JP2008016676A5 - - Google Patents

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Publication number
JP2008016676A5
JP2008016676A5 JP2006187071A JP2006187071A JP2008016676A5 JP 2008016676 A5 JP2008016676 A5 JP 2008016676A5 JP 2006187071 A JP2006187071 A JP 2006187071A JP 2006187071 A JP2006187071 A JP 2006187071A JP 2008016676 A5 JP2008016676 A5 JP 2008016676A5
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JP
Japan
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probe card
holder
plate
rotating
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JP2006187071A
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English (en)
Japanese (ja)
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JP2008016676A (ja
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Priority to JP2006187071A priority Critical patent/JP2008016676A/ja
Priority claimed from JP2006187071A external-priority patent/JP2008016676A/ja
Publication of JP2008016676A publication Critical patent/JP2008016676A/ja
Publication of JP2008016676A5 publication Critical patent/JP2008016676A5/ja
Pending legal-status Critical Current

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JP2006187071A 2006-07-06 2006-07-06 プローブカード自動交換機構及び検査装置 Pending JP2008016676A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006187071A JP2008016676A (ja) 2006-07-06 2006-07-06 プローブカード自動交換機構及び検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006187071A JP2008016676A (ja) 2006-07-06 2006-07-06 プローブカード自動交換機構及び検査装置

Publications (2)

Publication Number Publication Date
JP2008016676A JP2008016676A (ja) 2008-01-24
JP2008016676A5 true JP2008016676A5 (enrdf_load_stackoverflow) 2009-04-23

Family

ID=39073404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006187071A Pending JP2008016676A (ja) 2006-07-06 2006-07-06 プローブカード自動交換機構及び検査装置

Country Status (1)

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JP (1) JP2008016676A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4514236B2 (ja) * 2008-02-25 2010-07-28 株式会社協同 プローブカード移載装置
JP5343488B2 (ja) * 2008-09-26 2013-11-13 東京エレクトロン株式会社 プローブ装置
JP5422239B2 (ja) * 2009-03-24 2014-02-19 株式会社協同 プローブカード検査方法及び装置
KR101878752B1 (ko) 2011-10-26 2018-07-17 삼성전자주식회사 탐침 헤드 및 이를 채용한 주사탐침현미경
KR101545844B1 (ko) 2014-03-31 2015-08-20 주식회사 디이엔티 프로브 유닛 교체장치
KR102654604B1 (ko) * 2016-11-22 2024-04-03 세메스 주식회사 프로브 스테이션
KR20200039861A (ko) 2018-10-05 2020-04-17 삼성전자주식회사 반도체 패키지 소잉 장치
CN112735990A (zh) * 2021-01-27 2021-04-30 广西科林半导体有限公司 一种晶圆自动检测机
CN117855134A (zh) * 2024-03-04 2024-04-09 西北电子装备技术研究所(中国电子科技集团公司第二研究所) 顶针自动切换装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2613438B2 (ja) * 1988-06-27 1997-05-28 東京エレクトロン株式会社 プローブ装置
JP2000150596A (ja) * 1998-11-10 2000-05-30 Tokyo Seimitsu Co Ltd プローバ
JP4104099B2 (ja) * 1999-07-09 2008-06-18 東京エレクトロン株式会社 プローブカード搬送機構

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