KR100590072B1 - Lamination apparatus - Google Patents

Abstract

Lamination apparatus of the present invention, the film feed roller, the cutter assembly for cutting a certain length of the film supplied from the feed roller, the film is released from the feed roller with a predetermined time difference to support to be transported through the travel path And a transfer roller which compresses the adsorption member and the film fed through the adsorption member, adheres to the substrate supplied along the travel path, and has a plurality of protrusions along the surface thereof.

Plasma, Lamination, Sheet, Transfer Roller, Projection

Description

Lamination Device {LAMINATION APPARATUS}

1 is a configuration diagram schematically showing the configuration of a lamination device according to an embodiment of the present invention.

Figure 2 is a schematic perspective view showing the state of the transfer roller.

3 is a schematic cross-sectional view showing a cross section of the transfer roller.

4 is a perspective view showing an embodiment of the cutter assembly shown in FIG. 1.

It is a block diagram explaining the adsorption member shown in FIG.

6 is a schematic diagram illustrating a method of laminating a corner portion of an electrode by acting on a protrusion provided in a transfer roller.

The present invention relates to a lamination device, and more particularly, to a lamination device that improves the structure of a transfer roller that presses a film and attaches it onto a substrate.

In a general semiconductor manufacturing process, a plurality of laminates are sequentially stacked on a substrate to manufacture a semiconductor in order to manufacture a semiconductor device having complex properties by stacking layers having different properties. In the semiconductor manufacturing process, various lamination methods such as photolithography, lift-off, and screen printing are used.

Among these, the photolithographic method which is easy to manufacture especially is widely used. The photolithography method uses photo printing technology to implement components, wirings, and thin films constituting a semiconductor integrated circuit. That is, in the photolithography method, a photoresist (PR) having a photosensitive property is applied thinly on a semiconductor wafer, and then a circuit is constructed in the same manner as taking a photograph by applying a light on a desired mark pattern.

Here, the photoresist is a photosensitive material for an exposure process that allows a fine circuit pattern to be formed by differently responding to irradiation of light when transferring a designed semiconductor circuit to a wafer, and is a material for forming an anticorrosive coating by exposure. It is used for fine processing of semiconductors such as photoetching, integrated circuit (IC), and large scale integration (LSI), which perform precision processing of various metal plates in addition to photolithography for photolithography.

The photoresist is particularly used in the form of a lamination sheet (hereinafter, referred to as a 'film'), and the liquid crystal display panel (LCD) and the plasma display panel due to the uniformity of the thickness and the advantages of the process simplification. , PDP). In the case of the plasma display panel, the film is mainly used not only for electrodes but also for dielectrics.

However, there is a problem in the process of manufacturing a dielectric layer covering the electrodes (eg, display electrode, address electrode) using the film as described above. For example, when the electrodes are formed at regular intervals in the direction of the short side of the substrate, and the substrate is fed into the transfer roller in parallel with the direction in which the transfer roller is placed to form a dielectric layer thereon, the end of the electrode and the substrate There is a problem that the film is not properly laminated to the edges connecting the wires. That is, the lamination of the film is a lamination of the film by the pressing force applied from the transfer roller by feeding the film together over the substrate while the substrate is introduced between the transfer roller having a flat outer peripheral surface thereof. By the way, since the step is physically formed between the substrate and the end of the electrode by the electrode, the pressing force transmitted from the transfer roller is not properly transmitted to the corners, resulting in lamination failure.

The present invention is to solve the problems as described above, to provide a lamination apparatus of the present invention improved the structure of the transfer roller so that the film can be easily laminated on the electrode corresponding to the shape of the electrode.

Lamination apparatus provided by this invention in order to achieve such an objective,

A feed roller wound with a film, a cutter assembly for cutting a film of a predetermined length supplied from the feed roller, an adsorption member and the adsorption member for supporting the film so that the film is released from the supply roller with a predetermined time difference and transported through a traveling path. And a transfer roller having a plurality of protrusions attached to the substrate supplied along the traveling path by pressing the film to be fed through.

In the present invention, an electrode is formed on the substrate, and the projections are positioned between the electrodes to act to attach the film onto the substrate.

In the present invention, the protrusion is formed to protrude from the surface of the transfer roller to a predetermined height, and may be formed to extend along the axial direction of the transfer roller, or along the rotation direction.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.

1 is a front configuration diagram schematically showing the configuration of a lamination device according to the present invention.

Referring to the drawings, the lamination apparatus according to the present invention is a substrate (10) bound to the supply roller 30 is freely rotated and supplied to the transfer roller 70 side, with the substrate (not shown) moved by a transfer belt (not shown) 1) is introduced into the transfer roller 70 side, the film 10 is laminated on the substrate 1 by the transfer roller 70.

Lamination apparatus of the present invention is partitioned into the following various components, these components may be installed in one frame 20, each of the divided frame 20 may be a combined form. In addition, each component is controlled by a control unit (not shown).

The frame 20 is configured to support the device with respect to the ground, and is equipped with various motors for driving the device, a high pressure air system, a vacuum system, an electronic measurement system, and the like.

The components of the present invention described below are all installed in the frame 20, and various brackets, blocks, plates, housings, covers, collars, and the like are attached elements for installing the respective components in the frame 20. Therefore, except for exceptional cases, the frame 20 is generally referred to as a rule.

The lamination apparatus according to the present invention maintains the tension of the supply roller 30 wound around the film 10, the recovery roller 40 recovering the cover film 11 attached to the film 10, and the film 10. The tension member 50 to be cut, the cutter assembly 60 cutting the film 10 of the predetermined length supplied from the supply roller 30, and the surface of the cut film 10 are pressed and supplied along the traveling path. The transfer roller 70 attached to the upper surface of the substrate 1 and provided with a plurality of protrusions 71 along the surface thereof, and the transfer roller 70 so that the substrate 1 travels along the traveling path of the film 10. The support roller 80 and the film 10 which are disposed at the lower side of the film 10 are released from the supply roller 30 with a predetermined time difference to be supported to travel through the travel path, and the film 10 is supplied to the transfer roller 70. Adsorption member 90 is provided.

The above-described film 10 is composed of a cover film 11 and a transfer material attached to the cover film 11, and in the case of a plasma display panel, the transfer material includes an electrode material, a dielectric material, and the like. For example. As the electrode material, indium tin oxide (ITO) and SnO ₂ for transparent electrodes, Cr-Cu-Cr or Ag for bus electrodes, and Ag for address electrodes are widely used. In addition, as the dielectric, a paste mainly composed of low melting point glass powder, that is, glass paste is used. As the partition wall, a material in which an organic solution (organic solvent + resin) or various fillers (alumina or various metals) is added to the low melting glass powder is used.

The supply roller 30 is rotatably installed on the frame 20, the film 10 as described above is wound in a roll shape, and the film 10 is unloaded and supplied to the traveling path. Preferably, the supply roller 30 is not driven by a predetermined drive source, and is rotated while the film 10 is freely released by the suction member 90 described below. In addition, the supply roller 30 may be supported by a separate holder (not shown) to be rotatably mounted to the frame 20.

The recovery roller 40 is installed in close proximity to the supply roller 30, and is rotatably mounted to the frame 20 to wind the cover film 11 attached to the film 10. The recovery roller 40 has a structure in which the rotating shaft is connected to the rotating shaft (not shown) of the feed roller 30 by a belt or a chain and rotated together as the feed roller 30 is rotated. The recovery roller 40 may be supported by a separate holder together with the supply roller 30 to be rotatably mounted to the frame 20.

In addition, the tension member 50 acts to maintain a constant tension on the film 10 by changing the traveling path of the film to work with the adsorption member 90 described later. This will be described together with the description of the adsorption member 90 described later.

The transfer roller 70 compresses the film 10 supplied from the supply roller 30 so that the film 10 is easily attached to the upper surface of the substrate 1. The transfer roller 70 has a plurality of protrusions 71 formed on the surface thereof. Accordingly, the stepped edges 11a are easily pressed by the electrodes 11 formed on the substrate, so that the film 10 can be closely attached. Act to help.

2 is a schematic perspective view showing the protrusion 71 of the transfer roller 70 according to the present embodiment, Figure 3 is a cross-sectional view thereof. Referring to this, in the present embodiment, the transfer roller 71 has a cylindrical shape and has a plurality of protrusions 71 along its surface. The protrusion 71 may be formed along the surface along the axial direction of the transfer roller 70 or may be formed along the rotational direction. The protrusion 71 is formed to protrude from the surface in a predetermined size, and the pitch p and the protrusion height h between the protrusions 71 correspond to the size of the electrode 11. That is, the pitch p is preferably at least equal to or larger than the width w of the electrode 11, and the height h is formed to be equal to or larger than the thickness d of the electrode. And the projection part 71 is formed to taper. The protrusion 71 of the transfer roller 70 formed as described above is thermally compressed to the edge 11a to allow the film to be attached to the substrate.

Meanwhile, the substrate 1 is a substrate for manufacturing a plurality of plasma display panels, and passes between the transfer roller 70 and the support roller 80 disposed below the transfer roller 70 to transfer the roller 70. It is supplied in the same direction as the traveling direction of the film 10 supplied to the. The support roller 80 supports the lower surface of the substrate 1 and is rotated by a separate driving source. Accordingly, as the substrate 1 is supplied between the transfer roller 70 and the support roller 80 and at the same time the film 10 is supplied between the transfer roller 70 and the substrate 1, the film 10 is transferred to the transfer roller. It adheres to the upper surface of the board | substrate 1 by the complementary pressing force of the 70 and the support roller 80. As shown in FIG.

On the other hand, Figure 4 is a perspective view showing an embodiment of the cutter assembly shown in FIG.

Referring to this, the cutter assembly 60 has a structure capable of cutting the film 10 in a direction perpendicular to the travel path while the film 10 is supplied by the feed roller 30 by a predetermined length. To this end, the cutter assembly 60 is installed at the end of the lead screw 61 and the lead screw 61 rotatably installed in the frame 20 along a direction perpendicular to the travel path of the film 10 and a predetermined driving force. A drive motor 62 for forward and reverse rotation of the lead screw 61 by the screw, a mount block 63 coupled to the lead screw 61, and horizontally movable by rotation of the lead screw 61, and a mount block 63. A pair of guide rods 64 mounted on the frame 20 to guide the horizontal movement of the cutter, and a cutter installed on the mounting block 63 to cut the film 10 by the horizontal movement of the mount block 63 ( 65). As will be described in detail later, the cutter 65 operates to cut the film horizontally along the guide groove provided in the suction member 90.

5 is a block diagram explaining the adsorption member shown in FIG. 1.

Adsorption member 90 according to an embodiment of the present invention is a film 10 cut by a predetermined length by the cutter assembly 60 continuously attached to the upper surface of the substrate 1 spaced apart at regular intervals of the film 10 Maintain tension.

The adsorption member 90 is an adsorption roller 91 for adsorbing the film 10 wound on the supply roller 30 with a predetermined time difference and supplying it through a traveling path, and a film supplied by the adsorption roller 91 ( 10 is provided with an adsorption plate 92 for adsorbing and supplying it to the transfer roller 70.

The adsorption roller 91 is for unwinding the film 10 wound on the supply roller 30 to travel along the travel path. The suction roller 91 is positioned close to the cutter assembly 60 and is slidably installed in the frame 20 to reciprocate along the travel path of the film 10. That is, the adsorption roller 91 is screwed to a predetermined driving means 93, for example, a ball screw, and the ball screw is rotated by a servo motor, so that the film 10 travels along the guide rail formed on the frame 20. Sliding in the direction. As an alternative, the drive means 93 is not limited to having a ball screw and a servomotor, and may also include a cylinder which is normally operated by oil or pneumatic pressure.

In addition, the adsorption roller 91 has a structure capable of selectively adsorbing the film 10 to release the film 10 wound on the supply roller 30 and to travel along the travel path. To this end, the suction roller 91 is formed with a suction hole 95 that can adsorb the film 10 by the vacuum pressure generated from the vacuum pump 94. The suction roller 91 further includes a guide groove 97 in the advancing direction of the cutter assembly 60. The guide groove 97 guides the cutter assembly 60 so that the cutter is positioned along the guide groove 97 when cutting the film 10 so that the film 10 can be cut in one straight line in the horizontal direction. .

The adsorption plate 92 is for adsorbing the film 10 adsorbed on the adsorption roller 91 and supplying it to the transfer roller 70. The adsorption plate 92 is spaced apart by a predetermined distance downward from the adsorption roller 91, and is positioned to the rear relative to the adsorption roller 91. That is, with respect to the advancing direction of the board | substrate 1, the adsorption plate 92 is located relatively behind the adsorption roller 91. As shown in FIG.

And this adsorption plate 92 is '??' It is bent in a shape to change the traveling path of the film from the vertical direction to the horizontal direction and at the same time acts with the tension member 50 to keep the tension of the film 10 constant. That is, the tension member 50 also switches the traveling path of the film 10 from the horizontal direction to the vertical direction so that the film 10 maintains the tension by using the tension member 50 and the suction plate 92 as inflection points, respectively. do.

The adsorption plate 92 is fixed to the frame 20 and can selectively adsorb the film 10 to receive the film 10 adsorbed on the adsorption roller 91 and supply the film 10 to the transfer roller 70. Has a structure. To this end, the suction plate 92 is formed with a suction hole 95 that can adsorb the film 10 by the vacuum pressure generated from the vacuum pump 94.

Referring to the operation of the lamination device according to an embodiment of the present invention configured as described above in detail.

First, the film 10 wound around the feed roller 30 is released to the position of the adsorption roller 91, and the film 10 is adsorbed to the adsorption roller 91. Then, the adsorption roller 91 is moved to the second adsorption plate 92 side along the travel path of the film 10.

As a result, the adsorption roller 91 travels in the vertical direction and approaches the substrate 10 positioned below it. At this time, the front end of the board | substrate 1 is located in the vertical downward direction of the adsorption roller 91 by the conveyance operation of a conveyance belt.

The adsorption roller 91 continuously transfers the film in the vertical direction and adheres it to the tip of the substrate 1, then stops adsorption of the film 10 and returns to the original position.

Next, in a state where the film 10 is attached to the substrate 1, the transfer belt for transferring the substrate 1 transfers the substrate 1 to the transfer roller 70 side along the traveling path of the film 10. .

Subsequently, when the film 10 comes close to the transfer roller 70 side, the adsorption plate 92 operates to adsorb the film 10 and acts with the tension member 50 to maintain the tension of the film 10. The furnace film 10 and the substrate 1 are simultaneously introduced to the transfer roller 70 side.

Next, the cutter assembly 60 is started. Then, the lead screw 61 is rotated by the rotation of the drive motor 62, the mount block 63 is guided along the guide rod 64 by the rotation of the lead screw 61, the width of the film 10 Is moved horizontally in the direction. At this time, the cutter 65 of the cutter assembly 60 is seated in the guide groove 97 of the suction roller 91 to be rotated, whereby the film 10 by the cutter 65 installed in the mount block 63. Is cut.

Subsequently, when the cutting of the film 10 is completed, the mount block 63 is returned to its original position by the driving of the driving motor 62. At this time, the adsorption roller 91 is in a state where the adsorption of the film 10 is stopped while the cutter 65 cuts the film 10, and the transfer roller 70 and the support roller 80 are supported by the support roller 80. The substrate 1 enters a state therebetween while being rotated by the driving of the "

As such, when the cutting of the film 10 is completed, the adsorption plate 92 absorbs the cut film 10, converts the traveling path of the film from the horizontal direction to the vertical direction, and transfers the film 10 to the transfer roller. It supplies to 70.

Accordingly, the substrate 1 is introduced into the upper surface of the substrate 1 between the transfer roller 70 and the support roller 80 in a state where the film 10 is coated. In this case, the protrusions 71 of the transfer roller 70 are positioned between the electrodes 11 formed on the substrate 1 to correspond to the edges 11a. In this state, the substrate 1 moves along the travel path and passes through the transfer roller 70. The transfer roller 7 rotates to position the protrusions 71 between the electrodes 11 continuously. Accordingly, the projection 71 continuously presses the corner 11a portion so that the complementary pressing force of the transfer roller 70 and the support roller 80 is transferred to the corner 11a to attach the film 10 to this portion. (See FIG. 6).

Although the preferred embodiments of the present invention have been described above, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the scope of the invention.

As described above, according to the lamination device of the present invention, there is an advantage in that lamination can be easily performed on the edge portion formed by the electrode when the film is coated in the state in which the electrode is formed on the substrate.

In addition, according to the present invention, it is possible to continuously apply the film to significantly reduce the laminating equipment, it is possible to secure a competitive advantage in terms of cost.

Claims (9)

Film-rolled feed rollers; A cutter assembly for cutting a predetermined length of film supplied from the feed roller; An adsorption member for supporting the film so as to be transported through a travel path by being released from a supply roller with a predetermined time difference; And, And a transfer roller which compresses the film introduced through the suction member and attaches the film to the substrate supplied along the travel path, and has a plurality of protrusions along the surface thereof. The method of claim 1, An electrode is formed on the substrate, and the projection is positioned between the electrodes to attach the film to the substrate. The method of claim 1, Lamination apparatus wherein the projection is formed to protrude to a predetermined height from the surface of the transfer roller. The method of claim 1, And the protrusion is formed to extend to the surface along the axial direction of the transfer roller. The method of claim 1, And the protrusion is formed to extend to the surface along the rotational direction of the transfer roller. The method of claim 2, And a pitch between the protrusions is equal to or greater than the width of the electrode. The method of claim 2, And a height of the protrusion is greater than or equal to the thickness of the electrode. The method of claim 1, And a recovery roller for recovering the cover film attached to the film in pairs with the supply roller. The method of claim 1, The support member, An adsorption roller for adsorbing the film wound on the supply roller at a predetermined time difference and transporting the film in a vertical direction to attach to the front end of the substrate; And, And an adsorption plate for adsorbing the film supplied from the adsorption roller, converting the traveling path in the vertical direction into the horizontal direction, and feeding the film into the transfer roller.

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