JP2008006425A - Cleaning device - Google Patents

Cleaning device Download PDF

Info

Publication number
JP2008006425A
JP2008006425A JP2006201291A JP2006201291A JP2008006425A JP 2008006425 A JP2008006425 A JP 2008006425A JP 2006201291 A JP2006201291 A JP 2006201291A JP 2006201291 A JP2006201291 A JP 2006201291A JP 2008006425 A JP2008006425 A JP 2008006425A
Authority
JP
Japan
Prior art keywords
cleaning
liquid
tank
storage tank
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006201291A
Other languages
Japanese (ja)
Inventor
Tsukane Murakami
束 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2006201291A priority Critical patent/JP2008006425A/en
Publication of JP2008006425A publication Critical patent/JP2008006425A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a miniaturized cleaning device with increased productivity by shortening liquid transferring time even with a pump of small capacity, and reduced cost, considering problems in the past cleaning device wherein a long time is needed for transferring cleaning liquid, the productivity is low due to long cleaning tact, a large capacity pump is needed for the purpose of enhancing the productivity, causing enlargement of the device and increase of cost. <P>SOLUTION: In this cleaning device, a supply liquid storing tank 1 storing cleaning liquid supplied to a cleaning tank 2 is installed in the upper part of a cleaning tank 2, and a discharge liquid storing tank 3 storing the cleaning liquid discharged from the cleaning tank 2 is installed in the lower part of the cleaning tank 2. Cleaning liquid A (13) is transferred through pipes 6, 7 by height difference, and liquid is transferred from the discharge liquid storing tank 3 to the supply liquid storing tank 1 by a small capacity pump. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は金属、樹脂、ガラス、電子部品などの被洗浄物を洗浄する湿式洗浄における1槽式洗浄装置において、洗浄液を洗浄槽への供給と、洗浄槽からの排出を短時間で行うための液移送装置に関する。The present invention is a one-tank cleaning apparatus for wet cleaning that cleans an object to be cleaned, such as metal, resin, glass, and electronic parts, for supplying the cleaning liquid to the cleaning tank and discharging it from the cleaning tank in a short time. The present invention relates to a liquid transfer device.

従来の1槽式洗浄装置には、洗浄槽へ洗浄液を供給し洗浄槽からの排出液を備蓄する貯液槽を配置し、ポンプで液移送を行っているものがある。Some conventional one-tank type cleaning apparatuses include a storage tank that supplies a cleaning liquid to the cleaning tank and stores a drained liquid from the cleaning tank, and performs liquid transfer using a pump.

従来より、金属、樹脂、ガラス、電子部品など被洗浄物の表面に付着している油分、フラックス、剥離剤、塵埃などの汚れを除去するために水系、炭化水素系、ハロゲン系などの洗浄剤を用いた湿式洗浄法が広く採用されている。湿式洗浄の洗浄工程は浸漬洗浄、リンス、乾燥の3工程がある。各工程を独立した槽で行う多槽式洗浄装置と、全ての洗浄工程を洗浄槽1槽で行う1槽式洗浄装置がある。多槽式は1槽の洗浄と搬送時間が洗浄タクトとなるため、洗浄タクトが短く生産性が高い。しかし、バスケットを移動するための搬送装置が必要で装置の大型化、設備費の増大があった。従来の1槽式洗浄装置は、全ての洗浄工程を洗浄槽1槽で行うためバスケットの搬送装置は必要ないが、各工程が終了しなければ次の工程に進めず、洗浄タクトが長くなっていた。浸漬洗浄の工程では、洗浄液の供給と排出及び備蓄にポンプによる液移送を行っている。従来の1槽式洗浄装置は貯液槽が1槽で、液移送が完了しなければ次工程を開始する事が出来ない。洗浄液の移送は洗浄液の供給、排出、備蓄の3工程がある。従来の洗浄装置は、洗浄液の供給、排出、備蓄を貯液槽1槽で行っているため、液移送時間はポンプ容量に比例し、液移送時間を短縮するには容量の大きいポンプを設置する必要があった。従来の洗浄装置では容量0.4kw程度の小型渦流ポンプを使用しており、流量は30L/min程度である。容量60Lの一般的な洗浄槽では洗浄液の供給に2分、排出に2分を要し、液移送に4分を要する。浸漬洗浄、リンス、乾燥の洗浄工程に要する実洗浄時間が4分の場合、洗浄タクトは1バスケット当たり8分を要する。日産100バスケットを洗浄する場合は洗浄作業に13時間20分を要する。液移送に要する時間は6時間40分となり、洗浄作業時間に大きな比率を占める。従って、洗浄作業の時間短縮には液移送のポンプ容量を大きくする必要があり、装置の大型化による設置スペースの増大、設備費の増加を招いていた。Conventionally, water-based, hydrocarbon-based, halogen-based cleaning agents to remove dirt such as oil, flux, stripping agent, dust, etc. adhering to the surface of the object to be cleaned, such as metal, resin, glass, electronic parts, etc. A wet cleaning method using sapphire is widely adopted. There are three wet cleaning processes: immersion cleaning, rinsing and drying. There are a multi-tank cleaning apparatus that performs each process in an independent tank and a one-tank cleaning apparatus that performs all the cleaning processes in one cleaning tank. In the multi-tank type, the cleaning and transport time for one tank is a cleaning tact, so the cleaning tact is short and the productivity is high. However, a transport device for moving the basket is required, which increases the size of the device and increases the equipment cost. The conventional one tank type cleaning device does not require a basket transport device because all cleaning processes are performed in one cleaning tank, but if each process is not completed, it does not proceed to the next process and the cleaning tact is long. It was. In the immersion cleaning process, the liquid is transferred by a pump for supplying and discharging the cleaning liquid and storing it. The conventional one tank type cleaning device has one liquid storage tank, and the next process cannot be started unless the liquid transfer is completed. There are three processes for transferring the cleaning liquid: supplying, discharging and stocking the cleaning liquid. Since the conventional cleaning device supplies, discharges, and stores the cleaning liquid in one storage tank, the liquid transfer time is proportional to the pump capacity, and a pump with a large capacity is installed to shorten the liquid transfer time. There was a need. The conventional cleaning apparatus uses a small eddy current pump with a capacity of about 0.4 kW, and the flow rate is about 30 L / min. In a general cleaning tank having a capacity of 60 L, it takes 2 minutes to supply the cleaning liquid, 2 minutes to discharge, and 4 minutes to transfer the liquid. If the actual cleaning time required for the immersion cleaning, rinsing and drying cleaning steps is 4 minutes, the cleaning tact takes 8 minutes per basket. Cleaning the Nissan 100 basket requires 13 hours and 20 minutes. The time required for transferring the liquid is 6 hours and 40 minutes, which accounts for a large proportion of the cleaning work time. Therefore, in order to shorten the cleaning operation time, it is necessary to increase the capacity of the liquid transfer pump, which increases the installation space and the equipment cost due to the increase in the size of the apparatus.

本発明は上記の事情に鑑みなされたもので、1槽式洗浄装置の洗浄液移送を流量の大きいポンプを使用しなくても、従来の洗浄装置より短時間で行う事で、洗浄タクトの短縮を行い、生産性の向上と装置の小型化及びコストダウンを図る洗浄装置を提供する事を課題とする。The present invention has been made in view of the above-mentioned circumstances, and it is possible to shorten the cleaning tact time by performing cleaning liquid transfer of a single tank cleaning device in a shorter time than a conventional cleaning device without using a pump having a large flow rate. It is an object of the present invention to provide a cleaning apparatus that improves productivity and reduces the size and cost of the apparatus.

発明を解決するための手段Means for Solving the Invention

以上の課題を解決するために、洗浄液の貯液槽を供給と備蓄用の槽と排出用の槽に分離し2槽の構成とした。洗浄槽(2)に供給する洗浄液A(13)を蓄える供給液貯液槽(1)を洗浄槽(2)の上部に設置し、バルブA(10)と配管A(6)で接続する。洗浄槽から排出された洗浄液B(14)を蓄える排出液貯液槽(3)を洗浄槽(2)の下部に設置し、バルブB(11)と配管B(7)で接続した。供給液貯液槽(1)、洗浄槽(2)、排出液貯液槽(3)の高低差を利用し、洗浄槽(2)へ洗浄液の供給と、洗浄槽(2)からの排出を行う。次の浸漬洗浄のために洗浄液B(14)をポンプ(9)により排出液貯液槽(3)から供給液貯液槽(1)へ液移送を行い備蓄する。本発明は、以上の構成からなる洗浄装置である。In order to solve the above-described problems, the cleaning liquid storage tank is separated into a supply tank, a storage tank, and a discharge tank, so that two tanks are configured. A supply liquid storage tank (1) for storing the cleaning liquid A (13) to be supplied to the cleaning tank (2) is installed on the upper part of the cleaning tank (2), and is connected to the valve A (10) by the pipe A (6). A drain liquid storage tank (3) for storing the cleaning liquid B (14) discharged from the cleaning tank was installed in the lower part of the cleaning tank (2), and connected to the valve B (11) and the pipe B (7). Supplying the cleaning liquid to the cleaning tank (2) and discharging it from the cleaning tank (2) using the difference in height between the supply liquid storage tank (1), the cleaning tank (2), and the discharge liquid storage tank (3) Do. For the next immersion cleaning, the cleaning liquid B (14) is transferred from the discharge liquid storage tank (3) to the supply liquid storage tank (1) by the pump (9) and stored. This invention is a washing | cleaning apparatus which consists of the above structure.

発明の効果The invention's effect

供給液貯液槽(1)を洗浄槽の上部に、排出液貯液槽(3)を洗浄槽の下部に設置し、高低差により洗浄液を移送することで洗浄液の洗浄槽(2)への供給及び排出にポンプなどの動力を使用しなくても配管とバルブのみで可能となり設備費を低く抑える事が出来る。配管を従来の装置より大きい40A以上とする事やエアー圧を加える事で液移送時間が短縮され、洗浄タクトの短縮が出来る。次の浸漬洗浄のために供給液貯液槽(1)に洗浄液の備蓄が必要で、排出液貯液槽(3)から供給液貯液槽(1)へポンプ(9)で液移送する。次の工程である蒸気洗浄や乾燥工程の時間で液移送を完了すれば良いため、流量の少ない0.4kw程度の小容量ポンプで液移送に時間を掛けても洗浄タクトが長くなる事はない。従って、大容量ポンプは必要なく、従来の小容量ポンプでも生産性の高いコンパクトな洗浄装置が低コストで製造できる。The supply liquid storage tank (1) is installed at the top of the cleaning tank, the drain liquid storage tank (3) is installed at the bottom of the cleaning tank, and the cleaning liquid is transferred to the cleaning tank (2) by transferring the cleaning liquid according to the height difference. Even if power such as a pump is not used for supply and discharge, it is possible only with piping and valves, and the equipment cost can be kept low. The liquid transfer time can be shortened and the cleaning tact time can be shortened by making the pipe 40A or more larger than the conventional apparatus and applying air pressure. The supply liquid storage tank (1) needs to be stocked with the cleaning liquid for the next immersion cleaning, and the liquid is transferred from the discharge liquid storage tank (3) to the supply liquid storage tank (1) by the pump (9). Since it is only necessary to complete the liquid transfer in the time of the next process, steam cleaning and drying process, even if it takes time to transfer the liquid with a small capacity pump of about 0.4 kW with a small flow rate, the cleaning tact will not be prolonged. . Therefore, there is no need for a large-capacity pump, and a compact cleaning device with high productivity can be manufactured at low cost even with a conventional small-capacity pump.

本発明の一実施形態を、図1に示す。以下、本発明につき図面を参照してさらに詳しく説明する。One embodiment of the present invention is shown in FIG. Hereinafter, the present invention will be described in more detail with reference to the drawings.

図1にて貯液槽を設置した1槽式洗浄装置の事例を示す。本洗浄装置は、供給液貯液槽(1)、洗浄槽(2)、排出液貯液槽(3)、蒸留槽(4)、凝縮装置(5)から構成されている。供給液貯液槽(1)は洗浄槽(2)より高い位置に設置され配管A(6)で接合され、バルブA(10)が設置されている。排出液貯液槽(3)は洗浄槽(2)より低い位置に設置され、配管B(7)で接合され、バルブB(11)が設置されている。供給液貯液槽(1)と排出液貯液槽(3)はバルブC(12)とポンプ(9)で接続されている。液循環は、供給液貯液槽(1)から洗浄槽(2)、排出液貯液槽(3)をへて供給液貯液槽(1)へ戻る。さらに、この液循環が繰り返される。本発明の洗浄装置は以上の構成からなる。FIG. 1 shows an example of a single tank type cleaning apparatus provided with a liquid storage tank. This cleaning device is composed of a supply liquid storage tank (1), a cleaning tank (2), a discharge liquid storage tank (3), a distillation tank (4), and a condensing device (5). The supply liquid storage tank (1) is installed at a position higher than the washing tank (2), joined by a pipe A (6), and a valve A (10) is installed. The drain liquid storage tank (3) is installed at a position lower than the cleaning tank (2), joined by a pipe B (7), and a valve B (11) is installed. The supply liquid storage tank (1) and the discharge liquid storage tank (3) are connected by a valve C (12) and a pump (9). The liquid circulation returns from the supply liquid storage tank (1) through the washing tank (2) and the discharge liquid storage tank (3) to the supply liquid storage tank (1). Further, this liquid circulation is repeated. The cleaning apparatus of the present invention has the above configuration.

浸漬洗浄はバルブA(10)を開く事で、洗浄液が供給液貯液槽(1)から配管A(6)を通って洗浄槽(2)に供給されて始まる。洗浄液は高低差で自然落下し供給されるのでポンプなどの動力を必要としない。配管のサイズは、従来の装置では15A〜20A程度であるが、25A以上とする事で移送時間が短縮される。この時、供給液貯液槽(1)のエアーバルブ(8)を開きエアーを供給する事で、エアー圧に押され移送時間はさらに短縮される。Immersion cleaning is started by opening the valve A (10) and supplying the cleaning liquid from the supply liquid storage tank (1) to the cleaning tank (2) through the pipe A (6). Since the cleaning liquid is supplied by falling naturally with a height difference, it does not require power from a pump or the like. The pipe size is about 15A to 20A in the conventional apparatus, but the transfer time is shortened by setting it to 25A or more. At this time, by opening the air valve (8) of the supply liquid storage tank (1) and supplying air, it is pushed by the air pressure and the transfer time is further shortened.

25Lのタンクに20Lの水を入れ、40Aのバルブを接続し、高低差を利用した移送実験を行った。40Aの配管の場合、20Lの水を排出する時間は大気圧で17.2秒であった、これに0.5MPaのエアー圧で加圧すると8.5秒に短縮された。この流量は大気圧で70L/min、エアー加圧で140L/minに相当し、60Lの洗浄槽の場合、比重1の洗浄液で26秒で液移送が出来る。従来の洗浄装置でポンプを利用した液移送の場合、一般に使用される容量0.4kwのポンプの流量は高々30L/minである。容量60Lの洗浄槽の場合、液移送に120秒要する。従って、本発明の洗浄装置は従来の方法と比べ、移送時間が大気圧で1/2以下、0.5MPaのエアー加圧で1/4以下に短縮される。20 L of water was put into a 25 L tank, a 40 A valve was connected, and a transfer experiment using a height difference was performed. In the case of the 40A pipe, the time for discharging 20 L of water was 17.2 seconds at atmospheric pressure, and when this was pressurized with an air pressure of 0.5 MPa, it was shortened to 8.5 seconds. This flow rate corresponds to 70 L / min at atmospheric pressure and 140 L / min by air pressurization. In the case of a 60 L cleaning tank, the liquid can be transferred in 26 seconds with a cleaning liquid having a specific gravity of 1. In the case of liquid transfer using a pump in a conventional cleaning device, the flow rate of a generally used pump having a capacity of 0.4 kW is 30 L / min at most. In the case of a cleaning tank with a capacity of 60 L, liquid transfer takes 120 seconds. Therefore, the cleaning apparatus of the present invention shortens the transfer time to 1/2 or less at atmospheric pressure and 1/4 or less by air pressurization of 0.5 MPa as compared with the conventional method.

浸漬洗浄後、バルブB(11)が開き洗浄液は配管B(7)により排出液貯液槽(3)に高低差で移送する。この移送もエアー圧を加える事で移送時間の短縮が出来る。After the immersion cleaning, the valve B (11) is opened and the cleaning liquid is transferred to the drained liquid storage tank (3) with a height difference through the pipe B (7). This transfer can also reduce the transfer time by applying air pressure.

排出液貯液槽(3)に移送された洗浄液B(14)は、次の浸漬洗浄に備え、供給液貯液槽(1)に備蓄するために液移送が必要である。この液移送は揚程があるためポンプ(9)による移送が必要である。この時点ですでに洗浄槽の液移送は終了しているため、洗浄工程は次のリンス工程に移行する事が出来る。この排出液貯液槽(3)から供給液貯液槽(1)への移送工程は次の工程と同時に進行する事が出来るため、次工程の時間を利用して液移送が可能であり移送時間は洗浄タクトに加算される事がない。次工程のリンス及び乾燥の時間は一般洗浄の場合で2分以上を要するため、容量0.4kw、流量30L/minの小容量ポンプでも60L以上の液移送が洗浄タクトを延長せずに可能となる。The cleaning liquid B (14) transferred to the discharged liquid storage tank (3) needs to be transferred to be stored in the supply liquid storage tank (1) in preparation for the next immersion cleaning. Since this liquid transfer has a head, transfer by a pump (9) is required. At this point, since the liquid transfer in the cleaning tank has already been completed, the cleaning process can proceed to the next rinsing process. Since the transfer process from the discharged liquid storage tank (3) to the supply liquid storage tank (1) can proceed simultaneously with the next process, the liquid can be transferred using the time of the next process. Time is not added to the cleaning tact. Rinse and drying time in the next process requires 2 minutes or more in the case of general cleaning, so even a small capacity pump with a capacity of 0.4 kW and a flow rate of 30 L / min can transfer liquids of 60 L or more without extending the cleaning tact. Become.

洗浄槽容量60L、ポンプ容量0.4kwの洗浄装置で、実洗浄時間4分の被洗浄物を日産100バスケット洗浄する場合、従来の1槽式洗浄装置では、液移送に4分を要し、洗浄タクトは1バスケット8分となり、100バスケットで13時間20分を要する。本発明の洗浄装置では40Aの配管の場合、液移送に約1分を要する。実洗浄時間4分の場合、1バスケットの洗浄タクトは5分となる。100バスケットの洗浄時間は8時間20分となり、従来の装置より、5時間も大幅に短縮される。配管の口径を大きくすることによりさらに短縮される。When washing an object to be cleaned of 100 minutes per day with a cleaning device with a cleaning tank capacity of 60 L and a pump capacity of 0.4 kw, the conventional 1 tank cleaning device requires 4 minutes to transfer the liquid, The washing tact time is 8 minutes for one basket, and 13 hours and 20 minutes are required for 100 baskets. In the cleaning apparatus of the present invention, in the case of a 40A pipe, the liquid transfer takes about 1 minute. When the actual cleaning time is 4 minutes, the cleaning tact for one basket is 5 minutes. The washing time for 100 baskets is 8 hours and 20 minutes, which is significantly reduced by 5 hours compared with the conventional apparatus. This is further shortened by increasing the pipe diameter.

従って、本発明の洗浄装置により液移送時間が短縮され、洗浄タクトの短縮で生産性が向上する。洗浄タクトの短縮にポンプ容量を大きくする必要がないため装置の小型化、低コスト化が図れる。Therefore, the liquid transfer time is shortened by the cleaning apparatus of the present invention, and the productivity is improved by shortening the cleaning tact. Since it is not necessary to increase the pump capacity in order to shorten the cleaning tact, the apparatus can be reduced in size and cost.

前洗浄剤や仕上げ洗浄剤など洗浄液が複数の場合は、洗浄液の数に合わせ供給液貯液槽、洗浄槽、排出液貯液槽で構成された複数の貯液槽で構成する事も可能である。その場合は洗浄液を順次洗浄槽に送るように配管とバルブを構成する。When there are multiple cleaning liquids such as pre-cleaning agents and finishing cleaning agents, it can be configured with multiple storage tanks consisting of supply liquid storage tank, cleaning tank, and discharge liquid storage tank according to the number of cleaning liquids. is there. In that case, the piping and the valve are configured to sequentially send the cleaning liquid to the cleaning tank.

洗浄槽を複数にして生産性を上げる事が可能で、配管とバルブの構成により、順次バルブの切り替えで洗浄液を洗浄槽に供給と排出を行う。It is possible to increase the productivity by using a plurality of cleaning tanks, and supply and discharge the cleaning liquid to and from the cleaning tank by switching the valves sequentially by the configuration of the piping and valves.

複数の貯液槽と複数の洗浄槽の場合は配管とバルブの組み合わせで順次バルブを切り替え、各洗浄槽に各洗浄液の供給と排出を繰り返す事で、高度な洗浄性と生産性を持つコンパクトな洗浄装置が低コストで製造できる。In the case of multiple storage tanks and multiple cleaning tanks, the valves are switched sequentially by the combination of pipes and valves, and the supply and discharge of each cleaning liquid to each cleaning tank is repeated, resulting in a compact and highly cleanable and productive product. A cleaning device can be manufactured at low cost.

本発明実施の洗浄液循環を示したフロー図である。It is the flowchart which showed the washing | cleaning liquid circulation of this invention implementation.

符号の説明Explanation of symbols

(1)供給液貯液槽、(2)洗浄槽、(3)排出液貯液槽、(4)蒸留槽、(5)凝縮装置、(6)配管A、(7)配管B、(8)エアーバルブ、(9)ポンプ、(10)バルブA、(11)バルブB、(12)バルブC、(13)洗浄液A、(14)洗浄液B(1) Supply liquid storage tank, (2) Cleaning tank, (3) Drainage liquid storage tank, (4) Distillation tank, (5) Condensing device, (6) Pipe A, (7) Pipe B, (8 ) Air valve, (9) Pump, (10) Valve A, (11) Valve B, (12) Valve C, (13) Cleaning fluid A, (14) Cleaning fluid B

Claims (4)

湿式洗浄における洗浄装置において、洗浄液を洗浄槽(2)に供給する供給液貯液槽(1)を洗浄槽(2)の上部に設置し、洗浄槽(2)からの排出液を受ける排出液貯液槽(3)を洗浄槽(2)の下部に設置した事を特徴とする洗浄装置。In a cleaning apparatus for wet cleaning, a supply liquid storage tank (1) for supplying a cleaning liquid to the cleaning tank (2) is installed on the upper part of the cleaning tank (2), and the discharged liquid receives the discharged liquid from the cleaning tank (2). A cleaning device characterized in that the liquid storage tank (3) is installed in the lower part of the cleaning tank (2). 洗浄液の供給及び排出に空気圧で加圧し移送する手段を設けた請求項1記載の洗浄装置。2. A cleaning apparatus according to claim 1, further comprising means for pressurizing and transferring the cleaning liquid by air pressure to supply and discharge the cleaning liquid. 洗浄槽を複数有する請求項1記載の洗浄装置。The cleaning apparatus according to claim 1, comprising a plurality of cleaning tanks. 貯液槽を複数有する請求項1記載の洗浄装置。The cleaning apparatus according to claim 1, comprising a plurality of liquid storage tanks.
JP2006201291A 2006-06-26 2006-06-26 Cleaning device Pending JP2008006425A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006201291A JP2008006425A (en) 2006-06-26 2006-06-26 Cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006201291A JP2008006425A (en) 2006-06-26 2006-06-26 Cleaning device

Publications (1)

Publication Number Publication Date
JP2008006425A true JP2008006425A (en) 2008-01-17

Family

ID=39065121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006201291A Pending JP2008006425A (en) 2006-06-26 2006-06-26 Cleaning device

Country Status (1)

Country Link
JP (1) JP2008006425A (en)

Similar Documents

Publication Publication Date Title
US9278768B2 (en) Process liquid changing method and substrate processing apparatus
JP6331961B2 (en) Substrate liquid processing equipment
US5653820A (en) Method for cleaning metal articles and removing water from metal articles
JP2015220318A5 (en)
CA2869282A1 (en) Cleaning system and method with air flushing of detergent/rinse pipes
CN105537206A (en) Cleaning equipment and cleaning method for small-pipe diameter pipeline
JP2015088719A (en) Pre-processing method of filter unit, processing liquid supply device, heating device of filter unit, and pre-processing method of processing liquid supply path
CN105598064A (en) Wear-resisting steel ball circular cleaning device
JP2007113072A (en) Apparatus for cleaning workpiece such as machine parts
JPWO2005070570A1 (en) Multi-tank cleaning device and cleaning method
JP6278808B2 (en) Liquid supply device and filter cleaning method
JP2008006425A (en) Cleaning device
JP2006013015A (en) Cleaning device and cleaning method
JP2006167711A (en) Washing method and its apparatus for washing object
JP2008184632A (en) Apparatus for cleaning deposit of the inside of a bundled steel pipe
JP2015013240A (en) Ultrasonic cleaning device
JP4912177B2 (en) Cleaning method and cleaning mechanism for breast-feeding apparatus
JPH05261053A (en) Tableware washing machine
JP2007301462A (en) Washing method of tank structural part
JP2015191897A5 (en)
JP2007319577A (en) Dishwasher
KR20090056154A (en) Cleaning system for the photoresist nozzle tip
DK179189B1 (en) Method for restoring damaged electronic devices by cleaning and apparatus
JP2726234B2 (en) Machine parts cleaning equipment
KR101916263B1 (en) Apparatus for removing form