacting a web on which a master or imprint pattern having an imprint pattern circle formed for forming an imprint pattern on a web is formed, A stage unit movably provided; And an imprinting pattern is formed on the web by bringing the web into contact with the master as the stage unit is moved in the web direction, or by pressing the web on which the imprint pattern is formed on the substrate, And a web pressurizing unit for contacting and forming a pattern on the substrate can be provided.

Wherein the stage unit comprises: a stage on which the master or the substrate is placed; And a stage moving part connected to a lower part of the stage and supporting the stage, the stage moving part moving the stage in the web direction.

The stage moving part includes a stage support frame arranged to be spaced apart from the lower part of the stage and supporting the stage; A moving rail disposed long in the web direction; And a movement driving unit connected to the stage support frame and moving the stage support frame along the movement rail.

The movement drive includes a ball screw disposed along the moving rail, the ball screw coupled to the stage support frame; And a driving motor coupled to the ball screw and rotating the ball screw in forward and reverse directions to reciprocate the stage support frame in the web direction.

The web pressing unit may include a web pressing unit that is provided on the top of the web and presses the web against the master or the substrate that is moved to a lower portion of the web.

The web pressing unit may further include a pressing part driving part connected to the web pressing part and moving the web pressing part up and down so that the web is contacted with and released from the master or the substrate.

The web pressurizing portion includes a pressing roller that is vertically movable on an upper portion of the web and continuously presses the web on the master or the substrate moved to the lower portion of the web so as to contact and release the web .

And a web feed unit for feeding the web, wherein the web supply unit includes a roll-to-roll module for feeding or retrieving the web so that the web is disposed on the master or the substrate moved by the stage unit, . ≪ / RTI >

The roll-to-roll module includes an unwinder for winding the web, unwinding the wound web and feeding it to the top of the master or the substrate moved by the stage unit; A rewinder arranged to be spaced apart from the unwinder and interworking with the unwinder to rewind or unwind the web; And at least one idle roll disposed between the unwinder and the rewinder for guiding the web.

The roll-to-roll module further includes at least one tension adjusting roll part that is disposed between the un-winder and the re-winder and moves relative to the un-winder and the re-winder to keep the tension of the web constant between the un- .

Wherein the pressure roller is disposed between the unwinder and the rewinder and presses the web against the master or the substrate to contact and release the contact with the master or the substrate as the strip moves upward and downward, Further comprising an auxiliary pressure roller disposed parallel to the pressure roller so that the web remains in contact with the master or the substrate when the stage unit is moved with the web or the web pressed against the master or the substrate can do.

And a resin curing unit which is provided adjacent to the pressing roller and which is pressed by the pressing roller to form an imprint pattern formed on the web or a resin constituting a pattern formed on the substrate.

The resin curing unit may be disposed between the pressure roller and the auxiliary pressure roller.

And an application unit for applying an imprint pattern resin to the substrate or the imprint pattern circle of the master on the stage unit moved in the web direction so as to be inline with the stage unit moved in the web direction .

The coating unit may include a dispenser for applying the resin for the imprint pattern to the master or the substrate.

A loading unit for loading a master having an imprinted pattern circle for forming an imprinted pattern on the web or a substrate for contacting a web on which the imprinted pattern is formed to form a pattern on the surface; And an unloading unit for unloading a master having an imprint pattern formed on the web or a substrate having a pattern formed on its surface in contact with the web.

The embodiments of the present invention can easily replace an imprint pattern by forming an imprint pattern on a web, reduce the cost of a printing process, and move a substrate in a web direction in which an imprint pattern is formed, The printing quality can be improved by pressing the substrate against the substrate to form a pattern on the substrate.

1 is a structural view showing a printing apparatus according to an embodiment of the present invention.
2 is a perspective view schematically showing a stage unit according to an embodiment of the present invention.
3 is a plan view showing a main alignment mark and a secondary alignment mark formed on the imprint pattern circle of the master according to the embodiment of the present invention.
4 is a plan view showing a main alignment mark and auxiliary alignment mark formed on a substrate according to an embodiment of the present invention.
5 is a planar projection view of Fig.
FIG. 6 is an enlarged perspective view of the area A of FIG. 5. FIG.
7 is a sectional view taken along the line BB of Fig.
8 is a plan view showing a state in which a stage according to an embodiment of the present invention is moved in the X-axis direction.
9 is a plan view showing a state in which a stage according to an embodiment of the present invention is moved in the Y-axis direction.
10 is a plan view showing a state in which the stage is rotated by an axis according to an embodiment of the present invention.
11 is a cross-sectional view illustrating a vacuum suction type feeding roll according to an embodiment of the present invention.
12 is a cross-sectional view taken along CC in Fig.
13 is a plan view showing a main alignment mark and a secondary alignment mark formed in an imprint pattern of a web according to an embodiment of the present invention.
FIG. 14 is a view illustrating an operation of aligning a web and a substrate using a web vision unit according to an embodiment of the present invention.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

Hereinafter, the present invention will be described in detail with reference to the preferred embodiments of the present invention with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

The continuously supplied web according to the present embodiment is a substrate having a large width of material and continuity in the longitudinal direction as compared with a thickness thereof and is made of polycarbonate (PC), polyethylene terephthalate (PET), polyethylene naphthalene (PEN) A polymer film such as PI (polyimide), a thin glass, or a metal.

A thin film of SiOx, SiNx or the like may be deposited on the surface of the web, or may be subjected to a surface treatment necessary for the imprint process or the like, and the protective film P may be deposited.

In this embodiment, various substrates such as a glass substrate, plastic, fiber, and paper can be used as a substrate.

The printing apparatus according to the present embodiment is for forming a pattern of several micro or nano grades on a substrate, and includes a semiconductor manufacturing and packaging process, a display manufacturing and packaging process, a solar cell, a display manufacturing and packing process, And can be used for medical diagnosis / treatment device manufacturing process. In addition, it can be used for the exterior surface of materials such as plastic, metal, and glass of automobiles and home appliances, And visual effects using diffraction and reflection of light.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

FIG. 2 is a perspective view schematically showing a stage unit according to an embodiment of the present invention, and FIG. 3 is a perspective view of a master according to an embodiment of the present invention. FIG. 4 is a plan view showing a main alignment mark and auxiliary alignment mark formed on a substrate according to an embodiment of the present invention, and FIG. 5 is a plan view showing a main alignment mark and auxiliary alignment marks formed on a substrate according to an embodiment of the present invention. FIG. 6 is an enlarged perspective view of the area A of FIG. 5, FIG. 7 is a sectional view taken along line BB of FIG. 6, and FIG. 8 is a plan view of the stage moving in the X- FIG. 9 is a plan view showing a state where the stage according to the embodiment of the present invention is moved in the Y-axis direction, and FIG. 10 is a plan view showing a state where the stage according to an embodiment of the present invention 11 is a cross-sectional view showing a vacuum suction type feeding roll according to an embodiment of the present invention, FIG. 12 is a sectional view taken along CC in FIG. 11, and FIG. 13 is a cross- FIG. 14 is a plan view showing a main alignment mark and auxiliary alignment mark formed in the imprint pattern of the web according to an embodiment of the present invention, and FIG. 14 is a view illustrating alignment operation of the web and the substrate using the web vision unit according to an embodiment of the present invention. FIG.

1 to 14, a printing apparatus according to an embodiment of the present invention includes a master M having an imprint pattern circle M1 formed thereon, or a loading unit (not shown) for loading a substrate G for forming a pattern on a surface. a stage unit 200 provided with a loading unit 100 and a master M or a substrate G on which an imprint pattern circle M1 is formed and is movable in a web F direction; A coating unit 300 for applying a resin for an imprint pattern to the imprint pattern mold M1 or the substrate G, a web supply unit 400 for supplying a web F, A web pressurizing unit 500 for pressing the web F against the master M or the substrate G and a resin constituting a pattern formed on the resin or the substrate G forming the imprint pattern formed on the web F A master (M) having an imprint pattern formed on a web (F), or a pattern formed on the surface It comprises a loading and unloading unit for unloading the plate (G) (unloading unit, 800).

The imprinting process using the printing apparatus according to the present embodiment is a process in which the imprinted pattern is formed on the web F by moving the master M on which the imprint pattern prototype M1 is formed to the web F A new imprint pattern can be formed on the web F by using the master M so that it is easy to replace the imprint pattern and the cost for the printing process due to the replacement of the imprint pattern can be reduced.

A pattern formed on the surface of the substrate G by moving the substrate G to the web F on which the imprinted pattern is formed allows a pattern formed on the substrate G by a feeding error due to the meandering of the web F It is possible to prevent the deterioration of the print quality of the image forming apparatus.

Hereinafter, the printing apparatus according to the present embodiment will be described in detail.

Referring to FIG. 1, the loading unit 100 is a portion in which a master M on which an imprint pattern circle M1 is formed or a substrate G on which a pattern is formed is first placed.

Then, the master (M) or the substrate (G) loaded in the loading unit (100) is transferred to the stage unit (200). The transfer of the master (M) or the substrate (G) to the stage unit (200) can be carried out by a separate robot or the like.

1 and 2, the stage unit 200 includes a master M on which an imprint pattern loaded on the loading unit 100 is formed, or a substrate G on which a pattern is to be formed, M or the substrate G toward the application unit 300, the web supply unit 400 and the unloading unit 800, which will be described later.

The stage unit 200 includes a stage 210 on which the master M or the substrate G is seated and a stage 210 on which the stage 210 is supported by a lower portion of the stage 210, Unit 300, a web supply unit 400 and a stage moving unit 230 moving in the direction of the unloading unit 800.

The stage 210 is moved in the direction of the inline coating unit 300, the web supply unit 400 and the unloading unit 800 with the master M or the substrate G vacuum-adsorbed on the upper surface.

At this time, the movement of the stage 210 is performed by the stage moving unit 230 that supports the lower portion of the stage 210.

The stage moving unit 230 includes a stage support frame 231 that is disposed at a lower portion of the stage 210 to support the stage 210 and an inline coating unit 300, a web supply unit 400, And a movement driving unit connected to the stage support frame 231 to move the stage support frame 231 along the movement rail 233. The movement support unit 231 includes a movable rail 233 that is long in the direction of the unloading unit 800,

The movement driving unit includes a ball screw (not shown) disposed along the movement rail 233 and coupled to the stage support frame 231, a ball screw (not shown) coupled to the ball screw and rotating the ball screw in the forward and reverse directions, (Not shown) for reciprocating in the direction of the web feed unit 400. [

For example, the movable rail 233 is disposed long in the direction of the application unit 300, the web supply unit 400, and the unloading unit 800 in the direction in which the master M or the substrate G is moved.

The stage support frame 231 supporting the lower portion of the stage 210 is linearly reciprocated along the movement rail 233 in a state where the stage support frame 231 is connected to the movement rail 233. That is, after the stage 210 is moved from the loading unit 100 to the unloading unit 800, the stage 210 is moved from the unloading unit 800 to the loading unit 100 again.

The reciprocating motion of the stage 210 is performed by the rotation of the ball screw rotated in conjunction with the forward and reverse rotation of the driving motor.

On the other hand, in the case where the imprint pattern is to be formed on the web F, the imprint pattern mold M1 of the master M must be coated with the resin for the imprint pattern, The resin for the imprint pattern should be applied to the upper surface of the substrate G.

Therefore, in this embodiment, the coating unit 300 is provided to be inline with the web supply unit 400, that is, the stage unit 200 moved in the web F direction. That is, the coating unit 300 is provided on the path in which the stage unit 200 is moved in the web F direction.

Referring to FIG. 1, the coating unit 300 serves to apply a resin for an imprint pattern to the imprint pattern circle M1 of the master M or to apply a resin for an imprint pattern to the upper surface of the substrate G.

As described above, in order to apply the resin for the imprint pattern, the application unit 300 includes a dispenser 310 for applying the resin for the imprint pattern to the master M or the substrate G. [

The dispenser 310 may be configured as an inkjet for applying the resin for the imprint pattern to the master M or the substrate G but is not limited thereto and may be formed by applying the resin for the imprint pattern to the master M or the substrate G Anything that can be used is available.

On the other hand, when applying the resin for the imprint pattern to the master (M) or the substrate (G) using the application unit 300, it is not applied over the whole width direction of the master (M) Is applied to the imprint pattern circle M1 of the master M as shown in Fig. 4A or to the printing area G1 for forming a pattern on the substrate G as shown in Fig.

In the case of the substrate G, the remaining area except for the printing area G1 in which the pattern is formed is finally cut.

On the other hand, in applying the resin for the imprint pattern to the master (M) or the substrate (G), the dispenser (310) and the master (M) or the substrate (G)

As shown in FIG. 1, the coating unit 300 further includes an alignment vision unit 330 provided on one side of the dispenser 310.

The alignment vision unit 330 may be arranged to align the dispenser 310 and the master M or the substrate G so that the alignment mark M is formed on the imprint pattern M1 of the master M as shown in FIG. The main alignment marks P1 and the main alignment mark P1 on the substrate G as shown in Fig. 4, And photographs the auxiliary alignment mark P2 provided so as to be spaced apart from the mark P1 by a predetermined distance.

Based on the imprint pattern circle M1 of the master M photographed by the alignment vision unit 330 or the primary alignment marks P1 and secondary alignment marks P2 on the substrate G, 2, the stage unit 200 according to the present embodiment further includes a stage alignment module 250. The stage alignment module 250 includes a stage alignment module 250,

The stage alignment module 250 is configured to position the stage M on the stage 310 with respect to the dispenser 310 based on the alignment pattern M1 of the master M photographed by the alignment vision portion 330 or a plurality of alignment marks on the substrate G. [ 210 are moved relative to each other to align the dispenser 310 with the master (M) or the substrate (G).

The stage alignment module 250 is configured to align the stage 210 in the plate surface direction of the stage 210, for example, in the X axis direction (see FIG. 8), the Y axis direction The alignment operation of the master M or the substrate G with respect to the dispenser 310 is performed.

That is, the stage alignment module 250 is coupled to the lower portion of the stage 210 to support the stage 210 movably.

The stage alignment module 250 will be described with reference to FIGS. 2 and 5 to 7 as follows.

The stage alignment module 250 is coupled to the upper surface of the stage support frame 231 and the lower surface of the stage 210 to connect the stage support frame 231 to the stage 210.

The stage alignment module 250 is disposed in a substantially rectangular configuration with respect to the plate surface of the stage 210 to move the stage 210 in the plate surface direction (X axis, Y axis, and? Axis direction) It is the role of supporting.

 The stage alignment module 250 includes four stage alignment portions 260a to 260d that are disposed in four corner areas of the stage 210 and allow the stage 210 to be relatively movable with respect to the dispenser 310 .

When the four stage alignment units 260a to 260d are arranged in the four corners of the stage 210 in a rectangular configuration, the web pressing unit 500, which will be described later, The stage 210 is not moved in any direction even if it is pressed with a high pressing force. That is, it is possible to prevent the stage 210 from being pushed by the web pressing unit 500.

Further, the stage 210 itself can be finely moved easily and efficiently in the X-axis, Y-axis, and? -Axis directions.

Hereinafter, for convenience of description, each of the four stage arranging units 260a to 260d is referred to as first to fourth stage arranging units 260a to 260d along the counterclockwise direction with reference to the area A in FIG. 5 I will explain.

Each of the first to fourth stage arrangements 260a to 260d includes first to fourth drive motors 261a to 261d and first to fourth drive motors 261a to 261d, First to fourth ball screws 262a to 262d rotatable in forward and reverse directions by drive motors 261a to 261d and first to fourth ball screws 262a to 262d via first to fourth ball screws 262a to 262d, First to fourth rotation supporting portions 267a to 267d provided on the opposite sides of the driving motors 261a to 261d for rotatably supporting the ends of the first to fourth ball screws 262a to 262d, The first to fourth ball screws 262a to 262d and the first to fourth ball screws 262a to 262d which are movable along the longitudinal direction of the first to fourth ball screws 262a to 262d during rotation of the first to fourth ball screws 262a to 262d. The movable block 263a to 263d and the movable block 263a to 263d and the first to fourth movable blocks 263a to 263d and movable in the direction crossing the moving direction of the first to fourth moving blocks 263a to 263d. The first to fourth fixing portions 265a to 264d are fixed to the upper surface of the first to fourth intersecting blocks 264a to 264d and the lower surface of the stage 210, respectively, 265d.

The first to fourth drive motors 261a to 261d are independently controlled by a control unit (not shown). That is, when the degree to which the master M or the substrate G vacuum-attracted on the stage 210 with respect to the dispenser 310 is calculated in the X-axis, Y-axis and θ-axis directions is calculated, The stage 210 is moved through the movement of the first to fourth moving blocks 263a to 263d and the first to fourth intersecting blocks 264a to 264d by independently controlling the four driving motors 261a to 261d, .

For stable movement of the first to fourth moving blocks 263a to 263d, a plurality of first to fourth moving blocks 263a to 263d for guiding the movement of the first to fourth moving blocks 263a to 263d are formed on the upper surface of the stage supporting frame 231, And guide rails 266a through 266d are provided.

Accordingly, the first to fourth moving blocks 263a to 263d, which move along the longitudinal direction of the first to fourth ball screws 262a to 262d by the rotation of the first to fourth ball screws 262a to 262d, The first to fourth guide rails 266a to 266d can be stably moved along the first to fourth guide rails 266a to 266d.

As described above, the first to fourth moving blocks 263a to 263d are moved by the operation of the first to fourth driving motors 261a to 261d. However, unlike the first to fourth moving blocks 263a to 263d, the first to fourth intersecting blocks 264a to 264d are freely moved on the first to fourth moving blocks 263a to 263d.

6 and 7, a plurality of protrusions 269a protruding upward from the upper surface of the first moving block 263a and having a through hole 268a formed therein, Is further movably coupled to the projection 269a to pass through the first intersection block 268a and is further provided with a movement axis 270 at least a portion of which is fixed to the first intersection block 264a.

Through this structure, the first intersection block 264a can freely move along the longitudinal direction of the moving shaft 270 from the upper surface of the first moving block 263a.

6 and 7, the projections 269a and the moving shafts 270 are provided in the second to fourth stage alignment units 260b to 260d, respectively, in addition to the first stage alignment unit 260a The detailed description of the second to fourth stage arranging units 260b to 260d will be omitted for the sake of convenience.

The stage 210 can be more stably supported by arranging the first to fourth stage alignment portions 260a to 260d in a rectangular shape in the four corner regions of the stage support frame 231. [

However, since the stage 210 must be moved in the X-axis, Y-axis, and? -Axis directions as needed for the alignment operation of the master M or the substrate G with respect to the dispenser 310, The arrangement direction of each of the portions 260a to 260d also functions as an important element.

In this embodiment, first to fourth ball screws 262a (262a, 262b) formed in the first to fourth stage arranging parts 260a to 260d, respectively, so as to move the stage 210 in the X- 262d are arranged in substantially the same direction in the upper surface of the stage support frame 231 and arranged along the diagonal direction, and are arranged in the first through fourth stage arranging parts 260a through 260d arranged along the diagonal direction The first to fourth driving motors 261a to 261d are positioned in opposite directions to each other.

This structural feature allows the stage 210 to be easily moved in the X-axis, Y-axis, and the &thetas; axis directions (see FIGS. 8 to 10), thereby making the alignment operation for the dispenser 310 more efficient .

In the following, based on the imprint pattern circle M1 of the master M photographed by the alignment vision unit 330 or the main alignment mark P1 on the substrate G and the auxiliary alignment mark P2, 310, the alignment operation of the master M or the substrate G will be described as follows.

8, when the stage 210 is to be moved a predetermined distance in the right (X-axis) direction, the controller operates the first and third driving motors 261a and 261c to move the first and third balls The screws 262a and 262c are rotated in one direction. At this time, the second and fourth drive motors 261b and 261d are not operated.

Therefore, the first and third moving blocks 263a and 263c coupled to the first and third ball screws 262a and 262c are moved along the first to third guide rails 266a and 266c under the first and third ball screws 262a and 262c, respectively, And is moved in the right (X-axis) direction as shown.

At this time, although the first and third moving blocks 263a and 263c and the second and fourth moving blocks 263b and 263d located in the diagonal direction are fixed, the upper and the lower ends of the second and fourth moving blocks 263b and 263d The second and fourth intersection blocks 264b and 264d provided on the first and second movable blocks 263b and 263d move freely to the right.

By such a series of operations, the stage 210 is moved in the right (X-axis) direction as shown in Fig.

9, when it is necessary to move the stage 210 a predetermined distance in the upward direction (Y axis), the control unit operates the second and fourth drive motors 261b and 261d, 4 ball screws 262b and 262d in one direction. At this time, the first and third drive motors 261a and 261c are not operated.

Therefore, the second and fourth moving blocks 263b and 263d coupled to the second and fourth ball screws 262b and 262d are moved along the second to fourth guide rails 266b and 266d at the lower portion thereof, (Y axis) direction as shown in the figure.

At this time, the first and third moving blocks 263a and 263c positioned in the diagonal direction from the second and fourth moving blocks 263b and 263d are fixed, but the upper and lower ends of the first and third moving blocks 263a and 263c The first and third intersection blocks 264a and 264c provided on the first and third moving blocks 263a and 263c move freely upward.

By such a series of operations, the stage 210 is moved in the upward direction (Y axis) as shown in Fig.

10, when the stage 210 is rotated clockwise by a predetermined angle (theta axis), the control section operates all of the first to fourth drive motors 261a to 261d.

When the first to fourth driving motors 261a to 261d are operated, the first to fourth moving blocks 263a to 263d are driven by the first to fourth ball screws 262a to 262d rotating in one direction And the first to fourth intersecting blocks 263a to 263d are freely moved in the corresponding directions on the first to fourth moving blocks 263a to 263d so that as shown in Figure 10, So that the rotating shaft 210 can be rotated clockwise by a predetermined angle. As such, the rotation operation of the stage 210 as in Fig. 10 can be realized by appropriately combining the operations of Figs. 8 and 9. Fig.

As described above, the stage 210 is moved relative to the dispenser 310 to align the dispenser 310 with the master M or the substrate G, and the imprint pattern circle M1 of the master M or the substrate The master M or the substrate G is moved in the direction of the web supply unit 400 by the stage unit 200 after the application of the resin for the imprint pattern to the substrate W.

In this embodiment, the web pressing unit 500 forms an imprint pattern on the web F while the stage unit 200 on which the master M or the substrate G is placed passes under the web F Or to form a pattern on the surface of the substrate (G).

The web supply unit 400 for supplying the web F will be described first, and then the web pressing unit 500 will be described.

The web supply unit 400 serves to supply the web F to the operation line on which the imprinting process is carried out or to collect the web F in the opposite direction.

1, the web supply unit 400 is configured to supply and recover the web F such that the web F is disposed on the master M or the substrate G moved by the stage unit 200 Roll-to-roll module 410.

In this embodiment, the roll-to-roll module 410 is disposed above the stage unit 200 for moving the master M or the substrate G so that the web F is conveyed to the upper side of the master M or the substrate G Lt; / RTI >

The roll-to-roll module 410 unwinds the web F wound around the web F and feeds it to the upper portion of the master M or the substrate G moved by the stage unit 200 And a rewinder 413 which is disposed so as to be spaced apart from the unwinder 411 and which is interlocked with the unwinder 411 to rewind or unwind the web F, At least one idle roll 415 disposed between the unwinder 411 and the rewinder 413 for guiding the web F and at least one idle roll 415 disposed between the unwinder 411 and the rewinder 413, At least one driven roll 430 which is disposed and transfers power to the web F to convey the web F and a driven roll 430 which is disposed between the unwinder 411 and the rewinder 413, And at least one tension adjusting roll 415 for keeping the tension of the web F constant between the unwinder 411 and the rewinder 413. [

The unwinder 411 winds the web F and unwinds or reversely winds the web F in order to supply the web F to the operation line on which the imprinting process is performed.

The unwinder 411 is disposed at an upper portion of the operation line on which the stage unit 200 is moved and includes an unwinding roll (not shown) for unwinding and rewinding the web F, And a winding rotating shaft (not shown).

The rewinder 413 rewinds the unwound web F at the unwinder 411 or unwinds the web F rewound at the unwinder 411. [

The rewinder 413 is disposed at an upper portion of the operation line on which the stage unit 200 is moved and includes a rewinding roll (not shown) for rewinding and unwinding the web F, (Not shown).

At least one idle roll portion 415 is provided between the unwinder 411 and the rewinder 413 and the idle roll portion 415 serves to guide the conveyance path of the web F. [

As shown in Fig. 1, a plurality of idle rolls 415 are arranged in a conveying path of the web F to guide the conveyance of the web F, and the imprint patterns formed on the upper surface of the web F are contaminated and damaged The lower surface of the web F is supported.

At least one tension adjusting roll 415 is provided to prevent the web F fed between the unwinder 411 and the rewinder 413 from striking.

Particularly, in this embodiment, the tension adjusting roll 415 contacts the web F to measure the tension of the web F, and then maintains the tension of the web F constant.

 1, the tension adjusting roll 415 is provided so as to be movable up and down between the unwinder 411 and the rewinder 413 to maintain the tension of the web F constant.

That is, when the tension applied to the web F is small and the web F is struck, the tension adjusting roll 415 is lowered. When the tension acting on the web F is large, the tension adjusting roll 415 Thereby reducing the tension acting on the web F.

On the other hand, in the unwinder 411, the unfolded web F is shifted out of a predetermined transport path or does not deviate from the transport path, In the case where a slip phenomenon occurs in the roll section 415 or the like, the printing quality may be adversely affected.

Therefore, in this embodiment, at least one or more driven rollers 430 are provided to prevent the web F from slipping and slipping.

The driven roll portion 430 is disposed between the unwinder 411 and the rewinder 413 to transmit power to the web F and closely feed the web F to the outer circumferential surface.

The driven roll part 430 is composed of a vacuum suction type feeding roll 430 in which a plurality of suction holes 433 are formed on the outer circumferential surface so that the web F is sucked and conveyed on the outer circumferential surface.

11, the vacuum suction type feeding roll 430 includes an inner roller 431 and an inner roll 431 which are internally fixed and rotated together with the inner roll 431, An outer roll 432 having a plurality of suction holes 433 formed on its outer circumferential surface so as to be closely contacted with the inner roll 431 and an outer roll 432 and being communicated with the plurality of suction holes 433 A suction chamber 434 for vacuum adsorbing the web F to the outer peripheral surface of the outer roll 432 and a plurality of partition walls 435 provided between the inner roll 431 and the outer roll 432 for partitioning the suction chamber 434 ).

The suction chamber 434 is connected to an external vacuum pump (not shown). When the air in the suction chamber 434 is sucked in, the suction chamber 434 is evacuated. As the air is sucked to the outside, Air is introduced into the suction chamber 434 through a plurality of suction holes 433 formed on the outer peripheral surface of the roll 432. The web F that is in contact with the outer circumferential surface of the outer roll 432 is attracted to the outer circumferential surface of the outer roll 432 by the suction hole 433 for sucking air and is transported by the rotation of the outer roll 432. [

In this way, when feeding the web F using the vacuum suction type feeding roll 430, the feeding of the web F and the slip phenomenon can be prevented, so that the web F can be precisely conveyed.

Meanwhile, the printing apparatus according to an embodiment of the present invention may be configured such that the web pressing unit 500 is rotated while the stage unit 200 on which the master M or the substrate G is placed passes under the web F The web F is pressed against the master M to form an imprint pattern on the web F or the web F on which the imprinted pattern is formed is pressed against the substrate G to contact the substrate G, .

That is, the web pressing unit 500 forms an imprint pattern on the web F and forms a pattern on the surface of the substrate G. [

1, the web pressurizing unit 500 presses the web F onto the master M or the substrate G which is provided on the upper side of the web F and moves to the lower portion of the web F, And the web pressing unit 510 is moved up and down so that the web F is in contact with and released from the master M or the substrate G And a pressing part driving part (not shown).

The web pressing unit 510 forms an imprint pattern on the web F by pressing the web F against the master M having the imprint pattern prototype M1 formed thereon to form an imprint pattern on the web F, (F) to contact with each other to form a pattern on the surface of the substrate (G).

The web pressing unit 510 continuously presses the web F on the master M or the substrate G which is provided on the top of the web F so as to be movable up and down and moves to the lower portion of the web F A pressure roller 511 for causing the pressure roller 511 to contact and release the contact, and a pressure roller rotation shaft (not shown) for rotating the pressure roller 511.

In this embodiment, the pressure roller 511 is disposed in the width direction of the web F.

The pressurizing portion driving portion linearly moves the web pressing portion 510 and particularly the pressing roller 511 in the vertical direction so that the pressing roller 511 contacts the web M with the web F or the substrate G, To be released.

Although not shown, the pressurizing portion driving portion is constituted by a linear driving device capable of linearly moving the pressing roller 511 in the vertical direction, and the linear driving device may include a linear motor.

The pressing roller 511 is moved downward by the pressing unit driving unit to form an imprint pattern on the web F by pressing the web F against the resin for imprinting pattern coated on the master M, F are pressed against the resin for the imprint pattern coated on the substrate G to form a pattern on the surface of the substrate G. [

After the imprint pattern is formed on the web F or a pattern is formed on the surface of the substrate G, the pressing roller 511 is moved upward by the pressing portion driving portion and returned.

On the other hand, in forming the pattern by pressing the web F on the substrate G, the substrate G and the web F must be aligned.

1, a printing apparatus according to an embodiment of the present invention includes a web pressing unit 500 and a web feeding unit 400. The web pressing unit 500 is disposed adjacent to the web pressing unit 500 and the web feeding unit 400, And a web vision unit 600 provided in front of the web vision unit 511.

For reference, the imprint pattern M1 of the mask is projected as it is, so that the imprint pattern of the web F is formed in the imprint pattern M1 of the master M shown in Fig. A plurality of alignment marks corresponding to the primary alignment marks P1 and the secondary alignment marks P2 are formed.

For example, as shown in Fig. 13, the main alignment mark P1 and the auxiliary alignment mark P2 are formed in the imprint pattern of the web F.

Therefore, the web vision unit 600 photographs the primary alignment marks P1 and secondary alignment marks P2 formed in the imprint pattern of the web F.

Here, the interval D between the primary alignment marks P1 and the secondary alignment marks P2 can be a circumferential length corresponding to the case where the pressure roller 511 is rotated 90 degrees.

The alignment operation between the substrate G and the web F using the web vision unit 600 will now be described.

The distance between the web F and the substrate G transported by the stage unit 200 is calculated based on the main alignment mark P1 formed on the web F photographed using the web vision unit 600 The stage unit 200 is moved to move the substrate G to the lower portion of the web F. At this time, the movement distance of the stage unit 200 corresponds to the distance D corresponding to the interval between the primary alignment marks P1 and secondary alignment marks P2 formed on the web F.

14, the pressing roller 511 is lowered by using the pressing portion driving portion so that the web F is adjacent to the upper surface of the substrate G. [ At this time, the pressure roller 511 is rotated to rotate the pressure roller 511 so that the main alignment mark P1 on the web F is positioned opposite to the main alignment marks P1 on the substrate G, (F) is conveyed along the outer circumferential surface of the pressure roller 511.

The auxiliary vision mark P2 formed on the web F is photographed using the web vision unit 600 and it is determined whether or not the travel distance of the web F coincides with the moving distance of the substrate G do.

The stage 210 is relatively moved with respect to the web F by using the stage alignment module 250 described above and the web F is moved relative to the web F when the moving distance of the web F does not match the moving distance of the substrate G. [ ) And the substrate (G).

Alignment of the web F and the substrate G using the stage alignment module 250 is performed by moving the stage 210 relative to the dispenser 310 relative to the dispenser 310 and the master M or the substrate G, (G), and therefore, a detailed description thereof will be omitted.

1, the roll-to-roll module 410 is configured such that when the pressure roller 511 presses the web F against the master M or the substrate G, Further comprises an auxiliary pressure roller 419 disposed parallel to the pressure roller 511 so that the web F remains in contact with the master M or the substrate G when the web F is moved.

The auxiliary pressure roller 419 may be provided to move linearly in the up-and-down direction in association with the pressure roller 511. [

The auxiliary pressure roller 419 serves to peel off the imprint pattern formed on the web F and the imprint pattern prototype M1 formed on the master M when the imprint pattern is formed on the web F, And separates the imprint patterns formed on the substrate (G) and the web (F) when the pattern is formed on the surface of the substrate (G).

The auxiliary pressure roller 419 is disposed at a position spaced apart from the pressure roller 511 by the length of the imprint pattern M1 of the master M or the length of the imprint pattern formed on the web F. [

1, a resin curing unit 700 for curing a resin constituting an imprint pattern formed on the web F or a pattern formed on the surface of the substrate G is provided at the rear end of the pressure roller 511 do. In this embodiment, the resin curing unit 700 includes a UV lamp.

Particularly, a UV lamp, which is a resin hardening unit 700, is disposed between the pressure roller 511 and the auxiliary pressure roller 419 to harden the resin constituting the imprint pattern formed on the web F, The web F and the master M are separated from each other or the resin constituting the pattern formed on the surface of the substrate G is cured and then the substrate G and the web F are separated from each other by the auxiliary pressing roller 419, do.

When the step of forming the imprint pattern on the web F and the step of forming the pattern on the surface of the substrate G are completed, the master M or the substrate G is unconfined from the stage unit 200 Loading.

1, a substrate G on which a pattern is formed on an imprint pattern formed on a master (M) or web (F) having an imprint pattern formed on a web (F) Unloaded.

At this time, the master (M) having the imprinted pattern formed on the web (F) or the substrate (G) having the pattern formed on the surface thereof is moved to the unloading unit (800) by the stage unit (200) Unloading unit 800 as shown in FIG.

The imprinting process using the printing apparatus according to an embodiment of the present invention will now be described.

The imprint process using the printing apparatus according to the embodiment of the present invention is divided into a process of forming an imprint pattern on the web F and a process of forming a pattern on the substrate G. [

First, a process of forming an imprint pattern on the web F will be described.

The stage unit 200 is moved in the direction of the web feed unit 400 after the master M on which the imprint pattern circle M1 is formed from the loading unit 100 is placed on the stage unit 200. [

The imprint pattern prototype M1 of the master M is coated with the resin for the imprint pattern in the course of the movement of the stage unit 200 toward the web supply unit 400. The imprint pattern prototype M1 of the master M, The application of the resin for the imprint pattern to the coating unit 300 is performed by the application unit 300.

The master M coated with the resin for the imprint pattern is moved to a lower portion of the predetermined area of the web F and the predetermined area of the web F is moved by the pressure roller 511 of the web pressing unit 500 to the master (M) side and hardened with respect to the resin by the resin hardening unit (700) to form an imprint pattern on the web (F).

The imprint pattern formation for the web F is performed while the stage unit 200 is moved in the direction of the unloading unit 800 in a state in which the web F and the master M are in pressure contact with the pressure roller 511, When the imprint pattern formation for the web F is completed, the web F and the master M are peeled or separated from each other.

If the impression pattern formed on the web F is to be continuously formed with a new imprint pattern different from the imprint pattern formed on the web F, the stage unit 200 is moved in the direction of the coating unit 300, A new imprint pattern can be formed on the new surface of the substrate F.

Then, the master (M) having the imprinted pattern formed on the web F is moved in the direction of the unloading unit 800 by the stage unit 200.

Next, a step of forming a pattern on the surface of the substrate G will be described.

After the substrate G for which a pattern is to be formed on the surface from the loading unit 100 is placed on the stage unit 200, the stage unit 200 is moved toward the web supply unit 400.

The resin for the imprint pattern is applied to the surface of the substrate G in the process of moving the stage unit 200 toward the web supply unit 400. The application of the resin for the imprint pattern to the substrate G is performed by the application unit 300).

The substrate G coated with the resin for the imprint pattern is moved to a lower portion of a predetermined region of the web F on which the imprinted pattern is formed and the region where the imprinted pattern of the web F is formed is transferred to the pressing roller 511 by the substrate G , And the resin is hardened by the resin hardening unit 700 to form a pattern on the surface of the substrate G. [

The pattern formation on the surface of the substrate G is performed while the stage unit 200 is moved toward the unloading unit 800 in a state in which the web F and the substrate G are in pressure contact with the pressure roller 511 , When the pattern formation on the substrate G is completed, the web F and the substrate G are peeled or separated from each other.

Then, the substrate G on which the pattern is formed is moved in the direction of the unloading unit 800 by the stage unit 200.

If the imprint pattern formed on the web F needs to be replaced while repeating the process of forming the pattern for the substrate G, the unwinder 411 and the rewinder 413 are driven to move the web F Is wound on the side of the rewinder 413 so that the web F in the region without the imprint pattern is positioned below the pressure roller 511. [

A new imprint pattern is formed on the web F by moving the master M on which the imprint pattern original M1 is formed to the lower portion of the web F in the region without the imprint pattern, To form a pattern on the substrate (G).

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: loading unit 200: stage unit
210: stage 230: stage moving part
250: stage alignment module 260a, 260b, 260c, 260d:
300: dispensing unit 310: dispenser (inkjet)
330: alignment vision unit 400: web supply unit
410: roll to roll module 411: unwinder
413: Rewinder 415: Idle roll part
417: tension adjusting roll part 419: auxiliary pressure roller
430: Driven roll part 500: Web pressurizing unit
510: Web pressure unit 600: Web vision unit
700: Resin hardening unit 800: Unloading unit

Claims (16)

A stage unit on which a substrate on which a pattern is formed by contacting the web on which a master or imprint pattern having an imprint pattern pattern formed for forming an imprint pattern on the web is formed, the stage unit being movable in the web direction;
A web supply unit for continuously supplying the web;
Wherein the at least one imprint pattern is formed at a position adjacent to the web supply unit so that as the stage unit is moved in the web direction, the web is brought into pressure contact with the master, And a web pressing unit for pressing the substrate against the substrate to form a pattern on the substrate,
The web pressurizing unit includes:
And a web pressing portion provided on the web to move up and down and having a pressing roller that presses the web continuously onto the master or the substrate moved to a lower portion of the web,
The web supply unit includes:
When the stage unit is moved in a state in which the pressing roller presses the web against the master or the substrate, the web is moved in the vertical direction interlocked with the pressing roller so as to maintain the state of contact with the master or the substrate Wherein the pressing roller is spaced apart from the pressing roller by a length of the imprint pattern to support the web. The method according to claim 1,
The stage unit includes:
A stage on which the master or the substrate is mounted; And
And a stage moving unit connected to a lower portion of the stage and supporting the stage, the stage moving unit moving the stage in the web direction. 3. The method of claim 2,
Wherein the stage moving unit comprises:
A stage support frame disposed at a lower portion of the stage to support the stage;
A moving rail disposed long in the web direction; And
And a movement driving unit connected to the stage support frame to move the stage support frame along the movement rail. The method of claim 3,
The movement drive unit may include:
A ball screw disposed along the moving rail, the ball screw coupled to the stage support frame; And
And a driving motor coupled to the ball screw and rotating the ball screw in forward and reverse directions to reciprocate the stage support frame in the web direction. delete The method according to claim 1,
The web pressurizing unit includes:
Further comprising a pressing part driving part connected to the web pressing part and moving the web pressing part up and down so that the web comes into contact with and is released from the master or the substrate. delete The method according to claim 1,
The web supply unit includes:
And a roll-to-roll module that continuously feeds or retrieves the web so that the web is disposed on the master or the substrate moved by the stage unit. 9. The method of claim 8,
The roll-
An unwinder for unwinding the wound web and feeding the wound web to an upper portion of the master or the substrate moved by the stage unit;
A rewinder arranged to be spaced apart from the unwinder and interworking with the unwinder to rewind or unwind the web; And
And at least one idle roll disposed between the unwinder and the rewinder for guiding the web. 10. The method of claim 9,
The roll-
Further comprising at least one tension control roll portion which is disposed between the unwinder and the rewinder and keeps the tension of the web constant between the unwinder and the rewinder as the relative movement is performed. delete The method according to claim 1,
And a resin curing unit which is provided adjacent to the pressure roller and which is pressed by the pressure roller to form an imprint pattern formed on the web or a resin constituting a pattern formed on the substrate. 13. The method of claim 12,
The resin curing unit includes:
And the second pressure roller is disposed between the pressure roller and the auxiliary pressure roller. The method according to claim 1,
Further comprising a coating unit which is arranged to be inline with the stage unit moved in the web direction and which applies the resin for the imprint pattern to the substrate of the imprint pattern circle of the master on the stage unit moved in the web direction, . 15. The method of claim 14,
The coating unit includes:
And a dispenser for applying the resin for the imprint pattern to the master or the substrate. The method according to claim 1,
A loading unit for loading a master having an imprinted pattern circle for forming an imprinted pattern on the web or a substrate for contacting a web on which the imprinted pattern is formed to form a pattern on the surface; And
Further comprising an unloading unit for unloading a master having an imprinted pattern formed on the web or a substrate having a pattern formed on its surface in contact with the web.

Images